JPH06350383A - Surface acoustic wave resonator - Google Patents

Surface acoustic wave resonator

Info

Publication number
JPH06350383A
JPH06350383A JP15817293A JP15817293A JPH06350383A JP H06350383 A JPH06350383 A JP H06350383A JP 15817293 A JP15817293 A JP 15817293A JP 15817293 A JP15817293 A JP 15817293A JP H06350383 A JPH06350383 A JP H06350383A
Authority
JP
Japan
Prior art keywords
surface acoustic
acoustic wave
electrode fingers
gap
short
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15817293A
Other languages
Japanese (ja)
Inventor
Akinori Ishii
昭紀 石井
Tadashi Kanda
正 神田
Yuji Suzuki
勇次 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Electric Corp
Original Assignee
Kokusai Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kokusai Electric Corp filed Critical Kokusai Electric Corp
Priority to JP15817293A priority Critical patent/JPH06350383A/en
Publication of JPH06350383A publication Critical patent/JPH06350383A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To suppress spurious response by providing a part of short-circuited electrode fingers to a part through which a surface acoustic wave passing through a gap of electrode fingers of an interdigital electrode transducer passes so as to uniformize the propagation condition of the surface acoustic wave. CONSTITUTION:A short-circuit part 7 is provided between electrode fingers adjacent a gap 6 provided to electrode fingers 5 of an interdigital electrode transducer(IDT) 2 on a piezoelectric substrate 1. The short-circuit part 7 is provided to have the same width as that of the gap 6 between electrode fingers through which surface acoustic waves A, C or the like pass when the arrangement shape of the gap 6 is weighted so as to be symmetrical horizontally around a line tying connection terminals 3, 4. Thus, the propagation condition of surface acoustic waves A, B, C is totally equal in the IDTs and the surface acoustic wave propagation condition of the entire IDTs is uniformized and spurious response is suppressed.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、通信機に用いられる弾
性表面波共振子に関し、特に、圧電基板上に重み付けが
施されたすだれ状電極変換器が形成された弾性表面波共
振子に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface acoustic wave resonator used in a communication device, and more particularly to a surface acoustic wave resonator having a weighted interdigital transducer formed on a piezoelectric substrate. Is.

【0002】[0002]

【従来の技術】代表例として、電気機械結合係数
(K2 )がレーリー(Rayleigh)波型の弾性表
面波(P+SV波)に比べて格段に大きいラブ波(SH
波)型弾性表面波共振子について述べる。図2(A)は
ラブ波型弾性表面波共振子の構成例を示す平面図であ
り、(B)は(A)の実線で囲った8の部分の部分拡大
図である。図2において、1は圧電基板、12はすだれ
状電極変換器(Inter digital Tran
sducer、以IDTと略記する)、3,4は接続用
端子を示す。図2に示すラブ波型弾性表面波共振子は、
LiNbO3 (ニオブ酸リチウム)回転Y板などの圧電
基板1の上に、金(Au),銀(Ag),白金(Pt)
等の重金属のIDT電極を付着させることにより、伝搬
減衰の大きな擬似弾性表面波を減衰のないラブ波型表面
波とし、かつ、反射器電極などがなくIDT電極のみで
構成されている。図2(B)において、15はIDT電
極指、16は菱形の重み付けを施すための間隙部(GA
P)を示す。図中の矢印(イ)(ロ)(ハ)は、表面波
の伝搬方向を示したものである。図2(B)からわかる
ように、矢印(イ),(ハ)を伝搬する表面波はIDT
電極指を3本通過するが、矢印(ロ)を伝搬する表面波
はIDT電極指を4本通過する。
2. Description of the Related Art As a typical example, a Love wave (SH) whose electromechanical coupling coefficient (K 2 ) is significantly larger than that of a Rayleigh wave type surface acoustic wave (P + SV wave).
The (wave) type surface acoustic wave resonator will be described. FIG. 2A is a plan view showing a configuration example of a Love wave type surface acoustic wave resonator, and FIG. 2B is a partial enlarged view of a portion 8 surrounded by a solid line in FIG. In FIG. 2, reference numeral 1 is a piezoelectric substrate, and 12 is an interdigital transducer.
sducer (hereinafter abbreviated as IDT)), 3 and 4 denote connection terminals. The Love wave type surface acoustic wave resonator shown in FIG.
On a piezoelectric substrate 1 such as a LiNbO 3 (lithium niobate) rotating Y plate, gold (Au), silver (Ag), platinum (Pt)
By attaching an IDT electrode made of a heavy metal such as, for example, a pseudo-surface acoustic wave with large propagation attenuation is made into a Love wave type surface wave without attenuation, and there is no reflector electrode or the like, and only the IDT electrode is formed. In FIG. 2B, 15 is an IDT electrode finger, and 16 is a gap (GA) for weighting rhombus.
P) is shown. Arrows (a), (b) and (c) in the figure indicate the propagation directions of the surface waves. As can be seen from FIG. 2B, the surface waves propagating through the arrows (a) and (c) are IDTs.
Although three electrode fingers pass, the surface wave propagating through the arrow (B) passes four IDT electrode fingers.

【0003】[0003]

【発明が解決しようとする課題】このように、上記従来
のIDT電極構成では、局所的ではあるが場所により表
面波の伝搬条件が異なることになる。従って間隙部が表
面波伝搬特性の擾乱の原因となりデバイス特性を劣化さ
せると考えられる。図3(A)は従来の1端子対共振子
のインピーダンス特性例図であり、共振点と反共振点の
中間で円Sで囲った部分に僅かではあるがスプリアスレ
スポンスが認められる。一般に弾性表面波共振子を用い
て電圧制御発振器(VCO)を構成する場合、共振子に
対してスプリアスのないことが要求される。インピーダ
ンス特性上に極めて小さなスプリアス応答が存在しても
発振周波数飛びの原因になるためである。本発明の目的
は、このような問題点を解決し、スプリアスレスポンス
を抑圧した弾性表面波共振子を提供することにある。
As described above, in the above-mentioned conventional IDT electrode structure, the propagation conditions of the surface wave differ locally but depending on the location. Therefore, it is considered that the gap causes the disturbance of the surface wave propagation characteristics and deteriorates the device characteristics. FIG. 3A is a diagram showing an example of impedance characteristics of a conventional one-terminal pair resonator, and a spurious response is recognized in a portion surrounded by a circle S between the resonance point and the anti-resonance point although it is slight. Generally, when configuring a voltage controlled oscillator (VCO) using a surface acoustic wave resonator, it is required that the resonator be free of spurious. This is because even if there is an extremely small spurious response on the impedance characteristic, it may cause the oscillation frequency jump. An object of the present invention is to solve such problems and provide a surface acoustic wave resonator that suppresses spurious responses.

【0004】[0004]

【課題を解決するための手段】本発明の弾性表面波共振
子は、圧電基板上に重み付けを施したすだれ状電極変換
器が形成された弾性表面波共振子において、重み付けを
施すために前記すだれ状電極変換器の電極指に設けられ
た間隙部の一方の隣の同一端子側の2つの電極指間の、
前記間隙部を通過する表面波が通る部分に前記2つの電
極指を短絡する短絡部を設けたことを特徴とするもので
ある。
The surface acoustic wave resonator of the present invention is a surface acoustic wave resonator having a weighted interdigital transducer formed on a piezoelectric substrate. Between two electrode fingers on the same terminal side next to one of the gaps provided in the electrode fingers of the electrode transducer.
It is characterized in that a short-circuit portion for short-circuiting the two electrode fingers is provided in a portion where a surface wave passing through the gap portion passes.

【0005】[0005]

【実施例】以下図面により本発明を詳細に説明する。代
表例として、ラブ波型弾性表面波共振子について述べ
る。図1は本発明の一実施例を示す平面図(A)と部分
拡大図(B)であり、菱形重み付けが施されたラブ波型
弾性表面波共振子の電極構造を示す。図1(A)におい
て、1は圧電基板、2は本発明のIDT、3,4は接続
用端子を示す。図1(B)は、(A)の実線で囲った部
分8の部分拡大図である。図1(B)において、5はI
DT電極指、6は間隙部(GAP)、7は短絡部を示
す。矢印(イ),(ロ),(ハ)は表面波の伝搬方向を
示したものである。短絡部7は、間隙部6と同面積すな
わち間隙と同じ幅で、同じ接続端子側の左隣りの電極指
とさらにその左隣りの電極指との間に設けられている。
図1(A)のように接続端子3,4を結んだ線を中心と
して左右対称に間隙部の配置形状が菱形になるような重
み付けが施されている場合は、中心線に対して間隙部6
の外側の2つの電極指間の、間隙部6を通過する表面波
が通る部分に短絡部7が設けられる。上記のような短絡
部7を配置することにより、矢印(イ),(ロ),
(ハ)を伝搬する表面波の伝搬条件がIDT内でトータ
ル的に等しくなり、従って、IDT全体の表面波伝搬条
件が均一とみなすことができる。図3(B)は本発明に
よる共振子の2端子インピーダンス特性例であり、
(A)の従来例で認められたスプリアスレスポンスが認
められない。
The present invention will be described in detail below with reference to the drawings. As a typical example, a Love wave type surface acoustic wave resonator will be described. FIG. 1 is a plan view (A) and a partially enlarged view (B) showing an embodiment of the present invention, showing an electrode structure of a rhombic weighted Love wave type surface acoustic wave resonator. In FIG. 1A, 1 is a piezoelectric substrate, 2 is an IDT of the present invention, and 3 and 4 are connection terminals. FIG. 1B is a partially enlarged view of the portion 8 surrounded by the solid line in FIG. In FIG. 1B, 5 is I
DT electrode fingers, 6 indicates a gap (GAP), and 7 indicates a short circuit. The arrows (a), (b), and (c) indicate the propagation directions of surface waves. The short-circuit portion 7 has the same area as the gap portion 6, that is, the same width as the gap, and is provided between the electrode finger adjacent to the left and the electrode finger adjacent to the left on the same connection terminal side.
As shown in FIG. 1 (A), when weighting is applied symmetrically around the line connecting the connection terminals 3 and 4 so that the arrangement shape of the gap portion becomes a rhombus, the gap portion is centered on the center line. 6
A short-circuit portion 7 is provided in a portion between the two electrode fingers outside the area where the surface wave passing through the gap portion 6 passes. By arranging the short-circuit portion 7 as described above, the arrows (a), (b),
The propagation conditions of the surface wave propagating in (c) are totally equal in the IDT, and therefore the surface wave propagation condition of the entire IDT can be regarded as uniform. FIG. 3B is an example of a two-terminal impedance characteristic of the resonator according to the present invention,
The spurious response observed in the conventional example (A) is not observed.

【0006】[0006]

【発明の効果】以上詳細に説明したように、本発明を実
施することにより、スプリアスレスポンスが抑圧される
ため、VCOに用いたとき発振周波数の飛び発生がなく
なり実用上大きい効果がある。
As described in detail above, by implementing the present invention, spurious responses are suppressed, so that when used in a VCO, oscillation frequency jumps do not occur and there is a great practical effect.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の実施例を示す平面図と部分拡大図であ
る。
FIG. 1 is a plan view and a partially enlarged view showing an embodiment of the present invention.

【図2】従来の重み付けラブ波型弾性表面波共振子の平
面図と部分拡大図である。
FIG. 2 is a plan view and a partially enlarged view of a conventional weighted Love wave type surface acoustic wave resonator.

【図3】従来と本発明の1端子対弾性表面波共振子のイ
ンピーダンス特性例図である。
FIG. 3 is an impedance characteristic example diagram of a one-terminal pair surface acoustic wave resonator according to the related art and the present invention.

【符号の説明】 1 圧電基板 2 IDT 3,4 端子 5 電極指 6 間隙部 7 短絡部 8 拡大部分[Explanation of reference numerals] 1 piezoelectric substrate 2 IDT 3, 4 terminal 5 electrode finger 6 gap 7 short-circuit 8 enlarged portion

───────────────────────────────────────────────────── フロントページの続き (72)発明者 鈴木 勇次 山梨県甲府市和田町2870 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Yuji Suzuki 2870 Wadamachi, Kofu City, Yamanashi Prefecture

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 圧電基板上に重み付けを施したすだれ状
電極変換器が形成された弾性表面波共振子において、 重み付けを施すために前記すだれ状電極変換器の電極指
に設けられた間隙部の一方の隣の同一端子側の2つの電
極指間の、前記間隙部を通過する表面波が通る部分に前
記2つの電極指を短絡する短絡部を設けたことを特徴と
する弾性表面波共振子。
1. A surface acoustic wave resonator in which a weighted interdigital transducer is formed on a piezoelectric substrate, wherein a gap portion provided on an electrode finger of the interdigital transducer is used for weighting. A surface acoustic wave resonator, characterized in that a short-circuit portion for short-circuiting the two electrode fingers is provided at a portion between two electrode fingers on the same terminal side adjacent to one of the electrode fingers where the surface wave passing through the gap passes. .
JP15817293A 1993-06-04 1993-06-04 Surface acoustic wave resonator Pending JPH06350383A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15817293A JPH06350383A (en) 1993-06-04 1993-06-04 Surface acoustic wave resonator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15817293A JPH06350383A (en) 1993-06-04 1993-06-04 Surface acoustic wave resonator

Publications (1)

Publication Number Publication Date
JPH06350383A true JPH06350383A (en) 1994-12-22

Family

ID=15665853

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15817293A Pending JPH06350383A (en) 1993-06-04 1993-06-04 Surface acoustic wave resonator

Country Status (1)

Country Link
JP (1) JPH06350383A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1871006A1 (en) * 2005-04-08 2007-12-26 Murata Manufacturing Co., Ltd. Elastic wave element
WO2008126614A1 (en) 2007-03-27 2008-10-23 Murata Manufacturing Co., Ltd. Elastic wave device
US7479855B2 (en) * 2006-09-22 2009-01-20 Murata Manufacturing Co., Ltd. Longitudinally-coupled-resonator-type elastic wave filter device
US7671705B2 (en) * 2006-09-29 2010-03-02 Tdk Corporation Surface acoustic wave filter and resonator utilizing a branch electrode with an electrically opened end
US10432171B2 (en) * 2015-07-03 2019-10-01 Murata Manufacturing Co., Ltd. Radio-frequency module

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1871006A1 (en) * 2005-04-08 2007-12-26 Murata Manufacturing Co., Ltd. Elastic wave element
US7501916B2 (en) * 2005-04-08 2009-03-10 Murata Manufacturing Co., Ltd. Elastic wave device having an electrode finger with a side edge projection
EP1871006A4 (en) * 2005-04-08 2009-06-17 Murata Manufacturing Co Elastic wave element
US7479855B2 (en) * 2006-09-22 2009-01-20 Murata Manufacturing Co., Ltd. Longitudinally-coupled-resonator-type elastic wave filter device
US7671705B2 (en) * 2006-09-29 2010-03-02 Tdk Corporation Surface acoustic wave filter and resonator utilizing a branch electrode with an electrically opened end
WO2008126614A1 (en) 2007-03-27 2008-10-23 Murata Manufacturing Co., Ltd. Elastic wave device
EP2128982A1 (en) * 2007-03-27 2009-12-02 Murata Manufacturing Co. Ltd. Elastic wave device
US8390400B2 (en) * 2007-03-27 2013-03-05 Murata Manufacturing Co., Ltd. Acoustic wave element having an electrode finger with a protrusion
EP2128982A4 (en) * 2007-03-27 2013-07-24 Murata Manufacturing Co Elastic wave device
US10432171B2 (en) * 2015-07-03 2019-10-01 Murata Manufacturing Co., Ltd. Radio-frequency module

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