TW247374B - - Google Patents
Info
- Publication number
- TW247374B TW247374B TW083102132A TW83102132A TW247374B TW 247374 B TW247374 B TW 247374B TW 083102132 A TW083102132 A TW 083102132A TW 83102132 A TW83102132 A TW 83102132A TW 247374 B TW247374 B TW 247374B
- Authority
- TW
- Taiwan
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0894—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by non-contact electron transfer, i.e. electron tunneling
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE4311123 | 1993-04-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW247374B true TW247374B (en, 2012) | 1995-05-11 |
Family
ID=6484762
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW083102132A TW247374B (en, 2012) | 1993-04-05 | 1994-03-11 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US5431051A (en, 2012) |
| EP (1) | EP0619494B1 (en, 2012) |
| JP (1) | JPH06324072A (en, 2012) |
| DE (1) | DE59402799D1 (en, 2012) |
| TW (1) | TW247374B (en, 2012) |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5476819A (en) * | 1993-07-26 | 1995-12-19 | Litton Systems, Inc. | Substrate anchor for undercut silicon on insulator microstructures |
| WO1995019571A1 (de) * | 1994-01-18 | 1995-07-20 | Siemens Aktiengesellschaft | Tunneleffekt-sensor |
| US5596194A (en) * | 1994-08-19 | 1997-01-21 | Hughes Aircraft Company | Single-wafer tunneling sensor and low-cost IC manufacturing method |
| GB9426363D0 (en) * | 1994-12-29 | 1995-03-01 | Lynxvale Ltd | A micromechanical accelerometer |
| DE19506401A1 (de) * | 1995-02-23 | 1996-08-29 | Siemens Ag | Beschleunigungssensor |
| US5689107A (en) * | 1995-09-01 | 1997-11-18 | Hughes Aircraft Company | Displacement-based opto-electronic accelerometer and pressure sensor |
| US5756895A (en) * | 1995-09-01 | 1998-05-26 | Hughes Aircraft Company | Tunneling-based rate gyros with simple drive and sense axis coupling |
| US5798283A (en) * | 1995-09-06 | 1998-08-25 | Sandia Corporation | Method for integrating microelectromechanical devices with electronic circuitry |
| US5963788A (en) * | 1995-09-06 | 1999-10-05 | Sandia Corporation | Method for integrating microelectromechanical devices with electronic circuitry |
| GB9524241D0 (en) * | 1995-11-28 | 1996-01-31 | Smiths Industries Plc | Rate sensors |
| US5638946A (en) * | 1996-01-11 | 1997-06-17 | Northeastern University | Micromechanical switch with insulated switch contact |
| DE19821527A1 (de) | 1998-05-13 | 1999-12-02 | Siemens Ag | Schwingkreis |
| US6327909B1 (en) * | 1999-11-30 | 2001-12-11 | Xerox Corporation | Bistable mechanical sensors capable of threshold detection and automatic elimination of excessively high amplitude data |
| US9547019B2 (en) * | 2013-01-09 | 2017-01-17 | Farrokh Mohamadi | MEMS tunneling micro seismic sensor |
| CN103543292B (zh) * | 2013-11-06 | 2016-06-08 | 中北大学 | 一种基于电容效应和隧道效应的复合式加速度计 |
| CN105548610B (zh) * | 2015-12-07 | 2018-05-04 | 太原理工大学 | 一种基于共振光隧穿效应的加速度检测器及检测方法 |
| CN105319394B (zh) * | 2015-12-07 | 2018-03-13 | 太原理工大学 | 一种基于共振光隧穿效应的角加速度检测器及检测方法 |
| CN111579818B (zh) * | 2020-07-06 | 2021-09-28 | 吉林大学 | 一种高灵敏度低噪声加速度检测装置及方法 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4638669A (en) * | 1985-05-07 | 1987-01-27 | Massachusetts Institute Of Technology | Quantum tunneling cantilever accelerometer |
| JPH0821722B2 (ja) * | 1985-10-08 | 1996-03-04 | 日本電装株式会社 | 半導体振動・加速度検出装置 |
| US5265470A (en) * | 1987-11-09 | 1993-11-30 | California Institute Of Technology | Tunnel effect measuring systems and particle detectors |
| DE3834531A1 (de) * | 1988-10-11 | 1990-04-12 | Deutsche Forsch Luft Raumfahrt | Beschleunigungsaufnehmer |
-
1994
- 1994-03-09 EP EP94103620A patent/EP0619494B1/de not_active Expired - Lifetime
- 1994-03-09 DE DE59402799T patent/DE59402799D1/de not_active Expired - Lifetime
- 1994-03-11 TW TW083102132A patent/TW247374B/zh active
- 1994-03-29 US US08/219,538 patent/US5431051A/en not_active Expired - Fee Related
- 1994-03-31 JP JP6085826A patent/JPH06324072A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| EP0619494A1 (de) | 1994-10-12 |
| US5431051A (en) | 1995-07-11 |
| JPH06324072A (ja) | 1994-11-25 |
| DE59402799D1 (de) | 1997-06-26 |
| EP0619494B1 (de) | 1997-05-21 |