JPH01113952U - - Google Patents
Info
- Publication number
- JPH01113952U JPH01113952U JP1021488U JP1021488U JPH01113952U JP H01113952 U JPH01113952 U JP H01113952U JP 1021488 U JP1021488 U JP 1021488U JP 1021488 U JP1021488 U JP 1021488U JP H01113952 U JPH01113952 U JP H01113952U
- Authority
- JP
- Japan
- Prior art keywords
- slit
- anode
- terminal
- movable
- fixed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004020 conductor Substances 0.000 claims description 2
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988010214U JPH0635362Y2 (ja) | 1988-01-26 | 1988-01-26 | イオン注入装置のチャージアップ低減用の電子銃装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988010214U JPH0635362Y2 (ja) | 1988-01-26 | 1988-01-26 | イオン注入装置のチャージアップ低減用の電子銃装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01113952U true JPH01113952U (it) | 1989-07-31 |
| JPH0635362Y2 JPH0635362Y2 (ja) | 1994-09-14 |
Family
ID=31217670
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988010214U Expired - Lifetime JPH0635362Y2 (ja) | 1988-01-26 | 1988-01-26 | イオン注入装置のチャージアップ低減用の電子銃装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0635362Y2 (it) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6210850A (ja) * | 1985-07-08 | 1987-01-19 | Matsushita Electric Ind Co Ltd | 電子ビ−ム静電レンズ |
| JPS62137548U (it) * | 1986-02-24 | 1987-08-29 |
-
1988
- 1988-01-26 JP JP1988010214U patent/JPH0635362Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6210850A (ja) * | 1985-07-08 | 1987-01-19 | Matsushita Electric Ind Co Ltd | 電子ビ−ム静電レンズ |
| JPS62137548U (it) * | 1986-02-24 | 1987-08-29 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0635362Y2 (ja) | 1994-09-14 |