JPH01113952U - - Google Patents
Info
- Publication number
- JPH01113952U JPH01113952U JP1021488U JP1021488U JPH01113952U JP H01113952 U JPH01113952 U JP H01113952U JP 1021488 U JP1021488 U JP 1021488U JP 1021488 U JP1021488 U JP 1021488U JP H01113952 U JPH01113952 U JP H01113952U
- Authority
- JP
- Japan
- Prior art keywords
- slit
- anode
- terminal
- movable
- fixed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004020 conductor Substances 0.000 claims description 2
Landscapes
- Electron Sources, Ion Sources (AREA)
Description
第１図はこの考案の一実施例を示す断面図、第
２図は第１図の可動端子の斜視図、第３図は従来
例の断面図である。
……第１の固定端子、……可動端子、…
…第２の固定端子、３……フイラメント、５……
スリツト付のアノード、８……可撓導体、１０…
…スリツト。
FIG. 1 is a sectional view showing an embodiment of this invention, FIG. 2 is a perspective view of the movable terminal shown in FIG. 1, and FIG. 3 is a sectional view of a conventional example. ...first fixed terminal, ...movable terminal, ...
...Second fixed terminal, 3...Filament, 5...
Anode with slit, 8...Flexible conductor, 10...
...Slit.
Claims (1)
ツトの長手方向の両端部に設けた第１の固定端子
および可動端子と、前記第１の固定端子および可
動端子に両端を接続固定して前記アノードのスリ
ツトに沿つて張設したフイラメントと、前記可動
端子に可撓導体で接続した第２の固定端子とを備
え、前記可動端子を前記スリツトの長手方向に移
動自在とした電子銃装置。 an anode with a slit, a first fixed terminal and a movable terminal provided at both ends of the slit in the longitudinal direction of the anode, and an anode with both ends connected and fixed to the first fixed terminal and the movable terminal and attached to the slit of the anode. An electron gun device comprising a filament stretched along the slit, and a second fixed terminal connected to the movable terminal with a flexible conductor, the movable terminal being movable in the longitudinal direction of the slit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988010214U JPH0635362Y2 (en) | 1988-01-26 | 1988-01-26 | Electron gun device for reducing charge-up of ion implanter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988010214U JPH0635362Y2 (en) | 1988-01-26 | 1988-01-26 | Electron gun device for reducing charge-up of ion implanter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01113952U true JPH01113952U (en) | 1989-07-31 |
| JPH0635362Y2 JPH0635362Y2 (en) | 1994-09-14 |
Family
ID=31217670
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988010214U Expired - Lifetime JPH0635362Y2 (en) | 1988-01-26 | 1988-01-26 | Electron gun device for reducing charge-up of ion implanter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0635362Y2 (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6210850A (en) * | 1985-07-08 | 1987-01-19 | Matsushita Electric Ind Co Ltd | Electron beam static lens |
| JPS62137548U (en) * | 1986-02-24 | 1987-08-29 |
-
1988
- 1988-01-26 JP JP1988010214U patent/JPH0635362Y2/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6210850A (en) * | 1985-07-08 | 1987-01-19 | Matsushita Electric Ind Co Ltd | Electron beam static lens |
| JPS62137548U (en) * | 1986-02-24 | 1987-08-29 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0635362Y2 (en) | 1994-09-14 |