JPH0630326Y2 - 真空チャックスピンドルのシール継手 - Google Patents

真空チャックスピンドルのシール継手

Info

Publication number
JPH0630326Y2
JPH0630326Y2 JP20088287U JP20088287U JPH0630326Y2 JP H0630326 Y2 JPH0630326 Y2 JP H0630326Y2 JP 20088287 U JP20088287 U JP 20088287U JP 20088287 U JP20088287 U JP 20088287U JP H0630326 Y2 JPH0630326 Y2 JP H0630326Y2
Authority
JP
Japan
Prior art keywords
hollow member
shaft portion
peripheral surface
grooved
hollow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP20088287U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01101702U (US20100012521A1-20100121-C00001.png
Inventor
雅之 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NSK Ltd
Original Assignee
NSK Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NSK Ltd filed Critical NSK Ltd
Priority to JP20088287U priority Critical patent/JPH0630326Y2/ja
Publication of JPH01101702U publication Critical patent/JPH01101702U/ja
Application granted granted Critical
Publication of JPH0630326Y2 publication Critical patent/JPH0630326Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Sliding-Contact Bearings (AREA)
  • Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
  • Jigs For Machine Tools (AREA)
  • Turning (AREA)
  • Joints Allowing Movement (AREA)
JP20088287U 1987-12-28 1987-12-28 真空チャックスピンドルのシール継手 Expired - Lifetime JPH0630326Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20088287U JPH0630326Y2 (ja) 1987-12-28 1987-12-28 真空チャックスピンドルのシール継手

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20088287U JPH0630326Y2 (ja) 1987-12-28 1987-12-28 真空チャックスピンドルのシール継手

Publications (2)

Publication Number Publication Date
JPH01101702U JPH01101702U (US20100012521A1-20100121-C00001.png) 1989-07-10
JPH0630326Y2 true JPH0630326Y2 (ja) 1994-08-17

Family

ID=31491270

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20088287U Expired - Lifetime JPH0630326Y2 (ja) 1987-12-28 1987-12-28 真空チャックスピンドルのシール継手

Country Status (1)

Country Link
JP (1) JPH0630326Y2 (US20100012521A1-20100121-C00001.png)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0427773A (ja) * 1990-05-23 1992-01-30 Ibiden Co Ltd プランジャーポンプ
JP6787972B2 (ja) * 2018-10-31 2020-11-18 ファナック株式会社 主軸装置

Also Published As

Publication number Publication date
JPH01101702U (US20100012521A1-20100121-C00001.png) 1989-07-10

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