JPH06326203A - Laser marking device for integrated circuit device - Google Patents

Abstract

PURPOSE:To prevent the generation of a deviated or defective marking position in its outside view by correcting the position of the marking automatically. CONSTITUTION:A laser beam scanning range 3 formed with a marking character column direction and a direction intersecting with the direction is calculated, thereby automatically correcting marking so that the characters 4 may be centered in a marking area 2. This construction makes it possible to prevent the generation of a marking whose outside view is unattractive or defective in terms of products where the number of marking characters or marking character columns to ICI is different.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laser marking device for an integrated circuit device, and more particularly to a laser marking device for scanning a laser beam to perform a predetermined marking on the integrated circuit device.

[0002]

2. Description of the Related Art Referring to FIG. 4, which is a longitudinal sectional view of a conventional laser marking device for scanning an integrated circuit device (hereinafter referred to as an IC) with a laser beam, a laser oscillator 7 for emitting a laser beam is shown. A laser beam scanning unit 10 for scanning the laser beam oscillated by the oscillator 7, a laser control unit 12 for controlling the oscillator 7 and the laser beam scanning unit 10, a marking stage for marking the IC 1, and a marking character. And an input arithmetic unit 12.

The IC 1 which is slid on the slidable sliding rail 5 by its own weight and stopped and positioned by the IC stopper 6 is scanned by a reflection mirror 9 attached to a scanner motor 8 emitted from a laser oscillator 7. Predetermined markings are made on the IC 1 by the laser light 11.

Referring to FIG. 5 which shows the flow from the marking preparation of this apparatus to the actual marking, first, in the marking preparation stage, the operator inputs the characters to mark the corresponding product (process 101) and the laser control by the arithmetic unit 13 is performed. Create (scan) data (Process 10)
2). When the actual marking work is started and the IC1 is positioned on the marking stage (process 105), the IC1 is created using the laser control (scanning) data created.
Is marked (process 106). After that, the new IC 1 is positioned on the marking stage (process 105), and the marking (process 106) is repeatedly executed.

[0005]

In this conventional laser marking device, when the operator inputs a marking character at the start of marking, when the number of marking characters is large or small, the marking area 2 (score) of the IC 1 is marked. The marking characters 4 may be biased ((A) in FIG. 6), or the marking characters 4 may not fit in the marking area 2 and become defective ((B) in FIG. 6). However, there was a problem that the marking position had to be corrected.

[0006]

A laser marking device for an integrated circuit device according to the present invention has a structure in which a marking character string is used in a laser marking device for an integrated circuit device for scanning a laser beam to perform a predetermined marking on the integrated circuit device. It is characterized by comprising an arithmetic circuit for arithmetically operating a scanning range of a laser beam formed in a direction orthogonal to the above direction, and means for automatically correcting the marking position by the arithmetic value calculated by this circuit.

[0007]

1 shows a marking method according to a first embodiment of the present invention, in this embodiment, the marking position is automatically corrected by correcting the laser beam scanning data. This is a case of moving.

First, in the marking preparation stage, the operator inputs the characters to be marked on the product (process 101), and at the same time, the arithmetic unit 13 creates laser control (scanning) data (process 102).

Then, the scanning range of the laser beam formed in the marking character string direction and the direction orthogonal to the direction is calculated by the laser control (scanning) data (process 103).
Laser control (scanning) data is corrected so as to center the marking area (process 104).

When the actual marking operation is started and the IC is positioned on the marking stage (Process 10)
5) The IC is marked with the corrected laser control (scanning) data (process 106). After that, a new IC is positioned on the marking stage (process 105), and the marking (process 106) is repeatedly executed.

Referring to FIG. 2 which shows the appearance of the marking when the marking position of this embodiment is automatically corrected, the marking characters 4 (A) arranged in a biased position in the marking area 2 of the IC 1 are automatically corrected. As a result, as shown in the laser beam scanning range 3 in (B), marking is performed in a centered form.

Referring to FIG. 3, which is a longitudinal sectional view of a laser marking apparatus according to the second embodiment of the present invention, in which the marking position is automatically corrected by moving the IC positioning stage, referring to FIG. The marking position correction data calculated by the marking character input calculation device 13 is sent to the moving pulse motor 14 to change the sliding stop / positioning position of the IC1 to correct / center the marking position on the IC1. The other parts are common to those in FIG. 4 and are indicated by common reference numerals.

[0013]

As described above, according to the present invention, the scanning range of the laser beam formed in the marking character string direction and the direction orthogonal to the direction is calculated, and the marking position is automatically corrected. When marking products with different numbers of marking characters or marking character strings on ICs, it eliminates the problem of uneven marking appearance and defects that do not fit in the marking area and become defective. In the above, there is an effect that it is not necessary to correct the marking position.

[Brief description of drawings]

FIG. 1 is a flow chart showing a state from marking preparation to marking according to a first embodiment of the present invention.

2A and 2B are plan views showing an appearance of marking on an IC in the first embodiment.

FIG. 3 is a vertical sectional view of a laser marking device that corrects a marking position by moving an IC positioning stage according to a second embodiment of the present invention.

FIG. 4 is a vertical cross-sectional view of a conventional IC laser marking device.

FIG. 5 is a flowchart showing a state from marking preparation to marking according to a conventional technique.

6 (A) and 6 (B) are plan views showing defects of the marking appearance in the conventional marking.

[Explanation of symbols]

 1 IC 2 Marking Area 3 Laser Light Scanning Area 4 Marking Character 5 Sliding Rail 6 IC Stopper 7 Laser Oscillator 8 Scanner Motor 9 Reflecting Mirror 10 Laser Light Scanning Section 11 Laser Light 12 Laser Control Section 13 Marking Character Input Arithmetic Device 14 Pulse Motor

Claims (3)

[Claims] 1. A laser marking device of an integrated circuit device for scanning a laser beam to perform a predetermined marking on the integrated circuit device, wherein a scanning range of the laser beam formed in a direction orthogonal to the marking character string direction is defined. A laser marking device for an integrated circuit device, comprising: an arithmetic circuit for performing arithmetic operation; and means for automatically correcting a marking position based on an arithmetic value calculated by this circuit. 2. The laser marking device for an integrated circuit device according to claim 1, wherein the means for automatically correcting the marking position is means for moving the irradiation position of the laser light so as to correct the scanning data of the laser light. 3. The automatic correction means for the marking position,
The laser marking device for an integrated circuit device according to claim 1, wherein the laser marking device is a moving means of the integrated circuit device positioning stage.