JPH0632683Y2 - 半導体ウエハ保持ボート位置監視装置 - Google Patents
半導体ウエハ保持ボート位置監視装置Info
- Publication number
- JPH0632683Y2 JPH0632683Y2 JP1987143115U JP14311587U JPH0632683Y2 JP H0632683 Y2 JPH0632683 Y2 JP H0632683Y2 JP 1987143115 U JP1987143115 U JP 1987143115U JP 14311587 U JP14311587 U JP 14311587U JP H0632683 Y2 JPH0632683 Y2 JP H0632683Y2
- Authority
- JP
- Japan
- Prior art keywords
- boat
- semiconductor wafer
- switch
- monitoring device
- wafer holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 title claims description 13
- 238000012806 monitoring device Methods 0.000 title claims description 7
- 230000007246 mechanism Effects 0.000 claims description 19
- 238000012544 monitoring process Methods 0.000 claims description 14
- 239000010453 quartz Substances 0.000 claims description 13
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 13
- 230000003028 elevating effect Effects 0.000 claims description 11
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 7
- 235000012431 wafers Nutrition 0.000 description 19
- 235000014676 Phragmites communis Nutrition 0.000 description 11
- 239000007858 starting material Substances 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 2
- 230000007723 transport mechanism Effects 0.000 description 2
- 230000003213 activating effect Effects 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
Landscapes
- Control Of Conveyors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987143115U JPH0632683Y2 (ja) | 1987-09-21 | 1987-09-21 | 半導体ウエハ保持ボート位置監視装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987143115U JPH0632683Y2 (ja) | 1987-09-21 | 1987-09-21 | 半導体ウエハ保持ボート位置監視装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6448031U JPS6448031U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-03-24 |
| JPH0632683Y2 true JPH0632683Y2 (ja) | 1994-08-24 |
Family
ID=31409648
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987143115U Expired - Lifetime JPH0632683Y2 (ja) | 1987-09-21 | 1987-09-21 | 半導体ウエハ保持ボート位置監視装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0632683Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6127324Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1980-05-23 | 1986-08-14 | ||
| JPS6168444U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1984-10-12 | 1986-05-10 |
-
1987
- 1987-09-21 JP JP1987143115U patent/JPH0632683Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6448031U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-03-24 |