JPH06343847A - Electromagnetic induction agitator - Google Patents

Abstract

PURPOSE:To unnecessitate the use of an agitating element suitable for agitating a fused body of material which is required to be highly purified, such as Ga and In. CONSTITUTION:A quartz ample 2 sealing in a fused body 1 is vertically held in a quartz chamber 3. Around a vertical tubular furnace consisting of a translucent reflective plate 5 with a heater enclosing the chamber, a soft iron ring 10 on whose inner peripheral surface plural rare earth magnets 12 are fitted is arranged concentrically with the quartz ample. Power of a motor is transmitted to a pulley 7 fitted on the outer periphery of the ring through a pulley belt 6, causing the soft iron ring to be rotated, allowing the fused body 1 in the quartz ample to be agitated by magnetic force of the rare earth magnets fitted on the inner peripheral surface of the ring. Numbers 8, 9 and 11 shows a bearing, a magnet holding base and a heat insulator respectively.

Description

Detailed Description of the Invention

[0001]

The present invention relates to semiconductors, high-purity metals,
The present invention relates to a novel stirring device that can be conveniently used for the purpose of stirring a conductive melt in the technical field of metallurgy and the like.

[0002]

2. Description of the Related Art Conventionally, as a method for stirring a solution or melt,
A general method is to put a blade or a stirrer in the substance to be stirred and stir.

However, in these conventional methods, since an object such as a blade or a stirrer must be put in the melt for stirring, the melt is contaminated by the stirring object or the stirring object and the melt are mixed. Had a problem that they would react.

Further, if a part of the melt is solidified, it becomes impossible to stir, or the stirrer comes into contact with the solid to cause a trouble.

All of the above-mentioned methods are stirring methods in a container having an upper opening, and a non-magnetic substance inside is heated by an induction heating method or the like with a sealed container such as an ampoule fixed. So far nothing was known except the method.

[0006]

As described above, the conventional stirring means used only means using a blade or a stirrer, and therefore, they are used in the technical fields of recent years such as semiconductors, high-purity metals, and metallurgy. It could not be used as a stirring means for high-purity substances. Furthermore, there has been a demand for the development of a new stirring method as a stirring means for the melt sealed inside an ampoule or the like.

[0007]

Means for Solving the Problems The inventors of the present invention have made earnest studies to solve the above problems, and as a result, agitate the melt by using the magnetic force of a rare earth magnet for a non-magnetic object as the melt. It was possible to provide the device of the present invention.

That is, in the device of the present invention, firstly, a ring-shaped rotating body having a rare earth magnet attached to its inner peripheral surface is provided around an ampoule body containing a conductive melt having a magnetic susceptibility of 10 ^-5 or less. An electromagnetic induction stirrer, which is arranged concentrically with the ampoule, and is configured to generate an induced current in the melt by rotating the rotating body with a motor,
Secondly, below the container containing the electrically conductive melt having a magnetic susceptibility of 10 ⁻⁵ or less, a rotor attached with a rare earth magnet linked to a motor is arranged, and the rotor attached with the magnet is attached to the rotor. It is an electromagnetic induction stirrer characterized by being configured to rotate so as to generate an induced current in a melt.

[0009]

When the melt, which is the substance to be stirred, is a non-magnetic conductive melt having a magnetic susceptibility of 10 ⁻⁵ or less, the magnetic force of the rare earth magnet is used to stir the melt without using a stirrer. Based on this principle, the device of the present invention was developed.

In an embodiment described later, a ring with a rare earth magnet that can be rotated by a motor was attached to the outside of the heating device and stirred, and an Sm-Co magnet (φ30 × 10 t) as a magnet was placed in the soft iron ring. Although the individual magnets are used, any rare-earth magnet may be used as long as it has a magnetic susceptibility equal to or higher than that of the Sm-Co magnet.

The melt which can be advantageously used in the present invention is Ga,
Although high-purity In or the like is required, any melt having a magnetic susceptibility of 10 ⁻⁵ or less can be a target melt of the present invention.

The apparatus of the present invention will be described in detail below with reference to examples.

[0013]

Example 1 The following tests were conducted using the apparatus having the structure shown in FIG. In FIG. 1, 1 is a melt, 2 is a quartz ampoule,
3 is a quartz chamber, 4 is a heater, 5 is a semitransparent reflection plate, 6 is a pulley belt, 7 is a pulley, 8 is a bearing, 9 is a magnet holder, 10 is a soft iron ring, 11 is a heat insulating material, and 12 is a rare earth magnet. Respectively.

First, 1,200 g of Ga is put in a quartz ampoule 2 of 50 ^φ × 200 ^L and sealed.
As the Sm-Co magnet φ30 × 10 t manufactured by Shin-Etsu Chemical Co., Ltd., 36 rare earth magnets are mounted in the soft iron ring 10 and installed in a vertical transparent tubular furnace rotatably mounted outside the heating device (heater) 4 by a motor. When heated and stirred at 1000 ° C. for 2 hours, Ga taken out from the quartz ampoule 2 did not show contamination (contamination).

[0015]

[Example 2] 1,500 g of In was placed in a quartz ampoule 2 of 50 ^φ x 200 ^L , sealed, placed in the vertical transparent tubular furnace used in Example 1, and heated at 1000 ° C for 2 hours. After stirring with stirring, no contamination occurred in In taken out from the quartz ampoule 2.

[0016]

Example 3 The following test was conducted using the apparatus having the structure shown in FIG. In FIG. 2, 1 is a melt, 10 is a soft iron ring, 12 is a rare earth magnet, 13 is a Teflon-lined container made of SUS304 whose wall surface is a hot water heating device, 14 is a hot water inlet, and 15 is a hot water outlet. , 16 respectively represent motors.

As shown in FIG. 2, 25 kg of Ga was put in a hot water heating container of 200 ^φ × 200 ^h to 60 ° C., a rare earth magnet made of NS was provided at the bottom of the container, and the magnetizing power was generated by the rotating force of the motor. When it was generated and stirred, no contamination was generated as in Example 2.

[0018]

As described above, the device of the present invention is a novel stirring device which can stir the conductive melt without any trouble by rotating the magnet attached to the outside of the heating furnace.

[Brief description of drawings]

FIG. 1 is a schematic view showing a partial cross-section of the structure of a stirring device for a vertical transparent tubular furnace which is an example of the device of the present invention.

FIG. 2 is a schematic partial cross-sectional view showing the structure of a stirring device for a hot water heating container which is another example of the device of the present invention.

[Explanation of symbols]

 1 Melt 2 Quartz Ampoule 3 Quartz Chamber 4 Heater 5 Semi-transparent Reflector 6 Pulley Belt 7 Pulley 8 Bearing 9 Magnet Holder 10 Soft Iron Ring 11 Insulation Material 12 Rare Earth Magnet 13 Hot Water Heating Container 14 Hot Water Inlet 15 Hot Water Outlet 16 Motor

Front page continuation (72) Inventor Isamu Nishino 1-2-8 Marunouchi, Chiyoda-ku, Tokyo Dowa Mining Co., Ltd.

Claims (2)

[Claims] 1. A ring-shaped rotating body having a rare earth magnet attached to its inner peripheral surface is arranged concentrically with an ampoule body around an ampoule body containing a conductive melt having a magnetic susceptibility of 10 ⁻⁵ or less. An electromagnetic induction stirrer characterized in that the rotating body is rotated by a motor to generate an induced current in the melt. 2. A rotating body, to which a rare earth magnet interlocked with a motor is attached, is arranged below a container containing a conductive melt having a magnetic susceptibility of 10 ⁻⁵ or less, and the rotor is attached with the magnet by the motor. An electromagnetic induction stirrer characterized in that it is configured so that an induction current is generated in the melt by rotating the.