JPH0632269B2 - Method for manufacturing separator for heater of heat treatment furnace - Google Patents

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a heat treatment furnace used for manufacturing semiconductor elements and the like, and more specifically to a method for manufacturing a heater separator for a heat treatment furnace.

2. Description of the Related Art A heater of a heat treatment furnace is formed by winding a heater wire in a spiral shape. However, if a space between the heater wires (hereinafter, referred to as a pitch of the heater wires) is not maintained as set, a desired furnace You cannot get the characteristics.

Therefore, conventionally, the pitch of the heater wire is maintained at a predetermined pitch by mounting the heater wire in the heater wire groove of the ceramic separator corresponding to the pitch of the heater wire.

Problems to be Solved by the Invention When the pitch of the heater wires is changed, the temperature in the furnace changes. For example, when the pitch is small, the temperature becomes high, and when the pitch is large, the temperature becomes low.

Therefore, for example, in order to obtain the characteristics of the furnace such that the temperature gradually increases or the temperature rapidly increases, it is necessary to form heaters having various pitches. In this case, A wide variety of separators such as a separator for a portion with a small pitch and a separator for a portion with a large pitch must be prepared in advance, which is very troublesome and costly.

In view of the above circumstances, an object of the present invention is to make it possible to easily form a separator in accordance with the pitch of heater wires.

MEANS FOR SOLVING THE PROBLEMS The present invention is to form a heater by forming a heater wire in a spiral shape, cover the outer periphery of the heater with a dry hardening heat insulating material and press it to form a separating portion in a pitch gap between the heater wires. The problem is solved by drying and hardening the heat insulating material after the formation.

Operation After forming the heater by winding the heater wire in a spiral shape at a predetermined pitch, and then pressing the dry hardening heat insulating material on the outer periphery of the heater, a part of the heat insulating material is pushed into the pitch gap between the heater wires. A protruding separation portion is formed.

Then, when the dry curing heat insulating material is dried and cured, a heater separator is formed.

Embodiments Embodiments of the present invention will be described with reference to the accompanying drawings, and the same reference numerals have the same names and functions.

A heater wire 1 such as Kanthal heated to 700 ° C. to 800 ° C. is formed into a spiral shape as shown in FIG. 2 by using a winding jig to form a heater 2.

At this time, the pitch P of the heater strands 1 and the gap S between the heater strands (hereinafter referred to as the pitch gap) are formed with predetermined values.

The outer peripheral surface of the heater 2 is covered with the dry hardening heat insulating material 3 and pressed, and a part of the dry heat insulating material 3 is pressed into the pitch gap S between the heater wires to form a protruding separating portion 4 as shown in FIG.

As the dry-curing heat insulating material 3, for example, an alumina fiber containing a curing agent (sometimes called wet felt) is used.

Next, the dry hardening heat insulating material 3 is heated at 200 to 400 ° C.
After being dried for 6 hours, the heat insulating material 3 is cured and the separator 5 is formed.

In FIG. 1, 6 is a tube, 7 and 8 are heat insulating materials, and 9 is a heat treatment furnace.

The embodiment of the present invention is not limited to the above,
For example, before drying the dry hardening heat insulating material 3, the tip of the separating portion 4 may be rubbed and bent in a certain direction to form the pressing portion 10 as shown in FIG. 3, and then dried.

When the pressing portion 10 is formed in this way, the heater wire 1 does not hang down, so the heater wire 1 and the tube 6
It is possible to prevent contact accidents with

Further, instead of providing the separator 5 over the entire heater, it may be provided on a part of the heater as shown in FIG.

That is, the strip-shaped separator 15 may be formed along the longitudinal direction of the heater, and a plurality of the separators 15 may be provided at intervals in the circumferential direction of the heater.

As described above, the present invention covers the outer periphery of the heater with the dry-curing heat insulating material and presses it to form a separation portion in the pitch gap between the heater wires, and when the heat insulating material is dry-cured, the separator becomes Since it can be formed, a separator that matches the pitch of the heater wires can be easily manufactured.

Therefore, it is not necessary to prepare a wide variety of separators that match the pitch of the heater wires as in the conventional example, so that the number of parts can be reduced and the cost of the device can be reduced.

[Brief description of drawings]

FIG. 1 is a vertical sectional view showing an embodiment of the present invention.
The perspective view showing the heater wire of FIG. 1, FIG. 3, and FIG.
It is sectional drawing which shows another Example, respectively. 1 ... Heater wire 2 ... Heater 3 ... Dry hardening thermal insulation material 5 ... Separator 15 ... Separator

Claims (5)

[Claims] 1. A spirally wound heater wire is formed to form a heater, and the outer periphery of the heater is covered with a dry hardening heat insulating material and pressed to form a separating portion in a pitch gap between the heater wires, and then the heat insulating material is formed. Method of manufacturing separator for heater of heat treatment furnace characterized by being dried and cured 2. A method for manufacturing a heater separator for a heat treatment furnace according to claim 1, wherein the dry-curing heat insulating material is an alumina fiber containing a curing agent. 3. The method for manufacturing a heater separator for a heat treatment furnace according to claim 1, wherein the separating portion is formed in a spiral shape. 4. The method for manufacturing a heater separator of a heat treatment furnace according to claim 1, wherein the separating portion is formed in a strip shape at intervals in the longitudinal direction of the heater. 5. The method for manufacturing a heater separator for a heat treatment furnace according to claim 1, wherein a pressing portion is formed at the tip of the separating portion.