JPH06322338A - Releasable adhesive and adhesive member using the same - Google Patents

Releasable adhesive and adhesive member using the same

Info

Publication number
JPH06322338A
JPH06322338A JP13122493A JP13122493A JPH06322338A JP H06322338 A JPH06322338 A JP H06322338A JP 13122493 A JP13122493 A JP 13122493A JP 13122493 A JP13122493 A JP 13122493A JP H06322338 A JPH06322338 A JP H06322338A
Authority
JP
Japan
Prior art keywords
adhesive
emulsion
thf
sensitive adhesive
parts
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13122493A
Other languages
Japanese (ja)
Other versions
JP3288476B2 (en
Inventor
Michio Satsuma
道夫 薩摩
Yutaka Tozaki
裕 戸崎
Koichi Hashimoto
浩一 橋本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nitto Denko Corp
Original Assignee
Nitto Denko Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nitto Denko Corp filed Critical Nitto Denko Corp
Priority to JP13122493A priority Critical patent/JP3288476B2/en
Publication of JPH06322338A publication Critical patent/JPH06322338A/en
Application granted granted Critical
Publication of JP3288476B2 publication Critical patent/JP3288476B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

PURPOSE:To provide a releasable type emulsion adhesive extremely not leaving stain substances by releasing without requiring an extraction treatment using a solvent, and to provide an adhesive member using the same adhesive. CONSTITUTION:The releasable adhesive comprises an emulsion and, if necessary, a cross-linking agent to form an adhesive layer having a THF-insoluble content of >= 90% and a degree of swelling of >=10 times in THF. The emulsion contains an acrylic polymer which may be a cross-linked one and is formed by gradually emulsion-copolymerizing at least an acrylic acid 4-12C alkyl ester, a nonionic surfactant having a copolymerizable unsaturated group, and a functional or cross-linkable monomer in the presence of a small amount of a water- soluble orgnaic radical polymerization initiator. An adhesive member having the layer of the adhesive on a support substrate. The adhesive gives an adhesive layer little in the content of free substances, and excellent water resistance, adherend deterioration prevention, adhesive balance between adhesiveness and releasability, etc.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、再剥離時に被着体に残
存する糊成分等の汚染物質が極めて少なくてICウエハ
等の種々の物品の表面保護等に好適な再剥離型粘着剤、
及びその粘着部材に関する。
FIELD OF THE INVENTION The present invention relates to a re-peelable pressure-sensitive adhesive which is suitable for surface protection of various articles such as IC wafers, since contaminants such as glue components remaining on the adherend during re-peeling are extremely small.
And an adhesive member thereof.

【0002】[0002]

【発明の背景】金属板や化粧板、ガラス板等の種々の物
品からなる被着体に仮着して、損傷や塵埃の付着、酸化
等の変質等を防止する表面保護などの目的で用いられる
再剥離が必須の粘着部材にあっては、仮着時に剥がれ等
を生じることのない充分な接着力を保持しつつ、再剥離
時に糊成分等の汚染物質が被着体に残存しないことが剥
離後の洗浄工程の省略等の点より強く望まれる。
BACKGROUND OF THE INVENTION It is used for the purpose of surface protection such as temporary attachment to adherends made of various articles such as metal plates, decorative plates, glass plates, etc. to prevent damage, adhesion of dust, alteration such as oxidation, etc. In the case of an adhesive member that requires re-peeling, while maintaining sufficient adhesive strength that does not cause peeling during temporary attachment, contaminants such as glue components may not remain on the adherend during re-peeling. It is strongly desired from the standpoint of omitting a cleaning step after peeling.

【0003】特に、半導体ウエハ上に回路パターンを形
成したICウエハの場合には、汚染物質の残存が回路機
能を妨害するなどの重大な欠陥となるため高度な清澄さ
が要求される。またICウエハでは、裏面研磨時や切断
によるチップ化時等でも粘着部材が使用され洗浄水の侵
入防止等の点よりもウエハに対し充分に密着する接着力
も要求される。
In particular, in the case of an IC wafer having a circuit pattern formed on a semiconductor wafer, a high degree of clarification is required because residual contaminants cause serious defects such as interference with circuit functions. Further, in the IC wafer, an adhesive member is used even at the time of polishing the back surface or cutting into chips and the like, and therefore an adhesive force sufficient to adhere to the wafer is required in order to prevent invasion of cleaning water.

【0004】[0004]

【従来の技術】従来、前記した再剥離用途に適する粘着
部材としては、粘着剤層を溶剤で抽出処理して低分子量
のポリマーやその他の物質、界面活性剤等の遊離成分を
除去したものが知られていた。しかしながらその場合に
は、粘着剤層の内部も含めて完全に抽出除去する必要が
あり製造効率に乏しい問題点があった。表面部の処理等
で内部に遊離成分が残存する不完全な抽出処理では、そ
の残存遊離成分が表面に析出集積してむしろ未処理物よ
りも著しい残存汚染を引き起こしやすくなる。
2. Description of the Related Art Conventionally, as the pressure-sensitive adhesive member suitable for the above-mentioned re-peeling use, a pressure-sensitive adhesive layer is subjected to an extraction treatment with a solvent to remove low molecular weight polymers and other substances, and free components such as surfactants. Was known. However, in that case, there is a problem that the production efficiency is poor because it is necessary to completely extract and remove even the inside of the adhesive layer. In the incomplete extraction treatment in which the free components remain inside due to the treatment of the surface portion, etc., the residual free components are precipitated and accumulated on the surface, and rather, the remarkable residual contamination is more likely to occur than the untreated product.

【0005】一方、エマルジョン系の粘着剤を用いたも
のも提案されている。しかしながらこの場合には、界面
活性剤が遊離成分として粘着剤層中に残存して再剥離時
の汚染物質となり、洗浄除去が容易であるとしてもその
工程が必要となる。また乳化重合用の過硫酸アンモニウ
ムの如き無機塩系の重合開始剤も再剥離時の汚染物質と
なり、それが少量でも残存するとIC回路に不良を来
し、金属板等の被着体の場合にも変質等の特に不都合な
汚染物質となる。
On the other hand, one using an emulsion type adhesive has also been proposed. In this case, however, the surfactant remains as a free component in the pressure-sensitive adhesive layer and becomes a contaminant during re-peeling, and the step is required even if it is easily washed and removed. Also, an inorganic salt-based polymerization initiator such as ammonium persulfate for emulsion polymerization becomes a contaminant during re-peeling, and even if a small amount remains, it will cause a defect in the IC circuit, and even in the case of adherends such as metal plates. It becomes a particularly inconvenient pollutant such as alteration.

【0006】さらに前記エマルジョン系の場合の如く、
水溶性の遊離成分が粘着剤層中に多く残存すると接着力
の耐水性が低下し、ICウエハの裏面研磨時等に洗浄水
の侵入を招いて剥がれ問題を発生しやすくする。
Further, as in the case of the emulsion system,
If a large amount of water-soluble free components remain in the pressure-sensitive adhesive layer, the water resistance of the adhesive force will be reduced, which will cause invasion of cleaning water during the back surface polishing of the IC wafer, and the peeling problem will easily occur.

【0007】[0007]

【発明が解決しようとする課題】本発明は、溶剤による
抽出処理をしなくても再剥離による汚染物質の残存が極
めて少ないエマルジョン系の再剥離型粘着剤、及びその
粘着部材の開発を課題とする。
The object of the present invention is to develop an emulsion-based removable pressure-sensitive adhesive in which the amount of contaminants remaining after re-peeling is extremely small even if extraction treatment with a solvent is not performed, and an adhesive member thereof. To do.

【0008】[0008]

【課題を解決するための手段】本発明は、アルキル基の
炭素数が4〜12のアクリル酸系アルキルエステルと、
共重合性不飽和基を有する非イオン性界面活性剤と、官
能性モノマーを少なくとも用いて少量の水溶性有機ラジ
カル重合開始剤により緩やかに乳化共重合させて形成し
たアクリル系ポリマーを含有するエマルジョンに、TH
F不溶分が90%以上でTHFによる膨潤度が10倍以
上となるように架橋剤を配合してなることを特徴とする
再剥離型粘着剤を提供するものである。
Means for Solving the Problems The present invention relates to an acrylic acid-based alkyl ester having an alkyl group with 4 to 12 carbon atoms,
An emulsion containing a nonionic surfactant having a copolymerizable unsaturated group and an acrylic polymer formed by gently emulsion-copolymerizing a small amount of a water-soluble organic radical polymerization initiator using at least a functional monomer. , TH
A removable pressure-sensitive adhesive comprising a cross-linking agent so that the F insoluble content is 90% or more and the degree of swelling with THF is 10 times or more.

【0009】また本発明は、アルキル基の炭素数が4〜
12のアクリル酸系アルキルエステルと、共重合性不飽
和基を有する非イオン性界面活性剤と、架橋性モノマー
を少なくとも用いて少量の水溶性有機ラジカル重合開始
剤により緩やかに乳化共重合させて形成してなる、TH
F不溶分が90%以上でTHFによる膨潤度が10倍以
上の架橋アクリル系ポリマーを含有するエマルジョンか
らなることを特徴とする再剥離型粘着剤を提供するもの
である。
In the present invention, the alkyl group has 4 to 4 carbon atoms.
12 Acrylic alkyl ester, a nonionic surfactant having a copolymerizable unsaturated group, and a crosslinkable monomer are used to form an emulsion copolymer with a small amount of a water-soluble organic radical polymerization initiator. TH,
A removable pressure-sensitive adhesive comprising an emulsion containing a crosslinked acrylic polymer having an F insoluble content of 90% or more and a swelling degree with THF of 10 times or more.

【0010】さらに本発明は、支持基材上に前記した再
剥離型粘着剤からなる、THF不溶分が90%以上でT
HFによる膨潤度が10倍以上の粘着剤層を有すること
を特徴とする粘着部材を提供するものである。
Further, in the present invention, T-insoluble matter containing 90% or more of THF-insoluble matter, which comprises the above-mentioned removable adhesive on a supporting substrate.
It is intended to provide an adhesive member having an adhesive layer having a swelling degree by HF of 10 times or more.

【0011】[0011]

【作用】アルキル基の炭素数が4〜12のアクリル酸系
アルキルエステルを主成分に用い、かつ乳化重合を可能
とする界面活性剤として共重合性不飽和基を有する非イ
オン性のものを用いることにより、その界面活性剤を共
重合成分としてアクリル系ポリマー中に取り込むことが
でき、その遊離物質化を回避することができると共に、
接着密着性と再剥離性等の接着特性に優れるものとする
ことができる。
[Function] An acrylic acid alkyl ester having an alkyl group having 4 to 12 carbon atoms is used as a main component, and a nonionic one having a copolymerizable unsaturated group is used as a surfactant capable of emulsion polymerization. As a result, the surfactant can be incorporated into the acrylic polymer as a copolymerization component, and its free substance can be avoided.
It can be made to have excellent adhesive properties such as adhesive adhesion and removability.

【0012】また少量の水溶性有機ラジカル重合開始剤
を用いて重合反応を緩やかに進めることにより、遊離物
質となりやすい低分子量のポリマー、例えば重量平均分
子量が1万以下のポリマーの生成を抑制できると共に、
開始剤自体が遊離物質として残存することも抑制でき、
かつ有機系の開始剤は無機塩系のものよりも変質等の被
着体に対する影響が少ない。さらに最終的に架橋処理し
た構造とすることで分子量が増大して遊離物質となるポ
リマーをより低減することができる。
Further, by slowly advancing the polymerization reaction using a small amount of a water-soluble organic radical polymerization initiator, it is possible to suppress the formation of a low molecular weight polymer which easily becomes a free substance, for example, a polymer having a weight average molecular weight of 10,000 or less. ,
It is also possible to prevent the initiator itself from remaining as a free substance,
In addition, the organic type initiator has less influence on the adherend such as alterations than the inorganic salt type. Furthermore, the final crosslinked structure can increase the molecular weight and further reduce the amount of polymer that becomes a free substance.

【0013】加えてTHF(テトラヒドロフラン)不溶
分が90%以上でTHFによる膨潤度が10倍以上の粘
着剤層が形成されるようにすることで、被着体に対する
接着密着性と遊離物質の低減とを良好にバランスさせる
ことができる。従って前記により、遊離物質が少なくて
再剥離時の非汚染性に特段に優れる粘着剤を抽出処理の
必要なく得ることができる。
In addition, by forming a pressure-sensitive adhesive layer having a THF (tetrahydrofuran) insoluble content of 90% or more and a swelling degree with THF of 10 times or more, adhesion adhesion to an adherend and reduction of free substances And can be well balanced. Therefore, according to the above, it is possible to obtain a pressure-sensitive adhesive which has a small amount of free substances and is particularly excellent in non-staining property at the time of re-peeling, without the need for extraction treatment.

【0014】[0014]

【発明の構成要素の例示】本発明の再剥離型粘着剤は、
乳化共重合方式により形成したアクリル系ポリマーを含
有するエマルジョンをベースとするものであり、そのア
クリル系ポリマーはアルキル基の炭素数が4〜12のア
クリル酸系アルキルエステルと、共重合性不飽和基を有
する非イオン性界面活性剤を少なくとも成分とするもの
である。
Examples of constituent elements of the invention The removable adhesive of the present invention is
It is based on an emulsion containing an acrylic polymer formed by an emulsion copolymerization method, and the acrylic polymer is an acrylic acid alkyl ester having an alkyl group with 4 to 12 carbon atoms and a copolymerizable unsaturated group. Is a nonionic surfactant having at least one component.

【0015】前記のアクリル酸系アルキルエステルとし
ては、例えばブチル基、イソブチル基、アミル基、イソ
アミル基、2−エチルヘキシル基、オクチル基、イソオ
クチル基、ノニル基、イソノニル基、デシル基、ドデシ
ル基の如き炭素数が4〜12のアルキル基を有するアク
リル酸、ないしメタクリル酸のエステルなどが用いられ
る。
Examples of the acrylic acid type alkyl ester include butyl group, isobutyl group, amyl group, isoamyl group, 2-ethylhexyl group, octyl group, isooctyl group, nonyl group, isononyl group, decyl group and dodecyl group. Acrylic acid or methacrylic acid ester having an alkyl group having 4 to 12 carbon atoms is used.

【0016】炭素数が4〜12のアルキル基を有するア
クリル酸系アルキルエステルは、目的とするアクリル系
ポリマーの主成分モノマーとして1種又は2種以上が用
いられ、その使用割合は、全共重合成分の通常50重量
%以上、就中70重量%以上である。
The acrylic acid type alkyl ester having an alkyl group having 4 to 12 carbon atoms may be used alone or in combination of two or more as a main component monomer of the desired acrylic polymer. The content is usually 50% by weight or more, especially 70% by weight or more.

【0017】共重合性不飽和基を有する非イオン性界面
活性剤としては、例えば一般式 (ただし、Rは水素又はアルキル基、nは10〜70で
ある。)で表されるポリオキシエチレンアルキルフェニ
ルエーテルにおける疎水性基部としてのフェニル基にラ
ジカル重合性のプロペニル基を導入したものなどがあげ
られる。
Examples of the nonionic surfactant having a copolymerizable unsaturated group include those represented by the general formula: (However, R is hydrogen or an alkyl group, n is 10 to 70.) A polyoxyethylene alkylphenyl ether represented by a radical-polymerizable propenyl group introduced into a phenyl group as a hydrophobic group is can give.

【0018】非イオン性界面活性剤は、その共重合性不
飽和基を介して目的のアクリル系ポリマーに共重合成分
として取り込まれるものであるが、本発明においては乳
化重合用の乳化剤として用いるものであり、HLBが1
4〜18のものが好ましく用いうる。その使用量は、乳
化状態等に応じて適宜に決定されるが一般には全共重合
成分の0.2〜10重量%、就中1〜5重量%が用いら
れる。
The nonionic surfactant is incorporated into the target acrylic polymer as a copolymerization component through the copolymerizable unsaturated group, and is used as an emulsifier for emulsion polymerization in the present invention. And HLB is 1
Those having 4 to 18 can be preferably used. The amount used is appropriately determined depending on the emulsified state and the like, but generally 0.2 to 10% by weight, and particularly 1 to 5% by weight of the total copolymerization components are used.

【0019】本発明においては最終的に架橋状態のアク
リル系ポリマーの形成を目的とするが、その形成に際し
ては種々の方式を選択することができる。その一は、ア
クリル系ポリマーに架橋剤と反応する官能基を有する官
能性モノマーを共重合させて別途添加の架橋剤により架
橋処理する方式である。他の方式は、自己架橋性を有す
る架橋性モノマーの併用下に共重合させて目的とする架
橋アクリル系ポリマーを直接調製する方式である。なお
本発明においては、前記の各方式を併用して最終的に目
的とする架橋アクリル系ポリマーを形成することもでき
る。
In the present invention, the purpose is finally to form a crosslinked acrylic polymer, but various methods can be selected for the formation. One of them is a method in which a functional monomer having a functional group that reacts with a cross-linking agent is copolymerized with an acrylic polymer and cross-linked by a separately added cross-linking agent. The other method is a method in which a desired crosslinked acrylic polymer is directly prepared by copolymerization in the presence of a self-crosslinking crosslinkable monomer. In the present invention, the above-mentioned respective methods may be used in combination to finally form the desired crosslinked acrylic polymer.

【0020】前記の官能性モノマーとしては、併用する
架橋剤と反応する適宜な官能基を有するモノマーが用い
られる。好ましくは、カルボキシル基を含有するモノマ
ーが用いられる。その例としては、アクリル酸、メタク
リル酸、無水マレイン酸、イタコン酸、クロトン酸など
があげられる。
As the above-mentioned functional monomer, a monomer having an appropriate functional group which reacts with the crosslinking agent used in combination is used. Preferably, a monomer containing a carboxyl group is used. Examples thereof include acrylic acid, methacrylic acid, maleic anhydride, itaconic acid, crotonic acid and the like.

【0021】官能性モノマーとして用いうる他のモノマ
ーの例としては、ヒドロキシエチルアクリレート、ヒド
ロキシエチルメタクリレート、ヒドロキシプロピルアク
リレート、ヒドロキシプロピルメタクリレート、ヒドロ
キシブチルアクリレート、ヒドロキシブチルメタクリレ
ートの如き水酸基含有モノマー、ジアミノエチルアクリ
レート、ジアミノエチルメタクリレートの如きアミノ基
含有モノマー、アクリルアミド、メタクリルアミド、
N,N−ジメチルアクリルアミド、N,N−ジメチルメ
タクリルアミドの如きアミド基含有モノマーなどがあげ
られる。
Examples of other monomers that can be used as the functional monomer include hydroxyethyl acrylate, hydroxyethyl methacrylate, hydroxypropyl acrylate, hydroxypropyl methacrylate, hydroxybutyl acrylate, hydroxybutyl-containing monomers such as hydroxybutyl methacrylate, diaminoethyl acrylate, and the like. Amino group-containing monomer such as diaminoethyl methacrylate, acrylamide, methacrylamide,
Examples thereof include amide group-containing monomers such as N, N-dimethylacrylamide and N, N-dimethylmethacrylamide.

【0022】官能性モノマーの使用量は、その官能基や
併用の架橋剤の種類などにより適宜に決定される。一般
には、全共重合成分の1重量%以下、就中0.001〜
0.5重量%が用いられる。その使用量が1重量%を超
えるとアクリル系ポリマーの共重合成分として過剰の導
入割合となり、架橋剤で架橋した場合に架橋過多のアク
リル系ポリマーが形成されて接着力に乏しくなる場合が
ある。
The amount of the functional monomer used is appropriately determined depending on the functional group and the kind of the crosslinking agent used in combination. Generally, 1% by weight or less of all copolymerization components, especially 0.001-
0.5% by weight is used. If the amount used exceeds 1% by weight, an excessive amount of the acrylic polymer is introduced as a copolymerization component, and when cross-linked with a cross-linking agent, an excessively cross-linked acrylic polymer may be formed, resulting in poor adhesive strength.

【0023】なおカルボキシル基の含有は、金属等から
なる被着体を変質させる原因となりやすいことからカル
ボキシル基含有のアクリル系ポリマーの場合、カルボキ
シル基で変質されにくいプラスチック等からなる被着体
や変質が問題とならない被着体に使用する粘着部材の形
成に一般に適用されるが、その場合においてもカルボキ
シル基単位の含有量が5モル%以下の含有割合となるよ
うに調製することが好ましい。
Since the inclusion of a carboxyl group tends to cause deterioration of an adherend made of a metal or the like, in the case of a carboxyl group-containing acrylic polymer, an adherend made of a plastic or the like which is hard to be deteriorated by a carboxyl group or a deterioration Is generally applied to the formation of an adhesive member used for an adherend which does not cause a problem, but in that case also, it is preferable that the content of the carboxyl group unit is adjusted to 5 mol% or less.

【0024】一方、前記の架橋性モノマーとしては、2
個以上の結合手を有する適宜なモノマーを用いてよい。
好ましく用いうる架橋性モノマーは、被着体を変質させ
る原因となりやすいカルボキシル基を含有しないもので
ある。
On the other hand, the cross-linkable monomer is 2
Any suitable monomer having one or more bonds may be used.
The crosslinkable monomer that can be preferably used is one that does not contain a carboxyl group that tends to cause deterioration of the adherend.

【0025】好ましく用いうる架橋性モノマーの例とし
ては、エチレングリコールジアクリレート、ネオペンチ
ルジアクリレート、ヘキサンジオールジアクリレート、
プロピレングリコールジアクリレート、トリメチロール
プロパントリアクリレート、テトラメチロールメタント
リアクリレート、ジペンタエリスリトールヘキサアクリ
レート、グリシジルアクリレート、ないしそれらのアク
リル酸成分をメタクリル酸に置換したものの如き多官能
性アクリル酸系エステルなどがあげられる。
Examples of crosslinkable monomers that can be preferably used are ethylene glycol diacrylate, neopentyl diacrylate, hexanediol diacrylate,
Examples include propylene glycol diacrylate, trimethylol propane triacrylate, tetramethylol methane triacrylate, dipentaerythritol hexaacrylate, glycidyl acrylate, or polyfunctional acrylic acid esters such as those obtained by substituting methacrylic acid for those acrylic acid components. To be

【0026】また、N−メチロールアクリルアミド、N
−メトキシメチルアクリルアミド、N−ブトキシメチル
アクリルアミド、ないしそれらのアクリルアミド成分を
メタクリルアミドに置換したものの如きアクリルアミド
系化合物なども架橋性モノマーとして好ましく用いう
る。
Further, N-methylol acrylamide, N
An acrylamide compound such as -methoxymethyl acrylamide, N-butoxymethyl acrylamide, or a compound obtained by substituting the acrylamide component thereof with methacrylamide is also preferably used as the crosslinkable monomer.

【0027】さらに、アクリル酸プロピルトリメトキシ
シラン、アクリル酸プロピルジメトキシシラン、アクリ
ル酸プロピルトリエトキシシラン、ないしそれらのアク
リル酸成分をメタクリル酸に置換したものの如き多官能
性アルコキシシラン、その他ジビニルベンゼンなども架
橋性モノマーとして好ましく用いうる。
Furthermore, propyltrimethoxysilane acrylate, propyldimethoxysilane acrylate, propyltriethoxysilane acrylate, or polyfunctional alkoxysilanes such as those obtained by substituting methacrylic acid for these acrylic acid components, and other divinylbenzene, etc. It can be preferably used as a crosslinkable monomer.

【0028】架橋性モノマーを共重合させて架橋アクリ
ル系ポリマーを直接調製する方式の場合、その架橋性モ
ノマーの使用量は全共重合成分の0.01〜5重量%、
就中0.02〜3重量%が用いられる。その使用量が
0.01重量%以下では架橋不足で遊離成分となりやす
い低分子量のポリマーが生成しやすいし、5重量%を超
えると架橋過多のアクリル系ポリマーが形成されて接着
力に乏しくなる場合がある。
In the case of a method of directly preparing a crosslinked acrylic polymer by copolymerizing a crosslinkable monomer, the amount of the crosslinkable monomer used is 0.01 to 5% by weight based on the total amount of the copolymerized components.
Above all, 0.02 to 3% by weight is used. When the amount used is less than 0.01% by weight, a low-molecular-weight polymer is likely to be formed due to insufficient crosslinking, and when it exceeds 5% by weight, an acrylic polymer with excessive crosslinking is formed, resulting in poor adhesive strength. There is.

【0029】本発明においてアクリル系ポリマーの形成
に際し接着力の改良等を目的に必要に応じて用いられる
ことのある他の改質用モノマーとしては、例えばメチル
基やエチル基、プロピル基等の炭素数が3以下のアルキ
ル基を有するアクリル酸やメタクリル酸のエステル、ア
クリロニトリル、メタクリロニトリル、スチレンないし
その誘導体、酢酸ビニル、N−ビニルピロリドン、アク
リル酸メトキシエチルなどがあげられる。
In the present invention, other modifying monomers that may be optionally used for the purpose of improving the adhesive strength when forming an acrylic polymer include, for example, carbon such as methyl group, ethyl group and propyl group. Examples thereof include acrylic acid or methacrylic acid esters having an alkyl group of 3 or less, acrylonitrile, methacrylonitrile, styrene or a derivative thereof, vinyl acetate, N-vinylpyrrolidone, and methoxyethyl acrylate.

【0030】本発明においては少量の水溶性有機ラジカ
ル重合開始剤による乳化重合方式で調製したアクリル系
ポリマーのエマルジョンが粘着剤の形成に用いられる。
水溶性有機ラジカル重合開始剤としては、例えば水溶性
の有機過酸化物やアゾ系化合物などがあげられ、易腐食
性の被着体に使用する場合には後者が好ましく用いう
る。
In the present invention, an emulsion of an acrylic polymer prepared by an emulsion polymerization method with a small amount of a water-soluble organic radical polymerization initiator is used for forming a pressure-sensitive adhesive.
Examples of the water-soluble organic radical polymerization initiator include water-soluble organic peroxides and azo compounds, and the latter can be preferably used when used for an easily corrosive adherend.

【0031】水溶性の有機過酸化物の例としては、t-
ブチルパーオキシマレイン酸、t-ブチルハイドロパー
オキサイド、過酸化水素などがあげられ、適宜な還元剤
を併用することもできる。
Examples of water-soluble organic peroxides include t-
Butyl peroxy maleic acid, t-butyl hydroperoxide, hydrogen peroxide and the like can be mentioned, and an appropriate reducing agent can also be used in combination.

【0032】水溶性のアゾ系化合物の例としては、2,
2'−アゾビス〔2−メチル−N−(2−ヒドロキシエ
チル)プロピオンアミド〕、2,2'−アゾビス(2−
メチルプロピオンアミド)ジハイドレート、2,2'−
アゾビス(N,N'−ジメチレンイソブチルアミジ
ン)、2−(カルバモイルアゾ)イソブチロニトリルな
どがあげられる。
Examples of water-soluble azo compounds include 2,
2'-azobis [2-methyl-N- (2-hydroxyethyl) propionamide], 2,2'-azobis (2-
Methylpropionamide) dihydrate, 2,2'-
Examples thereof include azobis (N, N'-dimethyleneisobutylamidine), 2- (carbamoylazo) isobutyronitrile and the like.

【0033】水溶性有機ラジカル重合開始剤の使用量
は、遊離成分となりやすい低分子量ポリマーの生成を防
止する点より可及的に少量が好ましく、就中全共重合成
分の0.005〜0.1モル%が好ましい。この場合に
は、重合開始剤を一括添加しても反応が緩慢に進行して
安定に重合しやすく、得られるアクリル系ポリマーの特
性も良好である。
The amount of the water-soluble organic radical polymerization initiator used is preferably as small as possible from the viewpoint of preventing the formation of a low molecular weight polymer which is likely to become a free component, and 0.005 to 0. 1 mol% is preferred. In this case, even if a polymerization initiator is added all at once, the reaction proceeds slowly and stable polymerization is likely to occur, and the resulting acrylic polymer has good properties.

【0034】乳化重合処理は、適宜な方式で行ってよ
い。その例としては、原料モノマー等の共重合成分の混
合液を反応容器内で所定量の脱イオン水等の水中に加え
て混合乳化させ、反応容器を窒素置換して撹拌下に所定
の反応温度に加熱し乳化重合を進行完了させて目的のア
クリル系ポリマーを含有するエマルジョンを調製する方
式などがあげられる。
The emulsion polymerization treatment may be carried out by an appropriate method. As an example, a mixed solution of a copolymerization component such as a raw material monomer is added to a predetermined amount of water such as deionized water in a reaction vessel to be mixed and emulsified, the reaction vessel is replaced with nitrogen, and a predetermined reaction temperature is set under stirring. Examples of the method include a method of preparing a desired emulsion containing an acrylic polymer by heating to complete the emulsion polymerization.

【0035】前記において、水溶性有機ラジカル重合開
始剤は共重合成分の混合乳化時に加えてもよいし、反応
温度に加熱した際に加えてもよい。またその添加は、一
括でもよいし、分割して加えてもよい。
In the above, the water-soluble organic radical polymerization initiator may be added at the time of mixing and emulsifying the copolymerization components or at the time of heating to the reaction temperature. In addition, the addition may be performed all at once or may be performed in divided portions.

【0036】さらに沸点が150℃以下のアルコール性
化合物を加えてもよい。かかる化合物は、重合安定化剤
や塗工性改良剤などとして機能する。添加量は、全共重
合成分の30重量%以下が適当である。アルコール性化
合物の具体例としては、メタノール、n-プロパノー
ル、n-ブタノール、t-ブタノール、メトキシエタノー
ルなどがあげられる。
Further, an alcoholic compound having a boiling point of 150 ° C. or lower may be added. Such a compound functions as a polymerization stabilizer, a coatability improving agent, and the like. An appropriate amount of addition is 30% by weight or less based on the total amount of the copolymerization components. Specific examples of the alcoholic compound include methanol, n-propanol, n-butanol, t-butanol, methoxyethanol and the like.

【0037】重合温度は、20〜80℃が一般的である
が、本発明においては可及的に低温で行わせることが重
合度を上げて低分子量ポリマーの生成を防止する点より
好ましく、例えば10時間半減温度が40〜90℃の水
溶性有機ラジカル重合開始剤の場合、30〜50℃の温
度で重合処理する方式が特に好ましいが、前記に限定す
るものではない。
The polymerization temperature is generally 20 to 80 ° C. In the present invention, it is preferable to carry out the polymerization at a temperature as low as possible from the viewpoint of increasing the polymerization degree and preventing the formation of a low molecular weight polymer. In the case of a water-soluble organic radical polymerization initiator having a 10-hour half-life temperature of 40 to 90 ° C, a method of performing a polymerization treatment at a temperature of 30 to 50 ° C is particularly preferable, but not limited to the above.

【0038】なお、共重合成分の混合液の一部を水中に
添加して乳化させ、それを重合処理して微細な重合粒子
を生成させ、それを種粒子として残る混合液を徐々に添
加して粒径を生長させる重合方式(シードフィード方
式)も粒径が揃った重合体が得られやすい点より好まし
く適用することができる。
A part of the mixed solution of the copolymerization components is added to water to emulsify it, and the mixture is subjected to a polymerization treatment to produce fine polymer particles, and the mixed solution remaining as seed particles is gradually added. A polymerization method (seed feed method) in which the particle size is grown by the above method can be preferably applied because it is easy to obtain a polymer having a uniform particle size.

【0039】本発明の再剥離型粘着剤は、THF不溶分
が90%以上でTHFによる膨潤度が10倍以上の粘着
剤層を形成するために、必要に応じ架橋剤を配合してア
クリル系ポリマーを架橋処理するものである。架橋剤配
合による架橋は、前記の接着特性の調節のほか、粘着部
材を形成する支持基材への投錨性ないし密着性の改良の
ためなどに用いることもできる。
In order to form a pressure-sensitive adhesive layer having a THF insoluble content of 90% or more and a swelling degree with THF of 10 times or more, the re-peelable pressure-sensitive adhesive of the present invention may contain a crosslinking agent, if necessary, and may be an acrylic resin. The polymer is subjected to a crosslinking treatment. Cross-linking by blending a cross-linking agent can be used not only for adjusting the above-mentioned adhesive properties, but also for improving anchorage or adhesion to a supporting base material forming an adhesive member.

【0040】架橋剤としては、例えば水溶性の多官能エ
ポキシ系化合物、多官能エポキシ系化合物の水分散液、
水溶性メラミン系化合物、メラミン系化合物の水分散
液、水溶性多官能イソシアネート系化合物、多官能イソ
シアネート系化合物の水分散液などが好ましく用いう
る。
Examples of the cross-linking agent include water-soluble polyfunctional epoxy compounds, aqueous dispersions of polyfunctional epoxy compounds,
A water-soluble melamine compound, an aqueous dispersion of a melamine compound, a water-soluble polyfunctional isocyanate compound, an aqueous dispersion of a polyfunctional isocyanate compound, and the like can be preferably used.

【0041】架橋剤の添加量は、THF不溶分が90%
以上でTHFによる膨潤度が10倍以上の粘着剤層の形
成を目的に架橋対象のアクリル系ポリマーに応じて適宜
に決定される。一般には、架橋により重量平均分子量が
5万〜300万のアクリル系ポリマーが形成されると共
に、架橋剤が遊離成分として残存することが可及的にな
いように、アクリル系ポリマー含有のエマルジョンの固
形分100重量部あたり、0.001〜5重量部、就中
0.01〜0.5重量部が用いられる。
The amount of the cross-linking agent added is 90% of THF insoluble matter.
As described above, the degree of swelling with THF is appropriately determined according to the acrylic polymer to be crosslinked for the purpose of forming a pressure-sensitive adhesive layer having a fold or more 10 times. Generally, the acrylic polymer having a weight average molecular weight of 50,000 to 3,000,000 is formed by crosslinking, and the solid content of the emulsion containing the acrylic polymer is adjusted so that the crosslinking agent does not remain as a free component. 0.001 to 5 parts by weight, and especially 0.01 to 0.5 parts by weight, are used per 100 parts by weight.

【0042】本発明の粘着部材は、支持基材の片面又は
両面に厚さ5〜500μm程度の粘着剤層を設けたもの
である。その支持基材としては、ポリ塩化ビニルやエチ
レン・ビニルアルコール、エチレン・酢酸ビニル、ポリ
エステルの如き適宜なプラスチックフィルム、紙、織
布、不織布、金属箔等からなる薄葉体などが一般に用い
られる。
The pressure-sensitive adhesive member of the present invention has a pressure-sensitive adhesive layer having a thickness of about 5 to 500 μm provided on one or both sides of a supporting substrate. As the supporting base material, a suitable plastic film such as polyvinyl chloride, ethylene / vinyl alcohol, ethylene / vinyl acetate, polyester, or a thin leaf made of paper, woven fabric, non-woven fabric, metal foil or the like is generally used.

【0043】支持基材上への粘着剤層の付設は、流延方
式や塗布方式などの適宜な方式で粘着剤を支持基材上に
直接塗布し、それに乾燥処理や架橋処理などの必要な処
理を施してTHF不溶分が90%以上でTHFによる膨
潤度が10倍以上の粘着剤層とする方式、あるいはセパ
レータ、例えば薄葉体を剥離剤で表面処理したものや、
ポリプロピレン、ポリエステルの如き弱接着性のフィル
ム等の上に前記に準じて形成した粘着剤層を支持基材上
に転着する方式などの適宜な方式で行うことができる。
なお支持基材と粘着剤層との密着性の向上が望まれる場
合には、コロナ処理や下塗剤による表面処理などの必要
な処理を支持基材に施してもよい。
The attachment of the pressure-sensitive adhesive layer on the supporting base material requires direct coating of the pressure-sensitive adhesive on the supporting base material by an appropriate method such as a casting method or a coating method, and then a drying treatment or a crosslinking treatment. A method in which a pressure-sensitive adhesive layer having a THF-insoluble content of 90% or more and a swelling degree with THF of 10 times or more is applied, or a separator, for example, a thin leaf surface-treated with a release agent,
It can be carried out by an appropriate method such as a method of transferring a pressure-sensitive adhesive layer formed according to the above on a weakly adhesive film such as polypropylene or polyester onto a supporting substrate.
When it is desired to improve the adhesion between the supporting base material and the pressure-sensitive adhesive layer, the supporting base material may be subjected to necessary treatment such as corona treatment or surface treatment with an undercoating agent.

【0044】前記において粘着剤層におけるTHF不溶
分が90%未満では、遊離成分の含有量が多くて再剥離
時に被着体を汚染しやすくなる。またTHFによる膨潤
度が10倍未満の粘着剤層では硬すぎて被着面に対する
密着性に乏しい場合がある。この密着力不足は、ICウ
エハの回路パターン面における段差部分に隙間が生じて
洗浄水等の侵入を招き、洗浄汚濁水による汚染等を誘発
する原因などとなる。なお前記のTHF不溶分が増大す
ると膨潤度は低下するのが一般的傾向である。
When the THF insoluble content in the pressure-sensitive adhesive layer is less than 90%, the content of free components is large and the adherend is liable to be contaminated during re-peeling. If the pressure-sensitive adhesive layer has a degree of swelling with THF of less than 10 times, it may be too hard and the adhesion to the adherend may be poor. This lack of adhesion causes a gap in the stepped portion on the circuit pattern surface of the IC wafer to cause intrusion of cleaning water and the like, which causes contamination by cleaning contaminated water and the like. Incidentally, it is a general tendency that the degree of swelling decreases as the amount of THF-insoluble matter increases.

【0045】前記のTHF不溶分は、粘着剤をガラス板
上に100μmの厚さで塗工後105℃で5分間乾燥し
た粘着剤層をナイフでかき集めて20℃のTHFに1週
間浸漬したのち、THF不溶分を分離回収してその乾燥
直後の重量(B)を測定し、THFに浸漬する前の重量
(A)を用いて下式により算出される。THF不溶分
(架橋分率:%)=B/A×100
The above-mentioned THF-insoluble matter was prepared by applying a pressure-sensitive adhesive on a glass plate to a thickness of 100 μm, drying the pressure-sensitive adhesive layer at 105 ° C. for 5 minutes, scraping it with a knife and immersing it in THF at 20 ° C. for 1 week. , THF insoluble matter is separated and collected, the weight (B) immediately after drying is measured, and the weight (A) before immersion in THF is used to calculate by the following formula. THF insoluble matter (crosslinking ratio:%) = B / A × 100

【0046】また膨潤度は、前記THF不溶分の乾燥重
量(B)と、その乾燥前の、THF不溶分を20℃のT
HFに1週間浸漬させたものにおけるTHFの吸収重量
(C)を用いて下式により算出される。 膨潤度=(B+C)/B
The degree of swelling is determined by measuring the dry weight (B) of the THF-insoluble matter and the T-insoluble matter of 20 ° C. before drying.
It is calculated by the following formula using the absorption weight (C) of THF in one immersed in HF for one week. Swelling degree = (B + C) / B

【0047】本発明の粘着部材は、例えば損傷や塵埃の
付着、酸化等の変質等を防止する表面保護の目的や、I
Cウエハの裏面研磨時や切断によるチップ化時の固定保
持の目的などのように、仮着後に再剥離することが必須
の用途などに好ましく用いることができる。被着体とし
ては、例えば金属、シリコンの如き半導体、ガラスの如
きセラミック、プラスチックなどからなる板や化粧板等
の種々の物品を対象とすることができる。
The pressure-sensitive adhesive member of the present invention is used for the purpose of surface protection for preventing damage, adhesion of dust, alteration such as oxidation, and the like.
It can be preferably used for applications in which re-peeling is indispensable after temporary attachment, such as the purpose of fixing and holding the back surface of a C wafer or chipping by cutting. As the adherend, various articles such as a plate and a decorative plate made of, for example, a metal, a semiconductor such as silicon, a ceramic such as glass, or a plastic can be used.

【0048】[0048]

【発明の効果】本発明によれば、界面活性剤の共重合
化、低分子量ポリマーの生成や重合開始剤の残存の抑制
などで遊離物質の含有量が少なく、溶剤による抽出処理
をしなくても再剥離時の汚染物質の残存が極めて少ない
エマルジョン系の再剥離型粘着剤ないしその粘着部材を
得ることができる。またその粘着剤層は、耐水性、被着
体の変質防止性、接着密着性と再剥離性の接着力バラン
スなどにも優れている。
EFFECTS OF THE INVENTION According to the present invention, the content of free substances is small due to the copolymerization of surfactants, the formation of low molecular weight polymers and the suppression of the remaining polymerization initiator, and the extraction treatment with a solvent is not required. Also, it is possible to obtain an emulsion-based removable pressure-sensitive adhesive or a pressure-sensitive adhesive member thereof, in which residual contaminants are extremely small during re-peeling. Further, the pressure-sensitive adhesive layer is also excellent in water resistance, property of preventing deterioration of adherend, and balance of adhesive strength between adhesive adhesion and removability.

【0049】[0049]

【実施例】【Example】

実施例1 温度計、還流冷却管、窒素導入口及び撹拌機を備えた容
器に、脱イオン水225部(重量部、以下同じ)を入
れ、それにアクリル酸ブチル212.5部、アクリロニ
トリル25部、アクリル酸ヒドロキシエチル12.5
部、トリメチロールプロパントリアクリレート0.05
部及びHLBが17のプロペニル基導入ポリオキシエチ
レンアルキルフェニルエーテル(上記一般式の化合物、
以下同じ)8部の混合液の全量を加えて窒素置換し、撹
拌下に混合乳化させたのち40℃に昇温して2,2'−
アゾビス(N,N'−ジメチレンイソブチルアミジン)
0.12部を添加し、40℃に6時間保持したのち45
℃に3時間保持して反応させ、室温に冷却させて250
メッシュのナイロン布で濾過してアクリル系ポリマー含
有のエマルジョンを得、その100部に水溶性メラミン
0.5部を加えて撹拌し、再剥離型粘着剤を得た。
Example 1 A container equipped with a thermometer, a reflux condenser, a nitrogen inlet, and a stirrer was charged with 225 parts of deionized water (parts by weight, hereinafter the same), and 212.5 parts of butyl acrylate and 25 parts of acrylonitrile, Hydroxyethyl acrylate 12.5
Parts, trimethylolpropane triacrylate 0.05
Part and HLB of 17 are propenyl group-introduced polyoxyethylene alkylphenyl ethers (compounds of the above general formula,
The same applies hereafter) The whole amount of the mixed solution of 8 parts was added, the atmosphere was replaced with nitrogen, the mixture was emulsified with stirring, and the temperature was raised to 40 ° C. to obtain 2,2′-
Azobis (N, N'-dimethyleneisobutylamidine)
0.12 parts was added, and the mixture was kept at 40 ° C for 6 hours, then 45
Hold at ℃ for 3 hours to react, let cool to room temperature, 250
The emulsion was filtered through a nylon mesh cloth to obtain an acrylic polymer-containing emulsion. To 100 parts of the emulsion was added water-soluble melamine (0.5 part) and the mixture was stirred to obtain a removable pressure-sensitive adhesive.

【0050】次に前記の再剥離型粘着剤を、二軸延伸し
た厚さ38μmのポリエステルフィルム上にバーコータ
にて塗布し、80℃で20分間乾燥して厚さ20μmの
粘着剤層を付設し、その粘着剤層を厚さ150μmのエ
チレン・酢酸ビニルフィルムのコロナ処理面に貼り合わ
せ50℃で7日間キュアさせて粘着部材を得た。
Next, the re-peelable pressure-sensitive adhesive was applied onto a biaxially stretched polyester film having a thickness of 38 μm by a bar coater and dried at 80 ° C. for 20 minutes to attach a pressure-sensitive adhesive layer having a thickness of 20 μm. The adhesive layer was attached to a corona-treated surface of an ethylene / vinyl acetate film having a thickness of 150 μm and cured at 50 ° C. for 7 days to obtain an adhesive member.

【0051】実施例2 実施例1で得たエマルジョン100部にヘキサメチレン
ジイソシアネート系多官能化合物の水分散(乳化)液
(固形分25重量%)0.4部を加えて撹拌し、再剥離
型粘着剤を得た。次に、前記の再剥離型粘着剤を厚さ1
50μmのエチレン・酢酸ビニルフィルムのコロナ処理
面にバーコータにて塗布し、80℃で20分間乾燥して
厚さ20μmの粘着剤層を付設しそれを50℃で7日間
キュアさせて粘着部材を得た。
Example 2 To 100 parts of the emulsion obtained in Example 1 was added 0.4 part of an aqueous dispersion (emulsion) solution of a polyfunctional compound of hexamethylene diisocyanate (solid content 25% by weight), and the mixture was stirred to be removable. An adhesive was obtained. Next, the re-peelable pressure-sensitive adhesive is applied to a thickness of
It is coated with a bar coater on the corona-treated surface of 50 μm ethylene / vinyl acetate film, dried at 80 ° C. for 20 minutes and attached with a 20 μm thick adhesive layer, and cured at 50 ° C. for 7 days to obtain an adhesive member. It was

【0052】実施例3 アクリル酸ブチル217.5部、メタクリル酸メチル2
0部、アクリル酸メチル12.5部、N−n-ブトキシ
メチルアクリルアミド7部、HLBが17のプロペニル
基導入ポリオキシエチレンアルキルフェニルエーテル8
部、及びn−プロピルアルコール20部の混合液を用い
て実施例1に準じ重合処理して、架橋アクリル系ポリマ
ー含有のエマルジョンからなる再剥離型粘着剤を得、そ
れを用いて実施例1に準じ粘着部材を得た。
Example 3 217.5 parts butyl acrylate, 2 methyl methacrylate
0 parts, methyl acrylate 12.5 parts, Nn-butoxymethyl acrylamide 7 parts, HLB 17 propenyl group-introduced polyoxyethylene alkylphenyl ether 8
Parts and 20 parts of n-propyl alcohol were used for polymerization according to Example 1 to obtain a removable pressure-sensitive adhesive composed of a crosslinked acrylic polymer-containing emulsion, which was used in Example 1. A corresponding adhesive member was obtained.

【0053】実施例4 温度計、還流冷却管、窒素導入口及び撹拌機を備えた容
器に、脱イオン水225部を入れ、それにアクリル酸ブ
チル195部、アクリル酸2−メトキシエチル30部、
N−ビニルピロリドン25部、γ−メタクリロキシプロ
ピルトリメトキシシラン0.5部、HLBが17のプロ
ペニル基導入ポリオキシエチレンアルキルフェニルエー
テル8部、及びメタノール20部とt-ブチルアルコー
ル10部の混合液の全量を加えて窒素置換し、撹拌下に
混合乳化させたのち55℃に昇温して2,2'−アゾビ
ス〔2−メチル−N−(2−ヒドロキシエチル)プロピ
オンアミド〕0.1部を添加し、55℃に6時間保持し
たのち65℃に3時間保持して反応させ、室温に冷却さ
せて250メッシュのナイロン布で濾過して架橋アクリ
ル系ポリマー含有のエマルジョンからなる再剥離型粘着
剤を得、それを用いて実施例1に準じ粘着部材を得た。
Example 4 A container equipped with a thermometer, a reflux condenser, a nitrogen inlet and a stirrer was charged with 225 parts of deionized water, and 195 parts of butyl acrylate and 30 parts of 2-methoxyethyl acrylate were added to the container.
25 parts of N-vinylpyrrolidone, 0.5 part of γ-methacryloxypropyltrimethoxysilane, 8 parts of propoxy group-introduced polyoxyethylene alkylphenyl ether having HLB of 17, and a mixed solution of 20 parts of methanol and 10 parts of t-butyl alcohol. Was replaced with nitrogen, mixed and emulsified under stirring, and then heated to 55 ° C. to obtain 0.1 part of 2,2′-azobis [2-methyl-N- (2-hydroxyethyl) propionamide]. Was added, and the mixture was kept at 55 ° C for 6 hours, then kept at 65 ° C for 3 hours to react, cooled to room temperature, filtered through a 250-mesh nylon cloth, and re-peelable adhesive composed of emulsion containing cross-linked acrylic polymer. An agent was obtained, and using this, an adhesive member was obtained according to Example 1.

【0054】実施例5 温度計、還流冷却管、窒素導入口及び撹拌機を備えた容
器に、脱イオン水225部を入れ、それにアクリル酸ブ
チル205部、アクリル酸メチル38部、アクリル酸2
−ヒドロキシエチル8部、アクリル酸0.5部、HLB
が18のプロペニル基導入ポリオキシエチレンアルキル
フェニルエーテル5部、及びメタノール35部の混合液
の全量を加えて窒素置換し、撹拌下に混合乳化させたの
ち40℃に昇温して0.03部の2,2'−アゾビス
(N,N'−ジメチレンイソブチルアミジン)を加え4
0℃に6時間保持後0.01部を追加して45℃に3時
間保持して反応させ、室温に冷却させて250メッシュ
のナイロン布で濾過してアクリル系ポリマー含有のエマ
ルジョンを得、その100部に25重量%アンモニア水
0.1部と水溶性多官能エポキシ系化合物0.01部を
加えて撹拌し、再剥離型粘着剤を得、それを用いて実施
例2に準じ粘着部材を得た。
Example 5 A container equipped with a thermometer, a reflux condenser, a nitrogen inlet and a stirrer was charged with 225 parts of deionized water, and 205 parts of butyl acrylate, 38 parts of methyl acrylate and 2 parts of acrylic acid were added to the container.
-Hydroxyethyl 8 parts, acrylic acid 0.5 parts, HLB
18 parts of a propenyl group-introduced polyoxyethylene alkylphenyl ether (5 parts) and 35 parts of methanol (35 parts) were added to replace the mixture with nitrogen, and the mixture was mixed and emulsified with stirring. 2,2′-azobis (N, N′-dimethyleneisobutylamidine) was added to
After keeping at 0 ° C. for 6 hours, 0.01 part was additionally added and kept at 45 ° C. for 3 hours to react, cooled to room temperature and filtered through a 250 mesh nylon cloth to obtain an emulsion containing an acrylic polymer. To 100 parts, 0.1 parts of 25 wt% ammonia water and 0.01 parts of water-soluble polyfunctional epoxy compound were added and stirred to obtain a removable pressure-sensitive adhesive, which was used to prepare an adhesive member according to Example 2. Obtained.

【0055】実施例6 温度計、還流冷却管、窒素導入口及び撹拌機を備えた容
器に、脱イオン水225部を入れてL−アスコルビン酸
0.2部を加え、それにアクリル酸ブチル212.5
部、アクリロニトリル25部、アクリル酸ヒドロキシエ
チル12.5部、トリメチロールプロパントリアクリレ
ート0.05部及びHLBが17のプロペニル基導入ポ
リオキシエチレンアルキルフェニルエーテル8部の混合
液の全量を加えて窒素置換し、撹拌下に混合乳化させた
のち40℃に昇温して保持しつつ、t-ブチルハイドロ
パーオキサイド0.5部を溶解させた脱イオン水50部
を5時間かけて滴下したのち45℃に3時間保持して反
応させ、室温に冷却させて250メッシュのナイロン布
で濾過してアクリル系ポリマー含有のエマルジョンを
得、その100部に水溶性メラミン0.5部を加えて撹
拌し、再剥離型粘着剤を得、それを用いて実施例1に準
じ粘着部材を得た。
Example 6 A container equipped with a thermometer, a reflux condenser, a nitrogen inlet and a stirrer was charged with 225 parts of deionized water, 0.2 part of L-ascorbic acid was added, and butyl acrylate 212. 5
Parts, 25 parts of acrylonitrile, 12.5 parts of hydroxyethyl acrylate, 0.05 parts of trimethylolpropane triacrylate and 8 parts of a propenyl group-introduced polyoxyethylene alkylphenyl ether having an HLB of 17 are added to replace the mixture with nitrogen. Then, after mixing and emulsifying with stirring, the temperature was raised to 40 ° C and maintained, while 50 parts of deionized water in which 0.5 part of t-butyl hydroperoxide was dissolved was added dropwise over 5 hours, and then 45 ° C. The mixture is allowed to react for 3 hours, cooled to room temperature, filtered through a 250-mesh nylon cloth to obtain an acrylic polymer-containing emulsion, to which 100 parts of water-soluble melamine is added, stirred and re-mixed. A peelable pressure-sensitive adhesive was obtained, and using it, a pressure-sensitive adhesive member was obtained according to Example 1.

【0056】比較例1 プロペニル基導入ポリオキシエチレンアルキルフェニル
エーテルに代えて、そのプロペニル基を有しないものを
用いたほかは実施例1に準じて粘着剤とその粘着部材を
得た。
Comparative Example 1 A pressure-sensitive adhesive and its pressure-sensitive adhesive member were obtained in the same manner as in Example 1 except that the propenyl group-introduced polyoxyethylene alkylphenyl ether was replaced with a propenyl group-free one.

【0057】比較例2 2,2'−アゾビス(N,N'−ジメチレンイソブチルア
ミジン)の使用量を0.6部としてそれを添加後、60
℃に4間保持したのち70℃に2時間保持したほかは実
施例1に準じて粘着剤とその粘着部材を得た。
Comparative Example 2 2,2'-Azobis (N, N'-dimethyleneisobutylamidine) was added in an amount of 0.6 part, and 60 parts were added.
A pressure-sensitive adhesive and its pressure-sensitive adhesive member were obtained in the same manner as in Example 1 except that the temperature was maintained at 70 ° C. for 4 hours and then at 70 ° C. for 2 hours.

【0058】比較例3 重合開始剤として、過硫酸アンモニウム0.5部を用い
たほかは比較例2に準じて粘着剤とその粘着部材を得
た。
Comparative Example 3 An adhesive and its adhesive member were obtained in the same manner as in Comparative Example 2 except that 0.5 part of ammonium persulfate was used as a polymerization initiator.

【0059】比較例4 トリメチロールプロパントリアクリレートの使用量を
1.2部としたほかは実施例1に準じて粘着剤とその粘
着部材を得た。
Comparative Example 4 An adhesive and its adhesive member were obtained in the same manner as in Example 1 except that the amount of trimethylolpropane triacrylate used was 1.2 parts.

【0060】評価試験 実施例、比較例で得た粘着部材について次の特性を調べ
た。 接着力 幅20mmの粘着部材をステンレス板(SUS 304 BA仕上)
に1kgのゴムローラを一往復させて圧着し、剥離に要す
る力を測定した(180度ピール、剥離速度300mm/
分)。
Evaluation Test The following characteristics of the adhesive members obtained in Examples and Comparative Examples were examined. Adhesive strength Adhesive material with a width of 20 mm is stainless steel plate (SUS 304 BA finish)
1kg of rubber roller was reciprocated once and pressed to measure the force required for peeling (180 degree peeling, peeling speed 300mm /
Minutes).

【0061】耐水性 厚さ0.5mmのステンレス板(SUS 304 BA仕上)からな
る直径10cmの円板にその周縁より3mmを離して厚さ約
50μmのPFT基材の粘着テープを接着し、その上か
ら円板と同面積で試験用の粘着部材を接着し30分間経
過後に23℃の蒸留水中に24時間浸漬して取りだし、
周縁における粘着部材の剥がれ状態を調べ、次の基準で
評価した。 ○:全く剥がれ無し △:一部に剥がれ有り ×:周縁の半分以上に剥がれ有り
Water resistance A 0.5 mm thick stainless steel plate (SUS 304 BA finish) having a diameter of 10 cm was adhered to a PFT-based adhesive tape having a thickness of about 50 μm with a distance of 3 mm from the periphery. From the top, adhere the test adhesive member in the same area as the disk, and after 30 minutes have passed, dip it in distilled water at 23 ° C. for 24 hours and take it out.
The peeling state of the adhesive member at the periphery was examined and evaluated according to the following criteria. ◯: No peeling at all Δ: Peeling at part partially ×: Peeling at half or more of the peripheral edge

【0062】銅板腐食性 280番のサンドペーパで研磨した銅板面に、幅2cm、
長さ12cmの粘着部材を接着したのち50℃、湿度10
0%R.H.中に24時間放置したのち取りだし室温に
冷却後、粘着部材を剥がして変色の程度を調べ次の基準
で評価した。 ◎:褐色(変化無し)の状態 ○:こげ茶色の状態 △:緑色を帯びた状態 ×:緑色の状態
Copper plate corrosiveness 2 cm wide, on a copper plate surface polished with No. 280 sandpaper.
After bonding a 12 cm long adhesive member, 50 ° C, humidity 10
0% R. H. After leaving it for 24 hours, it was taken out, cooled to room temperature, the adhesive member was peeled off, and the degree of discoloration was examined and evaluated according to the following criteria. ◎: brown (no change) ○: dark brown △: greenish ×: green

【0063】パーティクル数 メタノールで洗浄したシリコンウエハに粘着部材を接着
し、60分間室温で放置したのち再剥離してシリコンウ
エハの表面におけるパーティクル数を測定した(HIA
C−ROYCO社製、PC−320/LAS346)。
Number of Particles An adhesive member was adhered to a silicon wafer washed with methanol, left at room temperature for 60 minutes, and then peeled again to measure the number of particles on the surface of the silicon wafer (HIA).
C-ROYCO, PC-320 / LAS346).

【0064】前記の結果を表1に示した。なお表にはT
HF不溶分と膨潤度を併記した。
The above results are shown in Table 1. The table shows T
The HF insoluble content and the swelling degree are also shown.

【表1】 [Table 1]

─────────────────────────────────────────────────────
─────────────────────────────────────────────────── ───

【手続補正書】[Procedure amendment]

【提出日】平成5年7月5日[Submission date] July 5, 1993

【手続補正1】[Procedure Amendment 1]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】0022[Name of item to be corrected] 0022

【補正方法】変更[Correction method] Change

【補正内容】[Correction content]

【0022】 官能性モノマーの使用量は、その官能基
や併用の架橋剤の種類などにより適宜に決定される。一
般には、全共重合成分の1重量%以下、就中0.01
重量%が用いられる。その使用量が1重量%を超
えるとアクリル系ポリマーの共重合成分として過剰の導
入割合となり、架橋剤で架橋した場合に架橋過多のアク
リル系ポリマーが形成されて接着力に乏しくなる場合が
ある。
The amount of the functional monomer used is appropriately determined depending on the functional group and the type of the crosslinking agent used in combination. In general, 1 0 wt% or less of the total copolymer components, especially 0. 01
~ 5 wt% is used. The amount becomes excessive incorporation percentage as a copolymerization component of 1 0% by weight, the acrylic polymer, there is a case where an acrylic polymer cross-linking excessive is formed becomes poor in adhesion when crosslinked with a crosslinking agent .

【手続補正2】[Procedure Amendment 2]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】0041[Correction target item name] 0041

【補正方法】変更[Correction method] Change

【補正内容】[Correction content]

【0041】 架橋剤の添加量は、THF不溶分が90
%以上でTHFによる膨潤度が10倍以上の粘着剤層の
形成を目的に架橋対象のアクリル系ポリマーに応じて適
宜に決定される。一般には、アクリル系ポリマー含有の
エマルジョンの固形分100重量部あたり、0.001
〜5重量部、就中0.01〜0.5重量部が用いられ
る。
The addition amount of the cross-linking agent is 90% insoluble in THF.
% Or more, the degree of swelling with THF is 10 times or more, and is appropriately determined depending on the acrylic polymer to be crosslinked for the purpose of forming an adhesive layer. In general, the solids content per 100 parts by weight of A acrylic-based polymer containing the emulsion, 0.001
.About.5 parts by weight, especially 0.01 to 0.5 parts by weight.

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 アルキル基の炭素数が4〜12のアクリ
ル酸系アルキルエステルと、共重合性不飽和基を有する
非イオン性界面活性剤と、官能性モノマーを少なくとも
用いて少量の水溶性有機ラジカル重合開始剤により緩や
かに乳化共重合させて形成したアクリル系ポリマーを含
有するエマルジョンに、THF不溶分が90%以上でT
HFによる膨潤度が10倍以上となるように架橋剤を配
合してなることを特徴とする再剥離型粘着剤。
1. A small amount of a water-soluble organic compound containing at least an acrylic acid alkyl ester having an alkyl group having 4 to 12 carbon atoms, a nonionic surfactant having a copolymerizable unsaturated group, and a functional monomer. When the THF-insoluble content is 90% or more in the emulsion containing an acrylic polymer formed by slowly emulsion-copolymerizing with a radical polymerization initiator,
A removable pressure-sensitive adhesive comprising a cross-linking agent so that the degree of swelling with HF is 10 times or more.
【請求項2】 アルキル基の炭素数が4〜12のアクリ
ル酸系アルキルエステルと、共重合性不飽和基を有する
非イオン性界面活性剤と、架橋性モノマーを少なくとも
用いて少量の水溶性有機ラジカル重合開始剤により緩や
かに乳化共重合させて形成してなる、THF不溶分が9
0%以上でTHFによる膨潤度が10倍以上の架橋アク
リル系ポリマーを含有するエマルジョンからなることを
特徴とする再剥離型粘着剤。
2. A small amount of a water-soluble organic compound containing at least an acrylic acid alkyl ester having an alkyl group having 4 to 12 carbon atoms, a nonionic surfactant having a copolymerizable unsaturated group, and a crosslinkable monomer. The THF-insoluble matter formed by gently emulsion-copolymerizing with a radical polymerization initiator is 9
A re-peelable pressure-sensitive adhesive comprising an emulsion containing a crosslinked acrylic polymer having a degree of swelling with THF of 0% or more and 10 times or more.
【請求項3】 共重合性不飽和基を有する非イオン性界
面活性剤が一般式 (ただし、Rは水素又はアルキル基、nは10〜70で
ある。)で表されるものである請求項1又は2に記載の
再剥離型粘着剤。
3. A nonionic surfactant having a copolymerizable unsaturated group is represented by the general formula: (However, R is hydrogen or an alkyl group, and n is 10 to 70.) The removable pressure-sensitive adhesive according to claim 1 or 2.
【請求項4】 支持基材上に請求項1又は2に記載の再
剥離型粘着剤からなる、THF不溶分が90%以上でT
HFによる膨潤度が10倍以上の粘着剤層を有すること
を特徴とする粘着部材。
4. A THF-insoluble matter containing 90% or more of T insoluble matter, which comprises the removable pressure-sensitive adhesive according to claim 1 or 2 on a supporting substrate.
An adhesive member having an adhesive layer having a swelling degree by HF of 10 times or more.
JP13122493A 1993-05-07 1993-05-07 Removable adhesive and its adhesive member Expired - Lifetime JP3288476B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
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Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13122493A JP3288476B2 (en) 1993-05-07 1993-05-07 Removable adhesive and its adhesive member

Publications (2)

Publication Number Publication Date
JPH06322338A true JPH06322338A (en) 1994-11-22
JP3288476B2 JP3288476B2 (en) 2002-06-04

Family

ID=15052938

Family Applications (1)

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Country Link
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JP2007314706A (en) * 2006-05-29 2007-12-06 Sumitomo Bakelite Co Ltd Surface protection film
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JP2010053258A (en) * 2008-08-28 2010-03-11 Sekisui Chem Co Ltd Double-sided tape for fixing polishing cloth
WO2012050049A1 (en) * 2010-10-12 2012-04-19 日本合成化学工業株式会社 Adhesive composition for optical components, adhesive for optical components, optical component with adhesive layer, and image display device
JP2011137181A (en) * 2011-04-11 2011-07-14 Nitto Denko Corp Pressure-sensitive adhesive sheet for sticking to metallic surface and article having metallic surface
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