JPH06344501A - Production of laminated sheet - Google Patents

Production of laminated sheet

Info

Publication number
JPH06344501A
JPH06344501A JP16025493A JP16025493A JPH06344501A JP H06344501 A JPH06344501 A JP H06344501A JP 16025493 A JP16025493 A JP 16025493A JP 16025493 A JP16025493 A JP 16025493A JP H06344501 A JPH06344501 A JP H06344501A
Authority
JP
Japan
Prior art keywords
layer
ptfe
prepreg
pfa
impregnated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16025493A
Other languages
Japanese (ja)
Other versions
JPH0790626B2 (en
Inventor
Kazuo Nakajima
一雄 中嶋
Wakao Taguchi
若男 田口
Hitoshi Kanzaki
仁 神崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Pillar Packing Co Ltd
Original Assignee
Nippon Pillar Packing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Pillar Packing Co Ltd filed Critical Nippon Pillar Packing Co Ltd
Priority to JP16025493A priority Critical patent/JPH0790626B2/en
Publication of JPH06344501A publication Critical patent/JPH06344501A/en
Publication of JPH0790626B2 publication Critical patent/JPH0790626B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

PURPOSE:To produce a laminated sheet of a low dielectric constant enhanced in thickness accuracy, reduced in thickness irregularity, reduced in the coefficient of linear expansion in its thickness direction, enhanced in the bonding strength of a metal foil and a prepreg, solder heat resistance and thermal impact resistance and prevented from the penetration of a chemical soln. CONSTITUTION:A base material 1 is impregnated with a PTFE dispersion and, after the impregnated base material is dried, it is baked at a temp. higher than the m.p. of PTFE to form a first layer 2 holding a necessary amt. of PTFE and the surface of the first layer is further impregnated with the PTFE dispersion and the impregnated layer is dried at a temp. lower than the m.p. of PTFE to form a second layer 3 holding a necessary amt. of PTFE. The surface of the second layer 3 is impregnated with the PFA dispersion and, after the impregnated layer is dried, it is baked at a temp. higher than the melting points of PFA and PTFE to form a third layer 4 holding a necessary amt. of PFA to obtain a prepreg 5. A metal foil 6 is arranged on at least the single surface of the prepreg 5 and the whole is pressed at a temp. higher than the melting points of PFA and PTFE under a high pressure.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は、例えば、高周波プリ
ント配線基板として用いられる低誘電率積層板のような
積層板の製造方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a laminate such as a low dielectric constant laminate used as a high frequency printed wiring board.

【0002】[0002]

【従来の技術】従来、積層板の製造方法としては次に述
べるような各種の製造方法がある。
2. Description of the Related Art Conventionally, as a method for manufacturing a laminated plate, there are various manufacturing methods as described below.

【0003】第一の製造方法は、基材にPTFE樹脂
(ポリ・テトラ・フルオロ・エチレン、4フッ化樹脂)
を含浸し、これを乾燥および焼成してプリプレグ(pre-
preg)を形成し、複数層のプリプレグ間にPFA樹脂
(テトラフルオロエチレン・パーフルオロアルキルビニ
ルエーテル共重合樹脂)フィルムまたはFEP樹脂(テ
トラフルオロエチレン・ヘキサフルオロプロピレン共重
合樹脂)フィルムを介設し、最外層に配置する金属箔と
プリプレグとの間にも上記フィルムを介設して、積層成
形することにより積層板を製造する方法である。
The first manufacturing method is to use a PTFE resin (polytetrafluoroethylene, tetrafluoride resin) as a base material.
Impregnated with prepreg (pre-
preg) is formed, and a PFA resin (tetrafluoroethylene / perfluoroalkyl vinyl ether copolymer resin) film or FEP resin (tetrafluoroethylene / hexafluoropropylene copolymer resin) film is interposed between multiple layers of prepreg, and In this method, the above film is also interposed between the metal foil and the prepreg arranged in the outer layer, and the laminate is manufactured by laminating and molding.

【0004】この第一の製造方法によれば、上記フィル
ムを介設することで、金属箔とプリプレグとの接着強さ
が保持され、またプリプレグ層間の接着力が保持され、
さらに積層板中の樹脂含有比率が調節できる利点がある
反面、一般に上述のフィルムはスクリュ押出機で樹脂を
溶融混練し、T型ダイスを通して射出成形されるため、
このフィルムの製造工程中に相当量の金属小片や金属粉
がフィルム中に混入し、金属小片および金属粉は導電性
を有するため、プリント配線基板においては回路の短
絡、断線などの要因となり、実質的に使用困難な問題点
があった。
According to this first manufacturing method, by interposing the film, the adhesive strength between the metal foil and the prepreg is maintained, and the adhesive force between the prepreg layers is maintained,
On the other hand, there is an advantage that the resin content ratio in the laminated plate can be adjusted. On the other hand, the above-mentioned film is generally melt-kneaded with a screw extruder and injection-molded through a T-type die.
During the manufacturing process of this film, a considerable amount of metal particles and metal powder are mixed in the film, and since the metal particles and metal powder have conductivity, they cause a short circuit of the printed circuit board, a disconnection, etc. There was a problem that it was difficult to use.

【0005】第二の製造方法は、基材に第1のフッ素樹
脂(例えばPTFE)を含浸し、これを乾燥および焼成
した後に、第2のフッ素樹脂としてPFAまたはFEP
を含浸し、これを乾燥および焼成して形成したプリプレ
グの最外層に金属箔を配置した後、積層成形することに
より積層板を製造する方法である。
In the second manufacturing method, a base material is impregnated with a first fluororesin (eg, PTFE), dried and fired, and then PFA or FEP is used as a second fluororesin.
Is placed on the outermost layer of the prepreg formed by impregnating and drying and firing the metal foil, and then laminating is performed to produce a laminated plate.

【0006】この第二の製造方法によれば、基材に含浸
した第1のフッ素樹脂は乾燥後、該樹脂の融点以上で焼
成され、このようにフッ素樹脂が融点以上で焼成される
と、その表面エネルギが低く、濡れ性が極度に悪化する
ため、該フッ素樹脂の上に他のPFAまたはFEPを保
持させようとしても、乾燥、焼成工程中に脱落が生じ
て、均一な高精度の膜の形成が困難で、プリプレグと金
属箔との接着力、プリプレグ相互の接着力、樹脂含有量
に部分的な差異が発生し、特性値がばらつく関係上、安
定した性能の積層板が得られない問題点があった。
According to this second manufacturing method, the first fluororesin impregnated into the base material is dried and then fired at a temperature equal to or higher than the melting point of the resin. Since the surface energy is low and the wettability is extremely deteriorated, even if an attempt is made to hold another PFA or FEP on the fluororesin, the film is dropped during the drying and firing steps, and a uniform and highly accurate film is obtained. Is difficult to form, and the adhesive strength between the prepreg and the metal foil, the mutual adhesive strength between the prepregs, and the resin content are partially different, and the characteristic values vary, so a laminated board with stable performance cannot be obtained. There was a problem.

【0007】第三の製造方法は、布状基材の表面にフッ
素樹脂層を形成し、このフッ素樹脂層における表面近傍
が未焼結であるプリプレグを形成し、このプリプレグの
表面に金属箔を配置した後に、加熱加圧して上述の金属
箔をプリプレグに接着させて、積層板を製造する方法で
ある。
A third manufacturing method comprises forming a fluororesin layer on the surface of a cloth-like substrate, forming a prepreg in the vicinity of the surface of the fluororesin layer which is not sintered, and forming a metal foil on the surface of the prepreg. After arranging, it is a method of manufacturing a laminated board by heating and pressurizing and adhering the above metal foil to the prepreg.

【0008】この第三の製造方法によれば、布状基材に
含浸させたフッ素樹脂層はその表面近傍のみが未焼結と
なり、基材の芯部および基材近傍は焼結される。この第
三の製造方法によればプリプレグと金属箔との接着強さ
をある程度確保することができる利点がある反面、大型
の積層板においてはその全面にわたって均一な接着力を
得ることが困難で、ばらつきが大きいうえ、樹脂含有率
が低い積層板においては、回路形成時のエッチングによ
り金属箔を除去した後の樹脂表面から薬液の浸込みが生
じ、かつハンダ耐熱性が劣り、金属箔に膨れなどの欠陥
が発生する問題点があった。加えて、プリプレグ中に焼
結層と未焼結層とが混在する関係上、積層板の厚さが薄
い場合には、反り、捩れなどの欠陥が発生しやすい問題
点があった。
According to the third manufacturing method, the fluororesin layer impregnated in the cloth-like base material is unsintered only near the surface thereof, and the core portion of the base material and the vicinity of the base material are sintered. According to this third manufacturing method, there is an advantage that the adhesive strength between the prepreg and the metal foil can be secured to some extent, but on the other hand, in a large-sized laminated plate, it is difficult to obtain a uniform adhesive force over the entire surface, In the case of a laminate with a large variation and a low resin content, the chemical solution penetrates from the resin surface after the metal foil is removed by etching during circuit formation, and the solder heat resistance is poor and the metal foil swells. There is a problem that the defect of occurs. In addition, since a sintered layer and a non-sintered layer are mixed in the prepreg, there is a problem that defects such as warp and twist are likely to occur when the laminated plate is thin.

【0009】第四の製造方法は、基材に第1のフッ素樹
脂を含浸した後に、これを乾燥および焼結し、この上層
に対して第1のフッ素樹脂より低融点の第2のフッ素樹
脂を保持させてプリプレグを形成し、このプリプレグに
金属箔を配置した後に、第1のフッ素樹脂の融点より低
温で、しかも第2のフッ素樹脂の融点より高温となる温
度条件下で、積層成形することにより積層板を製造する
方法である。
In the fourth manufacturing method, the base material is impregnated with the first fluororesin, dried and sintered, and the second fluororesin having a lower melting point than the first fluororesin for the upper layer. To form a prepreg, and after placing a metal foil on the prepreg, laminate molding is performed under a temperature condition that is lower than the melting point of the first fluororesin and higher than the melting point of the second fluororesin. This is a method for producing a laminated board.

【0010】この第四の製造方法によれば、積層加圧時
に上述の第1のフッ素樹脂は当該樹脂特有の形状記憶性
に起因してクッション性を発揮するため、積層板特性が
ばらついて不安定となり、加えて第1のフッ素樹脂の焼
成時にこの第1のフッ素樹脂の融点以上で焼成されるた
め、表面エネルギが低く、濡れ性が悪化するため、この
第1のフッ素樹脂の上に第2のフッ素樹脂を保持させよ
うとしても、乾燥、焼成工程中に脱落して均一な高精度
の膜の形成が困難となる問題点があった。
According to the fourth manufacturing method, since the first fluororesin described above exerts a cushioning property due to the shape memory property peculiar to the resin at the time of laminating and pressurizing the laminated plate, the characteristics of the laminated plate may vary and may not be uniform. In addition to being stable, since the first fluororesin is fired at a temperature equal to or higher than the melting point of the first fluororesin during firing, the surface energy is low and the wettability is deteriorated. Even if the second fluororesin is held, there is a problem that it becomes difficult to form a uniform film with high accuracy because it falls off during the drying and baking steps.

【0011】一方、低誘電率基板を得るためには、樹脂
含有率が多いプリプレグを形成する必要があるが、従来
技術においては樹脂含有率が多いプリプレグを形成する
ことが困難であった。すなわち、ガラス布基材に樹脂を
含浸した後に、乾燥、焼結を繰返す場合、上述の樹脂焼
結工程で樹脂が収縮するので、仮りにガラス布基材に対
する樹脂の厚塗りが可能になっても、上記操作の繰返し
により、基材が上記収縮力に絶えられず、波打ち状に変
形するため、形成されたプリプレグに凹凸状の厚みむら
が生じ、厚さ精度が悪化する。
On the other hand, in order to obtain a low dielectric constant substrate, it is necessary to form a prepreg having a high resin content, but it has been difficult to form a prepreg having a high resin content in the prior art. That is, when the glass cloth base material is impregnated with the resin, and then dried and sintered repeatedly, the resin shrinks in the resin sintering step described above, so that it becomes possible to thickly coat the resin on the glass cloth base material. However, by repeating the above-mentioned operation, the base material is not extinguished by the above-mentioned contraction force and is deformed in a wavy shape, so that unevenness in thickness is generated in the formed prepreg, and the thickness accuracy is deteriorated.

【0012】したがって従来においては既述した第一の
製造方法に見られるように、各層間およびプリプレグと
金属箔との間にPFAフィルムやFEPフィルムを介設
する方法がとられていたが、このような従来方法によれ
ば、積層成形時にPFAやFEPの樹脂フィルムの溶融
温度以上で加熱加圧される関係上、極薄肉化が比較的困
難なPFAフィルム、FEPフィルムの溶融もしくは軟
化した樹脂層(PFAやFEPの樹脂層)が流動状態と
なって、流出し、この樹脂の流出により基板厚さが不均
一となり、充分な厚さ精度が確保できない問題点があっ
た。
Therefore, conventionally, as seen in the above-described first manufacturing method, a method of interposing a PFA film or a FEP film between each layer and between the prepreg and the metal foil has been adopted. According to such a conventional method, a PFA film or a resin layer obtained by melting or softening a PEP film or an FEP film, which is relatively difficult to be extremely thin, is heated and pressed at a melting temperature or higher of the resin film of PFA or FEP during lamination molding. The (PFA or FEP resin layer) is in a fluidized state and flows out. Due to the outflow of this resin, the substrate thickness becomes non-uniform, and sufficient thickness accuracy cannot be ensured.

【0013】このような問題点を解決するために高温低
圧条件下で加圧した場合には、層間にボイド(小孔)が
残在し、また接合が不充分になるため、プリプレグそれ
自体に樹脂むらが生じ、金属箔の接合時やハンダ接着時
において金属箔の膨れ、層間クラック、層間剥離などが
生じ、ハンダ耐熱性および熱衝撃性が共に低く、さらに
は積層板全体の密度低下により、エッチング時に薬液の
浸込みが発生する問題点があった。
When pressure is applied under high temperature and low pressure conditions in order to solve such a problem, voids (small holes) remain between the layers and the joining becomes insufficient, so that the prepreg itself is Resin unevenness occurs, swelling of the metal foil at the time of bonding or solder bonding of the metal foil, interlayer cracks, delamination, etc., both solder heat resistance and thermal shock resistance are low, and further, due to a decrease in the density of the entire laminate, There is a problem in that the chemical solution penetrates during etching.

【0014】[0014]

【発明が解決しようとする課題】この発明は、プリプレ
グをPTFEの第1層と、PTFEの第2層と、PFA
の第3層との3層構造にし、PTFE第2層は焼結する
ことなく低温条件下で乾燥処理して、PFA第3層の保
持を良好とし、かつPFA第3層はフィルム介設構造で
はなくディスパージョン含浸、乾燥、焼成により形成す
ることで、高温高圧プレスを可能とし、積層プレス時に
PTFE、PFAの融点より高温かつ高圧条件下で加圧
する特異な方法により、厚さ精度が高く、厚さのばらつ
きが小で、厚さ方向の線膨張係数が小さく、また金属箔
とプリプレグとの接着力が強く、ハンダ耐熱性および熱
衝撃の耐性が共に高く、さらには薬液の浸込みがない低
誘電率の積層板の製造方法の提供を目的とする。
SUMMARY OF THE INVENTION According to the present invention, a prepreg comprises a first layer of PTFE, a second layer of PTFE, and a PFA.
3rd layer structure with the 3rd layer of the above, and the PTFE 2nd layer is dried under low temperature conditions without sintering to make the retention of the PFA 3rd layer good, and the PFA 3rd layer has a film interposed structure. Rather than being formed by dispersion impregnation, drying, and firing, high-temperature and high-pressure pressing is possible, and a unique method of pressurizing under high-temperature and high-pressure conditions above the melting points of PTFE and PFA during lamination pressing provides high thickness accuracy. The thickness variation is small, the linear expansion coefficient in the thickness direction is small, the adhesive strength between the metal foil and the prepreg is strong, the solder heat resistance and the thermal shock resistance are both high, and the chemical solution does not penetrate. An object of the present invention is to provide a method for manufacturing a laminate having a low dielectric constant.

【0015】[0015]

【課題を解決するための手段】この発明は、基材にPT
FEディスパージョンを含浸して乾燥させた後、PTF
Eの融点より高温条件下で焼成し、上記含浸、乾燥およ
び焼成を繰返して必要樹脂保持量の第1層を形成する第
1工程と、上記第1層の表面にPTFEディスパージョ
ンを含浸した後、PTFEの融点より低温条件下で乾燥
させ、上記含浸および乾燥を繰返して必要樹脂保持量の
第2層を形成する第2工程と、上記第2層の表面にPF
Aディスパージョンを含浸して乾燥させた後、該PFA
および上記PTFEの融点より高温条件下で焼成し、上
記含浸、乾燥および焼成を繰返して必要樹脂保持量の第
3層を形成すると共に、プリプレグを形成する第3工程
と、上記プリプレグの少なくとも片面に金属箔を配置し
た後に、上記PTFEおよびPFAの融点より高温条件
下で、かつ高圧プレスする第4工程とを備えた積層板の
製造方法であることを特徴とする。
The present invention provides a substrate with PT.
After impregnation with FE dispersion and drying, PTF
A first step of firing under conditions of a temperature higher than the melting point of E and repeating the above-mentioned impregnation, drying and firing to form the first layer having a required resin retention amount; and after impregnating the surface of the first layer with PTFE dispersion , A second step of drying at a temperature lower than the melting point of PTFE and repeating the above-mentioned impregnation and drying to form a second layer having a required resin retention amount, and PF on the surface of the second layer.
After impregnation with A dispersion and drying, the PFA
And firing at a temperature higher than the melting point of the above-mentioned PTFE, and repeating the above-mentioned impregnation, drying and firing to form a third layer having a required resin holding amount, and a third step of forming a prepreg, and at least one surface of the prepreg. A fourth aspect of the present invention is a method for producing a laminated plate, which comprises a fourth step in which, after arranging the metal foil, the temperature is higher than the melting points of PTFE and PFA, and high-pressure pressing is performed.

【0016】[0016]

【発明の効果】この発明によれば、上述のプリプレグを
PTFEの第1層と、PTFEの第2層と、PFAの第
3層との3層構造にし、PTFE第2層は焼結すること
なくPTFEの融点より低温条件下で乾燥処理して、P
FA第3層の保持を良好とし、かつPFA第3層はフィ
ルム介設手段ではなくPFAディスパージョンの含浸、
乾燥、焼成により形成するので、積層時の高温高圧プレ
スが可能となる。
According to the present invention, the above prepreg has a three-layer structure of the first layer of PTFE, the second layer of PTFE, and the third layer of PFA, and the second PTFE layer is sintered. Without a dry treatment at a temperature lower than the melting point of PTFE,
Good retention of the FA third layer, and impregnation of the PFA third layer with PFA dispersion instead of film interposing means,
Since it is formed by drying and firing, high-temperature and high-pressure pressing at the time of lamination becomes possible.

【0017】しかも積層プレス時にはPTFEおよびP
FAの各融点より高温かつ高圧条件下で加圧する方法で
あるから、厚さ精度が高く、厚さのばらつきが小で、厚
さ方向の線膨張係数が小さく、また金属箔とプリプレグ
との接着力が強く、ハンダ耐熱性および熱衝撃の耐性が
共に高く、さらには薬液の浸込みがない効果がある。
Moreover, during lamination press, PTFE and P
Since it is a method of pressurizing under high temperature and high pressure condition than each melting point of FA, thickness accuracy is high, thickness variation is small, linear expansion coefficient in the thickness direction is small, and metal foil and prepreg are bonded. It is strong, has high solder heat resistance and high thermal shock resistance, and has the effect of preventing the infiltration of chemicals.

【0018】また上記高温高圧プレスにより積層板が製
造されるので、層間のボイド(小孔)がなく、層間の接
合が充分で、プリプレグそれ自体の樹脂むらも生じない
うえ、ハンダ接着時等の金属箔の膨れ、層間クラック、
層間剥離を防止することができる効果がある。
Further, since the laminated plate is manufactured by the above high temperature and high pressure press, there are no voids (small holes) between the layers, the bonding between the layers is sufficient, the resin unevenness of the prepreg itself does not occur, and when the solder is adhered. Swelling of metal foil, interlayer cracks,
There is an effect that delamination can be prevented.

【0019】[0019]

【実施例】この発明の一実施例を以下図面に基づいて詳
述する。図面は積層板の製造方法を示し、図1に示す第
1工程S1で、目付48g/m 2のガラス布基材1(図2
参照)にPTFEディスパージョンを含浸して乾燥させ
た後に、PTFEの融点327℃より高温の380℃で
焼成(焼結)し、必要樹脂保持量としての樹脂含有率7
0vol %になるまで上述の含浸、乾燥および焼結を繰返
して第1層2を形成する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described in detail below with reference to the drawings. The drawing shows a method for manufacturing a laminated board, and in the first step S1 shown in FIG. 1, a glass cloth substrate 1 having a basis weight of 48 g / m 2 (see FIG.
(Refer to FIG. 3), which is impregnated with PTFE dispersion and dried, and then baked (sintered) at 380 ° C., which is higher than the melting point of PTFE, 327 ° C.
The first layer 2 is formed by repeating the above-mentioned impregnation, drying and sintering until it becomes 0 vol%.

【0020】次に図1に示す第2工程S2で、上述の第
1層2の上下両表面にPTFEディスパージョンを含浸
した後に、PTFEの融点327℃より低温の305℃
で乾燥させ、必要樹脂保持量としての樹脂含有率76vo
l %になるまで上述の含浸および乾燥を繰返して第2層
3を形成する。
Next, in a second step S2 shown in FIG. 1, after impregnating the upper and lower surfaces of the above-mentioned first layer 2 with PTFE dispersion, 305 ° C. which is lower than the melting point of PTFE of 327 ° C.
The resin content as required resin retention is 76 vo
The second layer 3 is formed by repeating the above-mentioned impregnation and drying until it reaches 1%.

【0021】次に図1に示す第3工程S3で、上述の第
2層3,3の上下両表面にPFAディスパージョンを含
浸して乾燥させた後、このPFAの融点310℃および
上述のPTFEの融点327℃より高温の380℃で焼
成(焼結)し、必要樹脂保持量としての樹脂含有率80
vol %になるまで上述の含浸、乾燥および焼結を繰返し
て第3層4を形成すると共に、プリプレグ5を形成す
る。
Next, in the third step S3 shown in FIG. 1, PFA dispersion is impregnated on the upper and lower surfaces of the second layers 3 and 3 and dried, and then the melting point of this PFA is 310 ° C. and the above-mentioned PTFE. The resin content rate of 80 as a necessary resin holding amount is obtained by firing (sintering) at 380 ° C, which is higher than the melting point of 327 ° C
The above-mentioned impregnation, drying and sintering are repeated until the vol% is reached to form the third layer 4 and the prepreg 5.

【0022】次に図1に示す第4工程S4で、上述のプ
リプレグ5を例えば2層重ね合わせ、図3に示すよう
に、この2層重合構造のプリプレグ5,5の最外層に金
属箔としてのCu箔6,6を配置した後に、上記PTF
Eの融点327℃およびPFAの融点310℃より高温
の380℃で、かつ高圧プレスして、全体の厚さが0.
4mmの銅箔張り積層板7を製造した。
Next, in a fourth step S4 shown in FIG. 1, for example, two layers of the above-mentioned prepreg 5 are superposed, and as shown in FIG. 3, a metal foil is formed on the outermost layer of the two-layer polymerized prepregs 5 and 5. After arranging the Cu foils 6 and 6, the above PTF
The melting point of E is 380 ° C., which is higher than the melting point of 327 ° C. of E, and the melting point of 310 ° C. of PFA.
A 4 mm copper foil-clad laminate 7 was produced.

【0023】一方比較例として図1で示す第1工程S1
で樹脂含有量を76vol %とし、このプリプレグを6層
重ね合わせ、その外側にPFAフィルムを配設し、最外
層に金属箔としてのCu箔を配設した後に、380℃で
高圧プレスをした積層板(比較例1)を製造すると共
に、さらに他の比較例として図1に示す第1工程S1で
樹脂含有量を70vol %とし、このプリプレグとPFA
フィルムを交互に6層配設し、最外層とするCu箔との
間がPFAフィルムとなるようにし、340℃かつ面圧
10Kgf/cm2 でプレスした積層板(比較例2)を製造
し、上記実施例品(実施例1)と比較例1、比較例2の
各比較品に対して各種の測定および試験を行なった結果
を次の表1に示す。
On the other hand, as a comparative example, the first step S1 shown in FIG.
With a resin content of 76 vol%, 6 layers of this prepreg were superposed, a PFA film was placed on the outside, a Cu foil as a metal foil was placed on the outermost layer, and then high-pressure pressing was performed at 380 ° C. A plate (Comparative Example 1) was manufactured, and as another Comparative Example, the resin content was 70 vol% in the first step S1 shown in FIG.
A laminated plate (Comparative Example 2) was produced by arranging 6 layers of films alternately so that a PFA film was formed between the outermost Cu foil and 340 ° C. and a surface pressure of 10 kgf / cm 2 . Table 1 below shows the results of various measurements and tests performed on the above-described example product (Example 1) and the comparative products of Comparative Example 1 and Comparative Example 2.

【0024】[0024]

【表1】 [Table 1]

【0025】上述の表1から明らかなように、本実施例
の製造方法により製造された積層板7は、厚さ精度が高
く、積層板7の板厚のばらつき(R=最大値−最小値)
が0.007mmと小さく、厚さ方向の線膨張係数は20
0×10-6/k で小さく、Cu箔6の剥離強度は常温お
よび200℃の何れにおいても強く、ハンダ耐熱性に優
れると共に、低温20℃と高温260℃との繰返し試験
による熱衝撃性(スルーホール信頼性)は60サイクル
と高く、蛍光探傷に漬けて紫外線で測定した薬液浸込み
試験においては薬液の浸込みがなく、何れも比較例1、
2に対して優れた結果を得ることができた。
As is clear from Table 1 above, the laminated plate 7 manufactured by the manufacturing method of the present embodiment has high thickness accuracy, and variations in plate thickness of the laminated plate 7 (R = maximum value-minimum value). )
Is as small as 0.007 mm and the linear expansion coefficient in the thickness direction is 20
The Cu foil 6 has a small peel strength of 0 × 10 −6 / k at both room temperature and 200 ° C., has excellent solder heat resistance, and has a thermal shock resistance by repeated tests at a low temperature of 20 ° C. and a high temperature of 260 ° C. ( Through-hole reliability) is as high as 60 cycles, and there is no chemical solution penetration in the chemical solution penetration test measured by ultraviolet rays immersed in fluorescent flaw detection.
Excellent results could be obtained for 2.

【0026】また上述の実施例の製造方法によれば、樹
脂含有率が80〜90vol %の積層板7の製造が可能な
うえ、焼結工程(図1の第1工程S1および第3工程S
3参照)を経てプリプレグ5が形成されるので、樹脂被
膜がなめらかで、ボイドもなく、仮りにプリプレグ5が
汚れた場合には、その表面を払拭して次ステップに移行
することができる。
Further, according to the manufacturing method of the above-mentioned embodiment, it is possible to manufacture the laminated plate 7 having a resin content of 80 to 90 vol%, and the sintering step (the first step S1 and the third step S in FIG. 1).
3), the prepreg 5 is formed, so that the resin coating is smooth and has no voids. If the prepreg 5 is contaminated, the surface can be wiped and the process can proceed to the next step.

【0027】以上要するに、上述のプリプレグ5をPT
FEの第1層2と、PTFEの第2層3と、PFAの第
3層4との3層構造にし、PTFE第2層3は焼結する
ことなくPTFEの融点より低温条件下で乾燥処理し
て、PFA第3層4の保持を良好とし、かつPFA第3
層4はフィルム介設手段ではなくPFAディスパージョ
ンの含浸、乾燥、焼成により形成するので、積層時の高
温高圧プレスが可能となる。
In summary, the above prepreg 5 is PT
The first layer 2 of FE, the second layer 3 of PTFE, and the third layer 4 of PFA are made into a three-layer structure, and the PTFE second layer 3 is dried without being sintered at a temperature lower than the melting point of PTFE. The PFA third layer 4 is held well, and the PFA third layer 4 is maintained.
Since the layer 4 is formed by impregnation of PFA dispersion, drying and firing, not by means of a film interposing means, high temperature and high pressure pressing at the time of lamination becomes possible.

【0028】しかも積層プレス時にはPTFEおよびP
FAの各融点より高温かつ高圧条件下で加圧する方法で
あるから、厚さ精度が高く、厚さのばらつきが小で、厚
さ方向の線膨張係数が小さく、また金属箔とプリプレグ
との接着力が強く、ハンダ耐熱性および熱衝撃の耐性が
共に高く、さらには薬液の浸込みがない効果がある。
Moreover, at the time of laminating press, PTFE and P
Since it is a method of pressurizing under high temperature and high pressure condition than each melting point of FA, thickness accuracy is high, thickness variation is small, linear expansion coefficient in the thickness direction is small, and metal foil and prepreg are bonded. It is strong, has high solder heat resistance and high thermal shock resistance, and has the effect of preventing the infiltration of chemicals.

【0029】また上記高温高圧プレスにより積層板7が
製造されるので、層間のボイド(小孔)がなく、層間の
接合が充分で、プリプレグそれ自体の樹脂むらも生じな
いうえ、ハンダ接着時等の金属箔の膨れ、層間クラッ
ク、層間剥離を防止することができる効果がある。
Further, since the laminated plate 7 is manufactured by the above high temperature and high pressure press, there are no voids (small holes) between the layers, the bonding between the layers is sufficient, the resin unevenness of the prepreg itself does not occur, and at the time of solder bonding, etc. The effect of preventing swelling of the metal foil, inter-layer cracks, and inter-layer peeling is effective.

【0030】図4、図5、図6は積層板の製造方法の他
の実施例を示し、先の実施例で示したプリプレグ5をこ
の実施例においては外層用プリプレグ8(図4参照)と
して、内層用プリプレグ9(図5参照)を次に述べる方
法により別途形成し、上述の外層用プリプレグ8と上述
の内層用プリプレグ9とを用いて積層板10(図6参
照)を製造する方法である。
FIGS. 4, 5 and 6 show another embodiment of the method for manufacturing a laminated plate, in which the prepreg 5 shown in the previous embodiment is used as the outer layer prepreg 8 (see FIG. 4). The inner layer prepreg 9 (see FIG. 5) is separately formed by the method described below, and the laminated plate 10 (see FIG. 6) is manufactured using the outer layer prepreg 8 and the inner layer prepreg 9 described above. is there.

【0031】以下、この積層板の製造方法について詳述
するが、外層用プリプレグ8については先の実施例のプ
リプレグ5の製造方法と同一であるから、図4において
前図と同一の部分には同一番号を付して、その詳しい説
明を省略する。
The manufacturing method of this laminated plate will be described in detail below. Since the outer layer prepreg 8 is the same as the manufacturing method of the prepreg 5 of the previous embodiment, the same parts as in the previous figure are not shown in FIG. The same numbers are assigned and detailed explanations thereof are omitted.

【0032】内層用プリプレグ9は図5に示すように、
目付48g /m 2 のガラスクロス11にPTFEディス
パージョンを含浸して乾燥させた後に、PTFEの融点
327℃より高温の380℃で焼成(焼結)し、必要樹
脂保持量としての樹脂含有率70vol %になるまで上述
の含浸、乾燥および焼結を繰返してPTFE層12を有
する内層用プリプレグ9を形成する。
The inner layer prepreg 9 is, as shown in FIG.
A glass cloth 11 having a basis weight of 48 g / m 2 was impregnated with PTFE dispersion and dried, and then baked (sintered) at 380 ° C., which is higher than the melting point of PTFE of 327 ° C., and a resin content rate of 70 vol as a required resin retention amount. The above-mentioned impregnation, drying and sintering are repeated until the content of the prepreg 9 reaches 10% to form the inner layer prepreg 9 having the PTFE layer 12.

【0033】次に図6に示すように、上述の内層用プリ
プレグ9を中央部分に2層重ね合わせ、これら各内層用
プリプレグ9,9の上下面に上述の外層用プリプレグ
8,8を重ね合わせ、さらに外層用プリプレグ8,8の
外表面に金属箔としてのCu箔6,6を配置した後に、
上記PTFEの融点327℃およびPFAの融点310
℃より高温の380℃で、かつ高圧プレスして、全体の
厚さが0.6mmの銅箔張り積層板10を製造した。
Next, as shown in FIG. 6, two layers of the above-mentioned inner layer prepreg 9 are superposed on the central portion, and the above-mentioned outer layer prepregs 8 and 8 are superposed on the upper and lower surfaces of each of the inner layer prepregs 9 and 9. After further arranging the Cu foils 6 and 6 as metal foils on the outer surfaces of the outer layer prepregs 8 and 8,
The above melting point of PTFE is 327 ° C. and the melting point of PFA is 310.
A copper foil-clad laminate 10 having a total thickness of 0.6 mm was manufactured by pressing at 380 ° C., which is higher than 0 ° C., and high pressure.

【0034】このようにして製造された実施例品(実施
例2)と比較例1、比較例2、の各比較品(なお、これ
ら各比較品の製造方法は前述と同様)に対して各種の測
定および試験を行なった結果を次の表2に示す。
Various kinds of comparative products of the example product (Example 2) manufactured in this way and Comparative Example 1 and Comparative Example 2 (the manufacturing method of each comparative product is the same as described above) The following Table 2 shows the results of the measurement and the test.

【0035】[0035]

【表2】 [Table 2]

【0036】上述の表2から明らかなように、本実施例
の製造方法により製造された積層板10は、積層板10
の板厚のばらつき(R=最大値−最小値)が0.010
mmと小さく、厚さ精度が高く、厚さ方向の線膨張係数は
180×10-6/k で小さく、Cu箔6の剥離強度は常
温および200℃の何れにおいても強く、ハンダ耐熱性
に優れると共に、低温20℃と高温260℃との繰返し
試験による熱衝撃性(スルーホール信頼性)は60サイ
クルと高く、蛍光探傷に漬けて紫外線で測定した薬液浸
込み試験においては薬液の浸込みがなく、何れも比較例
1、2に対して優れた結果を得ることができた。
As is apparent from Table 2 above, the laminated plate 10 manufactured by the manufacturing method of this embodiment is the laminated plate 10
Thickness variation (R = maximum value-minimum value) of 0.010
mm, the thickness accuracy is high, the linear expansion coefficient in the thickness direction is small at 180 × 10 −6 / k, the peel strength of the Cu foil 6 is strong at both room temperature and 200 ° C., and it has excellent solder heat resistance. At the same time, the thermal shock resistance (through hole reliability) of the repeated test of low temperature 20 ° C and high temperature 260 ° C is as high as 60 cycles, and there is no chemical solution penetration in the chemical solution penetration test which was measured by UV after being immersed in fluorescent flaw detection. In each case, excellent results were obtained with respect to Comparative Examples 1 and 2.

【0037】以上要するに、上述の外層用プリプレグ8
をPTFEの第1層2と、PTFEの第2層3と、PF
Aの第3層4との3層構造にし、PTFE第2層3は焼
結することなくPTFEの融点より低温条件下で乾燥処
理して、PFA第3層4の保持を良好とし、かつPFA
第3層4はフィルム介設手段ではなくPFAディスパー
ジョンの含浸、乾燥、焼成により形成するので、積層時
の高温高圧プレスが可能となる。
In summary, the above-mentioned outer layer prepreg 8
The first layer 2 of PTFE, the second layer 3 of PTFE, and the PF
A third layer 4 of A is formed into a three-layer structure, and the PTFE second layer 3 is dried without being sintered at a temperature lower than the melting point of PTFE to improve the retention of the PFA third layer 4 and the PFA.
Since the third layer 4 is formed by impregnation of PFA dispersion, drying and firing, not by means of a film interposing means, high temperature and high pressure pressing during lamination becomes possible.

【0038】しかも積層プレス時にはPTFEおよびP
FAの各融点より高温かつ高圧条件下で加圧する方法で
あるから、厚さ精度が高く、厚さのばらつきが小で、厚
さ方向の線膨張係数が小さく、また金属箔とプリプレグ
との接着力が強く、ハンダ耐熱性および熱衝撃の耐性が
共に高く、さらには薬液の浸込みがない効果がある。
Moreover, at the time of laminating press, PTFE and P
Since it is a method of pressurizing under high temperature and high pressure condition than each melting point of FA, thickness accuracy is high, thickness variation is small, linear expansion coefficient in the thickness direction is small, and metal foil and prepreg are bonded. It is strong, has high solder heat resistance and high thermal shock resistance, and has the effect of preventing the infiltration of chemicals.

【0039】また上記高温高圧プレスにより積層板10
が製造されるので、層間のボイド(小孔)がなく、層間
の接合が充分で、プリプレグそれ自体の樹脂むらも生じ
ないうえ、ハンダ接着時等の金属箔の膨れ、層間クラッ
ク、層間剥離を防止することができる効果がある。
The laminated plate 10 is produced by the high temperature and high pressure press described above.
Since it is manufactured, there are no voids (small holes) between layers, sufficient bonding between layers, no resin unevenness of the prepreg itself occurs, and swelling of metal foil during solder bonding, interlayer cracks, delamination There is an effect that can be prevented.

【0040】この発明の構成と、上述の実施例との対応
において、この発明の基材は、実施例のガラス布基材1
に対応し、以下同様に、金属箔は、Cu箔6に対応し、
プリプレグは、第1実施例のプリプレグ5と第2実施例
の外層用プリプレグ8とに対応するも、この発明は上述
の実施例の構成のみに限定されるものではない。
In the correspondence between the constitution of the present invention and the above-mentioned embodiment, the base material of the present invention is the glass cloth base material 1 of the embodiment.
In the same manner, the metal foil corresponds to the Cu foil 6,
The prepreg corresponds to the prepreg 5 of the first embodiment and the outer layer prepreg 8 of the second embodiment, but the present invention is not limited to the configuration of the above-described embodiment.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の積層板の製造方法を示す工程図。FIG. 1 is a process drawing showing a method for manufacturing a laminated board of the present invention.

【図2】プリプレグの断面図。FIG. 2 is a sectional view of a prepreg.

【図3】本発明の製造方法により製造された積層板の断
面図。
FIG. 3 is a cross-sectional view of a laminated board manufactured by the manufacturing method of the present invention.

【図4】本発明の積層板の製造方法の他の実施例を示す
外層用プリプレグの断面図。
FIG. 4 is a cross-sectional view of an outer layer prepreg showing another embodiment of the method for manufacturing a laminated board of the present invention.

【図5】本発明の積層板の製造方法の他の実施例を示す
内層用プリプレグの断面図。
FIG. 5 is a sectional view of an inner layer prepreg showing another embodiment of the method for manufacturing a laminated board of the present invention.

【図6】他の実施例により製造された積層板の断面図。FIG. 6 is a cross-sectional view of a laminated board manufactured according to another embodiment.

【符号の説明】[Explanation of symbols]

1…ガラス布基材 2…第1層 3…第2層 4…第3層 5…プリプレグ 6…Cu箔 8…外層用プリプレグ DESCRIPTION OF SYMBOLS 1 ... Glass cloth base material 2 ... 1st layer 3 ... 2nd layer 4 ... 3rd layer 5 ... Prepreg 6 ... Cu foil 8 ... Outer layer prepreg

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】基材にPTFEディスパージョンを含浸し
て乾燥させた後、PTFEの融点より高温条件下で焼成
し、上記含浸、乾燥および焼成を繰返して必要樹脂保持
量の第1層を形成する第1工程と、上記第1層の表面に
PTFEディスパージョンを含浸した後、PTFEの融
点より低温条件下で乾燥させ、上記含浸および乾燥を繰
返して必要樹脂保持量の第2層を形成する第2工程と、
上記第2層の表面にPFAディスパージョンを含浸して
乾燥させた後、該PFAおよび上記PTFEの融点より
高温条件下で焼成し、上記含浸、乾燥および焼成を繰返
して必要樹脂保持量の第3層を形成すると共に、プリプ
レグを形成する第3工程と、上記プリプレグの少なくと
も片面に金属箔を配置した後に、上記PTFEおよびP
FAの融点より高温条件下で、かつ高圧プレスする第4
工程とを備えた積層板の製造方法。
1. A base material is impregnated with PTFE dispersion, dried, and then fired at a temperature higher than the melting point of PTFE, and the above impregnation, drying and firing are repeated to form a first layer having a required resin retention amount. And a step of impregnating the surface of the first layer with PTFE dispersion, followed by drying under a temperature lower than the melting point of PTFE, and repeating the impregnation and drying to form a second layer having a necessary resin retention amount. The second step,
After the surface of the second layer is impregnated with PFA dispersion and dried, the PFA dispersion is baked at a temperature higher than the melting points of the PFA and the PTFE, and the impregnation, drying and baking are repeated to obtain a third resin having a necessary resin retention amount. The third step of forming a layer and forming a prepreg, and arranging a metal foil on at least one surface of the prepreg, and then applying the PTFE and P
Pressing under high temperature condition and higher than melting point of FA
A method for manufacturing a laminated board, which comprises:
JP16025493A 1993-06-03 1993-06-03 Laminated board manufacturing method Expired - Fee Related JPH0790626B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16025493A JPH0790626B2 (en) 1993-06-03 1993-06-03 Laminated board manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16025493A JPH0790626B2 (en) 1993-06-03 1993-06-03 Laminated board manufacturing method

Publications (2)

Publication Number Publication Date
JPH06344501A true JPH06344501A (en) 1994-12-20
JPH0790626B2 JPH0790626B2 (en) 1995-10-04

Family

ID=15711034

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16025493A Expired - Fee Related JPH0790626B2 (en) 1993-06-03 1993-06-03 Laminated board manufacturing method

Country Status (1)

Country Link
JP (1) JPH0790626B2 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6108205A (en) * 1996-10-21 2000-08-22 Telefonaktiebolaget Lm Ericsson Means and method for mounting electronics
US6417459B1 (en) * 1999-07-05 2002-07-09 Nippon Pillar Packing Co., Ltd. Printed circuit board, and prepreg for a printed circuit board
CN111171736A (en) * 2020-01-14 2020-05-19 广东生益科技股份有限公司 Lacquer cloth, preparation method thereof, copper-clad plate comprising lacquer cloth and application
JPWO2019049519A1 (en) * 2017-09-06 2020-08-13 日本ピラー工業株式会社 Circuit board and manufacturing method thereof

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6108205A (en) * 1996-10-21 2000-08-22 Telefonaktiebolaget Lm Ericsson Means and method for mounting electronics
US6417459B1 (en) * 1999-07-05 2002-07-09 Nippon Pillar Packing Co., Ltd. Printed circuit board, and prepreg for a printed circuit board
JPWO2019049519A1 (en) * 2017-09-06 2020-08-13 日本ピラー工業株式会社 Circuit board and manufacturing method thereof
CN111171736A (en) * 2020-01-14 2020-05-19 广东生益科技股份有限公司 Lacquer cloth, preparation method thereof, copper-clad plate comprising lacquer cloth and application

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