JPH0436242U - - Google Patents
Info
- Publication number
- JPH0436242U JPH0436242U JP7744390U JP7744390U JPH0436242U JP H0436242 U JPH0436242 U JP H0436242U JP 7744390 U JP7744390 U JP 7744390U JP 7744390 U JP7744390 U JP 7744390U JP H0436242 U JPH0436242 U JP H0436242U
- Authority
- JP
- Japan
- Prior art keywords
- support rod
- boat
- pair
- wafer boat
- holders
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 claims 1
Landscapes
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7744390U JPH0635472Y2 (ja) | 1990-07-23 | 1990-07-23 | ウェーハボート |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7744390U JPH0635472Y2 (ja) | 1990-07-23 | 1990-07-23 | ウェーハボート |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0436242U true JPH0436242U (pt) | 1992-03-26 |
| JPH0635472Y2 JPH0635472Y2 (ja) | 1994-09-14 |
Family
ID=31619837
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7744390U Expired - Lifetime JPH0635472Y2 (ja) | 1990-07-23 | 1990-07-23 | ウェーハボート |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0635472Y2 (pt) |
-
1990
- 1990-07-23 JP JP7744390U patent/JPH0635472Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0635472Y2 (ja) | 1994-09-14 |