JPH0635472Y2 - ウェーハボート - Google Patents

ウェーハボート

Info

Publication number
JPH0635472Y2
JPH0635472Y2 JP7744390U JP7744390U JPH0635472Y2 JP H0635472 Y2 JPH0635472 Y2 JP H0635472Y2 JP 7744390 U JP7744390 U JP 7744390U JP 7744390 U JP7744390 U JP 7744390U JP H0635472 Y2 JPH0635472 Y2 JP H0635472Y2
Authority
JP
Japan
Prior art keywords
wafer
support rod
boat
wafer boat
present
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP7744390U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0436242U (pt
Inventor
平人 大村
Original Assignee
コマツ電子金属株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by コマツ電子金属株式会社 filed Critical コマツ電子金属株式会社
Priority to JP7744390U priority Critical patent/JPH0635472Y2/ja
Publication of JPH0436242U publication Critical patent/JPH0436242U/ja
Application granted granted Critical
Publication of JPH0635472Y2 publication Critical patent/JPH0635472Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
JP7744390U 1990-07-23 1990-07-23 ウェーハボート Expired - Lifetime JPH0635472Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7744390U JPH0635472Y2 (ja) 1990-07-23 1990-07-23 ウェーハボート

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7744390U JPH0635472Y2 (ja) 1990-07-23 1990-07-23 ウェーハボート

Publications (2)

Publication Number Publication Date
JPH0436242U JPH0436242U (pt) 1992-03-26
JPH0635472Y2 true JPH0635472Y2 (ja) 1994-09-14

Family

ID=31619837

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7744390U Expired - Lifetime JPH0635472Y2 (ja) 1990-07-23 1990-07-23 ウェーハボート

Country Status (1)

Country Link
JP (1) JPH0635472Y2 (pt)

Also Published As

Publication number Publication date
JPH0436242U (pt) 1992-03-26

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