JPH0637316Y2 - X-ray diffraction sample position adjustment device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention is applicable, for example, to the analysis of physical properties of a sample by irradiating a minute sample with a thin X-ray beam from an arbitrary direction and measuring the wavelength, intensity and direction of the diffracted X-ray. A sample position adjusting device for use.

In such an apparatus, generally, a small granular sample is attached to the tip of a needle, the base end of the needle is supported by, for example, an X-axis moving table, and the moving table is further held by a Y-axis moving table, thereby Can be freely moved in an XY plane perpendicular to the needle. If necessary, the entire device is rotatably held by an axis parallel to the needle. However, in the conventional device, the screws directly connected to the motors for driving the X-axis moving base and the Y-axis moving base were screwed directly to the respective moving bases, and therefore these motors protruded to the side of the moving bases. Therefore, when an X-ray with a small angle with respect to the sample mounting needle is made incident on the sample or an attempt is made to detect a diffracted X-ray, the X-ray is blocked by the motor, and there is a disadvantage that measurement becomes impossible. . That is, the present invention eliminates such drawbacks, and aims to provide a sample position adjusting device capable of making X-rays incident on a sample at an arbitrary angle over a wide angle range or detecting diffracted X-rays. It is a thing.

Therefore, according to the present invention, when the sample is moved in the X-axis and Y-axis directions to adjust the sample position in the XY plane,
A motor for driving the sample in the direction of each of the above-mentioned axes is arranged so that their rotation axes are all orthogonal to the above-mentioned plane, and a worm is directly connected to each rotation axis and meshed with each worm. The screw is directly driven by the worm wheel so that one screw is screwed to the base of the other motor and the other screw is screwed to the sample mount. That is, since the axes of the two motors are both orthogonal to the XY plane by such a structure, the two motors can be arranged along substantially one straight line orthogonal to the above plane. Therefore, the angle range in which the X-rays irradiated on the sample or the X-rays diffracted by the sample are blocked by the motor is made extremely small, and there is an effect that the measurement can be performed over a wide angle.

1 is an embodiment of the present invention, FIG. 1 is a sectional view taken along the line AA in FIG. 2, FIG. 2 is a sectional view taken along the line BB in FIG. 1, and FIGS. 3 and 4 are CC and CC in FIG. 1, respectively. FIG. In this way, the base end of the needle 2 for attaching the minute sample 1 to the tip is fixed to the sample mount 3. The mounting base 3 is held on a mounting base 6 of a Y-axis motor 5 so as to be movable in the Y-axis direction by rolling balls 4, 4 ... . The motor 5 is attached to the base 6 so that the rotation shaft 7 of the motor 5 is orthogonal to the XY plane for adjusting the position of the sample 1. The worm 8 is directly connected to the shaft 7 and is engaged with the worm. A matching worm wheel 9 is attached to the base 6, and a screw 10 directly connected to the shaft of the wheel 9 is screwed to the sample mount 3. The base 6 is held by a mounting base 13 of an X-axis motor 12 so as to be movable in the X-axis direction by rolling balls 11, 11 ... Motor 12
Is attached to the base 13 so that its rotating shaft 14 is orthogonal to the XY plane, and the worm 15 is attached to the shaft 14.
Worm wheel 16 that connects directly to and meshes with this worm
Is attached to the base 13 and the screw 17 is directly connected to the shaft of the wheel 16, and the screw 17 is screwed to the base 6 of the Y-axis motor.
In the above apparatus, the balls 4, 4 ... And 11, 11, 11 ..., which are arranged in a line, are discs or cylindrical cross rollers in which the balls are arranged so that their axes are alternately orthogonal to each other. By so doing, it is possible to remove fine movements of the movable portion and perform more precise movements. Also, the motor 5 and
By using this as a pulse motor, the 12 can precisely control the operation amount. Further, if necessary, a spring is stretched between the mount 3 and the base 6 and between the bases 6 and 13 to prevent backlash, or the spiral groove of the screw 10 is superposed on the surface of the wheel 9. It is needless to say that the device can be made more compact by engaging with the base 3 only on a part of the peripheral side surface of the screw.

When the motor 5 is started in the above-mentioned device, the wheel 9 meshing with the worm 8 directly connected to the shaft thereof rotates, and the screw 10 in the Y-axis direction directly connected to this wheel also rotates.
Since the screw 10 is screwed into the mounting base 3 of the sample mounting needle 2, the sample 1 is moved in the direction indicated by the arrow Y by the activation of the motor. Also, when the motor 12 is started, the wheel 16 that meshes with the worm 15 directly connected to the shaft rotates,
Further, the screw 17 in the X-axis direction directly connected to this wheel rotates. The base 17 of the motor 5 is screwed onto the screw 17, but the sample mount 3 is further attached to the base 6, so that the sample 1 moves in the direction of the arrow X by the above rotation. Therefore, by starting the motor 5 or 12, the sample 1 on the mounting base 3 can be moved in the X-axis direction or the Y-axis direction and its position can be freely adjusted.

Moreover, since the rotation axes of the motors 5 and 12 are both arranged at right angles to the plane including the X and Y axes,
Moving the sample mount 3 and the motors 5 and 12 of the sample 1 X-
They can be arranged on one straight line orthogonal to the Y plane. Therefore, as in the embodiment, by constructing this in the shape of a rod perpendicular to the XY plane, the angular range p and the range of irradiation or detection of the X-rays irradiating the sample 1 or the X-rays diffracted by the sample and There is an effect that q becomes extremely large.

[Brief description of drawings]

1 is a sectional view taken along the line AA in FIG. 2, FIG. 2 is a sectional view taken along the line BB in FIG. 1, and FIG. 3 is a line CC in FIG.
The figure which expanded the cross section, FIG. 4 is the figure which expanded the DD cross section of FIG. In the figure, 1 is a sample, 3 is a sample mount, 4 and 11 are rolling balls, 5 is a Y-axis motor, 12 is an X-axis motor, 7 and 14 are rotary shafts of the motor, 8 and 15 are worms, 9 And 16 are worm wheels and 10 and 17 are screws.

Claims (1)

[Scope of utility model registration request] 1. An X-axis motor and a Y for driving an X-ray diffraction sample in X-axis and Y-axis directions which are orthogonal to each other.
The shaft motors are arranged such that their rotation axes are all orthogonal to the XY plane, and a screw directly connected to a worm wheel that meshes with a worm directly connected to the rotation shaft of the X-axis motor is used as a base of the Y-axis motor. An X-ray diffraction sample position adjusting device in which a screw directly connected to a worm wheel that meshes with a worm that is screwed and directly connected to the rotation axis of a Y-axis motor is screwed to a sample mount.