JPH06338753A - Piezoelectric oscillator - Google Patents
Piezoelectric oscillatorInfo
- Publication number
- JPH06338753A JPH06338753A JP5126921A JP12692193A JPH06338753A JP H06338753 A JPH06338753 A JP H06338753A JP 5126921 A JP5126921 A JP 5126921A JP 12692193 A JP12692193 A JP 12692193A JP H06338753 A JPH06338753 A JP H06338753A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric vibrator
- piezoelectric
- piezoelectric oscillator
- hardness
- holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Piezo-Electric Transducers For Audible Bands (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、圧電セラミック、水
晶、リチウム酸ニオブ等の圧電材料を用いた圧電振動子
の保持構造に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric vibrator holding structure using a piezoelectric material such as piezoelectric ceramic, crystal, niobium lithium oxide or the like.
【0002】[0002]
【従来の技術】以下に、圧電セラミック、水晶、リチウ
ム酸ニオブ等の圧電材料を用いた圧電振動子の保持構造
の従来技術について説明を行う。2. Description of the Related Art A conventional structure of a piezoelectric vibrator holding structure using a piezoelectric material such as piezoelectric ceramics, crystal, niobium lithium oxide or the like will be described below.
【0003】メカニカルフィルタや発振子等に用いられ
る圧電振動子は、圧電セラミック、水晶、リチウム酸ニ
オブ等の材料で作られ、使用する周波数領域に応じて適
切な振動モードが圧電効果により励振される。そして、
これらの圧電振動子は、振動を抑制しないように振動振
幅が0になる節の近傍で保持してフィルタや発振子等と
して構成される。これらの節は面積を持たない点または
線であるので、理想的には圧電振動子を理想的な点また
は線で保持することが特性上は望ましいが、実際には安
定な圧電振動子の保持を実現するために、ある有限の面
積を持たせて保持している。Piezoelectric vibrators used for mechanical filters, oscillators, etc. are made of materials such as piezoelectric ceramics, crystal, niobium lithium oxide, etc., and an appropriate vibration mode is excited by the piezoelectric effect according to the frequency range to be used. . And
These piezoelectric vibrators are configured as a filter or an oscillator by holding them near a node where the vibration amplitude is 0 so as not to suppress vibration. Since these nodes are points or lines that do not have an area, ideally it is desirable to hold the piezoelectric vibrator at ideal points or lines, but in reality it is a stable holding of the piezoelectric vibrator. In order to realize the above, a certain finite area is held and held.
【0004】図5は、圧電セラミック等の圧電材料で作
られた角板型圧電振動子11の斜視図であり、対抗する
2つの主面に電極12が形成され、この電極間に電界を
印加すれば角板の拡がり振動が励振される。この振動モ
ードの節は角板の中心部の点であり、従来は同図に示す
ように圧電振動子の中心部近傍を、先端が円形の平坦部
をもつバネ性を持つ保持具13で圧電振動子の両側から
保持していた。FIG. 5 is a perspective view of a rectangular plate type piezoelectric vibrator 11 made of a piezoelectric material such as a piezoelectric ceramic. Electrodes 12 are formed on two main surfaces facing each other, and an electric field is applied between the electrodes. Then, the spreading vibration of the square plate is excited. The node of this vibration mode is a point at the center of the square plate. Conventionally, as shown in the same figure, the vicinity of the center of the piezoelectric vibrator is piezo-electrically driven by a holder 13 having a spring-like property having a circular flat end. It was held from both sides of the oscillator.
【0005】図6は、圧電材料で作られた長方形板型圧
電振動子14の斜視図であり、同様に対抗する2つの主
面に駆動用の電極が形成されている。この長方形板には
長さ振動が励振され、長さ振動では振動の節は長方形の
中央部に線状にあり、従来は同図に示すように圧電振動
子の節部近傍をある幅で線状にバネ性を持つ保持具15
で保持していた。FIG. 6 is a perspective view of a rectangular plate type piezoelectric vibrator 14 made of a piezoelectric material. Similarly, driving electrodes are formed on two opposing main surfaces. A length vibration is excited in this rectangular plate, and in the length vibration, the node of vibration is linear in the center of the rectangle. Holding device 15 having a spring-like shape
Was held in.
【0006】[0006]
【発明が解決しようとする課題】従来のフィルタ、発振
子などの圧電振動子の保持構造は、ある程度の面積を持
たせて点状または線状に保持具で圧電振動子を直接保持
していたために、特性を低下させないように保持の面積
を小さくした場合には保持が不安定になり、落下などに
より衝撃力が加わると振動子の保持姿勢が変化し、また
特性も変化してしまった。そして、保持を安定にするた
めに保持の面積を大きくした場合には振動している部分
を押さえることになり、振動子の振動が抑制されるため
特性が低下してしまうという欠点があった。つまり、従
来の圧電振動子の保持構造は、圧電振動子を直接保持し
ていたので、振動子特性への影響の少ない、信頼性の高
い、しかも安定な保持を実現することが困難であるいう
課題があった。In the conventional holding structure for a piezoelectric vibrator such as a filter or an oscillator, the piezoelectric vibrator is directly held by a dot-shaped or linear holder having a certain area. In addition, when the holding area was made small so as not to deteriorate the characteristics, the holding became unstable, and the holding attitude of the vibrator changed when the impact force was applied by dropping or the like, and the characteristics also changed. Further, when the holding area is increased in order to stabilize the holding, the vibrating portion is pressed, and the vibration of the vibrator is suppressed, so that there is a drawback that the characteristics are deteriorated. That is, since the conventional piezoelectric vibrator holding structure directly holds the piezoelectric vibrator, it is difficult to realize stable holding with little influence on the vibrator characteristics, high reliability, and so on. There were challenges.
【0007】[0007]
【課題を解決するための手段】圧電材料を用いた圧電振
動子において、圧電振動子に金属等の電導性突起物を形
成し、圧電振動子の保持具の少なくても圧電振動子との
接触部に電導性突起物よりも硬度の小さい電導性材料を
用い、圧電振動子を電導性突起物と保持具の硬度の小さ
い電導性材料部を介して圧電振動子を保持する。In a piezoelectric vibrator using a piezoelectric material, a conductive protrusion such as a metal is formed on the piezoelectric vibrator so that the piezoelectric vibrator can be brought into contact with at least the piezoelectric vibrator. An electrically conductive material having a hardness lower than that of the electrically conductive protrusion is used for the portion, and the piezoelectric vibrator is held by the electrically conductive protrusion and the electrically conductive material portion having a low hardness of the holder.
【0008】[0008]
【作用】圧電振動子に形成された金属などの電導性突起
物の表面の微細な凹凸が、圧電振動子の保持具の圧電振
動子との接触部の電導性材料に硬度差により食い込むこ
とにより、機械的に結合し圧電振動子を安定に保持する
ことができる。また圧電振動子と保持具の接触部の面積
を大きくしても、突起物の表面の微細な凹凸のため実効
的な接触面積を小さくすることができ、安定性と信頼性
の向上と、特性の低下を少なくした圧電振動子の保持を
実現することができる。[Function] By the fine unevenness on the surface of the conductive projection such as metal formed on the piezoelectric vibrator, the conductive material at the contact portion of the holder of the piezoelectric vibrator with the piezoelectric vibrator bites due to the hardness difference. The piezoelectric vibrator can be stably held by being mechanically coupled. Even if the contact area between the piezoelectric vibrator and the holder is increased, the effective contact area can be reduced due to the fine irregularities on the surface of the protrusions, improving stability and reliability, and improving the characteristics. It is possible to realize the holding of the piezoelectric vibrator with less decrease in
【0009】[0009]
【実施例】以下、図面に従って本発明の実施例について
詳細な説明を行う。Embodiments of the present invention will be described in detail below with reference to the drawings.
【0010】図1は本発明の1実施例の保持構造に用い
る圧電振動子の斜視図である。同図において、1は圧電
セラミック、水晶、リチウム酸ニオブ等の圧電材料で作
られ、2つの対抗する主面に電極2を付けた長方形板状
の圧電振動子であり、電極2に交流電界を印加すること
により、振動子1の長さ方向に主変位を持つ長さ振動モ
ードが励振される。この長さ振動の節は長方形板の中央
部に線状にあり、この節線近傍に、表面に微細な凹凸が
あるニッケル・クロム合金またはニッケル・クロム・ア
ルミニウム合金等の比較的硬度の大きい金属が、線状に
溶射等の工法で金属突起物3として付けられている。FIG. 1 is a perspective view of a piezoelectric vibrator used in a holding structure according to an embodiment of the present invention. In the figure, reference numeral 1 denotes a rectangular plate-shaped piezoelectric vibrator made of a piezoelectric material such as piezoelectric ceramic, crystal, or niobium lithium oxide, and having electrodes 2 attached to two opposing main surfaces. By applying, a length vibration mode having a main displacement in the length direction of the vibrator 1 is excited. The node of this length vibration is linear in the central part of the rectangular plate, and in the vicinity of this node line there is a metal with a relatively high hardness such as nickel-chromium alloy or nickel-chromium-aluminum alloy with fine irregularities on the surface. The metal projections 3 are attached linearly by a method such as thermal spraying.
【0011】図2は図1の圧電振動子1の保持構造を示
す側面図であり、保持具であるバネ4は真ちゅう、銅合
金、アルミ合金などの金属突起物3よりも硬度の小さな
金属で作られている。圧電振動子1は金属突起物3を介
してバネ4で圧電振動子1を上下から挟むようにして保
持され、ケース5とネジ6により一定の力で加圧されて
いる。FIG. 2 is a side view showing the holding structure of the piezoelectric vibrator 1 of FIG. 1, and the spring 4 as a holder is made of a metal having a hardness smaller than that of the metal projection 3 such as brass, copper alloy, or aluminum alloy. Is made. The piezoelectric vibrator 1 is held so as to sandwich the piezoelectric vibrator 1 from above and below by a spring 4 via a metal protrusion 3, and is pressed by a case 5 and a screw 6 with a constant force.
【0012】このようにして保持された圧電振動子1の
金属突起物3とバネ4との接触状況を図3に示す。金属
突起物3は表面に微細な凹凸があり、硬度の差によりば
ね4の接触部に食い込むので、圧電振動子1と保持具で
あるバネ4の接触面積を小さくしても安定な圧電振動子
1の保持ができる。FIG. 3 shows the state of contact between the metal projection 3 and the spring 4 of the piezoelectric vibrator 1 thus held. Since the metal protrusion 3 has fine irregularities on its surface and digs into the contact portion of the spring 4 due to the difference in hardness, the piezoelectric vibrator 1 is stable even if the contact area between the piezoelectric vibrator 1 and the spring 4 serving as a holder is reduced. Can hold 1.
【0013】上記の実施例では、圧電振動子にニッケル
・クロム合金またはニッケル・クロム・アルミニウム合
金等の比較的硬度の大きい金属が電導性突起物として形
成されているが、同様にステンレス合金、タングステ
ン、真ちゅう、銅合金またはアルミ合金等の金属を用い
ることができる。また、電導性を持つものならセラミッ
クでも同様の効果が得られる。そして、電導性突起物の
形成の工法として本実施例では溶射を用いることができ
るが、その他、スパッタ、蒸着、CVD、鍍金または印
刷などの工法でも容易に形成できる。In the above embodiments, the piezoelectric vibrator is formed of a metal having a relatively high hardness, such as nickel-chromium alloy or nickel-chromium-aluminum alloy, as the electrically conductive protrusions. Metals such as brass, copper alloys or aluminum alloys can be used. Further, the same effect can be obtained even if ceramic has conductivity. In this embodiment, thermal spraying can be used as the method for forming the electrically conductive protrusions, but other methods such as sputtering, vapor deposition, CVD, plating or printing can be easily used.
【0014】また上記実施例では、圧電振動子の保持具
としてのバネに、真ちゅう、銅合金、アルミ合金が用い
られているが、図4に示すように、ステンレス、バネ鋼
などの材料に接触部だけに真ちゅう、銅合金、アルミ合
金、鉛合金または半田等の金属または電導性セラミック
などの電導性突起物よりも硬度の小さな材料から成る低
弾性突起物7を形成しても同様の効果が得られることは
言うまでもない。また、上記の実施例では、圧電振動子
として長方形板を用いているが、角板、円板などの輪郭
や拡がり振動モードを用いた圧電振動子などでも全く同
等の効果が得られることは言うまでもない。In the above embodiment, brass, copper alloy, aluminum alloy is used for the spring as the holder of the piezoelectric vibrator. However, as shown in FIG. 4, it contacts a material such as stainless steel or spring steel. The same effect can be obtained by forming a low-elasticity protrusion 7 made of a material having a hardness smaller than that of an electrically conductive protrusion such as brass, a copper alloy, an aluminum alloy, a lead alloy, or a solder, or an electrically conductive ceramic at only the portion. It goes without saying that you can get it. Further, in the above embodiment, the rectangular plate is used as the piezoelectric vibrator, but it is needless to say that the same effect can be obtained even with a piezoelectric vibrator using a contour or a spreading vibration mode such as a square plate and a circular plate. Yes.
【0015】[0015]
【発明の効果】圧電振動子に電導性突起物を形成し、圧
電振動子の保持具の少なくても圧電振動子との接触部に
電導性突起物よりも硬度の小さい材料を用い、圧電振動
子を電導性突起物と保持具の硬度の小さい材料部を介し
て圧電振動子を保持することにより、圧電振動子に形成
された電導性突起物の表面の微細な凹凸が、圧電振動子
の保持具の接触部の材料に硬度差により食い込むことに
より、機械的に結合し圧電振動子を安定に保持すること
ができる。また圧電振動子と保持具の接触部の面積を大
きくしても、表面の微細な凹凸のため実効的な接触面積
を小さくすることができ、安定性と信頼性の向上と、特
性の低下を少なくした圧電振動子の保持を実現すること
ができる。EFFECTS OF THE INVENTION Piezoelectric vibrations are formed by forming electrically conductive protrusions on a piezoelectric vibrator, and using a material having a hardness lower than that of the electrically conductive protrusions for the contact portion of the piezoelectric vibrator at least with the holder. By holding the piezoelectric vibrator through the conductive projection and the material part of the holder having a low hardness, the fine unevenness on the surface of the conductive projection formed on the piezoelectric vibrator causes By digging into the material of the contact portion of the holder due to the hardness difference, it is possible to mechanically bond and stably hold the piezoelectric vibrator. Even if the contact area between the piezoelectric vibrator and the holder is increased, the effective contact area can be reduced due to the fine irregularities on the surface, improving stability and reliability, and lowering the characteristics. It is possible to realize the reduced holding of the piezoelectric vibrator.
【図1】本発明の1実施例の保持構造に用いる圧電振動
子の斜視図FIG. 1 is a perspective view of a piezoelectric vibrator used in a holding structure according to an embodiment of the present invention.
【図2】本発明の1実施例の圧電振動子の保持構造図FIG. 2 is a holding structure diagram of a piezoelectric vibrator according to an embodiment of the present invention.
【図3】本発明の1実施例の保持構造の接触部の拡大図FIG. 3 is an enlarged view of a contact portion of a holding structure according to an embodiment of the present invention.
【図4】本発明の別の実施例の保持構造の接触部の拡大
図FIG. 4 is an enlarged view of a contact portion of a holding structure according to another embodiment of the present invention.
【図5】角板型圧電振動子の従来の保持構造の斜視図FIG. 5 is a perspective view of a conventional holding structure for a rectangular plate type piezoelectric vibrator.
【図6】長方形板型圧電振動子の従来の保持構造の斜視
図FIG. 6 is a perspective view of a conventional holding structure for a rectangular plate type piezoelectric vibrator.
1 圧電振動子 2 電極 3 電導性の金属突起物 4 保持具としてのバネ 5 ケース 6 ネジ 7 低弾性突起物 DESCRIPTION OF SYMBOLS 1 Piezoelectric vibrator 2 Electrode 3 Conductive metal projection 4 Spring as a holder 5 Case 6 Screw 7 Low elasticity projection
───────────────────────────────────────────────────── フロントページの続き (72)発明者 長澤 雅浩 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Masahiro Nagasawa 1006 Kadoma, Kadoma City, Osaka Prefecture Matsushita Electric Industrial Co., Ltd.
Claims (2)
記圧電振動子に金属等の電導性突起物を形成し、上記圧
電振動子の保持具の少なくても上記圧電振動子との接触
部に上記電導性突起物よりも硬度の小さい電導性材料を
用い、上記圧電振動子を上記電導性突起物と上記保持具
の硬度の小さい材料部を介して、上記圧電振動子を保持
したことを特徴とする圧電振動子。1. A piezoelectric vibrator using a piezoelectric material, wherein a conductive protrusion such as a metal is formed on the piezoelectric vibrator, and at least a holder for the piezoelectric vibrator is in contact with the piezoelectric vibrator. A conductive material having a hardness smaller than that of the conductive protrusion is used to hold the piezoelectric vibrator through the conductive protrusion and the material having a low hardness of the holder. Characteristic piezoelectric vibrator.
として、ニッケル・クロム合金、ステンレス合金、タン
グステン、真ちゅう、銅合金またはアルミ合金等の金属
または電導性セラミック等を用い、前記電導性突起物の
形成方法として溶射、スパッタ、蒸着、CVD、鍍金ま
たは印刷を用い、上記圧電振動子の保持具の少なくても
上記圧電振動子との接触部の電導性材料として、真ちゅ
う、銅合金、アルミ合金、鉛合金または半田等の金属ま
たは電導性セラミックを用いることを特徴とする請求項
1記載の圧電振動子。2. A material such as a nickel-chromium alloy, a stainless steel alloy, tungsten, brass, a copper alloy or an aluminum alloy, or a conductive ceramic is used as a material for the conductive protrusion formed on the piezoelectric vibrator. As a method of forming the projections, thermal spraying, sputtering, vapor deposition, CVD, plating or printing is used, and at least the holder of the piezoelectric vibrator is used as a conductive material of the contact portion with the piezoelectric vibrator, brass, copper alloy, The piezoelectric vibrator according to claim 1, wherein a metal such as an aluminum alloy, a lead alloy or solder, or a conductive ceramic is used.
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5126921A JPH06338753A (en) | 1993-05-28 | 1993-05-28 | Piezoelectric oscillator |
KR1019940011235A KR100204457B1 (en) | 1993-05-28 | 1994-05-24 | Piezoelectric oscillator and manufacturing method |
US08/249,738 US5521457A (en) | 1993-05-28 | 1994-05-26 | Holding structure for a piezoelectric vibrator |
DE69421002T DE69421002T2 (en) | 1993-05-28 | 1994-05-27 | Posture structure for a piezoelectric vibrator and associated manufacturing process |
EP94108171A EP0626212B1 (en) | 1993-05-28 | 1994-05-27 | Holding structure of piezoelectric vibrator and manufacturing method therefor |
US08/782,742 US6111338A (en) | 1993-05-28 | 1997-01-13 | Acceleration sensor and method for producing the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5126921A JPH06338753A (en) | 1993-05-28 | 1993-05-28 | Piezoelectric oscillator |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH06338753A true JPH06338753A (en) | 1994-12-06 |
Family
ID=14947204
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5126921A Pending JPH06338753A (en) | 1993-05-28 | 1993-05-28 | Piezoelectric oscillator |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH06338753A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2012115239A1 (en) * | 2011-02-25 | 2012-08-30 | 株式会社大真空 | Piezoelectric vibrating reed, piezoelectric vibrator, method for manufacturing piezoelectric vibrating reed, and method for manufacturing piezoelectric vibrator |
-
1993
- 1993-05-28 JP JP5126921A patent/JPH06338753A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2012115239A1 (en) * | 2011-02-25 | 2012-08-30 | 株式会社大真空 | Piezoelectric vibrating reed, piezoelectric vibrator, method for manufacturing piezoelectric vibrating reed, and method for manufacturing piezoelectric vibrator |
US9130148B2 (en) | 2011-02-25 | 2015-09-08 | Daishinku Corporation | Piezoelectric resonator plate, piezoelectric resonator, method for manufacturing piezoelectric resonator plate, and method for manufacturing piezoelectric resonator |
JP5880538B2 (en) * | 2011-02-25 | 2016-03-09 | 株式会社大真空 | Piezoelectric vibrating piece, piezoelectric vibrator, method for manufacturing piezoelectric vibrating piece, and method for manufacturing piezoelectric vibrator |
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