JPH0630238B2 - Ion source for mass spectrometer - Google Patents

Ion source for mass spectrometer

Info

Publication number
JPH0630238B2
JPH0630238B2 JP61002946A JP294686A JPH0630238B2 JP H0630238 B2 JPH0630238 B2 JP H0630238B2 JP 61002946 A JP61002946 A JP 61002946A JP 294686 A JP294686 A JP 294686A JP H0630238 B2 JPH0630238 B2 JP H0630238B2
Authority
JP
Japan
Prior art keywords
ion source
ionization chamber
mass spectrometer
porous member
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61002946A
Other languages
Japanese (ja)
Other versions
JPS62163250A (en
Inventor
大道 石井
英次 久保田
悳夫 水野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP61002946A priority Critical patent/JPH0630238B2/en
Publication of JPS62163250A publication Critical patent/JPS62163250A/en
Publication of JPH0630238B2 publication Critical patent/JPH0630238B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Tubes For Measurement (AREA)

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は、液体試料を直接イオン化室内に導入し、電子
衝撃あるいは化学イオン化によりイオン化することので
きる質量分析装置用イオン源に関するものである。
TECHNICAL FIELD The present invention relates to an ion source for a mass spectrometer capable of directly introducing a liquid sample into an ionization chamber and ionizing the sample by electron impact or chemical ionization.

[従来技術] 近時、液体クロマトグラフで展開された試料液を質量分
析装置のイオン源に導入してイオン化する方式として、
特開昭52−11719号に記載されているベルト方式
や、特開昭57−836号に記載されている直接噴霧方
式等がある。
[Prior Art] Recently, as a method of introducing a sample liquid developed by a liquid chromatograph into an ion source of a mass spectrometer to ionize it,
There are a belt method described in JP-A-52-11719 and a direct spray method described in JP-A-57-836.

[発明が解決しようとする問題点] ところが、ベルト方式では、ベルトをイオン源内へ導入
するための真空保持機構が大がかりになり、ベルトの汚
染による所謂メモリ効果の問題もある。
[Problems to be Solved by the Invention] However, in the belt system, the vacuum holding mechanism for introducing the belt into the ion source becomes large-scale, and there is a problem of so-called memory effect due to contamination of the belt.

又、直接噴霧方式では、極めて精巧な噴霧ノズルが必要
であり、そのノズルもつまり易く、イオン化室内へ試料
液を安定して導入することがむずかしいという問題点が
ある。
Further, the direct spraying method requires a very fine spraying nozzle, and the nozzle is also easily clogged, and there is a problem that it is difficult to stably introduce the sample solution into the ionization chamber.

本発明は上述した点に鑑みてなされたものであり、簡単
な構成でイオン化室内に試料液を安定して導入し、イオ
ン化することのできるイオン源を提供することを目的と
している。
The present invention has been made in view of the above points, and an object thereof is to provide an ion source capable of stably introducing a sample liquid into an ionization chamber and ionizing it with a simple configuration.

[問題点を解決するための手段] この目的を達成するため、本発明にかかる質量分析装置
用イオン源は、イオン化室と、先端部がイオン化室内へ
挿入され試料液を外部から該イオン化室内へ導入する導
入管と、該導入管の先端出口に取付けられ試料液を通過
させつつ表面から気化させる多孔性部材と、該多孔性部
材表面近傍へ向けて前記イオン化室内へ電子線を導入す
るための手段とから構成されることを特徴としている。
[Means for Solving Problems] In order to achieve this object, an ion source for a mass spectrometer according to the present invention has an ionization chamber and a tip portion inserted into the ionization chamber so that a sample solution is introduced into the ionization chamber from the outside. An introducing pipe to be introduced, a porous member attached to the outlet of the leading end of the introducing pipe to vaporize from the surface while allowing the sample liquid to pass therethrough, and for introducing an electron beam into the ionization chamber toward the vicinity of the surface of the porous member. It is characterized by comprising means and.

[作用] 導入管を介してイオン化室内に導入され、多孔性部材を
通ってその表面に滲み出て来た試料液は、気化した後電
子衝撃によりイオン化される。以下、図面を用いて本発
明の実施例を詳述する。
[Operation] The sample liquid introduced into the ionization chamber through the introduction tube and oozing to the surface through the porous member is vaporized and then ionized by electron impact. Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

[実施例] 第1図は本発明を電子衝撃イオン化型(EI)イオン源
に適用した実施例の一例を示す断面図であり、同図にお
いて1は質量分析装置の質量分析部、2はイオン化室、
3は電子線を発生するフィラメント、4,5はイオン化
室2に開けられた電子入射口及び電子出射口、6はイオ
ン化室2内で生成されたイオンを外部へ取出し、加速と
収束を行うスリット電極、7は高速液体クロマトグラ
フ、8はイオン化室2へ液体クロマトグラフ7で展開さ
れた試料液を送るための導入管である。上記導入管8と
しては、例えば内径40μm程度のフューズドシリカ管
が用いられる。
[Embodiment] FIG. 1 is a sectional view showing an example of an embodiment in which the present invention is applied to an electron impact ionization type (EI) ion source. In FIG. 1, 1 is a mass analyzer of a mass spectrometer, and 2 is ionization. Room,
3 is a filament that generates an electron beam, 4 and 5 are electron entrances and exits that are opened in the ionization chamber 2, and 6 is a slit that takes out the ions generated in the ionization chamber 2 to the outside and accelerates and converges them. Electrodes, 7 are high performance liquid chromatographs, and 8 is an introduction tube for sending the sample liquid developed by the liquid chromatograph 7 to the ionization chamber 2. As the introduction tube 8, for example, a fused silica tube having an inner diameter of about 40 μm is used.

この導入管8の先端部にはステンレス管9が被せられる
と共に、その外側にガラス管10が被せられ、更にその
外側に加熱用のヒータ11が巻回されている。そして、
導入管8の開口部を塞ぐように多孔性部材12が取付け
られている。この多孔性部材としては、例えばステンレ
スの粉末を焼結して作成したフィルタ(フリット)が使
用される。尚、上記ステンレス管9にはリペラ電源13
から適宜なリペラ電圧が印加される。
A stainless steel tube 9 is covered on the tip of the introduction tube 8, a glass tube 10 is covered on the outer side thereof, and a heater 11 for heating is further wound on the outer side thereof. And
The porous member 12 is attached so as to close the opening of the introduction tube 8. As this porous member, for example, a filter (frit) made by sintering stainless powder is used. In addition, the stainless steel tube 9 has a repeller power supply 13
Then, an appropriate repeller voltage is applied.

上述の如き構成において、液体クロマトグラフで展開さ
れた試料液は、イオン源の排気能力に応じた時間当り流
量例えば5μ/分で導入管を介してイオン化室2へ向
けて送られる。送られて来た試料液は、ヒータ11によ
って適宜な温度に設定されている多孔性部材12を通っ
て徐々にその表面に滲み出て、気化する。その際、多孔
性部材の表面付近では、沸点の低い試料液中の溶媒が優
先的に高速で気化し、沸点の高い試料成分は比較的ゆっ
くりと気化するため、相対的に多孔性部材表面における
試料成分の濃度は高まることになる。このようにして、
多孔性部材表面に濃縮された試料成分が存在するため、
多孔性部材表面近傍には、気化した試料成分が比較的高
い濃度で存在し、この高い濃度の気化試料成分は、入射
口4から出射口5へ向けてイオン化室内を通る電子線の
衝撃を受けてイオン化される。
In the configuration as described above, the sample liquid developed by the liquid chromatograph is sent toward the ionization chamber 2 via the introduction pipe at a flow rate per hour according to the exhaust capacity of the ion source, for example, 5 μ / min. The sent sample liquid passes through the porous member 12 whose temperature is appropriately set by the heater 11 and gradually exudes to the surface thereof to be vaporized. At that time, in the vicinity of the surface of the porous member, the solvent in the sample liquid having a low boiling point is preferentially vaporized at a high speed, and the sample component having a high boiling point is vaporized relatively slowly. The concentration of sample components will increase. In this way
Due to the presence of concentrated sample components on the surface of the porous member,
In the vicinity of the surface of the porous member, the vaporized sample component is present at a relatively high concentration, and the vaporized sample component of this high concentration is subjected to the impact of the electron beam passing through the ionization chamber from the entrance 4 to the exit 5. Is ionized.

尚、電子線と多孔性部材表面との相対位置関係を比較的
厳密に調整することが必要なので、多孔性部材12を前
後方向に移動する機構を設けることが望ましい。
Since it is necessary to adjust the relative positional relationship between the electron beam and the surface of the porous member relatively rigorously, it is desirable to provide a mechanism for moving the porous member 12 in the front-back direction.

第2図は本発明を化学イオン化(CI)イオン源に適用
した実施例を示す断面図であり、イオン化室内に管14
を介してCIガスを導入できるようにした点と、イオン
化室をCIに適した比較的高い圧力に保つため、電子入
射口4及びイオン取出し口を小さくし電子出射口5をな
くした点が第1図の実施例と異なっているだけで他の部
分は同じ構成となっている。
FIG. 2 is a sectional view showing an embodiment in which the present invention is applied to a chemical ionization (CI) ion source.
The point that the CI gas can be introduced through the chamber and that the electron entrance port 4 and the ion exit port are made small and the electron exit port 5 is eliminated in order to keep the ionization chamber at a relatively high pressure suitable for CI. Only the difference from the embodiment of FIG. 1 has the same structure as the other parts.

本実施例では、入射口4を介して導入される電子線によ
って先ずCIガスがイオン化され、その後、CIガスイ
オンとの反応によって気化試料成分がイオン化される。
In this embodiment, the CI gas is first ionized by the electron beam introduced through the entrance 4, and then the vaporized sample component is ionized by the reaction with the CI gas ions.

第3図はEI・CI複合イオン源に本発明を適用した実
施例の構成を示し、EI用の大きな電子入射口4Eと電
子出射口5を備えたイオン化室2E内に、CI用の小さ
な電子入射口4Cを備えたイオン化室2Cを摺動可能に
挿入した構成となっている。
FIG. 3 shows the configuration of an embodiment in which the present invention is applied to an EI / CI composite ion source, in which a small electron for CI is placed in an ionization chamber 2E equipped with a large electron entrance 4E and electron exit 5 for EI. An ionization chamber 2C having an entrance 4C is slidably inserted.

第3図の状態はCIモードであり、イオン化室2Cを破
線の位置へ引出し、管14を介してのCIガス導入を停
止すれば、入射口4Eと出射口5との間を電子線が通過
し、EIモードでのイオン化が可能である。
The state of FIG. 3 is the CI mode, and if the ionization chamber 2C is pulled out to the position indicated by the broken line and the CI gas introduction through the tube 14 is stopped, the electron beam passes between the entrance 4E and the exit 5. However, ionization in EI mode is possible.

尚、第3図に示したEI・CI複合イオン源の他にも、
第1図の実施例の斜線を施した部分Aに外部と連通する
通路を設け、この通路を介して一次中性ビーム又はイオ
ンビームを多孔性部材の表面に照射できるようにすれ
ば、EIによるイオン化と一次粒子ビーム衝撃によるイ
オン化を行うことのできる複合イオン源が実現される。
In addition to the EI / CI composite ion source shown in FIG.
If a passage communicating with the outside is provided in the shaded portion A of the embodiment of FIG. 1 and the surface of the porous member is irradiated with the primary neutral beam or the ion beam through this passage, the EI results. A composite ion source capable of performing ionization and ionization by primary particle beam bombardment is realized.

[効果] 以上詳述した如く、本発明によれば、多孔性部材を導入
管の先端に取付けるという簡単な構成で、液体試料をイ
オン化室内に導入し、イオン化することのできる質量分
析装置用イオン源が実現される。
[Effect] As described in detail above, according to the present invention, ions for a mass spectrometer capable of introducing and ionizing a liquid sample into an ionization chamber with a simple configuration in which a porous member is attached to the tip of an introduction tube. Source is realized.

【図面の簡単な説明】[Brief description of drawings]

第1図乃至第3図は夫々本発明の一実施例の構成を示す
断面図である。 1:質量分析部、2:イオン化室 3:フィラメント、4:電子入射口 5:電子出射口、6:スリット電極 7:高速液体クロマトグラフ 8:導入管、9:ステンレス管 10:ガラス管、11:ヒータ 12:多孔性部材、13:リペラ電源
1 to 3 are sectional views showing the construction of an embodiment of the present invention. 1: Mass spectrometric section, 2: Ionization chamber 3: Filament, 4: Electron entrance port, 5: Electron exit port, 6: Slit electrode, 7: High performance liquid chromatograph, 8: Introduction tube, 9: Stainless tube, 10: Glass tube, 11 : Heater 12: Porous member, 13: Repeller power supply

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】イオン化室と、先端部がイオン化室内へ挿
入され試料液を外部から該イオン化室内へ導入する導入
管と、該導入管の先端出口に取付けられ試料液を通過さ
せつつ表面から気化させる多孔性部材と、該多孔性部材
表面近傍へ向けて前記イオン化室内へ電子線を導入する
ための手段とから構成されることを特徴とする質量分析
装置用イオン源。
1. An ionization chamber, an introduction pipe whose tip is inserted into the ionization chamber to introduce the sample liquid into the ionization chamber from the outside, and an end pipe of the introduction pipe which is attached to the tip exit to vaporize the sample liquid while allowing the sample liquid to pass therethrough. An ion source for a mass spectrometer, comprising: a porous member for allowing the electron beam to be introduced into the ionization chamber toward the vicinity of the surface of the porous member.
【請求項2】前記導入管の先端部分にリペラ電極を取付
け、更にその先に前記多孔性部材を取付けるようにした
ことを特徴とする特許請求の範囲第1項記載の質量分析
装置用イオン源。
2. An ion source for a mass spectrometer according to claim 1, wherein a repeller electrode is attached to a tip portion of said introduction tube, and further said porous member is attached to the tip thereof. .
【請求項3】液体クロマトグラフを前記導入管に接続し
たことを特徴とする特許請求の範囲第1項乃至第2項の
いずれかに記載の質量分析装置用イオン源。
3. An ion source for a mass spectrometer according to any one of claims 1 and 2, wherein a liquid chromatograph is connected to the introduction tube.
【請求項4】前記室内に反応ガスを導入し、化学イオン
化により試料をイオン化できるようにした特許請求の範
囲第1項乃至第3項のいずれかに記載の質量分析装置用
イオン源。
4. The ion source for a mass spectrometer according to any one of claims 1 to 3, wherein a reaction gas is introduced into the chamber to ionize the sample by chemical ionization.
JP61002946A 1986-01-10 1986-01-10 Ion source for mass spectrometer Expired - Lifetime JPH0630238B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61002946A JPH0630238B2 (en) 1986-01-10 1986-01-10 Ion source for mass spectrometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61002946A JPH0630238B2 (en) 1986-01-10 1986-01-10 Ion source for mass spectrometer

Publications (2)

Publication Number Publication Date
JPS62163250A JPS62163250A (en) 1987-07-20
JPH0630238B2 true JPH0630238B2 (en) 1994-04-20

Family

ID=11543534

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61002946A Expired - Lifetime JPH0630238B2 (en) 1986-01-10 1986-01-10 Ion source for mass spectrometer

Country Status (1)

Country Link
JP (1) JPH0630238B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2675064B2 (en) * 1988-05-09 1997-11-12 日本電子株式会社 Ion source for mass spectrometer
JPH0713623B2 (en) * 1988-05-27 1995-02-15 株式会社日立製作所 Atmospheric pressure ionization mass spectrometer

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57126064U (en) * 1981-01-30 1982-08-06

Also Published As

Publication number Publication date
JPS62163250A (en) 1987-07-20

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