JPH0636583Y2 - 静電チャック - Google Patents

静電チャック

Info

Publication number
JPH0636583Y2
JPH0636583Y2 JP1987104983U JP10498387U JPH0636583Y2 JP H0636583 Y2 JPH0636583 Y2 JP H0636583Y2 JP 1987104983 U JP1987104983 U JP 1987104983U JP 10498387 U JP10498387 U JP 10498387U JP H0636583 Y2 JPH0636583 Y2 JP H0636583Y2
Authority
JP
Japan
Prior art keywords
terminal
electrode
film
electrostatic chuck
conductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987104983U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6411542U (en, 2012
Inventor
忠志 宮村
繁夫 菅原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Sumitomo Metal Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Metal Industries Ltd filed Critical Sumitomo Metal Industries Ltd
Priority to JP1987104983U priority Critical patent/JPH0636583Y2/ja
Publication of JPS6411542U publication Critical patent/JPS6411542U/ja
Application granted granted Critical
Publication of JPH0636583Y2 publication Critical patent/JPH0636583Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
JP1987104983U 1987-07-07 1987-07-07 静電チャック Expired - Lifetime JPH0636583Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987104983U JPH0636583Y2 (ja) 1987-07-07 1987-07-07 静電チャック

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987104983U JPH0636583Y2 (ja) 1987-07-07 1987-07-07 静電チャック

Publications (2)

Publication Number Publication Date
JPS6411542U JPS6411542U (en, 2012) 1989-01-20
JPH0636583Y2 true JPH0636583Y2 (ja) 1994-09-21

Family

ID=31337190

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987104983U Expired - Lifetime JPH0636583Y2 (ja) 1987-07-07 1987-07-07 静電チャック

Country Status (1)

Country Link
JP (1) JPH0636583Y2 (en, 2012)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7060771B1 (ja) * 2021-02-04 2022-04-26 日本碍子株式会社 半導体製造装置用部材
WO2022168368A1 (ja) * 2021-02-04 2022-08-11 日本碍子株式会社 半導体製造装置用部材及びその製法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2960566B2 (ja) * 1991-03-29 1999-10-06 信越化学工業株式会社 静電チャック基板および静電チャック
JP5281480B2 (ja) * 2009-05-22 2013-09-04 新光電気工業株式会社 静電チャック

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0727961B2 (ja) * 1986-06-05 1995-03-29 東陶機器株式会社 静電チャック板の製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7060771B1 (ja) * 2021-02-04 2022-04-26 日本碍子株式会社 半導体製造装置用部材
WO2022168368A1 (ja) * 2021-02-04 2022-08-11 日本碍子株式会社 半導体製造装置用部材及びその製法
US12243729B2 (en) 2021-02-04 2025-03-04 Ngk Insulators, Ltd. Member for semiconductor manufacturing apparatus and method for manufacturing the same

Also Published As

Publication number Publication date
JPS6411542U (en, 2012) 1989-01-20

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