JPH0632703Y2 - レ−ザ装置 - Google Patents

レ−ザ装置

Info

Publication number
JPH0632703Y2
JPH0632703Y2 JP6863687U JP6863687U JPH0632703Y2 JP H0632703 Y2 JPH0632703 Y2 JP H0632703Y2 JP 6863687 U JP6863687 U JP 6863687U JP 6863687 U JP6863687 U JP 6863687U JP H0632703 Y2 JPH0632703 Y2 JP H0632703Y2
Authority
JP
Japan
Prior art keywords
laser
laser beam
chamber
mirror
transmissive member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP6863687U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63177070U (enrdf_load_stackoverflow
Inventor
基 佐々木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibuya Corp
Original Assignee
Shibuya Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shibuya Corp filed Critical Shibuya Corp
Priority to JP6863687U priority Critical patent/JPH0632703Y2/ja
Publication of JPS63177070U publication Critical patent/JPS63177070U/ja
Application granted granted Critical
Publication of JPH0632703Y2 publication Critical patent/JPH0632703Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Lasers (AREA)
JP6863687U 1987-05-08 1987-05-08 レ−ザ装置 Expired - Lifetime JPH0632703Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6863687U JPH0632703Y2 (ja) 1987-05-08 1987-05-08 レ−ザ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6863687U JPH0632703Y2 (ja) 1987-05-08 1987-05-08 レ−ザ装置

Publications (2)

Publication Number Publication Date
JPS63177070U JPS63177070U (enrdf_load_stackoverflow) 1988-11-16
JPH0632703Y2 true JPH0632703Y2 (ja) 1994-08-24

Family

ID=30908636

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6863687U Expired - Lifetime JPH0632703Y2 (ja) 1987-05-08 1987-05-08 レ−ザ装置

Country Status (1)

Country Link
JP (1) JPH0632703Y2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4657103B2 (ja) * 2003-04-22 2011-03-23 株式会社小松製作所 露光用２ステージレーザ装置
JP2006203008A (ja) * 2005-01-21 2006-08-03 Komatsu Ltd ２ステージレーザシステム

Also Published As

Publication number Publication date
JPS63177070U (enrdf_load_stackoverflow) 1988-11-16

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