JPH0635472Y2 - ウェーハボート - Google Patents
ウェーハボートInfo
- Publication number
- JPH0635472Y2 JPH0635472Y2 JP7744390U JP7744390U JPH0635472Y2 JP H0635472 Y2 JPH0635472 Y2 JP H0635472Y2 JP 7744390 U JP7744390 U JP 7744390U JP 7744390 U JP7744390 U JP 7744390U JP H0635472 Y2 JPH0635472 Y2 JP H0635472Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- support rod
- boat
- wafer boat
- present
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Packaging Frangible Articles (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7744390U JPH0635472Y2 (ja) | 1990-07-23 | 1990-07-23 | ウェーハボート |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7744390U JPH0635472Y2 (ja) | 1990-07-23 | 1990-07-23 | ウェーハボート |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0436242U JPH0436242U (pt) | 1992-03-26 |
JPH0635472Y2 true JPH0635472Y2 (ja) | 1994-09-14 |
Family
ID=31619837
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7744390U Expired - Lifetime JPH0635472Y2 (ja) | 1990-07-23 | 1990-07-23 | ウェーハボート |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0635472Y2 (pt) |
-
1990
- 1990-07-23 JP JP7744390U patent/JPH0635472Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0436242U (pt) | 1992-03-26 |
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