JPH06324072A - トンネル効果式加速度センサ - Google Patents

トンネル効果式加速度センサ

Info

Publication number
JPH06324072A
JPH06324072A JP6085826A JP8582694A JPH06324072A JP H06324072 A JPH06324072 A JP H06324072A JP 6085826 A JP6085826 A JP 6085826A JP 8582694 A JP8582694 A JP 8582694A JP H06324072 A JPH06324072 A JP H06324072A
Authority
JP
Japan
Prior art keywords
layer
polysilicon
acceleration sensor
coated
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6085826A
Other languages
English (en)
Japanese (ja)
Inventor
Markus Biebl
ビーブル マルクス
Thomas Scheiter
シヤイター トーマス
Helmut Klose
クローゼ ヘルムート
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens Corp
Original Assignee
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Corp filed Critical Siemens Corp
Publication of JPH06324072A publication Critical patent/JPH06324072A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0894—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by non-contact electron transfer, i.e. electron tunneling

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
JP6085826A 1993-04-05 1994-03-31 トンネル効果式加速度センサ Pending JPH06324072A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4311123.8 1993-04-05
DE4311123 1993-04-05

Publications (1)

Publication Number Publication Date
JPH06324072A true JPH06324072A (ja) 1994-11-25

Family

ID=6484762

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6085826A Pending JPH06324072A (ja) 1993-04-05 1994-03-31 トンネル効果式加速度センサ

Country Status (5)

Country Link
US (1) US5431051A (en, 2012)
EP (1) EP0619494B1 (en, 2012)
JP (1) JPH06324072A (en, 2012)
DE (1) DE59402799D1 (en, 2012)
TW (1) TW247374B (en, 2012)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105319394A (zh) * 2015-12-07 2016-02-10 太原理工大学 一种基于共振光隧穿效应的角加速度检测器及检测方法

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5476819A (en) * 1993-07-26 1995-12-19 Litton Systems, Inc. Substrate anchor for undercut silicon on insulator microstructures
WO1995019571A1 (de) * 1994-01-18 1995-07-20 Siemens Aktiengesellschaft Tunneleffekt-sensor
US5596194A (en) * 1994-08-19 1997-01-21 Hughes Aircraft Company Single-wafer tunneling sensor and low-cost IC manufacturing method
GB9426363D0 (en) * 1994-12-29 1995-03-01 Lynxvale Ltd A micromechanical accelerometer
DE19506401A1 (de) * 1995-02-23 1996-08-29 Siemens Ag Beschleunigungssensor
US5689107A (en) * 1995-09-01 1997-11-18 Hughes Aircraft Company Displacement-based opto-electronic accelerometer and pressure sensor
US5756895A (en) * 1995-09-01 1998-05-26 Hughes Aircraft Company Tunneling-based rate gyros with simple drive and sense axis coupling
US5798283A (en) * 1995-09-06 1998-08-25 Sandia Corporation Method for integrating microelectromechanical devices with electronic circuitry
US5963788A (en) * 1995-09-06 1999-10-05 Sandia Corporation Method for integrating microelectromechanical devices with electronic circuitry
GB9524241D0 (en) * 1995-11-28 1996-01-31 Smiths Industries Plc Rate sensors
US5638946A (en) * 1996-01-11 1997-06-17 Northeastern University Micromechanical switch with insulated switch contact
DE19821527A1 (de) 1998-05-13 1999-12-02 Siemens Ag Schwingkreis
US6327909B1 (en) * 1999-11-30 2001-12-11 Xerox Corporation Bistable mechanical sensors capable of threshold detection and automatic elimination of excessively high amplitude data
US9547019B2 (en) * 2013-01-09 2017-01-17 Farrokh Mohamadi MEMS tunneling micro seismic sensor
CN103543292B (zh) * 2013-11-06 2016-06-08 中北大学 一种基于电容效应和隧道效应的复合式加速度计
CN105548610B (zh) * 2015-12-07 2018-05-04 太原理工大学 一种基于共振光隧穿效应的加速度检测器及检测方法
CN111579818B (zh) * 2020-07-06 2021-09-28 吉林大学 一种高灵敏度低噪声加速度检测装置及方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4638669A (en) * 1985-05-07 1987-01-27 Massachusetts Institute Of Technology Quantum tunneling cantilever accelerometer
JPH0821722B2 (ja) * 1985-10-08 1996-03-04 日本電装株式会社 半導体振動・加速度検出装置
US5265470A (en) * 1987-11-09 1993-11-30 California Institute Of Technology Tunnel effect measuring systems and particle detectors
DE3834531A1 (de) * 1988-10-11 1990-04-12 Deutsche Forsch Luft Raumfahrt Beschleunigungsaufnehmer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105319394A (zh) * 2015-12-07 2016-02-10 太原理工大学 一种基于共振光隧穿效应的角加速度检测器及检测方法
CN105319394B (zh) * 2015-12-07 2018-03-13 太原理工大学 一种基于共振光隧穿效应的角加速度检测器及检测方法

Also Published As

Publication number Publication date
EP0619494A1 (de) 1994-10-12
US5431051A (en) 1995-07-11
DE59402799D1 (de) 1997-06-26
EP0619494B1 (de) 1997-05-21
TW247374B (en, 2012) 1995-05-11

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