JPS6460987A - Manufacture of separator for heat treatment furnace heater - Google Patents

Manufacture of separator for heat treatment furnace heater

Info

Publication number
JPS6460987A
JPS6460987A JP21826287A JP21826287A JPS6460987A JP S6460987 A JPS6460987 A JP S6460987A JP 21826287 A JP21826287 A JP 21826287A JP 21826287 A JP21826287 A JP 21826287A JP S6460987 A JPS6460987 A JP S6460987A
Authority
JP
Japan
Prior art keywords
heater
separator
adiabatic material
adiabatic
pitch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP21826287A
Other languages
Japanese (ja)
Other versions
JPH0632269B2 (en
Inventor
Tadashi Inukai
Katsutoshi Ishii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Sagami Ltd
Original Assignee
Tokyo Electron Sagami Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Sagami Ltd filed Critical Tokyo Electron Sagami Ltd
Priority to JP21826287A priority Critical patent/JPH0632269B2/en
Publication of JPS6460987A publication Critical patent/JPS6460987A/en
Publication of JPH0632269B2 publication Critical patent/JPH0632269B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Resistance Heating (AREA)

Abstract

PURPOSE:To make it possible to manufacture a separator unified to the pitch of a heater bare wire by covering and pressing a drying and hardening adiabatic material around a heater, and forming separations at the pitch clearances between heater bare wires to dry and harden the adiabatic material. CONSTITUTION:A heater bare wire 1 of tantalum or the like heated at 700 deg.C to 800 deg.C is made into a spiral form by using a winding jig to form a heater 2. A drying and hardening adiabatic material 3 such as alumina fiber including a hardening agent is covered and pressed at the outer periphery of the heater 2, and parts of the material are pressed in the pitch clearances S between the heater bare wires to form projecting separations 4, and by drying for 5 to 6 hours at 200 deg.C to 400 deg.C, the adiabatic material 3 is hardened to form a separator 5. In the figure, 6 is a tube, 7 and 8 are the adiabatic materials, and 9 is a heat treatment furnace. And by rubbing to bend the tops of the separations 4 in a specific direction to form holding members 10 before the adiabatic material 3 is dried, the dangling of the heater bare wires 1 is prevented and the contact of the heater bare wires 1 and the tube 6 can be prevented.
JP21826287A 1987-09-01 1987-09-01 Method for manufacturing separator for heater of heat treatment furnace Expired - Fee Related JPH0632269B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21826287A JPH0632269B2 (en) 1987-09-01 1987-09-01 Method for manufacturing separator for heater of heat treatment furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21826287A JPH0632269B2 (en) 1987-09-01 1987-09-01 Method for manufacturing separator for heater of heat treatment furnace

Publications (2)

Publication Number Publication Date
JPS6460987A true JPS6460987A (en) 1989-03-08
JPH0632269B2 JPH0632269B2 (en) 1994-04-27

Family

ID=16717115

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21826287A Expired - Fee Related JPH0632269B2 (en) 1987-09-01 1987-09-01 Method for manufacturing separator for heater of heat treatment furnace

Country Status (1)

Country Link
JP (1) JPH0632269B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100643661B1 (en) * 2005-04-11 2006-11-10 (주)비에이치티 Heater assembly of heat treatment equipment and fabrication method thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100643661B1 (en) * 2005-04-11 2006-11-10 (주)비에이치티 Heater assembly of heat treatment equipment and fabrication method thereof

Also Published As

Publication number Publication date
JPH0632269B2 (en) 1994-04-27

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Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees