JPH06338752A - Piezoelectric oscillator - Google Patents

Piezoelectric oscillator

Info

Publication number
JPH06338752A
JPH06338752A JP5126920A JP12692093A JPH06338752A JP H06338752 A JPH06338752 A JP H06338752A JP 5126920 A JP5126920 A JP 5126920A JP 12692093 A JP12692093 A JP 12692093A JP H06338752 A JPH06338752 A JP H06338752A
Authority
JP
Japan
Prior art keywords
piezoelectric vibrator
piezoelectric
holding
vibration
piezoelectric oscillator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5126920A
Other languages
Japanese (ja)
Inventor
Osamu Kawasaki
修 川崎
Hidenobu Shintaku
秀信 新宅
Shigeo Suzuki
茂夫 鈴木
Masahiro Nagasawa
雅浩 長澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP5126920A priority Critical patent/JPH06338752A/en
Priority to KR1019940011235A priority patent/KR100204457B1/en
Priority to US08/249,738 priority patent/US5521457A/en
Priority to DE69421002T priority patent/DE69421002T2/en
Priority to EP94108171A priority patent/EP0626212B1/en
Publication of JPH06338752A publication Critical patent/JPH06338752A/en
Priority to US08/782,742 priority patent/US6111338A/en
Pending legal-status Critical Current

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Landscapes

  • Piezo-Electric Transducers For Audible Bands (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To realize the holding structure for piezoelectric oscillator which is stable and reduces the characteristic very little. CONSTITUTION:Projecting materials 3 made of conductive materials like a metal or ceramics are linearly attached along the nodal line of lengthwise oscillation which is excited in a piezoelectric oscillator 1 by an electrode. The piezoelectric oscillator 1 has projecting materials 3 caught between holding tools 4 having the spring property from above and below and is held and is stored in a case. At the time of the use, an AC electric field is applied to the electrode of the piezoelectric oscillator 1 from holding tools 4 or feed parts formed in these tools 4 through projecting materials 3 to excite the lengthwise oscillation.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、圧電セラミック、水
晶、リチウム酸ニオブ等の圧電材料を用いた圧電振動子
に関し、特に圧電素子の保持構造に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric vibrator using a piezoelectric material such as piezoelectric ceramic, crystal, niobium lithium oxide, etc., and more particularly to a piezoelectric element holding structure.

【0002】[0002]

【従来の技術】以下に、圧電セラミック、水晶、リチウ
ム酸ニオブ等の圧電材料を用いた圧電振動子の保持構造
の従来技術について説明を行う。
2. Description of the Related Art A conventional structure of a piezoelectric vibrator holding structure using a piezoelectric material such as piezoelectric ceramics, crystal, niobium lithium oxide or the like will be described below.

【0003】メカニカルフィルタや発振子等に用いられ
る圧電振動子は、圧電セラミック、水晶、リチウム酸ニ
オブ等の材料で作られ、使用する周波数領域に応じて、
拡がり振動、厚み縦振動、撓み振動等のうち適切な振動
モードが、圧電効果により振動損失の小さな状態で励振
される。そして、これらの圧電振動子は機械的品質係数
Qm が大きく、コンデンサやコイルを使ったフィルタや
発振子に比べて周波数精度のよいフィルタや発振子を実
現することができる。
Piezoelectric vibrators used for mechanical filters, oscillators, etc. are made of materials such as piezoelectric ceramics, crystal, and niobium lithium oxide. Depending on the frequency range used,
Appropriate vibration modes such as spreading vibration, longitudinal thickness vibration, and bending vibration are excited by the piezoelectric effect with small vibration loss. Further, these piezoelectric vibrators have a large mechanical quality factor Qm, and can realize a filter or an oscillator with higher frequency accuracy than a filter or an oscillator using a capacitor or a coil.

【0004】従って、圧電振動子では振動を抑制しない
ように保持することが重要な技術の1つである。一般的
には、振動振幅が0になる節の近傍で保持してフィルタ
や発振子として構成される。振動の節は面積を持たない
点または線であるので、理想的には圧電振動子を面積0
の点または線で保持することが望ましいが、安定な圧電
振動子の保持を実現するために、実際には特性をある程
度犠牲にして有限の面積を持たせて保持している。
Therefore, it is one of the important techniques to hold the piezoelectric vibrator so as not to suppress the vibration. Generally, it is held near a node where the vibration amplitude becomes 0 and configured as a filter or an oscillator. Since the vibration node is a point or line that does not have an area, ideally the area of the piezoelectric vibrator is 0.
It is desirable to hold the piezoelectric vibrator by the points or lines, but in order to realize stable holding of the piezoelectric vibrator, in reality, the characteristics are sacrificed to some extent and held with a finite area.

【0005】図5は、圧電セラミック等の圧電材料で作
られた角板型圧電振動子11の斜視図であり、対抗する
2つの主面に電極12が形成され、この電極間に電界を
印加すれば角板の拡がり振動が励振される。この振動モ
ードは角板の中心部に振動が0である節点を有し、同図
に示すように圧電振動子の中心部の節近傍を、安定な保
持のために先端に平坦部を持ち、振動阻害をしないよう
にバネ性を持つ保持具13で圧電振動子の両側から加圧
して挟み込むことで保持していた。
FIG. 5 is a perspective view of a rectangular plate type piezoelectric vibrator 11 made of a piezoelectric material such as a piezoelectric ceramic, in which electrodes 12 are formed on two opposing main surfaces and an electric field is applied between the electrodes. Then, the spreading vibration of the square plate is excited. This vibration mode has a node where the vibration is 0 at the center of the square plate, has a node near the center of the piezoelectric vibrator as shown in the figure, and has a flat portion at the tip for stable holding. In order to prevent the vibration from being disturbed, the holder 13 having a spring property is pressed from both sides of the piezoelectric vibrator and held by sandwiching it.

【0006】図6は、圧電材料で作られた長方形板圧電
振動子14の斜視図であり、対抗する2つの主面に電極
12が形成され、この電極間に電界を印加して長さ振動
を励振している。長方形板圧電振動子14の長さ振動で
は振動の節は長方形の中央部に線状にあり、従来は同図
に示すように、圧電振動子の節部近傍を先端に幅を持ち
バネ性を持つ保持具15で挟み込むことで保持してい
た。
FIG. 6 is a perspective view of a rectangular plate piezoelectric vibrator 14 made of a piezoelectric material, in which electrodes 12 are formed on two opposing main surfaces, and an electric field is applied between the electrodes to cause length vibration. Are excited. In the length vibration of the rectangular plate piezoelectric vibrator 14, the node of vibration is linear in the center of the rectangle, and conventionally, as shown in the same figure, the vicinity of the node of the piezoelectric vibrator has a width at the tip and a spring property. It was held by being sandwiched by the holding tool 15 held.

【0007】[0007]

【発明が解決しようとする課題】従来の圧電振動子の保
持構造は、圧電振動子をある程度の面積を持たせて点状
または線状に保持具で直接保持していたために、特性を
低下させないように保持の面積を小さくした場合には、
保持が不安定になり、また落下などの衝撃が加わると振
動子の姿勢が変化しその保持位置が変化することによ
り、特性が大きく変化してしまった。
The conventional piezoelectric vibrator holding structure does not deteriorate the characteristics because the piezoelectric vibrator has a certain area and is directly held by a holding tool in a dot shape or a linear shape. If the holding area is reduced like this,
The holding becomes unstable, and when a shock such as a drop is applied, the posture of the vibrator changes and the holding position changes, so that the characteristics greatly change.

【0008】また、保持を安定にするために保持の面積
を大きくした場合には、振動している部分を押さえるこ
とになり、振動子の振動が抑制されるため特性が低下し
てしまった。
Further, when the holding area is increased in order to stabilize the holding, the vibrating portion is pressed, and the vibration of the vibrator is suppressed, so that the characteristics are deteriorated.

【0009】また、直接に圧電素子を保持具で保持して
いたために、圧電素子と保持具との接触面積がばらつ
き、その結果特性も大きくばらついていた。即ち、従来
の圧電振動子の保持方法では、振動子特性への影響の少
ない、信頼性の高い安定な保持を実現することが困難で
あるいう課題があった。
Further, since the piezoelectric element is directly held by the holding tool, the contact area between the piezoelectric element and the holding tool varies, and as a result, the characteristics vary greatly. That is, the conventional piezoelectric vibrator holding method has a problem in that it is difficult to realize reliable and stable holding with little influence on the vibrator characteristics.

【0010】[0010]

【課題を解決するための手段】圧電振動子の電極面に金
属またはセラミック等の電導性突起物を溶射、スパッ
タ、蒸着、CVD、鍍金、ゾルゲル法または印刷などの
工法で形成し、突起物を介して圧電振動子を保持する。
[Means for Solving the Problems] Conductive projections such as metal or ceramics are formed on the electrode surface of a piezoelectric vibrator by a method such as thermal spraying, sputtering, vapor deposition, CVD, plating, sol-gel method or printing, and the projections are formed. Hold the piezoelectric vibrator through.

【0011】[0011]

【作用】圧電振動子の振動の節近傍に金属またはセラミ
ック等の電導性突起物をたとえば溶射等で形成し、この
突起物を介して圧電振動子を保持することにより、圧電
振動子と保持具の接触部の面積は、突起物の先端面積で
決まりほぼ一定にすることができ、保持のための面積を
できるだけ大きくすることができる。また、多少圧電振
動子と保持具の相対位置がずれても、圧電振動子から見
た保持位置は一定である。
The piezoelectric vibrator and the holder are formed by forming an electrically conductive protrusion such as metal or ceramic in the vicinity of the vibration node of the piezoelectric oscillator by, for example, thermal spraying and holding the piezoelectric oscillator through the protrusion. The area of the contact portion is determined by the tip area of the protrusion and can be made substantially constant, and the area for holding can be maximized. Further, even if the relative positions of the piezoelectric vibrator and the holder deviate to some extent, the holding position viewed from the piezoelectric vibrator is constant.

【0012】[0012]

【実施例】以下、図面に従って本発明の実施例について
詳細な説明を行う。
Embodiments of the present invention will be described in detail below with reference to the drawings.

【0013】(実施例1)図1は本発明の第1の実施例
の保持構造に用いる圧電振動子の斜視図である。同図に
おいて、1は圧電セラミック、水晶、リチウム酸ニオブ
等の圧電材料で作られた長方形板形の圧電振動子であ
り、対抗する2つの主面に駆動用の電極2が付けられて
いる。電極2に交流電界を印加することにより、圧電振
動子1の長さ方向に主変位を持つ長さ振動が励振され
る。この長さ振動の節は同図に示すように長方形板の中
央部に線状にあり、この節線9に沿って金属またはセラ
ミック等の電導性材料から成る突起物3を線状に付け
る。突起物3の幅と厚みは、要求耐振性を満たす安定保
持ができることと、許される圧電振動子1の特性への影
響を考慮して決める。そして、突起物3の材料は保持力
がかかっても機械的に安定であることと、リード線とし
ての役目を兼ねているので電気的性質が安定であること
ことが求められ、耐錆性、電導率、弾性率(硬度)等に
より決める。
(Embodiment 1) FIG. 1 is a perspective view of a piezoelectric vibrator used in a holding structure according to a first embodiment of the present invention. In the figure, reference numeral 1 is a rectangular plate-shaped piezoelectric vibrator made of a piezoelectric material such as piezoelectric ceramic, crystal, or niobium lithium oxide, and driving electrodes 2 are attached to two opposing main surfaces. By applying an AC electric field to the electrode 2, a length vibration having a main displacement in the length direction of the piezoelectric vibrator 1 is excited. The node of this length vibration is linear in the central portion of the rectangular plate as shown in the figure, and the protrusion 3 made of a conductive material such as metal or ceramic is linearly attached along this node line 9. The width and the thickness of the projection 3 are determined in consideration of stable holding that satisfies the required vibration resistance and the allowable influence on the characteristics of the piezoelectric vibrator 1. The material of the protrusions 3 is required to be mechanically stable even if a holding force is applied and to have stable electrical properties because it also serves as a lead wire. It is determined by the electric conductivity, elastic modulus (hardness), etc.

【0014】例えば、ニッケル・クロム合金、ステンレ
ス合金、タングステン、真ちゅう、銀、銅合金またはア
ルミ合金等の金属、または電導性セラミック等が突起物
3の材料として用いることができる。そして、突起物3
の形成の工法としては、溶射、スパッタ、蒸着、CV
D、鍍金または印刷等の工法を用いることができる。
For example, a metal such as nickel-chromium alloy, stainless alloy, tungsten, brass, silver, copper alloy or aluminum alloy, or conductive ceramic can be used as the material of the protrusion 3. And the protrusion 3
The method of forming the film is thermal spraying, sputtering, vapor deposition, CV
Construction methods such as D, plating or printing can be used.

【0015】図2は図1の圧電振動子1の保持構造を示
すものであり、突起物3において振動子1を上下からバ
ネ性を有する保持具4で挟むようにして保持し、ケース
の中に納めている。保持具4のバネ性は、圧電振動子1
を一定の加圧力で保持するためと、振動子1の振動を阻
害しないようにするためである。図2の保持構造によ
り、特性のばらつきを抑え、特性の安定性と信頼性を向
上するとともに、特性の低下を少なくした圧電振動子の
保持を実現している。
FIG. 2 shows a holding structure for the piezoelectric vibrator 1 shown in FIG. 1, in which the vibrator 1 is vertically sandwiched between the protrusions 3 by a holder 4 having a spring property, and is housed in a case. ing. The spring property of the holder 4 is determined by the piezoelectric vibrator 1
This is for maintaining a constant pressure, and not for disturbing the vibration of the vibrator 1. The holding structure of FIG. 2 suppresses variations in characteristics, improves stability and reliability of characteristics, and realizes holding of the piezoelectric vibrator with less deterioration of characteristics.

【0016】なお、突起物3は上下から押え込まれて
も、大きな塑性変形をしないことが必要である。使用時
には、保持具4または保持具4に形成された給電部(図
には明記していない)より、突起物3を介して、圧電振
動子1の電極2に交流電界を印加して、長さ振動を励振
する。
Note that it is necessary that the projection 3 does not undergo a large plastic deformation even if it is pressed in from above and below. At the time of use, an AC electric field is applied to the electrode 2 of the piezoelectric vibrator 1 from the holder 4 or a power feeding portion (not shown in the figure) formed on the holder 4 through the protrusion 3 to extend the length. Excite the vibration.

【0017】(実施例2)図3は本発明の別の実施例の
保持構造に用いる圧電振動子の斜視図である。同図にお
いて、5は対抗する2つの主面に電極6を付けた円板形
の圧電振動子であり、電極6に交流電界を印加すること
により、振動子5の径方向に主変位を持つ拡がり振動モ
ードを励振することができる。この振動の節は円板の中
央部の点であり、この節点近傍に、先端がある面積を持
つ円板形の金属またはセラミックなどの電導性突起物7
が付けられている。ここで先端の面積は、要求耐振性を
満たす安定保持ができることと、許される圧電振動子1
の特性への影響を考慮して決め、一般的には円板の直径
の1/50から1/5程度の大きさになる。
(Embodiment 2) FIG. 3 is a perspective view of a piezoelectric vibrator used in a holding structure according to another embodiment of the present invention. In the figure, reference numeral 5 denotes a disk-shaped piezoelectric vibrator having electrodes 6 attached to two opposing main surfaces, which has a main displacement in the radial direction of the vibrator 5 when an AC electric field is applied to the electrodes 6. The spreading vibration mode can be excited. The node of this vibration is a point in the center of the disk, and a disk-shaped conductive protrusion 7 such as a metal or ceramic having an area with a tip near the node.
Is attached. Here, the area of the tip can be stably maintained to satisfy the required vibration resistance, and the allowable piezoelectric vibrator 1
It is determined in consideration of the influence on the characteristics of, and is generally about 1/50 to 1/5 of the diameter of the disc.

【0018】図4は図3の圧電振動子5の保持構造であ
り、突起物7を介してバネ性を有する保持具8で圧電振
動子5を挟むようにして保持しケースの中に納めてい
る。保持具8は、実施例1と同様に、圧電振動子1を一
定の加圧力で保持するためと、振動阻害をしないように
するためにバネ性を持たせている。また、突起物7は円
板形に形成しているが、この形にこだわることなく、角
柱形でもよいことは言うまでもない。使用時には、保持
具8または保持具8に形成された給電部(図には明記し
ていない)より、突起物7を介して、圧電振動子5の電
極6に交流電界を印加して、径方向拡がり振動を励振す
る。
FIG. 4 shows a holding structure for the piezoelectric vibrator 5 of FIG. 3, in which the piezoelectric vibrator 5 is sandwiched and held by a holder 8 having a spring property via a protrusion 7. Similar to the first embodiment, the holder 8 has a spring property in order to hold the piezoelectric vibrator 1 with a constant pressing force and to prevent vibration inhibition. Further, although the projection 7 is formed in a disc shape, it goes without saying that the projection 7 may be a prism shape without being particular about this shape. At the time of use, an AC electric field is applied to the electrode 6 of the piezoelectric vibrator 5 from the holder 8 or a power feeding portion (not shown in the drawing) formed on the holder 8 via the protrusion 7 to generate a diameter. Excitation of directional vibration.

【0019】[0019]

【発明の効果】圧電振動子の振動の節近傍に、金属また
はセラミック等の電導性突起物を形成し、この溶射膜を
介して圧電振動子を保持することにより、圧電振動子と
保持具の接触部の面積は、突起物の先端面積で決まりほ
ぼ一定にすることができる。そのため、圧電振動子の特
性への影響を考慮した上で、保持のための面積をできる
だけ大きくすることができ、また、多少圧電振動子と保
持具の相対位置がずれても、圧電振動子から見た保持位
置は一定である。従って、特性の安定性と信頼性を向上
するとともに、特性の低下を少なくした圧電振動子の保
持を実現することができる。また、突起物が給電のため
のリード線を兼ねているので構造を簡単にすることがで
きる。
EFFECTS OF THE INVENTION By forming an electrically conductive protrusion such as a metal or ceramic near the vibration node of a piezoelectric vibrator and holding the piezoelectric vibrator through this sprayed film, the piezoelectric vibrator and the holder are held. The area of the contact portion is determined by the tip area of the protrusion and can be made substantially constant. Therefore, considering the influence on the characteristics of the piezoelectric vibrator, the area for holding can be made as large as possible, and even if the relative position of the piezoelectric vibrator and the holder is slightly shifted, The holding position seen is constant. Therefore, it is possible to improve the stability and reliability of the characteristics and to hold the piezoelectric vibrator with less deterioration of the characteristics. Moreover, since the protrusion also serves as a lead wire for feeding power, the structure can be simplified.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の1実施例の保持構造に用いる圧電振動
子の斜視図
FIG. 1 is a perspective view of a piezoelectric vibrator used in a holding structure according to an embodiment of the present invention.

【図2】本発明の圧電振動子の保持構造図FIG. 2 is a holding structure diagram of the piezoelectric vibrator of the invention.

【図3】本発明の別の実施例の保持構造に用いる圧電振
動子の斜視図
FIG. 3 is a perspective view of a piezoelectric vibrator used in a holding structure according to another embodiment of the present invention.

【図4】本発明の圧電振動子の保持構造図FIG. 4 is a holding structure diagram of the piezoelectric vibrator of the invention.

【図5】角板型圧電振動子の従来の保持構造の斜視図FIG. 5 is a perspective view of a conventional holding structure for a rectangular plate type piezoelectric vibrator.

【図6】長方形板型圧電振動子の従来の保持構造の斜視
FIG. 6 is a perspective view of a conventional holding structure for a rectangular plate type piezoelectric vibrator.

【符号の説明】[Explanation of symbols]

1 圧電振動子 2 電極 3 突起物 4 保持具 5 圧電振動子 6 電極 7 突起物 8 保持具 1 Piezoelectric vibrator 2 Electrode 3 Protrusion 4 Holder 5 Piezoelectric vibrator 6 Electrode 7 Protrusion 8 Holder

───────────────────────────────────────────────────── フロントページの続き (72)発明者 長澤 雅浩 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Masahiro Nagasawa 1006 Kadoma, Kadoma City, Osaka Prefecture Matsushita Electric Industrial Co., Ltd.

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】圧電材料を用いた圧電振動子において、前
記圧電振動子に金属またはセラミック等の電導性突起物
を形成し、前記突起物を介して前記圧電振動子を保持し
たことを特徴とする圧電振動子。
1. A piezoelectric vibrator using a piezoelectric material, wherein conductive protrusions such as metal or ceramics are formed on the piezoelectric vibrator, and the piezoelectric vibrator is held via the protrusions. Piezoelectric vibrator.
【請求項2】電導性突起物を、溶射、スパッタ、蒸着、
CVD、鍍金、ゾルゲル法または印刷などの工法で形成
することを特徴とする請求項1に記載の圧電振動子。
2. A conductive projection is formed by thermal spraying, sputtering, vapor deposition,
The piezoelectric vibrator according to claim 1, which is formed by a method such as CVD, plating, a sol-gel method, or printing.
【請求項3】圧電振動子の電極の上に金属またはセラミ
ック等の電導性突起物を形成したことを特徴とする請求
項1に記載の圧電振動子。
3. The piezoelectric vibrator according to claim 1, wherein a conductive protrusion such as metal or ceramic is formed on the electrode of the piezoelectric vibrator.
JP5126920A 1993-05-28 1993-05-28 Piezoelectric oscillator Pending JPH06338752A (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP5126920A JPH06338752A (en) 1993-05-28 1993-05-28 Piezoelectric oscillator
KR1019940011235A KR100204457B1 (en) 1993-05-28 1994-05-24 Piezoelectric oscillator and manufacturing method
US08/249,738 US5521457A (en) 1993-05-28 1994-05-26 Holding structure for a piezoelectric vibrator
DE69421002T DE69421002T2 (en) 1993-05-28 1994-05-27 Posture structure for a piezoelectric vibrator and associated manufacturing process
EP94108171A EP0626212B1 (en) 1993-05-28 1994-05-27 Holding structure of piezoelectric vibrator and manufacturing method therefor
US08/782,742 US6111338A (en) 1993-05-28 1997-01-13 Acceleration sensor and method for producing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5126920A JPH06338752A (en) 1993-05-28 1993-05-28 Piezoelectric oscillator

Publications (1)

Publication Number Publication Date
JPH06338752A true JPH06338752A (en) 1994-12-06

Family

ID=14947179

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5126920A Pending JPH06338752A (en) 1993-05-28 1993-05-28 Piezoelectric oscillator

Country Status (1)

Country Link
JP (1) JPH06338752A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20000071798A (en) * 1999-04-23 2000-11-25 무라타 야스타카 Piezoelectric device and piezoelectric oscillator using the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20000071798A (en) * 1999-04-23 2000-11-25 무라타 야스타카 Piezoelectric device and piezoelectric oscillator using the same

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