JPH0633392Y2 - シ−ス型温度測定素子 - Google Patents

シ−ス型温度測定素子

Info

Publication number
JPH0633392Y2
JPH0633392Y2 JP1987048112U JP4811287U JPH0633392Y2 JP H0633392 Y2 JPH0633392 Y2 JP H0633392Y2 JP 1987048112 U JP1987048112 U JP 1987048112U JP 4811287 U JP4811287 U JP 4811287U JP H0633392 Y2 JPH0633392 Y2 JP H0633392Y2
Authority
JP
Japan
Prior art keywords
sheath
temperature measuring
measuring element
temperature
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987048112U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63155033U (enrdf_load_stackoverflow
Inventor
治 松本
Original Assignee
国際電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 国際電気株式会社 filed Critical 国際電気株式会社
Priority to JP1987048112U priority Critical patent/JPH0633392Y2/ja
Publication of JPS63155033U publication Critical patent/JPS63155033U/ja
Application granted granted Critical
Publication of JPH0633392Y2 publication Critical patent/JPH0633392Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measuring Temperature Or Quantity Of Heat (AREA)
JP1987048112U 1987-03-30 1987-03-30 シ−ス型温度測定素子 Expired - Lifetime JPH0633392Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987048112U JPH0633392Y2 (ja) 1987-03-30 1987-03-30 シ−ス型温度測定素子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987048112U JPH0633392Y2 (ja) 1987-03-30 1987-03-30 シ−ス型温度測定素子

Publications (2)

Publication Number Publication Date
JPS63155033U JPS63155033U (enrdf_load_stackoverflow) 1988-10-12
JPH0633392Y2 true JPH0633392Y2 (ja) 1994-08-31

Family

ID=30869345

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987048112U Expired - Lifetime JPH0633392Y2 (ja) 1987-03-30 1987-03-30 シ−ス型温度測定素子

Country Status (1)

Country Link
JP (1) JPH0633392Y2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002162296A (ja) * 2000-11-27 2002-06-07 Nippon Dennetsu Co Ltd 温度感知センサー付きヒータ
US20220020571A1 (en) * 2020-07-16 2022-01-20 Tokyo Electron Limited Temperature sensor and plasma processing apparatus

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19990081157A (ko) * 1998-04-27 1999-11-15 김덕중 가스화기의 내부온도측정장치
KR20020052869A (ko) * 2000-12-26 2002-07-04 이구택 션트에러 방지를 위한 고온측정용 열전대
JP5189419B2 (ja) * 2008-06-30 2013-04-24 アズビル株式会社 温度センサ
JP2010054491A (ja) * 2008-07-30 2010-03-11 Saginomiya Seisakusho Inc 温度測定センサーおよび温度測定センサーを用いた温度測定装置
KR101277773B1 (ko) * 2012-12-28 2013-06-24 우진 일렉트로나이트(주) 홀더 교체부재 및 이를 포함하는 홀더 조립체

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57118933U (enrdf_load_stackoverflow) * 1981-01-19 1982-07-23

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002162296A (ja) * 2000-11-27 2002-06-07 Nippon Dennetsu Co Ltd 温度感知センサー付きヒータ
US20220020571A1 (en) * 2020-07-16 2022-01-20 Tokyo Electron Limited Temperature sensor and plasma processing apparatus

Also Published As

Publication number Publication date
JPS63155033U (enrdf_load_stackoverflow) 1988-10-12

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