JPH0642617B2 - Piezoelectric vibrator - Google Patents
Piezoelectric vibratorInfo
- Publication number
- JPH0642617B2 JPH0642617B2 JP59124742A JP12474284A JPH0642617B2 JP H0642617 B2 JPH0642617 B2 JP H0642617B2 JP 59124742 A JP59124742 A JP 59124742A JP 12474284 A JP12474284 A JP 12474284A JP H0642617 B2 JPH0642617 B2 JP H0642617B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric vibrator
- piezoelectric
- piezoelectric vibrating
- vibrating portion
- outer peripheral
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/0595—Holders; Supports the holder support and resonator being formed in one body
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Description
【発明の詳細な説明】 （産業上の利用分野） 本発明は、厚みすべり振動を利用した圧電振動子に関す
る。TECHNICAL FIELD The present invention relates to a piezoelectric vibrator that utilizes thickness shear vibration.
（従来技術） 電子機器など種々の分野で使用されている圧電振動子
は、時計やコンピュータなどの小型化にともない、その
小型化が要求されてきている。(Prior Art) Piezoelectric vibrators used in various fields such as electronic devices are required to be downsized with the downsizing of watches and computers.
第８図乃至第１０図は従来の圧電振動子を示す図であ
る。第８図乃至第１０図において、１は圧電振動子で、
圧電振動子１はＡＴカット等の水晶片２の両面に電極３
ａ，３ｂを設けることにより形成されている。４ａ，４
ｂは電極３ａ，３ｂの一部より外方へ延びる電極引き出
し部で、電極引き出し部４ａ，４ｂは互いに反対方向に
延びている。なお、前記電極３ａ，３ｂ及び電極引き出
し部４ａ，４ｂは金、銀、アルミニウムなどの金属を水
晶片２の両面に蒸着することにより形成される。8 to 10 are views showing a conventional piezoelectric vibrator. 8 to 10, 1 is a piezoelectric vibrator,
The piezoelectric vibrator 1 has electrodes 3 on both sides of a crystal piece 2 such as AT cut.
It is formed by providing a and 3b. 4a, 4
Reference numeral b denotes an electrode lead portion that extends outward from a part of the electrodes 3a and 3b, and the electrode lead portions 4a and 4b extend in opposite directions. The electrodes 3a and 3b and the electrode lead portions 4a and 4b are formed by depositing a metal such as gold, silver or aluminum on both surfaces of the crystal piece 2.
そして、上記圧電振動子１は基台５に設けたワイヤーク
リップ６，６に挟持され、電極３ａ，３ｂは電極引き出
し部４ａ，４ｂ、ワイヤークリップ６，６を介して、外
部導出ピン７，７に電気的に接続されるものである。８
は圧電振動子１を保護するケースで、ケース８は圧電振
動子１を密封するよう基台５に固着される。圧電振動子
１の周囲の密封された空間は不活性ガス（窒素，アルゴ
ン等）が封入されているかまたは真空となっている。The piezoelectric vibrator 1 is sandwiched between the wire clips 6 and 6 provided on the base 5, and the electrodes 3a and 3b are connected to the external lead-out pins 7 and 7 via the electrode lead-out portions 4a and 4b and the wire clips 6 and 6. To be electrically connected to. 8
Is a case for protecting the piezoelectric vibrator 1, and the case 8 is fixed to the base 5 so as to seal the piezoelectric vibrator 1. The sealed space around the piezoelectric vibrator 1 is filled with an inert gas (nitrogen, argon, etc.) or is in a vacuum.
そして、このような厚みすべり振動を利用した圧電振動
子において、その振動周波数は水晶片の厚みにより決定
される。即ち、その厚みを薄くすればそれに応じて振動
周波数が高くなるのである。Then, in such a piezoelectric vibrator utilizing the thickness shear vibration, its vibration frequency is determined by the thickness of the crystal piece. That is, the thinner the thickness, the higher the vibration frequency accordingly.
ところで、従来上記の水晶片２の厚みの加工は、圧電材
料からなる板の両面を金属等で作られた互いに逆回転す
る研磨板ですり合せることにより行なっていた。By the way, conventionally, the processing of the thickness of the crystal piece 2 has been performed by laminating both sides of a plate made of a piezoelectric material with polishing plates made of metal or the like and rotating in opposite directions.
（従来技術の問題点） しかしながら、以上の従来例にあっては、〔１〕圧電振
動子の振動部以外の水晶片の部分も振動してしまうこと
となるばかりか、その振動がワイヤークリップ６，６を
通じて外部に洩れるため、不要な振動エネルギーが必要
となり実効抵抗が増加することとなり、また〔２〕外部
からの衝撃に耐えるように剛性の高いワイヤークリップ
６，６で圧電振動子を強く固着すると、圧電振動子の振
動がワイヤークリップ６，６によって阻害され圧電振動
子のＱが低下することとなるため、該ワイヤークリップ
６，６の剛性を高く出来ず耐衝撃特性を向上させること
が出来ず、また〔３〕この構造の圧電振動子にあって
は、物理的にその小型化に限界があり、現今の非常に小
型化された電子機器等に要求される圧電振動子の大きさ
に対応するには困難であるなど種々の欠点を有してい
た。(Problems of the prior art) However, in the above conventional example, not only [1] the part of the crystal piece other than the vibrating part of the piezoelectric vibrator vibrates, but the vibration also causes the wire clip 6 to vibrate. Since it leaks to the outside through 6 and 6, unnecessary vibration energy is required and the effective resistance increases, and [2] the piezoelectric vibrator is firmly fixed with wire clips 6 and 6 with high rigidity so as to withstand external shock. Then, the vibration of the piezoelectric vibrator is blocked by the wire clips 6 and 6, and the Q of the piezoelectric vibrator is lowered, so that the rigidity of the wire clips 6 and 6 cannot be increased and the impact resistance can be improved. [3] In the piezoelectric vibrator of this structure, there is a physical limit to miniaturization, and the size of the piezoelectric vibrator required for today's extremely miniaturized electronic devices, etc. It has various drawbacks, such as difficulty in dealing with this.
さらに、上述の従来例にあっては、研磨によって水晶素
板の厚みを減少することに限界があり、現状ではその厚
みの限界は５０μｍ程度であった。また、水晶素板の厚
みが薄いと、第８図乃至第１０図に示す従来の圧電振動
子にあっては、組立時に破損しやすく、また、組立後に
あっても外部からの応力による水晶片のそり等の原因に
より破損を生じやすく、この点からも水晶片の厚みの減
少には限界があった。そしてこれらの理由により、圧電
振動子の基本波による周波数は３０ＭＨＺ付近が限界で
あり、それより高い周波数帯は三次高調波，五次高調波
等を利用することによってカバーされていた。しかしな
がら、基本波による圧電振動子の方が高調波利用の圧電
振動子よりも一般にその諸特性は良好である。Furthermore, in the above-mentioned conventional example, there is a limit to the reduction of the thickness of the quartz crystal plate by polishing, and at present, the limit of the thickness is about 50 μm. Further, when the thickness of the quartz crystal plate is thin, the conventional piezoelectric vibrators shown in FIGS. 8 to 10 are easily broken during assembly, and even after the assembly, the quartz crystal piece due to external stress is generated. Damage is likely to occur due to warpage and the like, and there is a limit in reducing the thickness of the crystal piece from this point as well. For these reasons, the frequency of the fundamental wave of the piezoelectric vibrator is limited to around 30 MHz, and the higher frequency band is covered by utilizing the third harmonic, the fifth harmonic, and the like. However, the piezoelectric vibrator based on the fundamental wave generally has better characteristics than the piezoelectric vibrator based on harmonics.
（発明の目的） 本発明の目的は、圧電振動子の振動部分の厚みが５０μ
ｍ程度以下のものが容易に作成できるとともに、組立時
や組立後に破損しにくい圧電振動子を提供するものであ
る。(Object of the Invention) An object of the present invention is that the thickness of the vibrating portion of the piezoelectric vibrator is 50 μm.
(EN) A piezoelectric vibrator which can easily be manufactured to have a size of about m or less and is less likely to be damaged during or after assembly.
本発明の他の目的は、容易に小型化が図れる圧電振動子
を提供するものである。Another object of the present invention is to provide a piezoelectric vibrator whose size can be easily reduced.
本発明のさらに他の目的は、圧電振動子の振動部の振動
と外部の振動とを有効にしゃ断する圧電振動子を提供す
るものである。Still another object of the present invention is to provide a piezoelectric vibrator that effectively isolates vibration of a vibrating portion of the piezoelectric vibrator from external vibration.
（発明の概要） 本願に係る第一の発明は、両面に励振用の電極を形成し
た圧電振動部と、圧電振動部より厚い厚みで該圧電振動
部の外周に圧電振動部と同一の材料で一体に形成し表面
に励振用電極の引き出し電極部を形成するとともに圧電
振動部を囲む部分に溝部を形成した外周部とを有する圧
電振動子に係るものであり、また、第二の発明は、両面
に励振用の電極部を形成した圧電振動部と、圧電振動部
より厚い厚みで該圧電振動部の外周全体に圧電振動部と
同一の材料で一体に形成し表面に励振用電極の引き出し
電極部を形成するとともに圧電振動部を囲む部分に溝部
を形成した外周部と、該外周部の両表面上に固着され圧
電振動部を密封する平板状のカバーとを有する圧電振動
子に係るものである。(Summary of the Invention) A first invention according to the present application is a piezoelectric vibrating part having electrodes for excitation formed on both surfaces thereof, and a piezoelectric vibrating part having a thickness thicker than that of the piezoelectric vibrating part and made of the same material as the piezoelectric vibrating part. The present invention relates to a piezoelectric vibrator which is integrally formed with an extraction electrode portion of an excitation electrode on the surface and has an outer peripheral portion in which a groove portion is formed in a portion surrounding the piezoelectric vibrating portion. A piezoelectric vibrating portion having excitation electrodes formed on both surfaces, and a piezoelectric vibrating portion having a thickness thicker than that of the piezoelectric vibrating portion and integrally formed of the same material as the piezoelectric vibrating portion to form a lead electrode for the exciting electrode on the surface. And a flat plate-shaped cover that is fixed to both surfaces of the outer peripheral portion and seals the piezoelectric vibrating portion. is there.
（実施例） 次に本発明の一実施例を、図面を用いて詳細に説明す
る。(Example) Next, an example of the present invention will be described in detail with reference to the drawings.
第１図は本発明に係る圧電振動子の斜視図、第２図は第
１図に示す圧電振動子をＣ−Ｃ面で切断した断面図であ
る。第１図，第２図において、１９は圧電振動部で、該
圧電振動部１９の表面の一部の両面には該圧電振動部１
９を振動させるための電極１３ａ，１３ｂが被着されて
いる（この圧電振動部１９の電極形成部を『電極部』と
いう）。１８は圧電振動部１９を囲むように形成された
圧電振動子の外周部であり、該外周部１８の表面には図
に示すような電極１３ａ，１３ｂの引き出し電極１４
ａ，１４ｂ（この外周部１８の引き出し電極形成部を
『引き出し電極部』という）が被着されている。１７は
外周部１８上であって圧電振動部１９を囲む部分の一部
に形成された溝部で、該溝部１７の深さは外周部１８の
厚みの１／１００以上の深さを有することが好ましい。FIG. 1 is a perspective view of a piezoelectric vibrator according to the present invention, and FIG. 2 is a sectional view of the piezoelectric vibrator shown in FIG. In FIGS. 1 and 2, reference numeral 19 is a piezoelectric vibrating portion, and the piezoelectric vibrating portion 1 is provided on both sides of a part of the surface of the piezoelectric vibrating portion 19.
Electrodes 13a and 13b for vibrating 9 are attached (the electrode forming portion of the piezoelectric vibrating portion 19 is referred to as "electrode portion"). Reference numeral 18 denotes an outer peripheral portion of the piezoelectric vibrator formed so as to surround the piezoelectric vibrating portion 19, and a lead electrode 14 for the electrodes 13a and 13b as shown in the drawing is provided on the surface of the outer peripheral portion 18.
a and 14b (the lead electrode forming portion of the outer peripheral portion 18 is referred to as "lead electrode portion") are attached. Reference numeral 17 denotes a groove portion formed on the outer peripheral portion 18 in a part of the portion surrounding the piezoelectric vibrating portion 19, and the depth of the groove portion 17 may be 1/100 or more of the thickness of the outer peripheral portion 18. preferable.
以上の本実施例に係る圧電振動子は以下の方法により作
成される。The piezoelectric vibrator according to this embodiment described above is manufactured by the following method.
即ち、ＡＴカットなどの水晶からなる水晶素板をエッチ
ングすることにより圧電振動部１９を所望の振動周波数
を得る厚みまで減少させるとともに溝部１７もエッチン
グし、その後、電極１３ａ，１３ｂと引き出し電極１４
ａ，１４ｂを、金，銀，アルミニウム等の金属を真空蒸
着の方法またはスパッターなどの方法により該圧電振動
部１９及び外周部１８の両面に被着すれば、本発明に係
る圧電振動子が得られるのである。ここで、外周部１８
の厚みは、外部からの種々の力から圧電振動部１９を保
護するため、十分な厚みとすることが好ましく、特に圧
電振動部１９の厚みの２倍以上の厚みを有することが好
ましい。That is, the piezoelectric vibrating portion 19 is reduced to a thickness for obtaining a desired vibration frequency by etching a quartz crystal plate such as AT cut, and the groove portion 17 is also etched, and thereafter, the electrodes 13a and 13b and the lead electrode 14 are formed.
The piezoelectric vibrator according to the present invention can be obtained by applying a, 14b to both surfaces of the piezoelectric vibrating portion 19 and the outer peripheral portion 18 by using a metal such as gold, silver or aluminum by a method such as vacuum deposition or a method such as sputtering. Be done. Here, the outer peripheral portion 18
In order to protect the piezoelectric vibrating portion 19 from various forces from the outside, it is preferable that the thickness thereof be a sufficient thickness, and it is particularly preferable that the thickness is twice or more the thickness of the piezoelectric vibrating portion 19.
第３図は第１図に示す圧電振動子の保持構造の一例を示
した図である。第３図において、１５は基台、１６，１
６は外部導出ピンであり、外部導出ピン１６，１６は引
き出し電極１４ａ，１４ｂに導電性接着材や半田などを
用いて固着される。そして、この保持された圧電振動子
はケース（図示せず）により密封され、その内部は不活
性ガス（窒素，アルゴン等）が封入されているかまたは
真空となっている。このように圧電振動子を弾性の少な
い外部導出ピンで直接保持すれば、第７図に示す従来例
に比較し弾性を有するワイヤークリップが不要となるた
め、圧電振動子を確実に保持できることとなる。FIG. 3 is a diagram showing an example of a holding structure for the piezoelectric vibrator shown in FIG. In FIG. 3, 15 is a base, and 16 and 1
Reference numeral 6 denotes an external lead-out pin, and the external lead-out pins 16 and 16 are fixed to the lead-out electrodes 14a and 14b by using a conductive adhesive material or solder. The held piezoelectric vibrator is sealed by a case (not shown), and the inside thereof is filled with an inert gas (nitrogen, argon, etc.) or is in a vacuum. As described above, if the piezoelectric vibrator is directly held by the external lead-out pin having less elasticity, the wire clip having elasticity is unnecessary as compared with the conventional example shown in FIG. 7, so that the piezoelectric vibrator can be held securely. .
第４図乃至第６図は本発明に係る他の圧電振動子を示し
た図であり、第４図は第１図，第２図に示す圧電振動子
にカバーを取付けた圧電振動子を示す斜視図、第５図は
第４図に示す圧電振動子をＥ−Ｅ面で切断した断面図、
第６図は第４図に示す圧電振動子の電子機器等のプリン
ト基板への固着構造を示した図である。ここで２０はそ
の内部を密封，保護するためのカバーであり、外周部１
８の両表面に圧電振動部１９を密封，保護するように固
着される。カバー２０は水晶，コバール，ガラスなどの
材料によって形成されている。その固着はエポキシ樹脂
などの接着剤を用いて行なわれる。なお、外周部１８の
カバー２０と固着される両表面上には引き出し電極１４
ａ，１４ｂの一部が形成されているが、その厚みは数１
００オングストロームから数１０００オングストローム
と非常に薄いので、カバー２０及び接着剤で圧電振動部
１９を密封する障害とはならない。そして、密封された
圧電振動部１９の周りの空隙部分２１には圧電振動部１
９を物理的に安定な状態に維持するため、不活性ガス
（窒素，アルゴン等）を封入するかまたは真空とする。
第６図に示す２５はプリント基板、２４ａ，２４ｂはプ
リント基板２５上に形成された導体層である。２３は半
田等の導電性固着剤であり、これによって第４図，第５
図に示す圧電振動子はプリント基板上に固着され、かつ
圧電振動子の引き出し電極１４ａ，１４ｂと導電性固着
剤２３を介して圧電振動部１９上の電極１３ａ，１３ｂ
と導体層２４ａ，２４ｂが各々導通される。圧電振動子
をこのように保持すれば、第７図乃至第９図に示す基
台、ワイヤークリップ、外部導出ピンは不要となり、第
３図に示す保持構造に比較してもその構造が簡単にな
り、圧電振動子の保持構造が小型化される。なお、この
構造で圧電振動子を保持する場合、圧電振動部１９の電
極を形成していない部分の一部に貫通穴を設ければ、圧
電振動部１９の上下の空隙部分２１，２１が導通され、
ガスの密度が一定となる。4 to 6 are views showing another piezoelectric vibrator according to the present invention, and FIG. 4 shows a piezoelectric vibrator in which a cover is attached to the piezoelectric vibrator shown in FIGS. 1 and 2. FIG. 5 is a perspective view, FIG. 5 is a sectional view of the piezoelectric vibrator shown in FIG.
FIG. 6 is a view showing a structure for fixing the piezoelectric vibrator shown in FIG. 4 to a printed circuit board of an electronic device or the like. Here, 20 is a cover for sealing and protecting the inside, and the outer peripheral portion 1
The piezoelectric vibrating portion 19 is fixed to both surfaces of 8 so as to seal and protect it. The cover 20 is made of a material such as crystal, kovar, or glass. The fixing is performed using an adhesive such as an epoxy resin. It should be noted that the extraction electrode 14 is provided on both surfaces of the outer peripheral portion 18 fixed to the cover 20.
Although a part of a and 14b is formed, its thickness is several 1
Since the thickness is very thin, from 00 angstroms to several thousand angstroms, it does not become an obstacle to seal the piezoelectric vibrating portion 19 with the cover 20 and the adhesive. The piezoelectric vibrating portion 1 is provided in the void portion 21 around the sealed piezoelectric vibrating portion 19.
In order to maintain 9 in a physically stable state, an inert gas (nitrogen, argon, etc.) is sealed or a vacuum is applied.
In FIG. 6, 25 is a printed circuit board, and 24 a and 24 b are conductor layers formed on the printed circuit board 25. Reference numeral 23 is a conductive adhesive such as solder.
The piezoelectric vibrator shown in the figure is fixed on a printed circuit board, and electrodes 13a, 13b on the piezoelectric vibrating portion 19 are connected via lead electrodes 14a, 14b of the piezoelectric vibrator and a conductive fixing agent 23.
And the conductor layers 24a and 24b are electrically connected. If the piezoelectric vibrator is held in this way, the base, wire clips, and external lead-out pins shown in FIGS. 7 to 9 are unnecessary, and the structure is simpler than the holding structure shown in FIG. Therefore, the holding structure of the piezoelectric vibrator is downsized. When the piezoelectric vibrator is held by this structure, if a through hole is provided in a part of the piezoelectric vibrating portion 19 where no electrode is formed, the upper and lower void portions 21 and 21 of the piezoelectric vibrating portion 19 are electrically connected. Is
The density of the gas becomes constant.
第７図は、第４図，第５図に示す圧電振動子の他の実施
例を示す断面図で、第４図，第５図に示す圧電振動子の
カバー２０には、外周部１８の溝部の内側の部分の表面
に接触しないように、凹部が設けられているのに対し、
第７図に示す圧電振動子は、そのカバー２０に該凹部を
設けず、外周部１８の溝部の内側の部分の厚みを外側の
部分の厚みより薄く構成している。FIG. 7 is a cross-sectional view showing another embodiment of the piezoelectric vibrator shown in FIGS. 4 and 5, and a cover 20 of the piezoelectric vibrator shown in FIG. 4 and FIG. While a recess is provided so as not to contact the surface of the inner part of the groove,
In the piezoelectric vibrator shown in FIG. 7, the cover 20 is not provided with the recess, and the thickness of the inner portion of the groove of the outer peripheral portion 18 is smaller than the thickness of the outer portion thereof.
以上、本発明を実施例に従って詳細に説明したが、本発
明に係る圧電振動子は上記実施例に限定されるものでは
なく、圧電振動部，外周部の形状を円形、六角形等の他
の形状としてもよく、又、外周部上の溝部は外周部の全
周又は他の一部に形成してもよく、又、振動子は水晶で
なく他の圧電材料であってもよい。又、圧電振動子を第
３図に示すように保持させる場合は、外周部を圧電振動
部の全周に亘って形成する必要はなく、外部導出ピンと
接続する部分のみに外周部を設けてもよい。Although the present invention has been described in detail above with reference to the embodiments, the piezoelectric vibrator according to the present invention is not limited to the above embodiments, and the piezoelectric vibrating portion and the outer peripheral portion may have other shapes such as a circle and a hexagon. It may have a shape, the groove on the outer peripheral portion may be formed on the entire circumference of the outer peripheral portion or a part thereof, and the vibrator may be made of other piezoelectric material instead of quartz. Further, when the piezoelectric vibrator is held as shown in FIG. 3, it is not necessary to form the outer peripheral portion over the entire circumference of the piezoelectric vibrating portion, and the outer peripheral portion may be provided only in the portion connected to the external lead-out pin. Good.
（発明の効果） 以上のように圧電振動子を構成したので、〔１〕圧電振
動子の圧電振動部の振動が外周部上の溝部によって遮断
されこれによって該振動が外部に伝わりにくく、また逆
に〔２〕外部の振動が圧電振動子に伝わったとしても圧
電振動子の外周部上の溝部によってその振動は圧電振動
部にまでは伝わりにくく、さらにまた〔３〕本発明に係
る圧電振動子の保持はその構造上、ワイヤークリップの
ような弾性のある材料を使用する必要はなく、圧電振動
子を確実に固定できる剛性率の高い材料を使用できるた
め、たとえ圧電振動子を小型化しても圧電振動子の周り
を保護するケースに圧電振動子が衝突することはなく、
該圧電振動子を破損する恐れがなくなる。(Effects of the Invention) Since the piezoelectric vibrator is configured as described above, [1] vibration of the piezoelectric vibrating portion of the piezoelectric vibrator is blocked by the groove portion on the outer peripheral portion, which makes it difficult for the vibration to be transmitted to the outside, and vice versa. [2] Even if external vibration is transmitted to the piezoelectric vibrator, the vibration is hard to be transmitted to the piezoelectric vibrating portion due to the groove portion on the outer peripheral portion of the piezoelectric vibrator, and [3] The piezoelectric vibrator according to the present invention. Because of its structure, it is not necessary to use an elastic material such as a wire clip for holding, and since a material with a high rigidity that can securely fix the piezoelectric vibrator can be used, even if the piezoelectric vibrator is downsized The piezoelectric vibrator does not collide with the case that protects the surroundings of the piezoelectric vibrator,
There is no risk of damaging the piezoelectric vibrator.
また、本発明によれば、圧電振動部の厚みが薄くなって
も（例えば５０μｍ程度以下）、外周部により保護され
ることにより、組立時に破損しにくく、また、組立後に
あっても外部からの応力による圧電振動部のそり等がな
く破損を生じにくく、これによって従来の圧電振動子よ
りも高い周波数を得られる圧電振動子を容易に作成でき
る。Further, according to the present invention, even if the thickness of the piezoelectric vibrating portion is thin (for example, about 50 μm or less), the outer peripheral portion protects the piezoelectric vibrating portion, so that the piezoelectric vibrating portion is less likely to be damaged during assembly, and even if it is after assembly, it is not damaged from the outside. Since the piezoelectric vibrating portion is not warped due to stress and is not easily damaged, a piezoelectric vibrator that can obtain a higher frequency than a conventional piezoelectric vibrator can be easily created.
さらに、本発明に係る圧電振動子を平板状のカバーで覆
う構成とすれば、従来の圧電振動子に比べ、非常に小形
化できるほか、圧電振動部分を簡単に密閉できる。又カ
バーが平板状であるので、小形化された圧電振動部に対
してカバーの設置が極めて容易に行えるという効果も有
する。Furthermore, if the piezoelectric vibrator according to the present invention is covered with a flat plate-shaped cover, it can be made much smaller than the conventional piezoelectric vibrator, and the piezoelectric vibrating portion can be easily sealed. In addition, since the cover has a flat plate shape, there is an effect that the cover can be extremely easily installed on the miniaturized piezoelectric vibrating portion.
第１図は本発明に係る圧電振動子の斜視図、第２図は第
１図に示す圧電振動子をＣ−Ｃ面で切断した断面図であ
る。第３図は第１図に示す圧電振動子の保持構造の一例
を示した図である。第４図乃至第６図は本発明に係る他
の圧電振動子を示した図であり、第４図は第１図，第２
図に示す圧電振動子にカバーを取付けた圧電振動子を示
す斜視図、第５図は第４図に示す圧電振動子をＥ−Ｅ面
で切断した断面図、第６図は第４図に示す圧電振動子の
電子機器等のプリント基板への固着構造を示した図であ
る。第７図は第４図，第５図に示す圧電振動子の他の実
施例を示す断面図である。第８図は従来の圧電振動子の
保持方法を示した一部切欠斜視図、第９図は従来の圧電
振動子の斜視図、第１０図は第９図に示す圧電振動子を
Ａ−Ａ面で切断した断面図である。 １３ａ，１３ｂ…電極 １４ａ，１４ｂ…引き出し電極 １７…溝部、１８…外周部 １９…圧電振動部、２０…カバーFIG. 1 is a perspective view of a piezoelectric vibrator according to the present invention, and FIG. 2 is a sectional view of the piezoelectric vibrator shown in FIG. FIG. 3 is a diagram showing an example of a holding structure for the piezoelectric vibrator shown in FIG. FIGS. 4 to 6 are views showing another piezoelectric vibrator according to the present invention, and FIG. 4 shows FIGS.
FIG. 5 is a perspective view showing the piezoelectric vibrator with a cover attached to the piezoelectric vibrator shown in FIG. 5, FIG. 5 is a cross-sectional view taken along the line EE of the piezoelectric vibrator shown in FIG. 4, and FIG. 6 is shown in FIG. FIG. 7 is a diagram showing a structure for fixing the piezoelectric vibrator shown to a printed circuit board of an electronic device or the like. FIG. 7 is a sectional view showing another embodiment of the piezoelectric vibrator shown in FIGS. 4 and 5. FIG. 8 is a partially cutaway perspective view showing a conventional piezoelectric vibrator holding method, FIG. 9 is a perspective view of a conventional piezoelectric vibrator, and FIG. 10 is the piezoelectric vibrator shown in FIG. It is sectional drawing cut | disconnected by the surface. 13a, 13b ... Electrodes 14a, 14b ... Lead-out electrodes 17 ... Grooves, 18 ... Peripheral part 19 ... Piezoelectric vibration part, 20 ... Cover
フロントページの続き (56)参考文献 特開 昭48−34494（ＪＰ，Ａ) 特開 昭58−172008（ＪＰ，Ａ) 特開 昭54−129994（ＪＰ，Ａ) 実開 昭53−25245（ＪＰ，Ｕ) 実開 昭53−27740（ＪＰ，Ｕ)Continuation of the front page (56) References JP-A-48-34494 (JP, A) JP-A-58-172008 (JP, A) JP-A-54-129994 (JP, A) Actual development Sho-53-25245 (JP , U) Actual development Sho 53-27740 (JP, U)
Claims (3)
と、該圧電振動部の外周全体に圧電振動部と同一の材料
で一体に形成され該圧電振動部より厚い厚みを有し表面
に励振用電極の引出電極部を形成した外周部と、該外周
部の表面に形成された溝部と、を具備することを特徴と
する圧電振動子。1. A piezoelectric vibrating portion having excitation electrodes formed on both surfaces, and a piezoelectric vibrating portion which is integrally formed on the entire outer periphery of the piezoelectric vibrating portion with the same material as that of the piezoelectric vibrating portion and has a thickness larger than that of the piezoelectric vibrating portion. A piezoelectric vibrator, comprising: an outer peripheral portion on which an extraction electrode portion of an excitation electrode is formed; and a groove portion formed on a surface of the outer peripheral portion.
／１００以上であることを特徴とする特許請求の範囲第
（１）項記載の圧電振動子。2. The depth of the groove is at least 1 of the thickness of the outer peripheral portion.
/ 100 or more, The piezoelectric vibrator according to claim (1).
と、該圧電振動部の外周全体に圧電振動部と同一の材料
で一体に形成され該圧電振動部より厚い厚みを有し表面
に励振用電極の引出電極部を形成した外周部と、該外周
部の表面に形成された溝部と、該外周部の両表面上に固
着され圧電振動部を密封する平板状のカバーとを有する
ことを特徴とする圧電振動子。3. A piezoelectric vibrating portion having excitation electrodes formed on both surfaces, and a piezoelectric vibrating portion formed integrally on the entire outer circumference of the piezoelectric vibrating portion with the same thickness as the piezoelectric vibrating portion. It has an outer peripheral portion on which the extraction electrode portion of the excitation electrode is formed, a groove portion formed on the surface of the outer peripheral portion, and a flat plate-like cover fixed to both surfaces of the outer peripheral portion to seal the piezoelectric vibrating portion. Piezoelectric vibrator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59124742A JPH0642617B2 (en) | 1984-06-18 | 1984-06-18 | Piezoelectric vibrator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59124742A JPH0642617B2 (en) | 1984-06-18 | 1984-06-18 | Piezoelectric vibrator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS613515A JPS613515A (en) | 1986-01-09 |
| JPH0642617B2 true JPH0642617B2 (en) | 1994-06-01 |
Family
ID=14892985
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59124742A Expired - Fee Related JPH0642617B2 (en) | 1984-06-18 | 1984-06-18 | Piezoelectric vibrator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0642617B2 (en) |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3396287A (en) * | 1965-09-29 | 1968-08-06 | Piezo Technology Inc | Crystal structures and method of fabricating them |
| US3694677A (en) * | 1971-03-03 | 1972-09-26 | Us Army | Vhf-uhf piezoelectric resonators |
| JPS4834497A (en) * | 1971-09-06 | 1973-05-18 | ||
| JPS4834494A (en) * | 1971-09-06 | 1973-05-18 | ||
| JPS5325245U (en) * | 1976-08-11 | 1978-03-03 | ||
| JPS5327740U (en) * | 1976-08-18 | 1978-03-09 | ||
| JPS54129994A (en) * | 1978-03-31 | 1979-10-08 | Matsushima Kogyo Co Ltd | Crystal vibrator |
| FR2438939A1 (en) * | 1978-10-09 | 1980-05-09 | France Etat | PIEZOELECTRIC BI-RESONATOR |
| JPS58172008A (en) * | 1982-04-02 | 1983-10-08 | Toyo Commun Equip Co Ltd | Structure and manufacture of piezoelectric oscillator |
-
1984
- 1984-06-18 JP JP59124742A patent/JPH0642617B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPS613515A (en) | 1986-01-09 |
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