JPH0630847Y2 - ストリツプ温度検出装置 - Google Patents

ストリツプ温度検出装置

Info

Publication number
JPH0630847Y2
JPH0630847Y2 JP9537187U JP9537187U JPH0630847Y2 JP H0630847 Y2 JPH0630847 Y2 JP H0630847Y2 JP 9537187 U JP9537187 U JP 9537187U JP 9537187 U JP9537187 U JP 9537187U JP H0630847 Y2 JPH0630847 Y2 JP H0630847Y2
Authority
JP
Japan
Prior art keywords
strip
temperature detector
reflecting mirror
rotary scanning
flat reflecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP9537187U
Other languages
English (en)
Japanese (ja)
Other versions
JPS642067U (enExample
Inventor
光博 阿部
史郎 鈴木
敏明 花田
満彦 迫
繁美 免田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Nippon Steel Nisshin Co Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Nisshin Steel Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd, Nisshin Steel Co Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP9537187U priority Critical patent/JPH0630847Y2/ja
Publication of JPS642067U publication Critical patent/JPS642067U/ja
Application granted granted Critical
Publication of JPH0630847Y2 publication Critical patent/JPH0630847Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP9537187U 1987-06-23 1987-06-23 ストリツプ温度検出装置 Expired - Lifetime JPH0630847Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9537187U JPH0630847Y2 (ja) 1987-06-23 1987-06-23 ストリツプ温度検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9537187U JPH0630847Y2 (ja) 1987-06-23 1987-06-23 ストリツプ温度検出装置

Publications (2)

Publication Number Publication Date
JPS642067U JPS642067U (enExample) 1989-01-09
JPH0630847Y2 true JPH0630847Y2 (ja) 1994-08-17

Family

ID=30959826

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9537187U Expired - Lifetime JPH0630847Y2 (ja) 1987-06-23 1987-06-23 ストリツプ温度検出装置

Country Status (1)

Country Link
JP (1) JPH0630847Y2 (enExample)

Also Published As

Publication number Publication date
JPS642067U (enExample) 1989-01-09

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