JP2823750B2 - Laser marking device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laser marking apparatus for marking a workpiece with a laser beam.

[0002]

2. Description of the Related Art FIG. 4 is a block diagram showing a conventional laser marking apparatus. In the drawing, reference numeral 1 denotes a laser oscillator, 2 denotes a laser beam emitted from a laser oscillator 1, and 3 denotes a predetermined laser beam such as a character or a figure. A mask on which a pattern is formed, 4 a reflecting mirror for reflecting the incident laser beam 2, 5 an imaging lens,
Reference numeral 6 denotes a workpiece such as a semiconductor package, and 7 denotes a storage tray for storing the workpiece 6. For example, as shown in FIG. 5, the workpiece 6 is stored in six holes 7a. I have.

Next, the operation will be described. First, when a laser beam 2 is emitted from a laser oscillator 1, the laser beam 2 is received, a predetermined pattern and a light pattern of characters formed on a mask 3 are incident on a reflecting mirror 4, and further changed in a predetermined direction. To the imaging lens 5. For this reason, the imaging lens 5 irradiates the surface of the workpiece 6 stored in the storage tray 7 at least once after reducing the light pattern to the same size or a fixed ratio.

As a result, the same pattern as the mask 3 irradiated with the light pattern or a pattern composed of characters formed on the mask 3 is marked on the surface of the workpiece 6.

Since a small gap G is provided between the storage tray 7 and the workpiece 6, as shown in FIG. 5, the workpiece 6 is loose in the storage tray 7. ,
It is displaced, rotated, or tilted in the XY directions. Therefore, in order to mark the workpiece 6 at a regular position, it is necessary to perform the marking after positioning the workpiece 6 by some method.

For this reason, as shown in FIG. 6, a method of positioning the workpiece 6 in the storage tray 7 has been proposed. The positioning is performed by lifting a positioning jig 9 holding the workpiece 6 in the storage tray 7 from below through a hole 8a provided in the surface plate 8 and a hole 7a of the storage tray 7. It is.

After the positioning is completed, the laser beam 2 is irradiated to perform marking, and after the marking is completed, the positioning jig 9 is lowered and the work 6 is returned to the original storage tray 7. Become. When there are a plurality of workpieces 6 in the storage tray 7, the above operation is repeated, or marking is performed in the same manner as above using the positioning jigs 9 corresponding to the number of the workpieces 6.

FIG. 7 shows another conventional positioning method for a workpiece. This is because the positioning projection 10a for minimizing the gap with the workpiece 6 is positioned on the positioning storage tray 1.
0. According to this, since the workpiece 6 is positioned in the positioning storage tray 10 by the positioning projection 10a, the workpiece 6 is positioned in the positioning storage tray 1.
The laser beam is used to carry the marking on the workpiece 6 simply by transporting it to the predetermined position.

[0009]

Since the conventional laser marking apparatus is configured as described above, the workpiece 6
In order to mark the upper regular position, it is necessary to position the workpiece 6 using the positioning jig 9 and the positioning storage tray 10. For example, the positioning jig 9 moves the workpiece 6 up and down. It takes a long time to perform a precise positioning operation, thereby reducing the processing ability, requiring a positioning jig according to the shape of the workpiece, and causing a problem such as an increase in cost.

On the other hand, when the positioning storage tray 10 is used, the clearance between the workpiece 6 and the positioning projection 10a of the storage tray 10 must be minimized. There is a problem in that it is difficult to take out and put in, and a storage mistake and a take-out mistake occur, and there is also a problem in that the appearance is deteriorated due to injury when the workpiece 6 is taken in and out.

The first aspect of the present invention has been made in order to solve the above-mentioned problems, and it is possible to control a predetermined angle by controlling an angle of a reflecting mirror without positioning a workpiece in a storage tray. It is an object of the present invention to obtain a laser marking device capable of performing accurate marking at a position.

According to the second aspect of the present invention, only the position and inclination of the movable table on which the storage tray is installed are controlled.
An object of the present invention is to provide a laser marking device capable of accurately marking a set position on a workpiece.

A third object of the present invention is to provide a laser marking apparatus capable of accurately marking a predetermined position on a workpiece only by controlling the position and inclination of the mask.

A fourth object of the present invention is to provide a laser marking apparatus capable of accurately marking a predetermined position by controlling the angle of a reflecting mirror even when a mask is not used.

According to a fifth aspect of the present invention, there is provided a laser marking apparatus capable of performing marking at a predetermined position on a workpiece only by controlling the position and inclination of a movable table of a tray without using a mask. Aim.

It is another object of the present invention to provide a laser marking apparatus capable of accurately determining a marking position by calculation and performing marking.

[0017]

According to a first aspect of the present invention, there is provided a laser marking apparatus including a recognition device for recognizing a mark position and an inclination of a marking made on a workpiece by an optical pattern from a mask, and recognizing the recognition data. The angle of the reflecting mirror is controlled so that the reflecting mirror control means corrects the mark position with respect to the workpiece.

According to a second aspect of the present invention, there is provided a laser marking apparatus for controlling the position and inclination of a storage tray for storing the workpiece so that the mark position with respect to the workpiece is corrected on the movable tray table. It was done.

According to a third aspect of the present invention, in the laser marking apparatus, the mask control device controls the position and inclination of the mask so as to correct the mark position with respect to the workpiece.

According to a fourth aspect of the present invention, there is provided a laser marking device provided with a recognition device for recognizing a position and an inclination of a mark of a marking made on a workpiece by a laser beam directly reflected by a reflecting mirror, The angle of the reflecting mirror is controlled so that the reflecting mirror control means corrects the mark position with respect to the workpiece.

According to a fifth aspect of the present invention, there is provided a laser marking device, further comprising a recognition device for recognizing a mark position and an inclination of a marking made on a workpiece by a laser beam directly reflected by a reflecting mirror. The tray movable table controls the position and inclination of a storage tray for storing the workpiece so that the mark position with respect to the workpiece is corrected.

According to a sixth aspect of the present invention, there is provided a laser marking apparatus, comprising: a recognition device for recognizing a mark position and an inclination of a mark on a workpiece; According to the comparison result with the previous representative coordinates, the correction data of the mark position is obtained by calculation.

[0023]

The laser marking device according to the first aspect of the present invention can recognize the displacement and inclination of the workpiece in the X-Y direction by the recognition device, so that when the workpiece is displaced or tilted. Switches the angle of the laser beam by switching the angle of the reflecting mirror so that the marking can be correctly performed at a predetermined position on the workpiece regardless of the displacement or inclination of the workpiece.

In the laser marking apparatus according to the second aspect of the present invention, the position and inclination of the tray movable table on which the storage tray for storing the workpiece is set are adjusted.
It is possible to correctly mark a predetermined position on a workpiece according to a positional shift or a tilt of the workpiece.

In the laser marking apparatus according to the third aspect of the present invention, the mask control device adjusts the position and inclination of the mask in accordance with the inclination of the workpiece so that the marking can be correctly performed at a predetermined position on the workpiece. I do.

In the laser marking apparatus according to the fourth aspect of the present invention, even when a mask is not used, by adjusting the angle of the reflecting mirror, a predetermined position of the workpiece can be maintained irrespective of the displacement or inclination of the workpiece. To be able to perform marking.

In the laser marking apparatus according to the fifth aspect of the present invention, even when a mask is not used, marking is performed at a predetermined position of the workpiece by controlling the movable table of the tray regardless of the displacement or inclination of the workpiece. Be able to do it.

In the laser marking apparatus according to the sixth aspect of the present invention, the position of the workpiece is recognized at one to three points by using the punched holes of the storage tray as representative coordinates, and a regular representative of these representative coordinates is used. A position shift and a tilt from coordinates can be recognized by calculation.

[0029]

【Example】

Embodiment 1 FIG. An embodiment of the present invention will be described below with reference to the drawings. In the figure, 1 is a laser oscillator, 2 is a laser beam emitted from the laser oscillator 1, 3 is a mask on which a predetermined pattern such as a character or a figure is formed, 4a, 4b, 4c
Are reflecting mirrors for reflecting the incident laser beam 2;
b, 12c are angle adjusting reflectors as reflector angle control means for controlling the inclination of these reflectors 4a, 4b, 4c;
5 is an imaging lens, 6 is a workpiece such as a semiconductor package, 7 is a storage tray for storing the workpiece 6, and 11 is a recognition device for recognizing the position of the workpiece 6 in the storage tray 7. .

Next, the operation will be described. First, based on the light pattern (image pattern) of the workpiece 6, the recognizing device 11 recognizes a position shift and a tilt of the workpiece 6 in the storage tray 7. Next, the laser beam 2 emitted from the laser oscillator 1 is passed through the mask 3 to output a predetermined light pattern.
b and 4c are reflected one after another.

At this time, based on the recognition data of the workpiece 6 recognized by the recognition device 11, the angle adjusting reflector 1
2a, 12b, and 12c, reflecting mirrors 4a, 4b, and 4c
Correct the angle of. Thereby, the angle of the laser beam can be corrected, and the position of the mark is shifted in the X-Y direction or tilted by a predetermined angle, so that the position of the workpiece 6 can be properly adjusted in accordance with the above-mentioned positional shift or tilt. Can be marked.

Next, an example of a method of recognizing the workpiece 6 using the recognition device 11 will be described with reference to FIG. In the drawing, reference numeral 6a denotes a workpiece placed at a regular position in the storage tray 7 (x ₀ , y ₀ ), (x ₁ , y ₁ ), (x ₂ ,
y ₂ ) is the representative coordinate of the workpiece 6 in this case, 6 b
Indicates a workpiece that is misaligned or inclined before marking, and (x ₀ ′, y ₀ ′), (x ₁ ′, y ₁ ′),
(X ₂ ′, y ₂ ′) are the coordinates of a point corresponding to the representative coordinates of the workpiece 6a at the correct position.

In the recognition device 11, the coordinates (x ₀ , y ₀ ), (x ₁ , y) of the workpiece 6a are previously determined.
₁ ) and (x ₂ , y ₂ ) are stored in the recognition device 11.
Next, before marking, the image of the workpiece 6 is recognized by the recognition device 11.
And the coordinates (x ₀ ′, y ₀ ′), (x
₁ ′, y ₁ ′) and (x ₂ ′, y ₂ ′) are read, and the coordinates (x ₀ , y ₀ ), (x ₁ , y
₁ ) and (x ₂ , y ₂ ), and calculate and recognize the planar displacement (in the X-Y direction) and the inclination (inclination angle θ) of the workpiece 6b before marking by calculation.

Then, these calculation result data are transferred to the angle adjusting reflecting mirrors 12a, 12b, 12c. By doing so, the light pattern (laser light) that has passed through the reflecting mirror 4 whose inclination has been changed using the above calculation result data as correction data is accurately applied to the intended position of the workpiece 6,
Marking is performed. Note that, instead of the representative coordinates of the workpiece 6a, coordinates of a point of the storage tray 7 which has been recognized in advance are taken, and the coordinates are compared with the coordinates of the workpiece 6b, thereby recognizing the positional deviation and inclination. You can also.

Embodiment 2 FIG. In the above-described embodiment, the marking is performed by changing the angle of the laser beam by correcting the angles of the angle adjusting reflecting mirrors 12a, 12b, and 12c after the recognition of the workpiece 6. The same function can be expected even if the position and inclination of the storage tray 7 to be corrected are corrected.

FIG. 3 shows this example. This is X-
It has a tray movable table 13 that can be adjusted in position in the Y direction and tilted so that the angle can be adjusted. According to this, after the position of the workpiece 6 in the storage tray 7 is recognized by the recognition device 11 before marking, the tray movable table 13 is moved in accordance with the positional shift of the workpiece 6 or the inclination in the θ direction. It can be operated in the −Y direction or the θ direction, and therefore, marking can be performed at a regular position irrespective of the displacement or inclination of the workpiece 6. In this embodiment, the method for recognizing a workpiece shown in FIG. 2 can be employed.

Embodiment 3 FIG. Also, instead of adjusting the positions and angles of the reflecting mirrors 4a, 4b, 4c and the storage tray 7 according to the inclination of the workpiece 6, as shown by the dotted blocks in FIGS. A drive system 3a such as a pulse motor as a mask control device is attached to the mask 3, and the mask 3 is rotated or deflected in a predetermined direction by the drive system 3a according to the inclination of the workpiece 6. In the same manner as in the above embodiment, it is possible to accurately mark a predetermined position on the workpiece 6. In this embodiment, the method for recognizing the workpiece shown in FIG. 2 can be adopted.

Embodiment 4 FIG. Further, although the mask 3 is provided between the laser oscillator 1 and the reflecting mirror 4a in the embodiment of FIG. 1, the workpiece 6 may be directly marked by the laser beam 2 without providing the mask 3. Good. According to this, similarly to the above embodiment, the marking can be performed at a correct position by adjusting the angles of the reflecting mirrors 4a, 4b, and 4c.

Embodiment 5 FIG. Further, in the embodiment of FIG. 3, the mask 3 is not provided between the laser oscillator 1 and the reflecting mirror 4,
The marking by the laser beam may be directly performed on the workpiece 6, and the marking can be performed at a correct position by controlling the tray movable table 13, as in the above embodiment.

[0040]

As described above, according to the first aspect of the present invention, there is provided a recognition device for recognizing a mark position and a tilt of a marking made on a workpiece by a light pattern from a mask, and based on the recognition data. To the reflector control means, so as to correct the mark position with respect to the workpiece,
Since the angle of the reflecting mirror is controlled, it is possible to perform marking at a correct position in accordance with the positional deviation or inclination of the workpiece in the storage tray, and it is necessary to position the workpiece at the time of marking. Therefore, there is an effect that a product that can reduce appearance defects due to injury or the like of a workpiece can be obtained.

According to the second aspect of the present invention, the position and the inclination of the storage tray for storing the workpiece are controlled on the tray movable table so as to correct the mark position with respect to the workpiece. Therefore, there is an effect that a mark which can accurately mark a set position on the workpiece by simply controlling the position and inclination of the tray movable table is obtained.

According to the third aspect of the present invention, since the mask control device is configured to control the position and inclination of the mask so as to correct the mark position with respect to the workpiece, the mask position and inclination can be simplified. The effect of obtaining a mark that can be accurately marked at a predetermined position on the workpiece by only simple control is obtained.

According to the fourth aspect of the present invention, there is provided a recognition device for recognizing a position and an inclination of a mark of a marking formed on a workpiece by a laser beam directly reflected by a reflecting mirror, and based on the recognition data, Since the reflecting mirror control means is configured to control the angle of the reflecting mirror so as to correct the mark position with respect to the workpiece, the reflecting mirror is controlled through the angle-controlled reflecting mirror without passing through a mask. The laser beam provided has an effect of obtaining an object that can directly perform marking on a workpiece.

According to the fifth aspect of the present invention, there is provided a recognition device for recognizing a mark position and an inclination of a marking made on a workpiece by a laser beam directly reflected by a reflecting mirror, and based on the recognition data, In order to correct the mark position with respect to the workpiece, the tray movable table is configured to control the position and inclination of the storage tray that stores the workpiece, so that the tray can be controlled by laser light without passing through a mask. By simply controlling the position and the inclination of the movable table, an effect is obtained in which marking can be performed directly on the workpiece.

According to the sixth aspect of the present invention, the recognition device for recognizing the position and the inclination of the mark to be marked on the workpiece, the regular representative coordinates of the workpiece and the representative before marking obtained from the workpiece before marking. In accordance with the result of comparison with the coordinates, the correction data of the mark position is configured to be calculated by the calculation, so that it is possible to accurately perform the marking at the marking position on the workpiece, which is the coordinate data obtained by the calculation. Has the effect.

[Brief description of the drawings]

FIG. 1 is a configuration diagram showing a laser marking device according to an embodiment of the present invention.

FIG. 2 is an explanatory diagram illustrating an operation of the recognition device in FIG. 1;

FIG. 3 is a configuration diagram showing a laser marking device according to an embodiment of the present invention.

FIG. 4 is a configuration diagram showing a conventional laser marking device.

FIG. 5 is a plan view showing a workpiece in a storage tray in FIG. 4;

FIG. 6 is a schematic view showing a conventional method for positioning a workpiece with respect to a storage tray.

FIG. 7 is a cross-sectional view illustrating another method of positioning a workpiece with respect to a conventional storage tray.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Laser oscillator 2 Laser light 3 Mask 3a Mask control device 4, 4a, 4b, 4c Reflecting mirror 6 Workpiece 7 Storage tray 11 Recognition device 12a, 12b, 12c Angle adjusting reflecting mirror (reflecting mirror angle control means) 13 Tray movable table

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁶ identification symbol FI B23K 26/10 B23K 26/10 G02B 26/10 101 G02B 26/10 101 (58) Fields surveyed (Int.Cl. ⁶ , DB Name) B23K 26/00-26/18

Claims (6)

(57) [Claims] 1. A mask for receiving a laser beam emitted from a laser oscillator to generate a light pattern, a reflecting mirror for reflecting the light pattern from the mask, and a processing target using the light pattern reflected by the reflecting mirror. A recognition device for recognizing a mark position or an inclination of a marking made on an object, and controlling an angle of the reflecting mirror so as to correct the mark position with respect to the workpiece based on recognition data obtained by the recognition device. Laser marking device provided with a reflecting mirror angle control means. 2. A mask for generating an optical pattern by receiving a laser beam emitted from a laser oscillator, a reflecting mirror for reflecting the light pattern from the mask, and a processing target using the light pattern reflected by the reflecting mirror. A recognition device for recognizing a mark position or an inclination of a marking on an object, and storing the workpiece so as to correct the mark position with respect to the workpiece based on recognition data obtained by the recognition device. A laser marking device including a tray movable table for controlling the position and inclination of the storage tray. 3. A mask for receiving a laser beam emitted from a laser oscillator to generate a light pattern, a reflecting mirror for reflecting the light pattern from the mask, and a processing target by the light pattern reflected by the reflecting mirror. A recognition device for recognizing a mark position and a tilt of a marking made on an object; and a mask position and a tilt for correcting the mark position with respect to the workpiece based on recognition data obtained by the recognition device. A laser marking device comprising a mask control device for controlling. 4. A reflecting mirror for reflecting a laser beam emitted from a laser oscillator, a recognition device for recognizing a mark position and an inclination of a marking made on a workpiece by the laser beam reflected by the reflecting mirror, A laser marking device comprising: a reflecting mirror angle control unit that controls an angle of the reflecting mirror so as to correct the mark position with respect to the workpiece based on recognition data obtained by the recognition device. 5. A reflector for reflecting a laser beam emitted from a laser oscillator, a recognition device for recognizing a mark position and an inclination of a marking made on a workpiece by the laser beam reflected by the reflector, A laser comprising a tray movable table that controls the position and inclination of a storage tray that stores the workpiece so as to correct the mark position with respect to the workpiece based on the recognition data obtained by the recognition device. Marking device. 6. A recognition device for recognizing a mark position and an inclination of a mark on a workpiece, according to a comparison result between regular representative coordinates of the workpiece and representative coordinates before marking obtained from the workpiece. 6. The laser marking device according to claim 1, wherein said mark position correction data is obtained by calculation.