JPH06320125A - Ultrasonic washing apparatus - Google Patents
Ultrasonic washing apparatusInfo
- Publication number
- JPH06320125A JPH06320125A JP5130131A JP13013193A JPH06320125A JP H06320125 A JPH06320125 A JP H06320125A JP 5130131 A JP5130131 A JP 5130131A JP 13013193 A JP13013193 A JP 13013193A JP H06320125 A JPH06320125 A JP H06320125A
- Authority
- JP
- Japan
- Prior art keywords
- partition plate
- medium
- port
- radiation
- curved surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は超音波洗浄装置に関する
ものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic cleaning device.
【0002】[0002]
【従来の技術】従来の此種装置は図6に示すように、ノ
ズル状をなした筺体1の一端にレンズ状輻射体2をパッ
キング3を介して固定し、レンズ状輻射体2に電圧振動
子4を固定し、放射面に耐薬液用コーテイング材5を貼
付けている。そして、薬液供給口6から薬液を導入し、
筺体1内に薬液を充満させ、薬液に超音波振動を付与
し、放射口7から薬液を放射する。2. Description of the Related Art In a conventional device of this type, as shown in FIG. 6, a lens-shaped radiator 2 is fixed to one end of a nozzle-shaped housing 1 through a packing 3, and voltage oscillation is applied to the lens-shaped radiator 2. The child 4 is fixed, and the chemical resistant coating material 5 is attached to the radiation surface. Then, the chemical liquid is introduced from the chemical liquid supply port 6,
The housing 1 is filled with the chemical liquid, ultrasonic vibration is applied to the chemical liquid, and the chemical liquid is emitted from the emission port 7.
【0003】[0003]
【発明が解決しようとする課題】前記従来の装置にあっ
ては一点又は直線状に超音波を集束させることができる
という効果を有するものであるが、圧電振動子の振動に
よりレンズ状輻射体が破損することがあり、薬液が流出
する欠点があった。又、輻射体の放射面近傍に気泡が溜
り、気泡によって超音波の透過率が低下するという欠点
があった。そこで、本発明においては、媒体液を用いて
薬液と分離させ、且気泡の溜りを防止しようとするもの
である。The above-mentioned conventional device has the effect of being able to focus ultrasonic waves in a single point or in a straight line. It had a drawback that it could be damaged and the chemical solution could flow out. In addition, there is a drawback that bubbles are accumulated in the vicinity of the radiation surface of the radiator, and the bubbles reduce the transmittance of ultrasonic waves. Therefore, in the present invention, the medium liquid is used to separate from the chemical liquid, and the accumulation of bubbles is prevented.
【0004】[0004]
【課題を解決するための手段】本発明は前記課題を解決
するために、筺体を仕切板で媒体槽とノズル部とに分離
し、媒体液を充満させる媒体槽内に、圧電振動子を固定
した放射面を曲面で形成した輻射体を設け、ノズル部の
一端に薬液供給口を、先端に被洗浄物に薬液を放射する
放射口を開口した超音波洗浄装置を構成する。In order to solve the above-mentioned problems, the present invention separates a housing into a medium tank and a nozzle portion by a partition plate, and fixes a piezoelectric vibrator in the medium tank filled with the medium liquid. An ultrasonic cleaning device is provided in which a radiation body having a curved radiation surface is provided, a chemical solution supply port is provided at one end of the nozzle portion, and a radiation port for radiating the chemical solution to the object to be cleaned is opened at the tip.
【0005】更に、輻射体の放射面の窪みから端部に向
かって気泡除去孔を設けた、仕切板を超音波の進行を乱
さない曲面を有する形状に形成し、仕切板の曲面内部に
傾斜した気泡排出溝を設けて、ノズルに設けた気泡排出
口と連通せしめた超音波洗浄装置を構成する。Furthermore, a partition plate having a bubble removal hole from the recess of the radiation surface of the radiator toward the end is formed into a shape having a curved surface that does not disturb the progress of ultrasonic waves, and is inclined inside the curved surface of the partition plate. The bubble cleaning groove is provided to communicate with the bubble discharging port provided on the nozzle to form an ultrasonic cleaning device.
【0006】[0006]
【作用】本発明は前記のように構成したもので、媒体槽
内の媒体液は輻射体の超音波振動を伝達して仕切板の曲
面を通してノズル部の薬液に振動を伝え、細い円形又は
ライン状に放射口から被洗浄物に超音波薬液を放射して
洗浄を行う。又、媒体槽内で発生した気泡は気泡除去孔
を通って外部に排出され、ノズル部内で発生した気泡は
気泡排出溝から気泡排出口を通って外部に排出される。The present invention is configured as described above, and the medium liquid in the medium tank transmits the ultrasonic vibration of the radiating body to transmit the vibration to the chemical liquid in the nozzle portion through the curved surface of the partition plate to form a thin circle or line. The ultrasonic chemical solution is radiated from the radiation port to the object to be cleaned in a similar manner. Further, the bubbles generated in the medium tank are discharged to the outside through the bubble removing hole, and the bubbles generated in the nozzle portion are discharged to the outside from the bubble discharging groove through the bubble discharging port.
【0007】[0007]
【実施例】本発明の実施例を図1,図2に基いて詳細に
説明する。筺体1を曲面を有する仕切板8でノズル部9
と媒体槽10とに分離し、媒体槽10内に円形したノズ
ル状輻射体2を位置させ、上端の鍔部11を筺体1の上
面にパッキング3を介して複数本のボルト12,12,
…で固定し、レンズ状輻射体2の上面に円形の圧電振動
子4を固定している。Embodiments of the present invention will be described in detail with reference to FIGS. The casing 1 is provided with a partition plate 8 having a curved surface and a nozzle portion 9
And the medium tank 10 are separated from each other, and the circular nozzle-shaped radiator 2 is positioned in the medium tank 10, and the flange portion 11 at the upper end is attached to the upper surface of the housing 1 via the packing 3 and the plurality of bolts 12, 12,
, And the circular piezoelectric vibrator 4 is fixed on the upper surface of the lens-shaped radiator 2.
【0008】又、媒体槽10の一方には市水である媒体
液を供給する媒体液供給管13を設け、他方に媒体液排
出管14を設けている。又、レンズ状輻射体2の放射面
の中央から媒体液排出管14近傍の端面に亘って気泡除
去孔15を設け、気泡を媒体液排出管14から排出する
ようになっている。A medium liquid supply pipe 13 for supplying a medium liquid, which is city water, is provided on one side of the medium tank 10, and a medium liquid discharge pipe 14 is provided on the other side. Further, a bubble removing hole 15 is provided from the center of the emission surface of the lens-shaped radiator 2 to the end face in the vicinity of the medium liquid discharge pipe 14 so that the bubbles are discharged from the medium liquid discharge pipe 14.
【0009】又、前記ノズル部9には従来と同様に下端
に放射口7を開口し、上端の一方に薬液供給口6を設け
ている。そして、他方に気泡排出口16を設け、仕切板
8の曲面に傾斜角Θで前記気泡排出口15と連通する気
泡排出溝17を設ける。尚、図1中18は被洗浄物であ
る。尚、前記実施例における仕切板の曲面は超音波の集
束点からの曲率と同一の曲率を有するレンズ状に形成し
ている。Further, the nozzle portion 9 is provided with a radiation port 7 at the lower end and a chemical liquid supply port 6 at one of the upper ends, as in the conventional case. A bubble discharge port 16 is provided on the other side, and a bubble discharge groove 17 communicating with the bubble discharge port 15 at an inclination angle Θ is provided on the curved surface of the partition plate 8. In addition, reference numeral 18 in FIG. 1 denotes an object to be cleaned. The curved surface of the partition plate in the above embodiment is formed in a lens shape having the same curvature as the curvature from the focal point of ultrasonic waves.
【0010】第1実施例は前記のように構成したもの
で、圧電振動子4の振動は媒体液を介して仕切板8に伝
達される。仕切板8においては図3で示すように、超音
波の一点に集中するように進行し、細い円形状に放射さ
れた超音波薬液が放射口から被洗浄物18に放射され
る。The first embodiment is constructed as described above, and the vibration of the piezoelectric vibrator 4 is transmitted to the partition plate 8 through the medium liquid. As shown in FIG. 3, the partition plate 8 advances so as to concentrate on one point of the ultrasonic wave, and the ultrasonic chemical solution radiated in a thin circular shape is radiated to the object to be cleaned 18 from the radiation port.
【0011】尚、図4に示すように仕切板8が平面の場
合には超音波は収束されず、乱れた状態になり、有効な
超音波洗浄できにくい。When the partition plate 8 is flat as shown in FIG. 4, the ultrasonic waves are not converged and are in a disordered state, which makes it difficult to perform effective ultrasonic cleaning.
【0012】又、媒体液内に超音波キャビテーション等
により発生した気泡は気泡除去孔15を通して媒体液吐
出管14を通って外部に排出され、洗浄用の薬液中に発
生した気泡は気泡排出溝17の傾斜面に沿って上昇し、
気泡排出口16から薬液と共に排出される。Bubbles generated by ultrasonic cavitation in the medium liquid are discharged to the outside through the medium liquid discharge pipe 14 through the bubble removing hole 15, and bubbles generated in the cleaning chemical liquid are discharged into the bubble discharge groove 17. Rises along the slope of
It is discharged from the bubble discharge port 16 together with the liquid medicine.
【0013】次に、第2実施例を図5に基いて説明す
る。本実施例は超音波を細いライン状に放射させるもの
で、輻射体2´を矩形状に形成し、これに応じて放射面
を球面状ではなく、曲面で形成する。他の部材例えば、
圧電振動子4´も矩形状に形成することにより放射口7
´を矩形に形成し、細いライン状に超音波薬液を放射す
るようになっている。他は全て第1実施例と同様なの
で、同一符号を付し、説明を省略する。Next, a second embodiment will be described with reference to FIG. In this embodiment, ultrasonic waves are emitted in a thin line shape, and the radiator 2'is formed in a rectangular shape, and accordingly, the emission surface is formed not in a spherical shape but in a curved surface. Other members, for example
The piezoelectric vibrator 4'is also formed in a rectangular shape so that the radiation port 7
′ Is formed in a rectangular shape, and the ultrasonic chemical solution is emitted in a thin line shape. Since all others are the same as in the first embodiment, the same reference numerals are given and description thereof is omitted.
【0014】[0014]
【発明の効果】本発明は前記のような構成、作用を有す
るもので、筺体を仕切板で分離し、輻射体を媒体液を充
満させた媒体槽内に設けているので、輻射体が振動等に
より破損するようなことがあっても薬液が漏洩するよう
なことがない。As described above, the present invention has the above-mentioned structure and action. Since the housing is separated by the partition plate and the radiator is provided in the medium tank filled with the medium liquid, the radiator vibrates. Even if it is damaged due to factors such as the above, the chemical solution will not leak.
【0015】又、輻射体は薬液と直接接触しないので、
薬液による腐蝕が発生するようなことがない。又、仕切
板には曲面を設けているので、超音波の進行が乱れるよ
うなことがなく、集束させることができる。Further, since the radiator does not come into direct contact with the chemical liquid,
No corrosion due to chemicals will occur. Further, since the partition plate is provided with a curved surface, the ultrasonic waves can be focused without being disturbed.
【0016】又、媒体槽及びノズル部に発生した気泡は
外部に排出させるので、放射面に気泡が存在して超音波
の進行が妨げられるようなことがない。Further, since the bubbles generated in the medium tank and the nozzle portion are discharged to the outside, there is no possibility that the bubbles are present on the radiation surface and the progress of ultrasonic waves is hindered.
【0017】[0017]
【図1】本発明の第1実施例の断面図。FIG. 1 is a sectional view of a first embodiment of the present invention.
【図2】その平面図。FIG. 2 is a plan view thereof.
【図3】仕切板の作用を説明する断面図。FIG. 3 is a cross-sectional view illustrating the operation of a partition plate.
【図4】仕切板の他の例の断面図。FIG. 4 is a sectional view of another example of the partition plate.
【図5】第2実施例の平面図。FIG. 5 is a plan view of the second embodiment.
【図6】従来例の平面図。FIG. 6 is a plan view of a conventional example.
【符号の説明】 1 筺体 1´ 筺体 2 輻射体(レンズ状) 2´ 輻射体 3 パッキング 4 圧電振動子 4´ 圧電振動子 5 耐薬液用コーティング材 6 薬液供給口 7 放射口 7´ 放射口 8 仕切板 8´ 仕切板 9 ノズル部 10 媒体槽 11 鍔部 12 ボルト 13 媒体液供給管 14 媒体液吐出管 15 気泡除去孔 16 気泡排出口 17 気泡排出溝 18 被洗浄物[Explanation of Codes] 1 housing 1 ′ housing 2 radiation body (lens-shaped) 2 ′ radiation body 3 packing 4 piezoelectric vibrator 4 ′ piezoelectric vibrator 5 coating agent for chemical solution 6 chemical solution supply port 7 radiation port 7 ′ radiation port 8 Partition plate 8'Partition plate 9 Nozzle part 10 Medium tank 11 Collar part 12 Bolt 13 Medium liquid supply pipe 14 Medium liquid discharge pipe 15 Bubble removal hole 16 Bubble discharge port 17 Bubble discharge groove 18 Object to be cleaned
Claims (4)
離し、媒体液を充満させる媒体槽内に、圧電振動子を固
定した放射面を曲面で形成した輻射体を設け、ノズル部
の一端に薬液供給口を、先端に被洗浄物に薬液を放射す
る放射口を開口したことを特徴とする超音波洗浄装置。1. A radiation body having a curved radiation surface on which a piezoelectric vibrator is fixed is provided in a medium tank in which a housing is separated into a medium tank and a nozzle section by a partition plate, and the medium solution is filled with the medium solution. An ultrasonic cleaning device characterized in that a chemical solution supply port is opened at one end of the container and a radiation port for radiating the chemical solution to the object to be cleaned is opened at the tip.
て気泡除去孔を設けたことを特徴とする請求項1記載の
超音波洗浄装置。2. The ultrasonic cleaning device according to claim 1, wherein a bubble removing hole is provided from the recess of the radiation surface of the radiator toward the end.
有する形状に形成したことを特徴とする請求項1,2記
載の超音波洗浄装置。3. The ultrasonic cleaning apparatus according to claim 1, wherein the partition plate is formed in a shape having a curved surface that does not disturb the progress of ultrasonic waves.
を設けて、ノズルに設けた気泡排出口と連通せしめたこ
とを特徴とする超音波洗浄装置。4. An ultrasonic cleaning device characterized in that an inclined bubble discharging groove is provided inside a curved surface of a partition plate so as to communicate with a bubble discharging port provided in a nozzle.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13013193A JP3258445B2 (en) | 1993-05-07 | 1993-05-07 | Ultrasonic cleaning equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13013193A JP3258445B2 (en) | 1993-05-07 | 1993-05-07 | Ultrasonic cleaning equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH06320125A true JPH06320125A (en) | 1994-11-22 |
JP3258445B2 JP3258445B2 (en) | 2002-02-18 |
Family
ID=15026698
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13013193A Expired - Lifetime JP3258445B2 (en) | 1993-05-07 | 1993-05-07 | Ultrasonic cleaning equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3258445B2 (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008080293A (en) * | 2006-09-28 | 2008-04-10 | Hitachi Plant Technologies Ltd | Washing apparatus |
KR101069457B1 (en) * | 2005-05-26 | 2011-09-30 | 혼다덴시 가부시키가이샤 | Ultrasonic washing apparatus |
CZ303782B6 (en) * | 2008-11-18 | 2013-05-02 | Univerzita Palackého | Device for ultrasonic irradiation of samples |
TWI511796B (en) * | 2012-10-16 | 2015-12-11 | Infina Technology Co Ltd | Curtain-style supersonic spray coating system and technique of substrate spraying material |
JP2020000995A (en) * | 2018-06-28 | 2020-01-09 | 株式会社ディスコ | Ultrasonic sound water injector |
CN111085942A (en) * | 2019-12-31 | 2020-05-01 | 中国计量大学 | Abrasive particle micro-jet polishing method and polishing device based on phased cavitation effect |
-
1993
- 1993-05-07 JP JP13013193A patent/JP3258445B2/en not_active Expired - Lifetime
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101069457B1 (en) * | 2005-05-26 | 2011-09-30 | 혼다덴시 가부시키가이샤 | Ultrasonic washing apparatus |
JP2008080293A (en) * | 2006-09-28 | 2008-04-10 | Hitachi Plant Technologies Ltd | Washing apparatus |
CZ303782B6 (en) * | 2008-11-18 | 2013-05-02 | Univerzita Palackého | Device for ultrasonic irradiation of samples |
TWI511796B (en) * | 2012-10-16 | 2015-12-11 | Infina Technology Co Ltd | Curtain-style supersonic spray coating system and technique of substrate spraying material |
JP2020000995A (en) * | 2018-06-28 | 2020-01-09 | 株式会社ディスコ | Ultrasonic sound water injector |
CN111085942A (en) * | 2019-12-31 | 2020-05-01 | 中国计量大学 | Abrasive particle micro-jet polishing method and polishing device based on phased cavitation effect |
CN111085942B (en) * | 2019-12-31 | 2021-10-15 | 中国计量大学 | Abrasive particle micro-jet polishing method and polishing device based on phased cavitation effect |
Also Published As
Publication number | Publication date |
---|---|
JP3258445B2 (en) | 2002-02-18 |
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