JPH06346219A - Magnetic material using amorphous magnetic alloy, method for producing the same and device therefor - Google Patents
Magnetic material using amorphous magnetic alloy, method for producing the same and device thereforInfo
- Publication number
- JPH06346219A JPH06346219A JP5143140A JP14314093A JPH06346219A JP H06346219 A JPH06346219 A JP H06346219A JP 5143140 A JP5143140 A JP 5143140A JP 14314093 A JP14314093 A JP 14314093A JP H06346219 A JPH06346219 A JP H06346219A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic alloy
- amorphous magnetic
- heat treatment
- atmosphere
- amorphous
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F1/00—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
- H01F1/01—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
- H01F1/03—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
- H01F1/12—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials
- H01F1/14—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys
- H01F1/147—Alloys characterised by their composition
- H01F1/153—Amorphous metallic alloys, e.g. glassy metals
- H01F1/15383—Applying coatings thereon
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Powder Metallurgy (AREA)
- Soft Magnetic Materials (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、スイッチング電源やイ
ンバータ回路等のトランスやチョークコイルのコアとし
て用いるのに適した非晶質磁性合金を用いた磁性材料、
磁性材料の製造方法、および磁性材料の製造装置に関す
るものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic material using an amorphous magnetic alloy suitable for use as a core of a transformer or a choke coil such as a switching power supply or an inverter circuit,
The present invention relates to a magnetic material manufacturing method and a magnetic material manufacturing apparatus.
【０００２】[0002]
【従来の技術】近年、電源装置の小型化、薄型化などを
目指してスイッチング素子を高周波で断続させることに
よって電力変換を行なうようにしたスイッチング電源や
インバータ回路が用いられている。この種の電源装置で
は、一層の小型化、薄型化を目的としてより高い周波化
でスイッチング素子を断続させることが望まれている。
このような要望を満たすためには、トランスやチョーク
コイルのコアとして高透磁率、低損失の材料が望まれ
る。2. Description of the Related Art In recent years, switching power supplies and inverter circuits have been used in which power conversion is performed by intermittently switching switching elements at high frequencies in order to reduce the size and thickness of power supply devices. In this type of power supply device, it is desired to intermittently switch the switching element at a higher frequency for the purpose of further size reduction and thickness reduction.
In order to meet such demands, a material with high magnetic permeability and low loss is desired as the core of the transformer or choke coil.
【０００３】ところで、トランスやチョークコイルのコ
アとして用いられる高透磁率、低損失の材料としては非
晶質磁性合金が知られている。非晶質磁性合金は、上記
特性のほか高飽和磁束密度という特性も併せ持っている
から、高周波用コアとして用いるのに適している。この
ような特性をさらに有効に活用するために、非晶質磁性
合金の高周波特性の一層の改善が試みられており、とく
に有効な改善策としては非晶質磁性合金を薄帯板に形成
することが提案されている。このような薄帯板では、高
周波領域で急増する渦電流損失を抑制することができる
のである。By the way, an amorphous magnetic alloy is known as a material having a high magnetic permeability and a low loss used as a core of a transformer or a choke coil. Since the amorphous magnetic alloy has the characteristics of high saturation magnetic flux density in addition to the above characteristics, it is suitable for use as a high frequency core. In order to make more effective use of such characteristics, further improvement of the high frequency characteristics of the amorphous magnetic alloy has been attempted, and a particularly effective improvement measure is to form the amorphous magnetic alloy on a thin strip plate. Is proposed. With such a thin strip plate, it is possible to suppress the eddy current loss that sharply increases in the high frequency region.
【０００４】薄帯板の非晶質磁性合金としては数μｍ程
度までのものが知られており、このような薄帯板の非晶
質磁性合金をトランスやチョークコイルのコアに用いる
場合には、積層コアないし巻コアとして用いることにな
る。この場合に、層間の絶縁が行なわれていないと渦電
流が層間で流れることになり、薄肉化による渦電流の抑
制効果が低減してしまうという問題が生じる。Amorphous magnetic alloys for thin strips up to several μm are known, and when such amorphous magnetic alloys for strips are used for the cores of transformers and choke coils. It will be used as a laminated core or a wound core. In this case, if insulation between layers is not performed, an eddy current will flow between the layers, which causes a problem that the effect of suppressing eddy current due to thinning is reduced.
【０００５】そこで、層間の絶縁を施すことが必要にな
る。層間を絶縁する技術としては、非晶質磁性合金の表
面に樹脂等の絶縁材料を塗布する技術や、層間に絶縁材
料のフィルムを介在させる技術や、非晶質磁性合金の表
面に電解法やプラズマ法によって酸化膜を形成する技術
が知られている。Therefore, it is necessary to provide insulation between layers. Techniques for insulating the layers include a technique of applying an insulating material such as a resin on the surface of the amorphous magnetic alloy, a technique of interposing a film of an insulating material between the layers, and an electrolytic method on the surface of the amorphous magnetic alloy. A technique of forming an oxide film by a plasma method is known.
【０００６】[0006]
【発明が解決しようとする課題】しかしながら、絶縁材
料を塗布したり絶縁材料のフィルムを用いることによっ
て絶縁材料を層間に介在させる技術では、全体の体積当
たりの非晶質磁性合金の存在割合である占積率が小さく
なるという問題が生じる。また、非晶質磁性合金によっ
てコアを形成する際には、層間に絶縁材料を介装する独
立した工程が必要であって、生産効率が低くなり、コス
ト高につながるという問題が生じる。さらに、絶縁材料
がコアの磁気特性に影響を与える可能性もある。However, in the technique of interposing the insulating material between the layers by applying the insulating material or using a film of the insulating material, the ratio of the amorphous magnetic alloy to the whole volume is present. There is a problem that the space factor becomes small. Further, when the core is made of the amorphous magnetic alloy, an independent step of interposing an insulating material between layers is required, which causes a problem that production efficiency is lowered and cost is increased. In addition, the insulating material can affect the magnetic properties of the core.
【０００７】これに対して、非晶質磁性合金の表面に酸
化膜を形成する技術を用いれば、絶縁材料を用いる場合
に比較すると占積率を大きくとることができるのである
が、電解法やプラズマ法により酸化膜を形成する場合に
は、酸化膜を形成する工程はコアの製造工程の中で独立
した工程となるから、生産効率が低いという問題は改善
されないものである。さらに、電解法やプラズマ法では
設備投資が大きくなるから、高コストになり工業的には
採用できないという問題がある。On the other hand, if the technique of forming an oxide film on the surface of an amorphous magnetic alloy is used, the space factor can be increased as compared with the case where an insulating material is used. When the oxide film is formed by the plasma method, the process of forming the oxide film is an independent process in the manufacturing process of the core, and therefore the problem of low production efficiency cannot be solved. Further, the electrolytic method and the plasma method require a large amount of capital investment, resulting in a high cost and not being industrially applicable.
【０００８】本発明は上記問題点の解決を目的とするも
のであり、非晶質磁性材料の表面に絶縁用の酸化膜を形
成することによって占積率を大きくとることができ、し
かも低コストで生産性よく酸化膜を形成することができ
る非晶質磁性合金を用いた磁性材料を提供し、かつその
磁性材料を製造する方法、およびその磁性材料を製造す
る装置を提供しようとするものである。An object of the present invention is to solve the above problems, and a large space factor can be obtained by forming an insulating oxide film on the surface of an amorphous magnetic material, and at a low cost. In order to provide a magnetic material using an amorphous magnetic alloy capable of forming an oxide film with high productivity, a method for producing the magnetic material, and an apparatus for producing the magnetic material. is there.
【０００９】[0009]
【課題を解決するための手段】請求項１の発明は、上記
目的を達成するために、非晶質磁性合金の熱処理過程に
おける雰囲気に酸素を導入することによって形成した酸
化膜を表面に備えることを特徴とする。請求項２の発明
は、薄帯板の非晶質磁性合金を厚み方向に重合した形状
に形成され、熱処理過程における雰囲気に酸素を導入す
ることによって形成した酸化膜を各層間に備えることを
特徴とする。In order to achieve the above object, the invention of claim 1 is provided with an oxide film formed on the surface by introducing oxygen into the atmosphere during the heat treatment process of the amorphous magnetic alloy. Is characterized by. The invention of claim 2 is characterized in that an amorphous magnetic alloy of a thin strip is formed in a shape that is polymerized in the thickness direction, and an oxide film formed by introducing oxygen into the atmosphere in the heat treatment process is provided between the layers. And
【００１０】請求項３の発明は、請求項１または請求項
２において、非晶質磁性合金が、遷移金属のうち４Ａ，
５Ａ，６Ａ族の少なくとも１つの元素を含むことを特徴
とする。請求項４の発明は、請求項３において、非晶質
磁性合金が、Ｃｒ、Ｎｂ、Ｔｉのうちの少なくとも１つ
の元素を含むことを特徴とする。According to a third aspect of the invention, in the first or second aspect, the amorphous magnetic alloy is 4A of transition metals.
It is characterized by containing at least one element of 5A and 6A groups. According to a fourth aspect of the present invention, in the third aspect, the amorphous magnetic alloy contains at least one element of Cr, Nb, and Ti.
【００１１】請求項５の発明は、請求項３において、非
晶質磁性合金が、Ｃｒ、Ｎｂ、Ｔｉのうちの少なくとも
１つの元素を８原子％以下含むことを特徴とする。請求
項６の発明は、請求項５において、非晶質磁性合金が、
Ｃｏa Ｆｅb ＭcＳｉd Ｂe の組成〔ただし、ａ＝１−
（ｂ＋ｃ＋ｄ＋ｅ）、０≦ｂ≦０．６４、０．０１≦ｃ
≦０．０８、０．０６≦ｄ≦０．１８、０．２≦ｄ＋ｅ
≦０．２６〕であって、ＭはＣｒ、Ｎｂ、Ｔｉのうちの
少なくとも１つの元素であることを特徴とする。According to a fifth aspect of the invention, in the third aspect, the amorphous magnetic alloy contains 8 atomic% or less of at least one element of Cr, Nb, and Ti. According to a sixth aspect of the present invention, in the fifth aspect, the amorphous magnetic alloy is
Co a Fe b M c Si d B composition of e [However, a = 1-
(B + c + d + e), 0 ≦ b ≦ 0.64, 0.01 ≦ c
≦ 0.08, 0.06 ≦ d ≦ 0.18, 0.2 ≦ d + e
≦ 0.26], and M is at least one element of Cr, Nb, and Ti.
【００１２】請求項７の発明は、２０％以下の酸素を含
む雰囲気中で非晶質磁性合金をキュリー温度以上、結晶
温度以下の温度で加熱することにより非晶質磁性合金の
表面に酸化膜を形成して成ることを特徴とする。請求項
８の発明は、非晶質磁性合金に磁界を作用させると同時
に、２０％以下の酸素を含む雰囲気中で非晶質磁性合金
をキュリー温度以上、結晶温度以下の温度で加熱するこ
とにより非晶質磁性合金の表面に酸化膜を形成して成る
ことを特徴とする。According to a seventh aspect of the invention, an oxide film is formed on the surface of the amorphous magnetic alloy by heating the amorphous magnetic alloy at a temperature not lower than the Curie temperature and not higher than the crystal temperature in an atmosphere containing 20% or less oxygen. Is formed. According to the invention of claim 8, the magnetic field is applied to the amorphous magnetic alloy, and at the same time, the amorphous magnetic alloy is heated at a temperature not lower than the Curie temperature and not higher than the crystal temperature in an atmosphere containing 20% or less oxygen. It is characterized in that an oxide film is formed on the surface of the amorphous magnetic alloy.
【００１３】請求項９の発明は、２０％以下の酸素を含
む雰囲気中において、非晶質磁性合金をキュリー温度以
上、結晶温度以下の温度で加熱した後に冷却する熱処理
を行い、次に、酸素濃度を所定量だけ増加させた雰囲気
中で上記熱処理を行い、以後、所望の酸素濃度の雰囲気
中で上記熱処理を行なうまで雰囲気の酸素濃度を２０％
以下の所定量ずつ増加させては上記熱処理を繰り返すこ
とにより非晶質磁性合金の表面に酸化膜を形成して成る
ことを特徴とする。According to a ninth aspect of the present invention, in an atmosphere containing 20% or less of oxygen, a heat treatment is performed in which the amorphous magnetic alloy is heated at a temperature not lower than the Curie temperature and not higher than the crystal temperature and then cooled. The heat treatment is performed in an atmosphere in which the concentration is increased by a predetermined amount, and thereafter, the oxygen concentration of the atmosphere is 20% until the heat treatment is performed in an atmosphere of a desired oxygen concentration.
It is characterized in that an oxide film is formed on the surface of the amorphous magnetic alloy by repeating the above heat treatment by increasing the amount by the following predetermined amount.
【００１４】請求項１０の発明は、２０％以下の酸素を
含む雰囲気中において、非晶質磁性合金に磁界を作用さ
せると同時にキュリー温度以上、結晶温度以下の温度で
加熱した後に冷却する熱処理を行い、次に、酸素濃度を
所定量だけ増加させた雰囲気中で上記熱処理を行い、以
後、所望の酸素濃度の雰囲気中で上記熱処理を行なうま
で雰囲気の酸素濃度を２０％以下の所定量ずつ増加させ
ては上記熱処理を繰り返すことにより非晶質磁性合金の
表面に酸化膜を形成して成ることを特徴とする。According to a tenth aspect of the present invention, a heat treatment is performed in which, in an atmosphere containing 20% or less oxygen, a magnetic field is applied to the amorphous magnetic alloy and, at the same time, the amorphous magnetic alloy is heated at a temperature not lower than the Curie temperature and not higher than the crystal temperature and then cooled. Then, the heat treatment is performed in an atmosphere in which the oxygen concentration is increased by a predetermined amount, and thereafter, the oxygen concentration of the atmosphere is increased by a predetermined amount of 20% or less until the heat treatment is performed in an atmosphere having a desired oxygen concentration. Then, the heat treatment is repeated to form an oxide film on the surface of the amorphous magnetic alloy.
【００１５】請求項１１の発明は、請求項１０におい
て、酸素濃度が１００％になるまで熱処理を繰り返すこ
とを特徴とする。請求項１２の発明は、非晶質磁性合金
は薄帯板であって厚み方向に層をなすように重ねられた
後に、請求項７ないし請求項１１のいずれかに記載の方
法が適用されて成ることを特徴とする。The invention of claim 11 is characterized in that in claim 10, the heat treatment is repeated until the oxygen concentration reaches 100%. According to a twelfth aspect of the present invention, the amorphous magnetic alloy is a thin strip plate, and the method according to any one of the seventh to eleventh aspects is applied after the amorphous magnetic alloys are stacked so as to form a layer in the thickness direction. It is characterized by being formed.
【００１６】請求項１３の発明は、非晶質磁性合金の薄
板を厚み方向に重ね合わせて形成した磁性材料を収納す
る容器と、容器内の雰囲気の酸素濃度を調節する濃度調
節装置と、容器を加熱する加熱装置と、濃度調節装置お
よび加熱装置を請求項２ないし請求項７のいずれかに記
載の条件に制御する制御装置とを具備して成ることを特
徴とする。According to a thirteenth aspect of the present invention, a container for containing a magnetic material formed by stacking thin plates of amorphous magnetic alloy in the thickness direction, a concentration adjusting device for adjusting the oxygen concentration of the atmosphere in the container, and the container And a controller for controlling the concentration adjusting device and the heating device to the conditions described in any one of claims 2 to 7.
【００１７】請求項１４の発明は、非晶質磁性合金の薄
板を厚み方向に重ね合わせて形成したコアを収納する容
器と、容器内の雰囲気の酸素濃度を調節する濃度調節装
置と、容器を加熱する加熱装置と、コアに磁界を作用さ
せる磁界発生装置と、濃度調節装置および加熱装置を請
求項２ないし請求項７のいずれかに記載の条件に制御す
る制御装置とを具備して成ることを特徴とする。According to a fourteenth aspect of the present invention, there is provided a container for accommodating a core formed by stacking thin sheets of amorphous magnetic alloy in the thickness direction, a concentration adjusting device for adjusting the oxygen concentration of the atmosphere in the container, and the container. A heating device for heating, a magnetic field generating device for applying a magnetic field to the core, and a control device for controlling the concentration adjusting device and the heating device to the conditions according to any one of claims 2 to 7. Is characterized by.
【００１８】[0018]
【作用】請求項１、請求項２の発明は、非晶質磁性合金
による製品の製造過程のうち、内部歪の除去等の目的で
行なう熱処理や、誘導磁気異方性の制御の目的で行なう
磁界中での熱処理などの工程を、酸素を含む雰囲気中で
行なうことによって製造過程において必須である熱処理
の過程と同時に形成した酸化膜を備えるのであって、層
間の絶縁を酸化膜によって行なうことができ、占積率を
大きくとることができて高透磁率になる。The inventions of claims 1 and 2 are carried out for the purpose of controlling the induced magnetic anisotropy and heat treatment which is carried out for the purpose of removing internal strain in the manufacturing process of the product using the amorphous magnetic alloy. Since an oxide film formed at the same time as the heat treatment process which is indispensable in the manufacturing process by performing a heat treatment in a magnetic field in an atmosphere containing oxygen, it is possible to perform insulation between layers by the oxide film. It is possible to obtain a high space factor and a high magnetic permeability.
【００１９】請求項３ないし請求項６の発明は、非晶質
磁性合金の望ましい実施態様であって、４Ａ，５Ａ，６
Ａ族の少なくとも１つの元素を含んでいることによっ
て、透磁率の制御が容易になる。請求項７、請求項８の
発明では、非晶質磁性合金の内部歪の除去や誘導磁気異
方性の制御などの目的で行なわれる熱処理の過程で雰囲
気に酸素を導入しているので、従来より必須であった熱
処理の過程における雰囲気の制御のみで酸化膜を形成す
ることができ、設備投資によるコスト増がほとんどな
く、かつ電解法やプラズマ法に比較して酸化膜を容易に
生成することができるのである。The invention of claims 3 to 6 is a preferred embodiment of an amorphous magnetic alloy, which is 4A, 5A, 6
The inclusion of at least one Group A element facilitates control of magnetic permeability. In the inventions of claims 7 and 8, oxygen is introduced into the atmosphere during the heat treatment performed for the purpose of removing the internal strain of the amorphous magnetic alloy and controlling the induced magnetic anisotropy. The oxide film can be formed only by controlling the atmosphere in the process of heat treatment, which was more essential, there is almost no increase in cost due to capital investment, and the oxide film can be easily generated compared to the electrolytic method or the plasma method. Can be done.
【００２０】請求項９、請求項１０の発明によれば、雰
囲気中の酸素濃度を増加させては熱処理を行なうように
しているので、酸化膜の膜厚の制御が容易になり、しか
も層間に確実に酸化膜を形成することができるのであ
る。請求項１１は望ましい実施態様である。請求項１２
の発明は、トランスやチョークコイルのコアを形成する
際の望ましい実施態様であって、薄帯板である非晶質磁
性合金によって巻コアや積層コアを形成した後に、熱処
理によって内部歪の除去や誘導磁気異方性の制御を行な
う際に酸化膜を同時に形成するようにしているのであ
り、製品の形状とした後に各層間に酸化膜を形成するこ
とができることになる。According to the ninth and tenth aspects of the present invention, since the heat treatment is performed by increasing the oxygen concentration in the atmosphere, it becomes easy to control the film thickness of the oxide film, and moreover, between the layers. The oxide film can be reliably formed. Claim 11 is a preferred embodiment. Claim 12
The invention of 1 is a preferred embodiment in forming a core of a transformer or a choke coil, in which a wound core or a laminated core is formed of an amorphous magnetic alloy that is a thin strip plate, and then internal strain is removed or removed by heat treatment. Since the oxide film is formed at the same time when the induced magnetic anisotropy is controlled, the oxide film can be formed between the respective layers after the product is shaped.
【００２１】請求項１３、請求項１４の発明は、熱処理
に必要である容器、加熱装置、磁界発生装置のほかに、
雰囲気の酸素濃度を調節する濃度調節装置と濃度調節装
置および加熱装置を制御する制御装置とを付加している
だけであって、簡単な装置ながらも酸化膜を容易に形成
することができるのである。すなわち、従来の設備に対
して大きな設備投資を行なうことなく、有用な酸化膜を
形成することができるのである。In addition to the container, the heating device and the magnetic field generator required for the heat treatment,
The oxide film can be easily formed even with a simple device, only by adding a concentration control device for controlling the oxygen concentration of the atmosphere and a control device for controlling the concentration control device and the heating device. . That is, a useful oxide film can be formed without making a large capital investment in conventional equipment.
【００２２】[0022]
（実施例１）本実施例では、非晶質磁性合金として、磁
気歪がゼロでありかつ高磁気特性の材料として知られて
いるＣｏ70Ｆｅ5 Ｓｉ15Ｂ10という組成の材料の一部を
Ｃｒで置換して得た、（Ｃｏ0.933 Ｆｅ0.067 ）75-xＣ
ｒx Ｓｉ15Ｂ10という組成の材料を用いる。ただし、０
＜ｘ≦８〔原子％〕である。ここに、Ｃｒの含有量をｘ
≦８に設定しているのは、ｘ＞８になると非晶質とする
のが困難になり、またキュリー温度が低くなりすぎて工
業的価値がなくなるからである。Example 1 In this example, a part of a material having a composition of Co 70 Fe 5 Si 15 B 10 which is known as a material having zero magnetostriction and high magnetic characteristics is used as an amorphous magnetic alloy. (Co 0.933 Fe 0.067 ) 75-x C obtained by substituting with Cr
A material having a composition of r x Si 15 B 10 is used. However, 0
<X ≦ 8 [atomic%]. Where the Cr content is x
The reason why ≦ 8 is set is that when x> 8, it becomes difficult to make amorphous, and the Curie temperature becomes too low to lose industrial value.
【００２３】上述の材料によって薄帯板を形成し、さら
に薄帯板を巻回してトロイダル状の巻コアを形成する。
この巻コアについて以下の方法で表面処理を行なう。本
実施例は表面処理の方法および原理を示す趣旨であるか
ら、表面処理を行なう装置としては簡易なものを示す。
図１に示すように、巻コア１の雰囲気を制御し、かつ巻
コア１を加熱することができるように、巻コア１を容器
となる石英管１１に封入する。石英管１１には真空ポン
プ１２に連結された排気管１３と雰囲気となる気体を導
入する導入管１４とが濃度調節装置である４ポート弁１
５を介して接続されており、石英管１１の中の雰囲気の
排気および雰囲気の導入を４ポート弁１５によって制御
できるようにしてある。また、石英管１１は加熱手段と
しての電気炉１６の中に配置され、石英管１１の中の巻
コア１を加熱できるようにしてある。巻コア１には巻コ
ア１の加熱温度を検出できるように熱電対１７の温度検
出部を接触させてある。４ポート弁１５による石英管１
１の中の酸素濃度の調節や、電気路１６の温度の調節な
どは別途に設けた制御装置（図示せず）によって行なわ
れる。また、制御装置では、熱電対１７により検出した
温度に基づいて巻コア１が所望の温度に保たれるように
電気炉１６の加熱量を制御する。A thin strip plate is formed from the above materials, and the thin strip plate is wound to form a toroidal winding core.
This wound core is surface-treated by the following method. Since this embodiment is intended to show the method and principle of surface treatment, a simple apparatus for surface treatment will be shown.
As shown in FIG. 1, the winding core 1 is enclosed in a quartz tube 11 serving as a container so that the atmosphere of the winding core 1 can be controlled and the winding core 1 can be heated. In the quartz tube 11, an exhaust pipe 13 connected to a vacuum pump 12 and an introduction pipe 14 for introducing a gas as an atmosphere are four-port valve 1 which is a concentration adjusting device.
5, the exhaust of the atmosphere in the quartz tube 11 and the introduction of the atmosphere can be controlled by the 4-port valve 15. Further, the quartz tube 11 is arranged in an electric furnace 16 as a heating means so that the winding core 1 in the quartz tube 11 can be heated. The temperature detecting portion of the thermocouple 17 is brought into contact with the winding core 1 so that the heating temperature of the winding core 1 can be detected. Quartz tube with 4 port valve 15
The oxygen concentration in 1 and the temperature of the electric path 16 are adjusted by a controller (not shown) provided separately. Further, the control device controls the heating amount of the electric furnace 16 so that the winding core 1 is maintained at a desired temperature based on the temperature detected by the thermocouple 17.
【００２４】非晶質磁性合金に酸化膜を形成するにあた
っては、まず、石英管１１の内部の空気を真空ポンプ１
２によって排気し、石英管１１の内部をほぼ真空にす
る。その後、石英管１１の中に酸素を２０％以下（数％
が望ましい）含む雰囲気（たとえば、窒素中に酸素を混
合した気体）を導入した状態で、電気炉１６によって巻
コア１を１０℃／分の昇温速度で４００℃まで加熱し、
２０分間、４００℃に保った後に、石英管１１を水中で
急冷する。In forming the oxide film on the amorphous magnetic alloy, first, the air inside the quartz tube 11 is evacuated to the vacuum pump 1.
The interior of the quartz tube 11 is evacuated by 2 to make it substantially vacuum. After that, 20% or less of oxygen (a few%
Is desirable), the wound core 1 is heated to 400 ° C. at a temperature rising rate of 10 ° C./min by the electric furnace 16 in a state in which an atmosphere (for example, a gas in which oxygen is mixed with nitrogen) is introduced,
After keeping at 400 ° C. for 20 minutes, the quartz tube 11 is rapidly cooled in water.
【００２５】上述した熱処理は、雰囲気の酸素濃度の条
件を除けば、一般に巻コア１の内部歪の除去等の目的で
行なわれる熱処理である。すなわち、本実施例では、巻
コア１の製造過程で必須となる熱処理の工程において、
雰囲気を上記条件に設定することによって、巻コア１の
表面に望ましい厚みの酸化膜を形成する点に特徴を有し
ている。ここに、雰囲気の酸素濃度を２０％以下に設定
しているのは、酸素濃度が２０％以上である雰囲気（大
気、大気に酸素を混合した気体、酸素など）を用いる
と、熱処理の際に巻コア１を形成する非晶質磁性合金の
薄帯板の表面だけではなく薄帯板の内部までも酸化され
て磁気特性が劣化してしまうからである。また、昇温速
度、保持温度、保持時間などの条件に関しては、必ずし
も上記条件とする必要はなく、巻コア１を形成する非晶
質磁性合金が結晶化しない範囲で条件を設定すればよ
い。すなわち、保持温度としては結晶化温度以下に設定
することが必要になる。ただし、保持温度が巻コア１の
材料のキュリー温度よりも低いと内部歪を除去する効果
が得られないので、保持温度はキュリー温度以上に設定
することが必要である。The heat treatment described above is generally performed for the purpose of removing the internal strain of the wound core 1 and the like, except for the condition of the oxygen concentration of the atmosphere. That is, in the present embodiment, in the heat treatment step that is essential in the manufacturing process of the wound core 1,
It is characterized in that an oxide film having a desired thickness is formed on the surface of the wound core 1 by setting the atmosphere to the above conditions. Here, the oxygen concentration of the atmosphere is set to 20% or less because when an atmosphere having an oxygen concentration of 20% or more (air, gas in which oxygen is mixed with air, oxygen, etc.) is used, heat treatment is performed. This is because not only the surface of the thin strip of amorphous magnetic alloy forming the winding core 1 but also the inside of the thin strip is oxidized and the magnetic characteristics deteriorate. The conditions such as the temperature rising rate, the holding temperature, and the holding time do not necessarily have to be the above-mentioned conditions, and may be set within a range in which the amorphous magnetic alloy forming the winding core 1 is not crystallized. That is, it is necessary to set the holding temperature below the crystallization temperature. However, if the holding temperature is lower than the Curie temperature of the material of the wound core 1, the effect of removing the internal strain cannot be obtained, so the holding temperature must be set to the Curie temperature or higher.
【００２６】上述のような熱処理によって、非晶質磁性
合金の薄帯板の表面に数百〜１０００Åの酸化膜が形成
され、巻コア１の層間に酸化膜が形成されることになっ
て、層間を絶縁することができる。上述したように、非
晶質磁性合金の材料中にＣｒを含有させ、かつ熱処理の
過程で雰囲気の酸素濃度を上述した範囲で設定すれば、
巻コア１の製造過程として必須となっている内部歪の除
去等の目的で行なわれる熱処理の過程で、同時に酸化膜
を形成することができるのであって、別工程を要するこ
となく層間の絶縁を行なうことができるのである。その
結果、層間の絶縁性が保たれることによって抵抗値が大
きくなって渦電流を減少させることができ、透磁率が高
くかつ損失の少ない巻コア１を提供できることになる。
しかも、合成樹脂による絶縁層によって層間の絶縁を行
なう場合に比較すれば占積率を大きくすることができ、
しかも酸化膜を形成するにあたって電解法やプラズマ法
を用いる場合に比較すれば、元々行なっている熱処理の
過程での酸素濃度を制御するための簡単な装置の付加だ
けで目的を達成することができるのであり、酸化膜を形
成する表面処理を大きな設備投資を行なうことなく、容
易に実現することができるのである。By the heat treatment as described above, an oxide film of several hundred to 1000 Å is formed on the surface of the amorphous magnetic alloy thin strip plate, and an oxide film is formed between the layers of the winding core 1. The layers can be insulated. As described above, if Cr is contained in the material of the amorphous magnetic alloy and the oxygen concentration of the atmosphere is set within the above range during the heat treatment,
The oxide film can be formed at the same time in the process of heat treatment performed for the purpose of removing the internal strain, which is essential in the manufacturing process of the wound core 1, so that insulation between layers can be performed without requiring a separate process. It can be done. As a result, the insulation between layers is maintained, so that the resistance value increases and the eddy current can be reduced, and the wound core 1 having high magnetic permeability and low loss can be provided.
Moreover, the space factor can be increased as compared with the case where the insulating layers made of synthetic resin are used to insulate the layers,
Moreover, the object can be achieved only by adding a simple device for controlling the oxygen concentration in the course of the heat treatment which is originally performed, as compared with the case where the electrolytic method or the plasma method is used for forming the oxide film. Therefore, the surface treatment for forming the oxide film can be easily realized without a large capital investment.
【００２７】実際に工業的に生産する場合には、上述し
たような石英管１１や電気炉１６の実験室的な装置では
なく、巻コア１の生産に従来より用いられている装置を
転用すればよく、巻コア１を熱処理する際の雰囲気の酸
素濃度を制御できるように配管系を構成しておけばよ
い。 （実施例２）本実施例では、図２に示すように、石英管
１１の外部から巻コア１に対して磁界を作用させるため
の巻線１８を巻コア１に巻回してある。すなわち、巻コ
ア１はトロイダル状であって中央の孔を通すようにして
周部に巻線１８が巻回されており、この巻線１８に通電
すれば巻コア１の内部に周方向（すなわち、非晶質磁性
合金の薄帯の長手方向）に磁束が通過することになる。In the case of actual industrial production, the equipment conventionally used for producing the wound core 1 may be used instead of the laboratory equipment such as the quartz tube 11 and the electric furnace 16 as described above. It suffices if the piping system is configured so that the oxygen concentration in the atmosphere when the wound core 1 is heat-treated can be controlled. (Embodiment 2) In this embodiment, as shown in FIG. 2, a winding 18 for applying a magnetic field to the winding core 1 from the outside of the quartz tube 11 is wound around the winding core 1. That is, the winding core 1 has a toroidal shape, and the winding 18 is wound around the peripheral portion of the winding core 1 so as to pass through the center hole. , The magnetic flux will pass in the longitudinal direction of the ribbon of the amorphous magnetic alloy.
【００２８】そこで、巻線１８には直流電源Ｅを接続し
て定磁束を巻コア１に作用させた状態で電気炉１６での
熱処理を行なう。熱処理における雰囲気の酸素濃度、昇
温速度、保持時間、保持温度の条件は実施例１と同様で
あって、酸素濃度２０％以下の雰囲気で１０℃／分の昇
温速度で４００℃まで加熱し、２０分間、４００℃に保
つ。また、加熱後には急冷ではなく降温速度を５℃／分
以下に設定して徐冷する。Therefore, a heat treatment is carried out in the electric furnace 16 while a DC power source E is connected to the winding 18 and a constant magnetic flux is applied to the winding core 1. The conditions of the oxygen concentration of the atmosphere in the heat treatment, the temperature rising rate, the holding time, and the holding temperature were the same as those in Example 1, and the temperature was raised to 400 ° C. at a temperature rising rate of 10 ° C./min in an atmosphere having an oxygen concentration of 20% or less. Keep at 400 ° C for 20 minutes. Further, after heating, the temperature is not rapidly cooled but is gradually cooled by setting the temperature lowering rate to 5 ° C./minute or less.
【００２９】上述のような磁界を作用させながら行なう
熱処理は、雰囲気の酸素濃度を除くと誘導磁気異方性の
制御の目的で行なう磁界中での熱処理と同様であって、
巻コア１を製造する上での磁界を作用させながらの熱処
理という必須の工程において雰囲気の酸素濃度を調節す
るだけで、巻コア１の表面に酸化膜を形成することがで
きるのである。他の方法については実施例１と同様であ
る。The heat treatment performed under the action of a magnetic field as described above is the same as the heat treatment in the magnetic field for the purpose of controlling the induced magnetic anisotropy except for the oxygen concentration in the atmosphere.
An oxide film can be formed on the surface of the winding core 1 only by adjusting the oxygen concentration of the atmosphere in an essential step of heat treatment while applying a magnetic field in manufacturing the winding core 1. Other methods are the same as those in the first embodiment.
【００３０】（実施例３）実施例２では巻コア１に対し
て周方向に磁界を作用させるために、巻コア１に巻回し
た巻線１８に通電するようにしていた、本実施例は、図
３に示すように、熱処理の際に石英管１１の外部に設け
た電磁石１９によって、巻コア１に対して中心線方向
（すなわち、非晶質磁性合金の薄帯の幅方向）に磁界を
作用させるようにしてある。他の方法については、実施
例２と同様である。(Third Embodiment) In the second embodiment, in order to apply a magnetic field to the winding core 1 in the circumferential direction, the winding 18 wound around the winding core 1 is energized. As shown in FIG. 3, a magnetic field is applied to the winding core 1 in the centerline direction (that is, the width direction of the amorphous magnetic alloy ribbon) by the electromagnet 19 provided outside the quartz tube 11 during the heat treatment. Is made to act. Other methods are the same as those in the second embodiment.
【００３１】（実施例４）実施例１ないし実施例３の熱
処理のみでも巻コア１の表面に酸化膜を形成することは
可能であるが、酸化膜の膜厚の厚みを増す必要があると
きには、上記熱処理と同様の熱処理を複数回繰り返すの
が望ましい。たとえば、熱処理として実施例１の処理を
採用するとすれば、上述した条件での熱処理の後に、石
英管１１の中の酸素濃度が１０％になるように酸素ガス
を導入管１４を通して導入し、上述した温度条件で熱処
理を再度行なう。さらに、石英管１１の中の酸素濃度を
１０％だけ増加させて酸素濃度を２０％とし、同じ温度
条件で熱処理を行なう。以後、同様にして石英管１１の
中の酸素濃度を１０％ずつ増しながら、同じ温度条件で
の熱処理を行い、最終的に酸素濃度を１００％にして熱
処理を行なう。このような熱処理を行なえば、巻コア１
の表面に数百〜２０００Å程度の酸化膜を形成すること
ができる。ここにおいて、熱処理を繰り返す際には、１
回の熱処理について酸素濃度を２０％以上増加させると
望ましい酸化膜を形成することができないから、２０％
以下に設定することが必要である。また、最終的に酸素
濃度を１００％に設定するのは必須ではなく、所望の特
性が得られるように最終的な酸素濃度を設定すればよ
い。(Embodiment 4) Although it is possible to form an oxide film on the surface of the wound core 1 only by the heat treatment of Embodiments 1 to 3, when it is necessary to increase the thickness of the oxide film. It is desirable to repeat the same heat treatment as the above heat treatment a plurality of times. For example, if the treatment of Example 1 is adopted as the heat treatment, after the heat treatment under the above-mentioned conditions, oxygen gas is introduced through the introduction pipe 14 so that the oxygen concentration in the quartz pipe 11 becomes 10%, and The heat treatment is performed again under the above temperature conditions. Further, the oxygen concentration in the quartz tube 11 is increased by 10% so that the oxygen concentration is 20%, and the heat treatment is performed under the same temperature condition. Thereafter, heat treatment is performed under the same temperature conditions while increasing the oxygen concentration in the quartz tube 11 by 10% in the same manner, and finally the heat treatment is performed with the oxygen concentration set to 100%. If such heat treatment is performed, the wound core 1
An oxide film of about several hundred to 2000 liters can be formed on the surface of the. Here, when repeating the heat treatment, 1
Since the desired oxide film cannot be formed if the oxygen concentration is increased by 20% or more in each heat treatment, 20%
It is necessary to set the following. Further, it is not essential to finally set the oxygen concentration to 100%, and the final oxygen concentration may be set so that desired characteristics can be obtained.
【００３２】上述のように形成した巻コア１について１
０ＭＨｚでの透磁率を測定したところ、図４に示すよう
な結果が得られた。図４においてａは熱処理を１回だけ
行なった場合であって酸素濃度が数％である場合、ｂは
複数回の熱処理を行い最後の酸素濃度を５０％とした場
合、ｃは複数回の熱処理を行い最終的に酸素濃度が１０
０％であった場合について示してある。また、図４の縦
軸は層間にシリコン樹脂などの合成樹脂による絶縁層を
形成した従来の巻コアの透磁率μｐから酸化膜を層間に
形成した巻コア１の透磁率μｃを減算した値（μｐ−μ
ｃ）と、従来の巻コアの透磁率μｐとの比（μｐ−μ
ｃ）／μｐであって、この値が負になれば酸化膜を有す
る巻コア１のほうが透磁率が大きいことになる。また、
図４の横軸は材料中のＣｒの含有量を原子濃度（単位は
原子％）で示してある。ここで、巻コアを形成するのに
用いた非晶質磁性合金の薄帯の厚みは５μｍであって、
従来の巻コアとは、酸化膜を形成した巻コア１と同材料
の薄帯板の表面に合成樹脂を塗布した後に巻回し、窒素
雰囲気において上記温度条件での熱処理を行なったもの
を意味している。この場合、材料の磁気歪は非常に小さ
いから合成樹脂の絶縁層による応力は磁気特性にほとん
ど影響を与えないと考える。Regarding the wound core 1 formed as described above, 1
When the magnetic permeability at 0 MHz was measured, the results shown in FIG. 4 were obtained. In FIG. 4, a is a case where the heat treatment is performed only once and the oxygen concentration is several%, b is a heat treatment performed a plurality of times and the final oxygen concentration is 50%, and c is a heat treatment performed a plurality of times. And finally the oxygen concentration is 10
It is shown for the case of 0%. The vertical axis of FIG. 4 is a value obtained by subtracting the magnetic permeability μc of the wound core 1 having an oxide film formed between the layers from the magnetic permeability μp of the conventional wound core having an insulating layer made of a synthetic resin such as silicon resin between layers ( μp-μ
c) and the magnetic permeability μp of the conventional wound core (μp-μ
c) / μp, and if this value becomes negative, it means that the wound core 1 having an oxide film has a higher magnetic permeability. Also,
The horizontal axis of FIG. 4 shows the Cr content in the material by atomic concentration (unit: atomic%). Here, the thickness of the ribbon of the amorphous magnetic alloy used to form the wound core is 5 μm,
The conventional wound core means a material obtained by applying a synthetic resin to the surface of a thin strip plate made of the same material as that of the wound core 1 having an oxide film, and then winding the synthetic resin and performing heat treatment under the above temperature conditions in a nitrogen atmosphere. ing. In this case, since the magnetostriction of the material is very small, it is considered that the stress due to the insulating layer of synthetic resin has almost no influence on the magnetic characteristics.
【００３３】図４により明らかなように、Ｃｒを含んで
いない場合でも雰囲気の最終的な酸素濃度が高くなるほ
ど透磁率が高くなり、またＣｒの含有量が多いほど透磁
率が高くなることがわかる。とくに、Ｃｒの含有率があ
る程度以上（たとえば、雰囲気の酸素濃度が１００％で
はＣｒの含有量が２．５％以上）になると、合成樹脂の
絶縁層を設けた従来の巻コアよりも透磁率が高くなる。As is apparent from FIG. 4, even when Cr is not contained, the higher the final oxygen concentration in the atmosphere, the higher the magnetic permeability, and the higher the content of Cr, the higher the magnetic permeability. . In particular, when the Cr content exceeds a certain level (for example, when the oxygen concentration in the atmosphere is 100%, the Cr content is 2.5% or more), the magnetic permeability is higher than that of the conventional wound core provided with the insulating layer of synthetic resin. Becomes higher.
【００３４】４ＭＨｚでの透磁率は、図５に示すように
なる。図５における縦軸および横軸の意味、ａ〜ｃの符
号を付した各曲線の酸素濃度については図４と同じであ
る。図５を見れば明らかなように、傾向としては図４に
示した１０ＭＨｚの場合と同様であって、雰囲気の最終
的な酸素濃度が高くなるほど、またＣｒの含有量が多く
なるほど透磁率が高くなる。The magnetic permeability at 4 MHz is as shown in FIG. The meanings of the ordinate and the abscissa in FIG. 5 and the oxygen concentration of each curve labeled with a to c are the same as in FIG. As is clear from FIG. 5, the tendency is similar to the case of 10 MHz shown in FIG. 4, and the higher the final oxygen concentration in the atmosphere and the higher the Cr content, the higher the magnetic permeability. Become.
【００３５】このように、図４、図５によれば、熱処理
を施す際に形成された酸化膜を有する巻コア１は、合成
樹脂による絶縁層を形成した従来の巻コアと同程度に層
間の絶縁を保つ機能があるから、巻コア１の状態で形成
した酸化膜であるにもかかわらず酸化膜が層間の絶縁に
寄与することがわかる。しかも、材料中のＣｒの含有量
によっては合成樹脂の絶縁層を形成する場合よりも層間
絶縁の効果が高くなるのである。As described above, according to FIGS. 4 and 5, the wound core 1 having the oxide film formed when the heat treatment is applied has the same level of interlayer insulation as the conventional wound core formed with the insulating layer made of synthetic resin. It is understood that the oxide film contributes to the insulation between the layers even though it is the oxide film formed in the state of the wound core 1, because it has the function of maintaining the insulation of the. Moreover, depending on the content of Cr in the material, the effect of interlayer insulation is higher than that in the case of forming an insulating layer of synthetic resin.
【００３６】上記各実施例では、非晶質磁性合金として
Ｃｒを含有したものを用いているが、Ｃｒ、Ｎｂ、Ｔｉ
などの４Ａ，５Ａ，６Ａ族の元素であるうちの少なくと
も１種を含んでいればよく、これらの元素を含まないも
のでも酸化膜を形成することは可能である。また、上述
した組成の非晶質磁性合金以外であっても、同様の熱処
理を行なうことによって酸化膜を形成することができ
る。さらに、製品形状が巻コア１である場合について示
しているが、積層コアなどでもよい。In each of the above examples, the amorphous magnetic alloy containing Cr is used, but Cr, Nb, Ti are used.
It is only necessary to contain at least one of the elements of the 4A, 5A, and 6A groups such as the above, and it is possible to form an oxide film even if it does not contain these elements. Further, even if it is other than the amorphous magnetic alloy having the composition described above, the oxide film can be formed by performing the same heat treatment. Furthermore, although the case where the product shape is the wound core 1 is shown, a laminated core or the like may be used.
【００３７】[0037]
【発明の効果】請求項１、請求項２の発明は、非晶質磁
性合金による製品の製造過程のうち、内部歪の除去等の
目的で行なう熱処理や、誘導磁気異方性の制御の目的で
行なう磁界中での熱処理などの工程を、酸素を含む雰囲
気中で行なうことによって製造過程において必須である
熱処理の過程と同時に形成した酸化膜を備えるので、層
間の絶縁を酸化膜によって行なうことができ、占積率を
大きくとることができて高透磁率になるという利点があ
る。The inventions of claims 1 and 2 are for the purpose of heat treatment for the purpose of removing internal strain and the control of induced magnetic anisotropy in the process of manufacturing a product using an amorphous magnetic alloy. Since the oxide film formed at the same time as the heat treatment process which is indispensable in the manufacturing process by performing the process such as the heat treatment in the magnetic field in the step of performing the heat treatment in the atmosphere containing oxygen, it is possible to perform insulation between the layers by the oxide film. This has the advantage that the space factor can be increased and the magnetic permeability can be increased.
【００３８】請求項３ないし請求項６の発明は、非晶質
磁性合金が４Ａ，５Ａ，６Ａ族の少なくとも１つの元素
を含んでいるので、透磁率の制御が容易になるという利
点がある。請求項７、請求項８の発明は、非晶質磁性合
金の内部歪の除去や誘導磁気異方性の制御などの目的で
行なわれる熱処理の過程で雰囲気に酸素を導入している
ので、従来より必須であった熱処理の過程における雰囲
気の制御のみで酸化膜を形成することができ、設備投資
によるコスト増がほとんどなく、かつ電解法やプラズマ
法に比較して酸化膜を容易に生成することができるとい
う効果を奏する。Since the amorphous magnetic alloy contains at least one element of the 4A, 5A and 6A groups, the inventions of claims 3 to 6 have an advantage that the magnetic permeability can be easily controlled. In the inventions of claims 7 and 8, oxygen is introduced into the atmosphere during the heat treatment performed for the purpose of removing internal strain of the amorphous magnetic alloy and controlling induced magnetic anisotropy. The oxide film can be formed only by controlling the atmosphere in the process of heat treatment, which was more essential, there is almost no increase in cost due to capital investment, and the oxide film can be easily generated compared to the electrolytic method or the plasma method. There is an effect that can be.
【００３９】請求項９、請求項１０の発明は、雰囲気中
の酸素濃度を増加させては熱処理を行なうようにしてい
るので、酸化膜の膜厚の制御が容易になり、しかも層間
に確実に酸化膜を形成することができるという利点があ
る。請求項１２の発明は、トランスやチョークコイルの
コアを形成する際の望ましい実施態様であって、薄帯板
である非晶質磁性合金によって巻コアや積層コアを形成
した後に、熱処理によって内部歪の除去や誘導磁気異方
性の制御を行なう際に酸化膜を同時に形成するようにし
ているので、製品の形状とした後に各層間に酸化膜を形
成することができるものである。According to the ninth and tenth aspects of the present invention, since the heat treatment is performed by increasing the oxygen concentration in the atmosphere, it becomes easy to control the film thickness of the oxide film, and moreover, it is possible to surely secure the interlayer. There is an advantage that an oxide film can be formed. A twelfth aspect of the present invention is a preferred embodiment for forming a core of a transformer or a choke coil, in which a wound core or a laminated core is formed of an amorphous magnetic alloy which is a thin strip plate, and then internal strain is applied by heat treatment. Since the oxide film is formed at the same time when the above is removed and the induced magnetic anisotropy is controlled, the oxide film can be formed between the respective layers after the product is shaped.
【００４０】請求項１３、請求項１４の発明は、熱処理
に必要である容器、加熱装置、磁界発生装置のほかに、
雰囲気の酸素濃度を調節する濃度調節装置と濃度調節装
置および加熱装置を制御する制御装置とを付加している
だけでるから、簡単な装置ながらも酸化膜を容易に形成
することができるという利点がある。すなわち、従来の
設備に対して大きな設備投資を行なうことなく、有用な
酸化膜を形成することができるという利点を有する。In addition to the container, the heating device and the magnetic field generator required for the heat treatment,
Since only a concentration control device for controlling the oxygen concentration of the atmosphere and a control device for controlling the concentration control device and the heating device are added, there is an advantage that an oxide film can be easily formed with a simple device. is there. That is, there is an advantage that a useful oxide film can be formed without making a large capital investment for conventional equipment.
【図１】実施例１の製造装置を示す概略構成図である。FIG. 1 is a schematic configuration diagram illustrating a manufacturing apparatus according to a first embodiment.
【図２】実施例２の製造装置を示す概略構成図である。FIG. 2 is a schematic configuration diagram showing a manufacturing apparatus of a second embodiment.
【図３】実施例３の製造装置を示す概略構成図である。FIG. 3 is a schematic configuration diagram showing a manufacturing apparatus of a third embodiment.
【図４】実施例の特性を示す図である。FIG. 4 is a diagram showing characteristics of an example.
【図５】実施例の特性を示す図である。FIG. 5 is a diagram showing characteristics of the example.
１ コア １１ 石英管 １２ 真空ポンプ １３ 排気管 １４ 導入管 １５ ４ポート弁 １６ 電気炉 １７ 熱電対 １８ 巻線 １９ 電磁石 Ｅ 直流電源 1 core 11 quartz tube 12 vacuum pump 13 exhaust tube 14 introduction tube 15 4 port valve 16 electric furnace 17 thermocouple 18 winding 19 electromagnet E DC power supply
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.5 識別記号 庁内整理番号 ＦＩ 技術表示箇所 Ｃ２２Ｃ 45/02 Ａ Ｈ０１Ｆ 1/153 1/18 27/25 ─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 5 Identification code Internal reference number FI Technical indication C22C 45/02 A H01F 1/153 1/18 27/25
Claims (14)
囲気に酸素を導入することによって形成した酸化膜を表
面に備えることを特徴とする非晶質磁性合金を用いた磁
性材料。1. A magnetic material using an amorphous magnetic alloy, comprising an oxide film formed on the surface thereof by introducing oxygen into an atmosphere during the heat treatment of the amorphous magnetic alloy.
合した形状に形成され、熱処理過程における雰囲気に酸
素を導入することによって形成した酸化膜を各層間に備
えることを特徴とする非晶質磁性合金を用いた磁性材
料。2. An oxide film formed by superimposing an amorphous magnetic alloy of a thin strip in a thickness direction and having an oxide film formed by introducing oxygen into an atmosphere during a heat treatment process is provided between the respective layers. A magnetic material using an amorphous magnetic alloy.
Ａ，５Ａ，６Ａ族の少なくとも１つの元素を含むことを
特徴とする請求項１または請求項２記載の非晶質磁性合
金を用いた磁性材料。3. The amorphous magnetic alloy is composed of 4 of transition metals.
The magnetic material using the amorphous magnetic alloy according to claim 1 or 2, which contains at least one element of the A, 5A, and 6A groups.
うちの少なくとも１つの元素を含むことを特徴とする請
求項３記載の磁性材料の製造方法。4. The method for producing a magnetic material according to claim 3, wherein the amorphous magnetic alloy contains at least one element of Cr, Nb, and Ti.
うちの少なくとも１つの元素を８原子％以下含むことを
特徴とする請求項３記載の非晶質磁性合金を用いた磁性
材料。5. The magnetic material using the amorphous magnetic alloy according to claim 3, wherein the amorphous magnetic alloy contains 8 atomic% or less of at least one element of Cr, Nb and Ti. .
ｉd Ｂe の組成〔ただし、ａ＝１−（ｂ＋ｃ＋ｄ＋
ｅ）、０≦ｂ≦０．６４、０．０１≦ｃ≦０．０８、
０．０６≦ｄ≦０．１８、０．２≦ｄ＋ｅ≦０．２６〕
であって、ＭはＣｒ、Ｎｂ、Ｔｉのうちの少なくとも１
つの元素であることを特徴とする請求項５記載の非晶質
磁性合金を用いた磁性材料。6. The amorphous magnetic alloy is Co a Fe b M c S
i d composition of B e [However, a = 1- (b + c + d +
e), 0 ≦ b ≦ 0.64, 0.01 ≦ c ≦ 0.08,
0.06 ≦ d ≦ 0.18, 0.2 ≦ d + e ≦ 0.26]
And M is at least one of Cr, Nb, and Ti.
The magnetic material using the amorphous magnetic alloy according to claim 5, wherein the magnetic material is one element.
質磁性合金をキュリー温度以上、結晶温度以下の温度で
加熱することにより非晶質磁性合金の表面に酸化膜を形
成して成ることを特徴とする磁性材料の製造方法。7. An oxide film is formed on the surface of an amorphous magnetic alloy by heating the amorphous magnetic alloy at a temperature not lower than the Curie temperature and not higher than the crystal temperature in an atmosphere containing 20% or less oxygen. A method of manufacturing a magnetic material, comprising:
時に、２０％以下の酸素を含む雰囲気中で非晶質磁性合
金をキュリー温度以上、結晶温度以下の温度で加熱する
ことにより非晶質磁性合金の表面に酸化膜を形成して成
ることを特徴とする磁性材料の製造方法。8. An amorphous magnetic alloy is subjected to a magnetic field, and at the same time, the amorphous magnetic alloy is heated at a temperature not lower than the Curie temperature and not higher than the crystallization temperature in an atmosphere containing 20% or less of oxygen to make it amorphous. A method for producing a magnetic material, comprising forming an oxide film on the surface of a high-quality magnetic alloy.
て、非晶質磁性合金をキュリー温度以上、結晶温度以下
の温度で加熱した後に冷却する熱処理を行い、次に、酸
素濃度を所定量だけ増加させた雰囲気中で上記熱処理を
行い、以後、所望の酸素濃度の雰囲気中で上記熱処理を
行なうまで雰囲気の酸素濃度を２０％以下の所定量ずつ
増加させては上記熱処理を繰り返すことにより非晶質磁
性合金の表面に酸化膜を形成して成ることを特徴とする
磁性材料の製造方法。9. A heat treatment in which an amorphous magnetic alloy is heated at a temperature not lower than the Curie temperature and not higher than the crystal temperature and then cooled in an atmosphere containing 20% or less oxygen, and then the oxygen concentration is adjusted to a predetermined amount. The heat treatment is performed in the increased atmosphere, and thereafter, the oxygen concentration of the atmosphere is increased by a predetermined amount of 20% or less until the heat treatment is performed in an atmosphere having a desired oxygen concentration, and the heat treatment is repeated. A method for producing a magnetic material, comprising forming an oxide film on the surface of a high-quality magnetic alloy.
いて、非晶質磁性合金に磁界を作用させると同時にキュ
リー温度以上、結晶温度以下の温度で加熱した後に冷却
する熱処理を行い、次に、酸素濃度を所定量だけ増加さ
せた雰囲気中で上記熱処理を行い、以後、所望の酸素濃
度の雰囲気中で上記熱処理を行なうまで雰囲気の酸素濃
度を２０％以下の所定量ずつ増加させては上記熱処理を
繰り返すことにより非晶質磁性合金の表面に酸化膜を形
成して成ることを特徴とする磁性材料の製造方法。10. A heat treatment in which a magnetic field is applied to the amorphous magnetic alloy in an atmosphere containing 20% or less of oxygen, and at the same time, the amorphous magnetic alloy is heated to a temperature not lower than the Curie temperature and not higher than the crystal temperature and then cooled, and then: The heat treatment is performed in an atmosphere in which the oxygen concentration is increased by a predetermined amount, and thereafter, the oxygen concentration in the atmosphere is increased by a predetermined amount of 20% or less until the heat treatment is performed in an atmosphere having a desired oxygen concentration. A method for producing a magnetic material, characterized in that an oxide film is formed on the surface of an amorphous magnetic alloy by repeating the above.
を繰り返すことを特徴とする請求項１０記載の磁性材料
の製造方法。11. The method for producing a magnetic material according to claim 10, wherein the heat treatment is repeated until the oxygen concentration reaches 100%.
方向に層をなすように重ねられた後に、請求項７ないし
請求項１１のいずれかに記載の方法が適用されて成るこ
とを特徴とする磁性材料の製造方法。12. The amorphous magnetic alloy is a thin strip plate, which is formed by stacking the amorphous magnetic alloys so as to form a layer in the thickness direction, and then applying the method according to any one of claims 7 to 11. And a method for producing a magnetic material.
ね合わせて形成した磁性材料を収納する容器と、容器内
の雰囲気の酸素濃度を調節する濃度調節装置と、容器を
加熱する加熱装置と、濃度調節装置および加熱装置を請
求項２ないし請求項７のいずれかに記載の条件に制御す
る制御装置とを具備して成ることを特徴とする磁性材料
の製造装置。13. A container for accommodating a magnetic material formed by stacking thin plates of amorphous magnetic alloy in the thickness direction, a concentration adjusting device for adjusting the oxygen concentration of the atmosphere in the container, and a heating device for heating the container. And a controller for controlling the concentration adjusting device and the heating device to the conditions according to any one of claims 2 to 7.
ね合わせて形成したコアを収納する容器と、容器内の雰
囲気の酸素濃度を調節する濃度調節装置と、容器を加熱
する加熱装置と、コアに磁界を作用させる磁界発生装置
と、濃度調節装置および加熱装置を請求項２ないし請求
項７のいずれかに記載の条件に制御する制御装置とを具
備して成ることを特徴とする磁性材料の製造装置。14. A container for accommodating a core formed by stacking amorphous magnetic alloy thin plates in the thickness direction, a concentration adjusting device for adjusting the oxygen concentration of the atmosphere in the container, and a heating device for heating the container. A magnetic field generating device that applies a magnetic field to the core; and a controller that controls the concentration adjusting device and the heating device to the conditions according to any one of claims 2 to 7. Material manufacturing equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14314093A JP3210776B2 (en) | 1993-06-15 | 1993-06-15 | Magnetic material using amorphous magnetic alloy, method for producing magnetic material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14314093A JP3210776B2 (en) | 1993-06-15 | 1993-06-15 | Magnetic material using amorphous magnetic alloy, method for producing magnetic material |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH06346219A true JPH06346219A (en) | 1994-12-20 |
| JP3210776B2 JP3210776B2 (en) | 2001-09-17 |
Family
ID=15331866
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14314093A Expired - Fee Related JP3210776B2 (en) | 1993-06-15 | 1993-06-15 | Magnetic material using amorphous magnetic alloy, method for producing magnetic material |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3210776B2 (en) |
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| CN106716569A (en) * | 2014-09-26 | 2017-05-24 | 日立金属株式会社 | Amorphous alloy core and method for manufacturing same |
| JPWO2016047717A1 (en) * | 2014-09-26 | 2017-06-22 | 日立金属株式会社 | Method for producing amorphous alloy magnetic core |
| JPWO2016047718A1 (en) * | 2014-09-26 | 2017-07-06 | 日立金属株式会社 | Amorphous alloy magnetic core and manufacturing method thereof |
| US10269476B2 (en) | 2014-09-26 | 2019-04-23 | Hitachi Metals, Ltd. | Method of manufacturing an amorphous alloy magnetic core |
| US10283265B2 (en) | 2014-09-26 | 2019-05-07 | Hitachi Metals, Ltd. | Method of manufacturing amorphous alloy magnetic core |
| CN106716569B (en) * | 2014-09-26 | 2019-08-13 | 日立金属株式会社 | Amorphous alloy magnetic core and its manufacturing method |
| US11244782B2 (en) | 2014-09-26 | 2022-02-08 | Hitachi Metals, Ltd. | Amorphous alloy magnetic core |
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