JPH0635362Y2 - イオン注入装置のチャージアップ低減用の電子銃装置 - Google Patents

イオン注入装置のチャージアップ低減用の電子銃装置

Info

Publication number
JPH0635362Y2
JPH0635362Y2 JP1988010214U JP1021488U JPH0635362Y2 JP H0635362 Y2 JPH0635362 Y2 JP H0635362Y2 JP 1988010214 U JP1988010214 U JP 1988010214U JP 1021488 U JP1021488 U JP 1021488U JP H0635362 Y2 JPH0635362 Y2 JP H0635362Y2
Authority
JP
Japan
Prior art keywords
filament
slit
anode
terminal
fixed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988010214U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01113952U (it
Inventor
博 藤沢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP1988010214U priority Critical patent/JPH0635362Y2/ja
Publication of JPH01113952U publication Critical patent/JPH01113952U/ja
Application granted granted Critical
Publication of JPH0635362Y2 publication Critical patent/JPH0635362Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP1988010214U 1988-01-26 1988-01-26 イオン注入装置のチャージアップ低減用の電子銃装置 Expired - Lifetime JPH0635362Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988010214U JPH0635362Y2 (ja) 1988-01-26 1988-01-26 イオン注入装置のチャージアップ低減用の電子銃装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988010214U JPH0635362Y2 (ja) 1988-01-26 1988-01-26 イオン注入装置のチャージアップ低減用の電子銃装置

Publications (2)

Publication Number Publication Date
JPH01113952U JPH01113952U (it) 1989-07-31
JPH0635362Y2 true JPH0635362Y2 (ja) 1994-09-14

Family

ID=31217670

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988010214U Expired - Lifetime JPH0635362Y2 (ja) 1988-01-26 1988-01-26 イオン注入装置のチャージアップ低減用の電子銃装置

Country Status (1)

Country Link
JP (1) JPH0635362Y2 (it)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6210850A (ja) * 1985-07-08 1987-01-19 Matsushita Electric Ind Co Ltd 電子ビ−ム静電レンズ
JPH0535557Y2 (it) * 1986-02-24 1993-09-09

Also Published As

Publication number Publication date
JPH01113952U (it) 1989-07-31

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