JPH06305526A - Fluid floating device - Google Patents

Fluid floating device

Info

Publication number
JPH06305526A
JPH06305526A JP9457793A JP9457793A JPH06305526A JP H06305526 A JPH06305526 A JP H06305526A JP 9457793 A JP9457793 A JP 9457793A JP 9457793 A JP9457793 A JP 9457793A JP H06305526 A JPH06305526 A JP H06305526A
Authority
JP
Japan
Prior art keywords
fluid
pressure
floating
slits
storage chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9457793A
Other languages
Japanese (ja)
Other versions
JP3339909B2 (en
Inventor
Seiichi Marumoto
清一 丸元
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Nippon Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Steel Corp filed Critical Nippon Steel Corp
Priority to JP09457793A priority Critical patent/JP3339909B2/en
Publication of JPH06305526A publication Critical patent/JPH06305526A/en
Application granted granted Critical
Publication of JP3339909B2 publication Critical patent/JP3339909B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Landscapes

  • Heat Treatment Of Strip Materials And Filament Materials (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
  • Advancing Webs (AREA)
  • Registering, Tensioning, Guiding Webs, And Rollers Therefor (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)

Abstract

PURPOSE:To provide a fluid floating device excellent in fluid floating stability by way of restraining generation of self-excited oscillation by compressible fluid by providing a pressure continuity hole to continue from a storage chamber to the side of a floating object on a guide as well as providing the pressure storage chamber in the guide. CONSTITUTION:Fluid delivered from a compressible fluid supply source enters a header chamber B, is exhausted from exhaust slits 1a and 1b, generates static pressure and flows out from a clearance part. Pressure of this flowout part is led to storage chambers Ca, Cb provided on guides 12a, 12b by continuity slits 2a, 2b, and balance pressure is stored in the storage chamber C. When the floating amount, that is, a floating clearance of a floating object 10 changes from such a balanced state due to some disturbance, the flowing state of the floating clearance part changes, accordingly absorption and bleedoff of a flow rate are carried out through the continuity slits 2a, 2b by a gas of mass the storage chamber C, and a damping effect against change of the floating amount is made. Continuity slits 3a, 3b control balance pressure of the storage chamber C.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、複数の噴出口(または
スリット)、あるいは、少なくとも1本の閉曲線をなす
噴出口(またはスリット)を有し、該噴出口(またはス
リット)から空気や窒素などの圧縮性流体を噴出させ
て、その流体のカーテンシール効果により、浮上物体と
浮上装置の間に静圧を発生させ、物体を浮上させる流体
浮上装置(以後エアーカーテンタイプと称す)、例えば
帯状の鋼板などを浮上させて搬送する流体浮上装置、お
よび、高速機械軸受けなどに使用されていて、噴出口
(またはスリット)と静圧を発生させるポケットとから
成る流体浮上装置(以後ポケットタイプと称す)におけ
るガイド装置に関するもので、このような流体浮上装置
における浮上物体の自励振動の安定性を改善するもので
ある。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention has a plurality of jet ports (or slits) or at least one closed curve jet port (or slit), from which air or nitrogen is discharged. A fluid levitation device (hereinafter referred to as an air curtain type) that blasts a compressible fluid such as, and creates a static pressure between the levitation object and the levitation device due to the curtain sealing effect of the fluid, for example, a strip shape. Fluid levitation device that floats and conveys steel sheets, etc., and a fluid levitation device that is used for high-speed mechanical bearings and that consists of jet ports (or slits) and pockets that generate static pressure (hereinafter referred to as pocket type ), It improves the stability of self-excited vibration of a floating object in such a fluid levitation device.

【0002】[0002]

【従来の技術】帯状製品の表面品質の高品質要求に伴っ
て、非接触で帯状製品が搬送できる流体浮上装置が注目
され、また、機械の高速回転軸の支持において、精度や
摩擦問題の解決のために静圧軸受けと呼ばれる流体浮上
装置が盛んに用いられてきている。
2. Description of the Related Art With the demand for high surface quality of strip-shaped products, attention has been paid to a fluid levitation device that can convey the strip-shaped products in a non-contact manner. Also, in supporting a high-speed rotating shaft of a machine, it solves problems of accuracy and friction. For this reason, a fluid levitation device called a hydrostatic bearing has been widely used.

【0003】図5は、公知のエアーカーテンタイプの流
体浮上装置の一例を断面図示したもので、図示しない圧
縮性流体の供給源装置からヘッダーBに送り込まれた圧
縮性流体は、ノズルスリット1a,1bより噴出し、浮
上物体10に衝突してその方向を変え、この運動量変化
によってノズルスリット1a,1bに挟まれた領域A部
に静圧が発生して浮上物体10を浮上させる。浮上静圧
を発生している部分の釣合は、たとえば、浮上物体10
が搬送する帯状鋼板などでは張力の変動などの外乱を受
け、また、圧縮性流体の供給源装置も常に微小な圧力変
動は避けられないので、これらの外乱により、自励振動
が生じることがあり、これが生じると正常な搬送が行え
ない。現在はこれの対応策として、浮上条件やラインの
操業条件を経験的に変更したり、帯状鋼板の搬送ライン
の中に振動減衰のための装置を付加して、帯状鋼板の搬
送の障害にならない程度に振動発生を抑制しているのが
実状である。
FIG. 5 is a cross-sectional view of an example of a known air curtain type fluid levitation device. The compressible fluid sent to the header B from a compressible fluid supply source device (not shown) is the nozzle slit 1a, It jets from 1b, collides with the levitating object 10 and changes its direction, and due to this momentum change, a static pressure is generated in the area A sandwiched between the nozzle slits 1a and 1b to levitate the levitating object 10. The balance of the portion generating the floating static pressure is, for example, the floating object 10
The strip-shaped steel sheet conveyed by the machine is subject to external disturbances such as tension fluctuations, and the pressure source of the compressible fluid is also inevitably subject to minute pressure fluctuations.Therefore, these disturbances may cause self-excited vibrations. However, if this happens, normal transportation cannot be performed. Currently, as countermeasures against this, levitation conditions and line operating conditions are empirically changed, and a device for vibration damping is added to the strip steel sheet conveyance line to prevent obstacles to the conveyance of strip steel sheets. The actual situation is that the generation of vibration is suppressed to some extent.

【0004】また、図6は、公知のポケットタイプの流
体浮上装置の一例を断面図で示したもので、ポケット部
Aから外部へ流失する時の抵抗がポケット部Aに静圧を
発生させ、これにより、浮上物体10(例えば回転軸)
を浮上支持するものである。本例は日本機械学会論文集
(第3部)32巻244号(昭41.12)P.1877〜18
82に示されている森らによる振動安定要素の研究の成果
を折り込んで図示したものである。この文献に示されて
いるように、軸受けポケットAにつながる部分に、流体
抵抗要素と安定化室Dを設けることにより振動の安定化
が図れるが、文献の方法ではエアーカーテンタイプの流
体浮上装置には適用できないし、また、安定化室Dの製
作加工も場所的に加工が難しく工夫が必要である。
FIG. 6 is a sectional view showing an example of a well-known pocket type fluid levitation device, in which the resistance when flowing away from the pocket portion A causes static pressure in the pocket portion A, As a result, the floating object 10 (for example, the rotation axis)
To support levitation. This example is from the Japan Society of Mechanical Engineers (Part 3) Volume 32, No. 244 (Sho 41.12) P. 1877-18
The results of the research on the vibration stabilizing element by Mori et al. As shown in this document, vibration can be stabilized by providing a fluid resistance element and a stabilizing chamber D in a portion connected to the bearing pocket A. However, the method of the document provides an air curtain type fluid levitation device. Is not applicable, and the manufacturing process of the stabilization chamber D is difficult due to the location, and a device needs to be devised.

【0005】一方、特公平3−249423号公報、特
公平3−249424号公報等にみられるように、ポケ
ットタイプの静圧軸受けにおいて、その受圧部の面積を
確保したままポケット体積を小さくすることで、自励振
動の安定性向上ほかの特性改善を図っている発明も見ら
れるが、エアーカーテンタイプの流体浮上装置では、も
ともと浮上高さ相当のポケット体積しかない構造となっ
ているので、これらの方法では安定性の改善代は見込め
ない。
On the other hand, as seen in Japanese Examined Patent Publication No. 3-249423 and Japanese Examined Patent Publication No. 3-249424, in a pocket type static pressure bearing, the pocket volume is reduced while ensuring the area of the pressure receiving portion. Therefore, there are inventions that improve the stability of self-excited vibration and other characteristics, but since the air curtain type fluid levitation device originally has a pocket volume equivalent to the levitation height, these The method cannot improve the stability.

【0006】[0006]

【発明が解決しようとする課題】上述のように、圧縮性
流体の供給により、浮上物体と浮上装置の間に静圧を発
生させて物体を浮上させる装置においては、圧縮性流体
による自励振動の抑制が重要な課題である。エアーカー
テンタイプの流体浮上装置にて使用されていた従来の振
動抑制策は、安定操業条件の探索に多大な労力を要する
上に操業制約も生じ、また、圧縮性流体の供給装置の余
裕を大きく取る必要があったため、エネルギーの無駄も
多い。また、搬送ラインの中に振動減衰のための装置を
付加して振動発生を抑える方法は、このための装置を設
ける必要があり、かつ、余分な張力を付加して操業をす
ることになるので、厚みが薄くて幅が広い帯状製品を搬
送する浮上装置としては利用できないという問題があ
る。
As described above, in a device that levitates an object by generating a static pressure between the levitating object and the levitating device by supplying the compressive fluid, self-excited vibration caused by the compressible fluid. The suppression of is an important issue. The conventional vibration suppression measures used in the air curtain type fluid levitation system require a great deal of labor to search for stable operating conditions and also cause operational restrictions, and increase the margin of the compressive fluid supply device. Since it had to be taken, much energy wasted. In addition, in the method of suppressing the occurrence of vibration by adding a device for damping the vibration in the transfer line, it is necessary to provide a device for this purpose, and since an extra tension is added, the operation is performed. However, there is a problem that it cannot be used as a levitation device that conveys a thin strip-shaped product having a wide width.

【0007】一方、ポケットタイプの浮上装置における
振動抑制策は、エアーカーテンタイプの流体浮上装置に
は利用できず、加工も難しく、また、浮上対象物が機械
加工品でなく鋼板のように大きくて、浮上隙間寸法精度
の悪いものには適用効果が不十分であった。
On the other hand, the vibration suppression measures in the pocket type levitation device cannot be applied to the air curtain type fluid levitation device and are difficult to process. Moreover, the floating object is not a machined product but a large one such as a steel plate. However, the application effect was insufficient for those with poor levitation clearance dimension accuracy.

【0008】本発明は、浮上物体両端外側にガイドを有
する流体浮上装置に着目し、自励振動の発生を抑制して
流体浮上安定性を改善した流体浮上装置を提供すること
を目的とする。
It is an object of the present invention to provide a fluid levitation device which focuses on a fluid levitation device having guides outside both ends of a levitation object and which suppresses the occurrence of self-excited vibration and improves the fluid levitation stability.

【0009】[0009]

【課題を解決するための手段】そこで、本発明者は、流
体浮上装置の流体的なバランスと振動特性を解析すると
共に、実験的に振動特性を解明することにより以下のこ
とを見いだした。本発明は圧縮性流体の供給源に通じた
複数の噴出口(またはスリット)、あるいは、少なくと
も1本の閉曲線をなす噴出口(またはスリット)を有
し、該噴出口(またはスリット)から流体を噴出させ
て、流体が噴出する一対の噴出口(またはスリット)に
挟まれた領域、あるいは閉曲線をなす噴出口(またはス
リット)に囲まれた領域にて、浮上物体との間に静圧を
発生させて物体を浮上させると共に、浮上物体両端外側
にあるガイドにより浮上物体の横ぶれを抑制する流体浮
上装置において、前記ガイド内に圧力蓄積室を設けると
共に、該ガイドに該蓄積室から浮上物体側に導通する圧
力導通孔またはスリットを設けたことを特徴とする。
Therefore, the present inventor has found the following by analyzing the fluid balance and vibration characteristics of the fluid levitation device and experimentally clarifying the vibration characteristics. The present invention has a plurality of ejection ports (or slits) communicating with a supply source of a compressive fluid, or at least one ejection port (or slit) forming a closed curve, and the fluid is ejected from the ejection ports (or slits). Static pressure is generated between the floating object and the area between a pair of jets (or slits) from which the fluid is jetted, or the area surrounded by jets (or slits) that form a closed curve. In the fluid levitation device, in which the object is levitated and the lateral deviation of the levitation object is suppressed by the guides on the both outer sides of the levitation object, a pressure accumulating chamber is provided in the guide, and the guide is provided on the levitation object side. It is characterized in that a pressure conducting hole or a slit for conducting to is provided.

【0010】また、圧縮性流体の供給源に通じた、噴出
口または噴出スリットと、その流体噴出位置にあって、
噴出する流体により静圧を発生するポケットとから成
り、浮上物体との間に静圧を発生させて該物体を浮上さ
せると共に、浮上物体両端外側に位置するガイドにより
浮上物体の横ぶれを抑制する流体浮上装置においても同
様である。すなわち、浮上隙間部に静圧を発生せしめる
エアーカーテンタイプの流体浮上装置の噴出スリット、
または、ポケットタイプの流体浮上装置の静圧を作り出
しているポケット端より浮上物体のガイドを設け、この
ガイド内に圧力導通孔を通して浮上隙間部を流れる流体
と連通した蓄積室を設けることにより、流体浮上装置に
おける振動の安定性が増すことを利用して振動抑制を行
うものである。ここにいう圧縮性流体とは例えば空気等
のガス体が相当する。
In addition, at the jet outlet or jet slit and the fluid jet position, which communicates with the supply source of the compressive fluid,
It consists of a pocket that generates static pressure by the ejected fluid and generates static pressure between it and a floating object to levitate it, and guides located outside both ends of the floating object suppress lateral deflection of the floating object. The same applies to the fluid levitation device. That is, a jet slit of an air curtain type fluid levitation device that generates static pressure in the levitation gap,
Alternatively, by providing a guide for the floating object from the pocket end that creates the static pressure of the pocket-type fluid levitation device, and providing a storage chamber in this guide that communicates with the fluid flowing through the levitation gap through the pressure communication hole, Vibration is suppressed by utilizing the fact that the stability of vibration in the levitation device is increased. The compressible fluid here corresponds to a gas body such as air.

【0011】[0011]

【作用】上述のように構成される本発明の浮上装置で
は、何らかの外乱で浮上物体の浮上量が変動した場合、
浮上隙間部を流れる流量変化を、蓄積室に蓄えている流
体質量が補償することができる。つまり、浮上隙間部の
流量につながる蓄積室があることは、高さ変化に対し、
流量の変化の積分(蓄積)効果が大きく現れることにな
るが、これは、高さ変動に対する一次遅れ要素が大きい
ことを意味し、一般の振動の運動方程式 m(dx2 /dt2 )+c(dx/dt)+kx=F ただし、m:振動質量 c:粘性減衰係数 k:バネ定
数 F:外乱 x:振動変位の粘性減数項cが大きいこ
とと等価であり、振動に対する安定性が増す。
In the levitation device of the present invention configured as described above, when the levitation amount of the levitation object fluctuates due to some disturbance,
The mass of the fluid stored in the storage chamber can compensate for the change in the flow rate flowing through the floating gap. In other words, the fact that there is a storage chamber that leads to the flow rate in the floating gap part
The integral (accumulation) effect of the change in the flow rate appears significantly, which means that the first-order lag element with respect to the height variation is large, and the general equation of motion m (dx 2 / dt 2 ) + c ( dx / dt) + kx = F However, m: vibrating mass c: viscous damping coefficient k: spring constant F: disturbance x: viscous divisor term of vibration displacement is equivalent to large c, and stability against vibration increases.

【0012】さらに、この作用による振動安定は、浮上
隙間部を流れる流量変化を補償する方法なので、エアー
カーテンタイプの流体浮上装置にも、ポケットタイプの
流体浮上装置にも適用が可能であり、また、粘性減衰項
相当の係数を大きくするので振動安定効果が大きく、容
積を設定することでその量的選択も容易である。
Further, the vibration stabilization due to this action is a method of compensating for the change in the flow rate flowing through the floating gap portion, so that it can be applied to both an air curtain type fluid levitation device and a pocket type fluid levitation device. Since the coefficient corresponding to the viscous damping term is increased, the vibration stabilizing effect is large, and it is easy to quantitatively select it by setting the volume.

【0013】[0013]

【実施例】以下図を用いて詳細な説明を行う。なお、振
動抑制の構成は、エアーカーテンタイプの流体浮上装置
もポケットタイプの流体浮上装置も同じなので、説明を
容易にするため、エアーカーテンタイプによる流体浮上
装置を主体に説明をすすめる。
Embodiments will be described in detail below with reference to the drawings. Since the air curtain type fluid levitation device and the pocket type fluid levitation device have the same vibration suppressing configuration, the description will be given mainly on the air curtain type fluid levitation device for ease of explanation.

【0014】図1は本発明の流体浮上装置の第1の実施
例断面図である。図示していない圧縮性流体供給源から
送られてきた流体は、ヘッダー室Bに入り、噴出スリッ
ト1a及び1bより噴出し、A部に静圧を発生させて隙
間部から外に流出する。この流出部の圧力を導通スリッ
ト(または孔)2a,2bによりガイド12a,12b
に設けられた蓄積室Ca,Cbに導き、バランス圧が蓄
積室に蓄えられる。蓄積室Ca,Cbと外部を繋ぐ導通
孔3a,3bは必ずしも必要ではないが、蓄積室Ca,
Cbのバランス圧の制御が必要な場合にはこれを設ける
ことも有効である。
FIG. 1 is a sectional view of a first embodiment of a fluid levitation apparatus according to the present invention. The fluid sent from a compressive fluid supply source (not shown) enters the header chamber B, is jetted from the jet slits 1a and 1b, generates a static pressure in the portion A, and flows out from the gap portion to the outside. The pressure at the outflow portion is guided by the conduction slits (or holes) 2a, 2b to guides 12a, 12b.
The balance pressure is led to the accumulating chambers Ca and Cb provided in the storage chamber, and the balance pressure is stored in the accumulating chamber. Although the conduction holes 3a and 3b for connecting the storage chambers Ca and Cb to the outside are not always necessary,
If control of the balance pressure of Cb is required, it is effective to provide this.

【0015】このような釣合状態から何らかの外乱で浮
上物体10の浮上量、つまり浮上隙間が変動すると、浮
上隙間部の流れ状態が変わり、これに伴って蓄積室Cの
気体質量により流量の吸収、放出が導通孔2a,2bを
経由して行われて、浮上量変動に対する減衰効果が生じ
る。なお、図1では浮上物体10の寸法変化に対応し
て、ガイド12a,12bが図示されていない駆動装置
により移動できる構造となっており、右半分は浮上物体
10−1が大きい場合、左半分は浮上物体10−2が小
さい場合を示す。
When the flying height of the floating object 10, that is, the floating clearance changes due to some disturbance from such a balanced state, the flow state of the floating clearance changes, and the flow rate is absorbed by the gas mass in the storage chamber C accordingly. , Is discharged via the conduction holes 2a and 2b, and a damping effect for fluctuations in the flying height is produced. In FIG. 1, the guides 12a and 12b have a structure that can be moved by a drive device (not shown) in response to the dimensional change of the floating object 10. The right half is the left half when the floating object 10-1 is large. Indicates a case where the floating object 10-2 is small.

【0016】図2は、本発明の流体浮上装置の第2の実
施例断面図で、浮上隙間が小さい場合に使用されてい
る、一般のポケットタイプの静圧軸受けに本発明を適用
したものである。A部に静圧を発生させるために、入口
を絞ったポケットを用いている他は第1の実施例と同じ
で、振動のため導通孔スリット2a,2bや蓄積室C
a,Cbも第1の実施例と同様に設ける。
FIG. 2 is a sectional view of a second embodiment of the fluid levitation device of the present invention, in which the present invention is applied to a general pocket type static pressure bearing used when the levitation gap is small. is there. This is the same as the first embodiment except that a pocket with a narrowed inlet is used to generate a static pressure in the portion A. Due to vibration, the through hole slits 2a and 2b and the storage chamber C are used.
Also, a and Cb are provided as in the first embodiment.

【0017】本発明の効果を実験調査した結果を図3に
示す。板幅1m、負荷60Kgを1.2m半径で図7に示
す180度ターンする浮上装置に載せて調べた実験結果
であるが、本発明の蓄積室がない図3(a)図に比べ、
約0.3m3 の本発明の蓄積室Cを設けた図3(b)図
では、気流に伴う若干の圧力変動以外には、振動が殆ど
生じておらず、また、少し生じてもすぐ減衰しているこ
とが分かる。
The results of an experimental investigation on the effect of the present invention are shown in FIG. FIG. 3 is a result of an experiment conducted by mounting a plate width of 1 m and a load of 60 kg on a levitation device that turns 180 degrees shown in FIG. 7 with a radius of 1.2 m, but compared with FIG.
In FIG. 3 (b) in which the accumulating chamber C of the present invention of about 0.3 m 3 is provided, almost no vibration occurs except for a slight pressure fluctuation due to the air flow, and even if it occurs a little, it is immediately attenuated. You can see that

【0018】また、図4は本発明の蓄積室Cの容積によ
る振動抑制効果の変化を示したもので、上記180度タ
ーンの浮上装置の板幅1m、負荷130Kgでの計算結果
である。このような大きな負荷においても、蓄積室Cの
容積を0.3m3 程度にすれば振動発生領域から逃れる
ことができ、さらにこれを大きな容積とすれば、振動発
生に対する余裕を急激に大きくできることが分かる。な
お、図2のようなタイプの浮上装置においても、ガイド
内に設けた蓄積室の振動抑制効果は図3と同様の傾向が
見られる。また、振動抑制の意味では非対称に蓄積室C
を設けても良いが、蓄積室Cを設けることにより浮上特
性が若干変わるので、対称に蓄積室Cを設けることが一
般的には好ましい。
FIG. 4 shows a change in the vibration suppressing effect according to the volume of the storage chamber C of the present invention, and is a calculation result at a plate width of 1 m and a load of 130 kg of the levitation device of the above 180 degree turn. Even with such a large load, if the volume of the storage chamber C is set to about 0.3 m 3 , it is possible to escape from the vibration generation region, and if it is set to a large volume, the margin for vibration generation can be rapidly increased. I understand. Even in the levitation device of the type shown in FIG. 2, the vibration suppression effect of the storage chamber provided in the guide has the same tendency as in FIG. In addition, the storage chamber C is asymmetrical in terms of vibration suppression.
However, since the levitation characteristics are slightly changed by providing the storage chamber C, it is generally preferable to provide the storage chamber C symmetrically.

【0019】また、図7の例のように帯状物の搬送装置
に用いられている流体浮上装置などでは、ガイドを全周
に設けず、幅方向のみ、あるいは、その一部にガイドを
設けて本発明を適用しても効果がある。さらに、蓄積室
の導通路2a,2bはノズルスリット1a,1bの流出
側、つまり、浮上物体10の外端側に設けたガイド内に
あれば、これに沿って流れる浮上隙間部の流量変化を補
償でき振動抑制の効果を発揮するので、蓄積室の導通路
2a,2bの配置(高さなど)は目的とする浮上高さな
どで適宜定め、必ずしも下端に限定されるものではない
し、本発明が対称とする浮上物体としては、鋼板や機械
軸の他にアルミ板などでもその作用は変わらない。
Further, in the fluid levitation device or the like used in the belt-like material conveying device as in the example of FIG. 7, the guide is not provided all around, but only in the width direction or in a part thereof. Even if the present invention is applied, it is effective. Further, if the conduction paths 2a, 2b of the accumulation chamber are located on the outflow side of the nozzle slits 1a, 1b, that is, in the guide provided on the outer end side of the floating object 10, the flow rate change of the floating gap portion flowing along the flow path 2a, 2b can be suppressed. Since the effect of vibration compensation can be achieved by compensating, the arrangement (height, etc.) of the conducting paths 2a, 2b of the accumulating chamber is appropriately determined according to the desired flying height, etc., and is not necessarily limited to the lower end. As a levitating object which is symmetrical with respect to, a steel plate, a mechanical shaft, an aluminum plate, or the like does not change its action.

【0020】[0020]

【発明の効果】以上述べたように本発明を用いれば、エ
アーカーテンタイプの流体浮上装置でも、ポケットタイ
プの流体浮上装置でも、圧縮性流体供給源の大きなエネ
ルギー余裕を持たずに、浮上物体の寸法が変化する場合
の対応が容易で、加工も容易な圧縮性流体による自励振
動の発生し難い安定した流体浮上装置を達成でき、ま
た、既存の流体浮上装置において大きな改造をしないで
その振動安定を図ることも可能であり、その適用効果は
非常に大である。
As described above, according to the present invention, in both an air curtain type fluid levitation device and a pocket type fluid levitation device, a floating object of a floating object can be obtained without a large energy margin of the compressive fluid supply source. It is possible to achieve a stable fluid levitation device that is easy to handle when the dimensions change and is easy to process, and which is less likely to generate self-excited vibration due to a compressive fluid. It is possible to achieve stability, and its application effect is very large.

【図面の簡単な説明】[Brief description of drawings]

【図1】エアーカーテンタイプの流体浮上装置での本発
明の第一の実施例図である。
FIG. 1 is a first embodiment of the present invention in an air curtain type fluid levitation apparatus.

【図2】ポケットタイプの流体浮上装置での本発明の第
二の実施例図である。
FIG. 2 is a second embodiment of the present invention in a pocket type fluid levitation device.

【図3】本発明の有無による振動波形の実測結果比較図
である。
FIG. 3 is a comparison diagram of measurement results of vibration waveforms with and without the present invention.

【図4】本発明の蓄積室の容積と振動安定効果を示す図
である。
FIG. 4 is a diagram showing a volume of a storage chamber and a vibration stabilizing effect of the present invention.

【図5】従来の流体浮上装置の断面図である。FIG. 5 is a cross-sectional view of a conventional fluid levitation device.

【図6】従来の他の流体浮上装置の断面図である。FIG. 6 is a cross-sectional view of another conventional fluid levitation device.

【図7】帯状物の搬送に用いられている180度ターン
の流体浮上装置の状況を示す鳥瞰図である。
FIG. 7 is a bird's-eye view showing the state of a fluid levitation device with a 180-degree turn, which is used to convey a belt-like material.

【符号の説明】[Explanation of symbols]

A 静圧発生部 B ヘッダー室 Ca,Cb 蓄積室 1a,1b 噴出スリット 2a,2b 蓄積室導通路 10 浮上物体 11 流体浮上装置 A static pressure generation part B header chamber Ca, Cb storage chamber 1a, 1b ejection slits 2a, 2b storage chamber conduction path 10 floating object 11 fluid levitation device

───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.5 識別記号 庁内整理番号 FI 技術表示箇所 B65H 29/24 A C21D 9/63 F16C 32/06 Z 8613−3J ─────────────────────────────────────────────────── ─── Continuation of front page (51) Int.Cl. 5 Identification code Office reference number FI technical display location B65H 29/24 A C21D 9/63 F16C 32/06 Z 8613-3J

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 圧縮性流体の供給源に通じた複数の噴出
口(またはスリット)、あるいは、少なくとも1本の閉
曲線をなす噴出口(またはスリット)を有し、該噴出口
(またはスリット)から流体を噴出させて流体が噴出す
る一対の噴出口(またはスリット)に挟まれた領域、あ
るいは閉曲線をなす噴出口(またはスリット)に囲まれ
た領域にて、浮上物体との間に静圧を発生させて物体を
浮上させると共に、浮上物体両端外側に位置するガイド
により浮上物体の横ぶれを抑制する流体浮上装置におい
て、前記ガイド内に圧力蓄積室を設けると共に、該ガイ
ドに蓄積室から浮上物体側に導通する圧力導通孔または
スリットを設けたことを特徴とする流体浮上装置。
1. A plurality of jet outlets (or slits) communicating with a supply source of a compressive fluid, or at least one jet outlet (or slit) forming a closed curve, and from the jet outlets (or slits) Static pressure is applied to the floating object in the area sandwiched by a pair of jets (or slits) that ejects the fluid and ejects the fluid, or in the area surrounded by the jets (or slits) that form a closed curve. In a fluid levitation device that generates and levitates an object and suppresses lateral shake of the levitating object by guides located outside both ends of the levitating object, a pressure accumulating chamber is provided in the guide, and the object is levitated from the accumulating chamber A fluid levitation device, characterized in that a pressure conducting hole or slit is provided on the side thereof for conducting.
【請求項2】 圧縮性流体の供給源に通じた噴出口また
は噴出スリットと、その流体噴出位置にあって、噴出す
る流体により静圧を発生するポケットとから成り、浮上
物体との間に静圧を発生させて該物体を浮上させると共
に、浮上物体両端外側に位置するガイドにより浮上物体
の横ぶれを抑制する流体浮上装置において、前記ガイド
内に圧力蓄積室を設けると共に、該ガイドに該蓄積室か
ら浮上物体側に導通する圧力導通孔またはスリットを設
けたことを特徴とする流体浮上装置。
2. A jet nozzle or a jet slit which communicates with a supply source of a compressive fluid, and a pocket which is located at the jet position of the fluid and generates a static pressure by the jetting fluid. In a fluid levitation device that generates pressure to levitate the object and suppresses lateral deviation of the levitating object by guides located on both outer sides of the levitating object, a pressure accumulating chamber is provided in the guide, and the accumulating is performed in the guide. A fluid levitation device, characterized in that a pressure conducting hole or slit is provided for conducting from the chamber to the floating object side.
JP09457793A 1993-04-21 1993-04-21 Fluid flotation device Expired - Fee Related JP3339909B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP09457793A JP3339909B2 (en) 1993-04-21 1993-04-21 Fluid flotation device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP09457793A JP3339909B2 (en) 1993-04-21 1993-04-21 Fluid flotation device

Publications (2)

Publication Number Publication Date
JPH06305526A true JPH06305526A (en) 1994-11-01
JP3339909B2 JP3339909B2 (en) 2002-10-28

Family

ID=14114148

Family Applications (1)

Application Number Title Priority Date Filing Date
JP09457793A Expired - Fee Related JP3339909B2 (en) 1993-04-21 1993-04-21 Fluid flotation device

Country Status (1)

Country Link
JP (1) JP3339909B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010179985A (en) * 2009-02-03 2010-08-19 Wacom R & D Corp Levitation conveying apparatus and levitation conveying method
JP2012121642A (en) * 2010-12-06 2012-06-28 Daifuku Co Ltd Plate-like body conveying device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010179985A (en) * 2009-02-03 2010-08-19 Wacom R & D Corp Levitation conveying apparatus and levitation conveying method
JP2012121642A (en) * 2010-12-06 2012-06-28 Daifuku Co Ltd Plate-like body conveying device
CN102556565A (en) * 2010-12-06 2012-07-11 株式会社大福 Plate-shaped article transporting device

Also Published As

Publication number Publication date
JP3339909B2 (en) 2002-10-28

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