JPH06337642A - Liquid crystal display device - Google Patents

Abstract

PURPOSE:To provide a liquid crystal display device having a high yield characteristic, high reliability, and high display quality, though relieving for discontinuity is performed. CONSTITUTION:In an active matrix substrate having auxiliary wiring for relieving a defect, two or more auxiliary electrode wiring 9, 11 are arranged crossing and holding an insulator 17 between them, while marks indicating working positions are provided at a crossing section of auxiliary electrode wiring and a crossing section of signal electrode lines and auxiliary electrode lines and their peripheral parts.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid crystal display device having a defect relief auxiliary electrode line.

[0002]

2. Description of the Related Art In recent years, liquid crystal display devices have been actively approached for large-capacity display typified by image display, and have attracted the most attention as displays capable of realizing low-priced devices.

FIG. 7 is an electrical schematic diagram of a conventional active matrix liquid crystal display device. In the active matrix substrate 1, the gate electrode wiring 2 and the source electrode wiring 4 intersect with each other, and at the intersection of the gate electrode wiring 2 and the source electrode wiring 4, a switching element 6 made of a thin film transistor and a pixel electrode 7 made of indium tin oxide are formed. A display area 8 is formed, and the source electrode wiring 4 is formed around the display area 8.
The auxiliary electrode line 7 intersects with. Switching element 6
For example, a metal-insulator-metal structure or a diode structure having a two-terminal circuit may be used.

A spacer made of glass fibers or resin fine particles is provided on a counter substrate made of an active matrix substrate 1 having such electrical wiring and a transparent insulating substrate having a transparent common electrode and a light shielding layer (not shown). The pixel electrode 7 and the transparent common electrode are opposed to each other and bonded with a resin adhesive, and the gap formed by the spacer is filled with the liquid crystal composition to form a liquid crystal panel.

FIG. 8 shows the source electrode wirings 4 and 1 in FIG.
An enlarged plan view of intersections 15a and 15b with the next auxiliary electrode wirings 9 and 9'is shown. At the intersections 15a and 15b of the source electrode wiring 4 and the primary auxiliary electrode wirings 9 and 9 ', the respective electrode wirings are straight lines.

FIG. 9 is a sectional view taken along line BB 'in FIG. The source electrode wiring 4 and the primary auxiliary electrode wiring 9 are three-dimensionally crossed on the glass substrate 19 with the insulator 17 interposed therebetween.

In FIG. 7, for example, the source electrode wiring 4 '
When there is a defect 16 on the upper side and a disconnection occurs, in order to relieve the disconnection, as shown in FIG. 8, the intersections 15a, 1 of the source electrode wiring 4'and the primary auxiliary electrode wirings 9, 9'are crossed.
A laser beam is applied to an arbitrary point 20 of 5b to electrically connect the source electrode wiring 4'and the primary auxiliary electrode wirings 9 and 9 '. As a result, a normal signal required as an image is supplied to the defective source electrode wiring 4 '. In this way, the line defect generated in the active matrix substrate can be repaired.

[0008]

However, in a liquid crystal display device having such a defect relief auxiliary wiring, an interlayer short circuit may occur during the manufacturing process at the intersection of the defect relief wiring and the source electrode wiring. . For example, as shown in FIG. 10, this interlayer short circuit causes the source electrode wirings 4a and 4b.
15b and 15c between the first and second auxiliary electrode wirings 9 and 9 '
If this occurs, there is a problem that the source electrode wirings 4a and 4b are electrically short-circuited through the auxiliary wiring, making it impossible to display a normal image. Further, as shown in FIG. 11, when the primary auxiliary electrode wiring A (9), the primary auxiliary electrode wiring A '(9') and the source electrode wiring 4'have disconnections (16a to 16c), they are corrected by the wiring structure. There was a problem that became impossible.

Further, at the intersection of the primary auxiliary electrode wiring 9 and the source electrode wiring 4 in FIGS. 8 and 9, it is necessary to irradiate the laser at the intersection of the two wirings when performing the interlayer short-circuit processing by laser irradiation. There is. However, when looking at the processed part from the back surface of the active matrix substrate,
The primary auxiliary electrode wiring 9 is hidden by the source electrode wiring 4, and the entire intersection cannot be known. At this time, if the area of the crossing portion is increased, the crossing area of the primary auxiliary electrode wiring 9 and the source electrode wiring 4, that is, the additional capacitance of the source electrode wiring 4 increases, so that the crossing area cannot be unnecessarily increased. . That is, since it is not possible to know the exact machining position, there is a problem that a plurality of machining operations cannot be performed within the limited area of one intersection.

Therefore, the present invention provides relief from disconnection while
It is an object of the present invention to solve the above problems and provide a liquid crystal display device having excellent display quality.

[0011]

In order to achieve the above object, the present invention divides auxiliary electrode lines into two, first and second, on an active matrix substrate of a liquid crystal display device having auxiliary wiring for defect relief. , Are arranged so as to intersect each other through an insulating layer, and a mark indicating a processing position is arranged at a portion where the two auxiliary insulators intersect, a source electrode wiring and an auxiliary wiring, or a periphery thereof. It is configured as described above.

[0012]

In the liquid crystal display device having the above-mentioned structure, the accuracy of the processing position is improved as compared with the conventional one, and the number of processing points can be increased even in the active matrix substrate having the same crossing area, and the reliability of the processing part is greatly improved.

[0013]

EXAMPLES Examples of the present invention will be described below. Figure 1
FIG. 3 is an electrical schematic diagram of the liquid crystal display device of the first embodiment of the present invention. FIG. 2 is an enlarged plan view of a portion where the source electrode wiring and the primary auxiliary electrode wiring of the liquid crystal display device in the same embodiment intersect.

Around the image display region 8 on the active matrix substrate 1, a primary auxiliary electrode line (first auxiliary electrode line) 9, which intersects with the source electrode line 4 via an insulator,
10, a secondary auxiliary electrode wire (second auxiliary electrode wiring) 11, which intersects with the primary auxiliary electrode wires 9 and 10 via an insulator,
Have twelve.

Source electrode wiring 4 and secondary auxiliary electrode wiring 1
1, 11 ', 12, 12' are made of aluminum having a film thickness of 200 nm, and a pattern in which three convex portions and two concave portions are repeated is patterned at a portion intersecting with the primary auxiliary electrode wirings 9, 10. Silicon nitride having a film thickness of 400 nm formed by plasma CVD was used for the interlayer insulator 17. Further, the primary auxiliary electrode wirings 9, 9 ', 10, 10'
As a result, aluminum having a film thickness of 200 nm was formed by sputtering. The entire structure of the liquid crystal display device of this embodiment other than the auxiliary electrode wiring is the same as that of the conventional example.

FIG. 3 is a cross sectional view of the source electrode of the liquid crystal display device shown in FIG.
It is a -A 'sectional view. The source electrode wiring 4 and the primary auxiliary electrode wiring 9 are normally kept insulated by sandwiching the silicon nitride film which is the above-mentioned interlayer insulator 17. This structure is the same at the intersection of the primary auxiliary electrode line and the secondary auxiliary electrode line, and in that case, the source electrode wiring 4 in FIG.
Corresponds to the secondary auxiliary electrode line.

In this example, when the source electrode wiring 4 and the primary or secondary auxiliary electrode wiring were electrically connected by laser irradiation, the uneven portion was irradiated.

In FIG. 1, for example, the source electrode wiring 4 '
If there is a defect 16 on the upper side and a disconnection occurs, in order to remedy this disconnection, a laser beam is applied to the point 20 at the intersection 15a between the source electrode wiring 4'and the primary auxiliary electrode wiring 9 as shown in FIG. Irradiate and source electrode wiring 4'and 1
The next auxiliary electrode wiring 9 is electrically connected. Similar processing 1
By performing steps 5b, 13a, and 13e as well, a normal signal required for an image is supplied to the source electrode wiring 4'in which a defect has occurred. In this way, the line defect 16 generated in the active matrix substrate 1 can be repaired.
Note that the points 20 are not patterned on the substrate.

Next, another embodiment of the present invention is shown in FIGS. 4, FIG. 5, and FIG. 6, the mark indicating the processing position is made of chromium having a film thickness of 100 nm by patterning. The source electrode wiring 4, the primary auxiliary electrode wiring 9, and the interlayer insulator 17 have the same structure as that of FIG. In FIG. 4, the interlayer short-circuit processing is performed along the cross mark in the center. In FIG. 5, the interlayer short-circuit processing is performed according to the tip of the arrow. In FIG. 6, the interlayer short-circuit processing is performed within the rectangular mark at the intersection.

[0020]

As described above, according to the present invention, most of the conventional defective products due to the interlayer short circuit of the auxiliary electrode wiring can be treated as good products. Further, since the position of the inter-layer short circuit processing by laser irradiation is easy to recognize, it is possible to accurately move to the processing position.
As a result, it is possible to perform processing without overlapping the processed parts or removing the intersecting part of the wiring, and a stable connection resistance can be obtained even if the area of the intersecting part is the same as the conventional one. In addition, the success rate of interlayer short-circuit processing at one intersection can be maintained at 100%, and at the same time, the reliability of connection processing at one intersection can be significantly improved. As a result, it was confirmed that the yield and display performance of liquid crystal display devices were dramatically improved.

[Brief description of drawings]

FIG. 1 is an electrical schematic diagram of a liquid crystal display device according to a first embodiment of the present invention.

FIG. 2 is an enlarged plan view of the same embodiment.

FIG. 3 is a sectional view taken along the line AA ′ in FIG.

FIG. 4 is an enlarged plan view of a crossing portion of a source electrode wiring and a primary auxiliary electrode wiring of a liquid crystal display device according to another embodiment of the present invention viewed from the glass substrate side.

FIG. 5 is an enlarged plan view of a crossing portion of a source electrode wiring and a primary auxiliary electrode wiring of a liquid crystal display device according to another embodiment of the present invention viewed from the glass substrate side.

FIG. 6 is an enlarged plan view of a portion where a source electrode wiring and a primary auxiliary electrode wiring intersect in a liquid crystal display device according to another embodiment of the present invention as seen from the glass substrate side.

FIG. 7 is an electrical schematic diagram of a conventional active matrix liquid crystal display device.

FIG. 8 is an enlarged plan view of the conventional example.

9 is a sectional view taken along line BB ′ in FIG.

FIG. 10: 1 due to defect defect of conventional liquid crystal display device
Electrical schematic showing an example

FIG. 11 is an electrical schematic diagram showing another defect example.

[Explanation of symbols]

1 Active Matrix Substrate 7 Pixel Electrode 8 Image Display Area 9 Primary Auxiliary Electrode Wiring A 9 'Primary Auxiliary Electrode Wiring A'10 Primary Auxiliary Electrode Wiring B 10' Primary Auxiliary Electrode Wiring B'11 Secondary Auxiliary Electrode Wiring A 11 'Secondary auxiliary electrode wiring A'12 Secondary auxiliary electrode wiring B 12' Secondary auxiliary electrode wiring B'13a to 13h Primary auxiliary electrode wiring-Secondary auxiliary electrode wiring intersection 15a to 15c Source electrode wiring-Primary Auxiliary electrode wiring intersection 16 Defects 17 Interlayer insulators 22a, 22b Tertiary auxiliary electrode wiring 20 Processing points 21 Marks indicating processing positions

Claims (2)

[Claims] 1. Defect relief first and second auxiliary electrode wirings are provided, the first auxiliary electrode wiring intersects the signal electrode wiring, and the secondary auxiliary electrode wiring is interposed via an insulator. A liquid crystal display device characterized by being arranged so as to intersect. 2. A plurality of gate signal electrode wirings, a plurality of source signal electrode wirings intersecting the gate signal electrode wirings, and an intersection of the gate signal electrode wirings and the source signal electrode wirings on an active matrix substrate. An image display region including a pair of switching elements and a pixel electrode, and an auxiliary electrode wiring for defect relief that intersects the signal electrode wiring of one of the gate and the source, and the auxiliary electrode wiring is the signal electrode wiring. A liquid crystal display device, characterized in that a mark indicating a processing position is provided in a portion intersecting with an insulator or in the vicinity thereof.