JPH0635156Y2 - 圧力センサ - Google Patents
圧力センサInfo
- Publication number
- JPH0635156Y2 JPH0635156Y2 JP264189U JP264189U JPH0635156Y2 JP H0635156 Y2 JPH0635156 Y2 JP H0635156Y2 JP 264189 U JP264189 U JP 264189U JP 264189 U JP264189 U JP 264189U JP H0635156 Y2 JPH0635156 Y2 JP H0635156Y2
- Authority
- JP
- Japan
- Prior art keywords
- electrode plate
- fixed
- plate
- pressure sensor
- bottom plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 125000006850 spacer group Chemical group 0.000 claims description 11
- 239000002184 metal Substances 0.000 claims description 10
- 239000000919 ceramic Substances 0.000 claims description 7
- 239000012212 insulator Substances 0.000 claims description 7
- 230000008878 coupling Effects 0.000 claims description 4
- 238000010168 coupling process Methods 0.000 claims description 4
- 238000005859 coupling reaction Methods 0.000 claims description 4
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 238000009530 blood pressure measurement Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP264189U JPH0635156Y2 (ja) | 1989-01-17 | 1989-01-17 | 圧力センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP264189U JPH0635156Y2 (ja) | 1989-01-17 | 1989-01-17 | 圧力センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0295832U JPH0295832U (enrdf_load_html_response) | 1990-07-31 |
| JPH0635156Y2 true JPH0635156Y2 (ja) | 1994-09-14 |
Family
ID=31203585
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP264189U Expired - Lifetime JPH0635156Y2 (ja) | 1989-01-17 | 1989-01-17 | 圧力センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0635156Y2 (enrdf_load_html_response) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007086002A (ja) * | 2005-09-26 | 2007-04-05 | Hitachi Ltd | センサおよびセンサモジュール |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102006016554A1 (de) * | 2006-04-07 | 2007-10-11 | L'Air Liquide, S.A. a Directoire et Conseil de Surveillance pour l'Etude et l'Exploitation des Procédés Georges Claude | Verfahren zum Befüllen mindestens eines Druckgasbehälters mit mindestens einem Gas, Zwischenstück zum Verbinden mit einer Öffnung eines Druckgasbehälters und Druckgasflaschenarmatur |
| US8704538B2 (en) * | 2010-07-01 | 2014-04-22 | Mks Instruments, Inc. | Capacitance sensors |
-
1989
- 1989-01-17 JP JP264189U patent/JPH0635156Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007086002A (ja) * | 2005-09-26 | 2007-04-05 | Hitachi Ltd | センサおよびセンサモジュール |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0295832U (enrdf_load_html_response) | 1990-07-31 |
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