JPH06298304A - Conveyor system - Google Patents

Conveyor system

Info

Publication number
JPH06298304A
JPH06298304A JP8701293A JP8701293A JPH06298304A JP H06298304 A JPH06298304 A JP H06298304A JP 8701293 A JP8701293 A JP 8701293A JP 8701293 A JP8701293 A JP 8701293A JP H06298304 A JPH06298304 A JP H06298304A
Authority
JP
Japan
Prior art keywords
magazine
conveyor
transport
base plate
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8701293A
Other languages
Japanese (ja)
Inventor
Hiroyuki Matsubara
博之 松原
Yoichi Fukuoka
洋一 福岡
Keiji Fujikawa
啓司 藤川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Computer Electronics Co Ltd
Hitachi Ltd
Original Assignee
Hitachi Computer Electronics Co Ltd
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Computer Electronics Co Ltd, Hitachi Ltd filed Critical Hitachi Computer Electronics Co Ltd
Priority to JP8701293A priority Critical patent/JPH06298304A/en
Publication of JPH06298304A publication Critical patent/JPH06298304A/en
Pending legal-status Critical Current

Links

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  • Automatic Assembly (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Intermediate Stations On Conveyors (AREA)

Abstract

PURPOSE:To provide a conveyor system which is able to convey an every possible mounting system base plate surely in a highly efficient manner and prevent the running cost from increasing. CONSTITUTION:This conveyor system consists of a receiving mechanism installed in a buffer stage 1 in order to house a base plate in a conveying magazine 8, both upper and lower conveyors 3 and 6 set up for conveying this conveying magazine, and a base plate delivery mechanism 5 for feeding a postprocess with the base plate in the conveying magazine piece by piece. In addition, it is provided with both loader and unloader lifters 2 and 4 being intermittently liftable, installed at both ends of these upper and lower conveyors 3 and 6 in order to circulate the conveying magazine.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、電子部品を実装した基
板等を搬送するための搬送装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a carrying device for carrying a board or the like having electronic parts mounted thereon.

【0002】[0002]

【従来の技術】電子部品を実装した基板等を効率良く搬
送する従来の搬送装置は、特開昭59−163899に
記載のように、一旦マガジンラック内に複数個の基板を
収納して搬送し、後工程へは再度基板のみを1枚ずつ取
り出して供給するという方法を採用していた。
2. Description of the Related Art As described in JP-A-59-163899, a conventional carrier device for efficiently carrying a substrate or the like having electronic parts mounted thereon is used to carry a plurality of substrates once housed in a magazine rack. In the subsequent process, a method of retrieving and supplying only the substrates one by one was adopted again.

【0003】また、電子部品実装後の基板をはんだ付け
工程まで部品ずれなく確実に搬送する方法としては、特
開平4−88696、4−88697に示すように、は
んだペーストを塗布し、はんだコテを用いて仮固定を行
い搬送する方法が一般的であった。
Further, as a method for surely transporting a substrate after mounting electronic components to a soldering process without misalignment of components, as shown in JP-A-4-88696 and 4-88697, a solder paste is applied and a soldering iron is applied. The method of temporary fixing and carrying was used.

【0004】[0004]

【発明が解決しようとする課題】上記特開昭59−16
3899記載の従来技術は、一度に複数の基板を搬送す
ることは可能であるが、前工程のタクトが後工程のタク
トより大の時、マガジンラック内に基板が満載される
間、後工程は基板待ちの状態となってしまい、タクトバ
ランスが保てないという問題があった。
DISCLOSURE OF THE INVENTION Problems to be Solved by the Invention
According to the conventional technique described in 3899, it is possible to convey a plurality of substrates at one time, but when the tact of the previous process is larger than that of the subsequent process, the subsequent process is performed while the magazine rack is fully loaded with the substrates. There is a problem that the tact balance cannot be maintained because the substrate is in a waiting state.

【0005】また、上記特開平4−88696、4−8
8697に記載の従来技術は、TAB(テープ オート
メーテッド ボンディング)方式の実装部品には最適で
あるが、フリップチップ方式によって実装された部品に
対しては不向きであるという問題があった。
Further, the above-mentioned Japanese Patent Laid-Open Nos. 4-88696 and 4-8.
The conventional technique described in 8697 is suitable for a TAB (tape automated bonding) type mounting component, but has a problem that it is not suitable for a component mounted by a flip chip type.

【0006】本発明の目的は、あらゆる実装方式の基板
を確実に、かつ、高効率で搬送することができ、ランニ
ングコストを増加させない搬送装置を提供することにあ
る。
It is an object of the present invention to provide a carrier device capable of reliably and efficiently carrying substrates of any mounting method without increasing running costs.

【0007】[0007]

【課題を解決するための手段】上記目的を達成するため
に、本発明の搬送装置は、基板を搬送用マガジンに収納
するための受け入れ機構と、搬送用マガジンを搬送する
ため上下2段に設置されたコンベアと、搬送用マガジン
内の基板を後工程へ1枚ずつ供給するための払い出し機
構と、搬送用マガジンを循環させるため、上記上下2段
のコンベアの両端に設けられた間欠的に昇降可能な昇降
機構とにより構成される。
In order to achieve the above object, a transfer apparatus of the present invention is provided with a receiving mechanism for storing substrates in a transfer magazine and two upper and lower stages for transferring the transfer magazine. Conveyor, a delivery mechanism for supplying the substrates in the transfer magazine to the subsequent process one by one, and the transfer magazine is circulated so that the conveyor is intermittently moved up and down at both ends. It is composed of a possible lifting mechanism.

【0008】更に本発明の搬送装置は、装置内部の清浄
度を一定に保つため、クリーンエアーを供給、排出する
機構を設けることが好ましい。また、後工程の処理状態
を検出する検出手段からの信号を受けて、搬送用マガジ
ンへ収納する基板の最適な枚数を決定するための制御手
段を設け、それにより、搬送用マガジンの搬送を制御す
ることが好ましい。
Further, in order to keep the cleanliness inside the apparatus constant, the carrying apparatus of the present invention is preferably provided with a mechanism for supplying and discharging clean air. In addition, control means is provided for determining the optimum number of substrates to be stored in the transport magazine in response to a signal from the detection means for detecting the processing state of the subsequent process, thereby controlling the transport of the transport magazine. Preferably.

【0009】更に各機構の駆動部に振動抑制機構を設け
ることが好ましい。例えば、前工程より基板を受け取る
受け入れ機構、逆に後工程へ基板を供給する払い出し機
構及びリフタの昇降機構の3機構に対しては、駆動源に
モータ、駆動伝達にタイミングベルト及び低膨張丸ベル
トを採用することが好ましい。また、搬送される基板に
接触するプッシャー先端に衝撃吸収材を使用すること、
コンベアにはフリーローラコンベアを採用することが好
ましい。
Further, it is preferable to provide a vibration suppressing mechanism in the drive section of each mechanism. For example, for a receiving mechanism that receives a substrate from a previous process, a payout mechanism that supplies a substrate to a subsequent process, and a lifter lifting mechanism, a motor is used as a drive source, a timing belt is used for drive transmission, and a low expansion round belt is used. Is preferably adopted. Also, use a shock absorber at the tip of the pusher that comes into contact with the substrate being transported,
It is preferable to adopt a free roller conveyor as the conveyor.

【0010】[0010]

【作用】上下2段のコンベアとその両端に設けられた昇
降機構とによる搬送用マガジンの循環方式を採用するた
め、基板を確実にかつ高効率で搬送することができる。
また、複数の基板を収納できる搬送用マガジンを用いる
ことで集約搬送が可能なバッファ機能が得られる。更に
後工程の処理状況をシーケンサへフィードバックし、コ
ンベア内停滞時間と集約数の自動最適制御を行うことに
よりランニングコストが減少できる。
Since the circulation system of the conveying magazine by the upper and lower two-stage conveyor and the elevating mechanism provided at both ends thereof is adopted, the substrate can be surely and highly efficiently conveyed.
In addition, a buffer function capable of collective transport can be obtained by using a transport magazine that can store a plurality of substrates. Furthermore, the running cost can be reduced by feeding back the processing status of the subsequent process to the sequencer and performing automatic optimum control of the stagnation time in the conveyor and the number of consolidations.

【0011】装置にクリーンフィルターを通したクリー
ンエアーを供給し、排出するようにすれば、装置内部に
浮遊する異物及び稼動部より発生する塵埃を効率よく除
去することができる。更に、上下2段のコンベアによる
搬送用マガジン循環方式のため装置扉開閉が不要とな
り、外部との遮断によって清浄度を一定に保ち、清浄度
の低下防止を図れる。
By supplying clean air to the device through a clean filter and discharging the clean air, foreign substances floating in the device and dust generated from the operating part can be efficiently removed. Furthermore, since the conveyor magazine circulation system using the upper and lower two-stage conveyors makes it unnecessary to open and close the device door, and keeps the cleanliness constant by shutting off from the outside, and prevents the cleanliness from decreasing.

【0012】また、駆動源にモータを使用することで、
二段スピードでの搬送が実現し、搬送時間の短縮を図る
ことができる。モータ回転時に発生する固有の振動は、
駆動伝達部のタイミングベルト及び低膨張丸ベルトで吸
収し、プッシャーが基板と接触するときに発生する衝撃
は、その先端に取り付けた衝撃吸収材で最小限に抑えら
れることから基板に対して低振動の搬送を行うことがで
きる。更に、搬送機構でもフリーローラコンベアを使用
することで低振動搬送が可能となる。また、フリーフロ
ー機能も容易に得ることができる。そして、ストッパー
による機械的停止でなく、センサーによるローラ回転停
止方式によって減速停止を行い振動加速を最小限に抑制
することができる。
Further, by using a motor as a drive source,
Transport at a two-step speed is realized, and the transport time can be shortened. The unique vibration generated when the motor rotates is
The shock absorption material attached to the tip of the drive absorber absorbs the timing belt and the low expansion round belt, and the shock generated when the pusher comes into contact with the board is minimized. Can be carried. In addition, the use of a free roller conveyor in the transfer mechanism also enables low-vibration transfer. Also, the free flow function can be easily obtained. Then, instead of mechanical stop by the stopper, deceleration stop is performed by the roller rotation stop method by the sensor, and vibration acceleration can be suppressed to the minimum.

【0013】[0013]

【実施例】以下、本発明の搬送装置の実施例を図面を用
いて説明する。図1は、搬送装置の構成図である。本装
置は、バッファステージ1、ローダリフタ2、上段コン
ベア3、アンローダリフタ4、基板払い出し機構5、下
段コンベア6で構成されている。装置上部に設置された
クリーンエアー供給口7よりクリーンフィルターを通し
たエアーを供給し、装置下部から排出することで装置内
部に浮遊する異物及び稼動部から発生する塵埃の除去を
行う。また、上段コンベア3と下段コンベア6による搬
送用マガジン8の循環方式のため、装置扉の開閉を不要
にすることで外部との遮断が行える。よって、装置内部
を常時一定の清浄度に保ち、その低下を防止することが
できる。更に、上段コンベア3が基板を収納した実マガ
ジン搬送で、下段コンベア6が基板を払い出した後の空
マガジン回収用としているため、万一内部で発塵した場
合にも落下異物が基板に付着する恐れはない。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a carrying device of the present invention will be described below with reference to the drawings. FIG. 1 is a configuration diagram of the transport device. The present apparatus is composed of a buffer stage 1, a loader lifter 2, an upper conveyor 3, an unloader lifter 4, a substrate delivery mechanism 5, and a lower conveyor 6. Air that has passed through a clean filter is supplied from a clean air supply port 7 installed on the upper part of the device, and is discharged from the lower part of the device to remove foreign matters floating inside the device and dust generated from the operating part. Further, since the conveying magazine 8 is circulated by the upper conveyor 3 and the lower conveyor 6, the opening and closing of the apparatus door is not necessary, so that the exterior can be shut off. Therefore, it is possible to always maintain a constant cleanliness inside the apparatus and prevent the deterioration. Furthermore, since the upper conveyor 3 conveys the actual magazine containing the substrate and the lower conveyor 6 is for collecting the empty magazine after the substrate has been discharged, even if dust is generated inside, foreign substances that fall are attached to the substrate. There is no fear.

【0014】図2にバッファステージ1に設けられた基
板受け入れ機構の概略図を示す。本機構は、前工程の搭
載機から払い出された電子部品実装済基板を受け取り、
後工程の処理状況に応じて、図の右手にある搬送用マガ
ジンへ1枚ずつ又は複数枚、例えば10枚ずつ収納する
動作を行っている。基板を複数枚収納するときは、図1
に示したローダリフタ2を間欠的に上昇させ、その停止
時に、搬送用マガジン内の等間隔に仕切られた部所に基
板を次々と収納する。本機構の駆動源であるモータ9の
回転運動はプーリー10、低膨張丸ベルト11を介して
プシャー12へ直線運動に変換して伝達される。低膨張
丸ベルト11はモータ9の回転時に発生する固有の振動
を吸収し、プシャー12に伝わらないようにする役目も
担っている。更に、プシャー12の先端に取り付けた衝
撃吸収材13は、搬送対象物である基板と接触する時に
実装されている電子部品に与える衝撃を最小限に抑制す
ることができる。
FIG. 2 is a schematic view of a substrate receiving mechanism provided on the buffer stage 1. This mechanism receives the electronic component mounted board delivered from the mounting machine in the previous process,
Depending on the processing status of the subsequent process, an operation of storing one or a plurality of sheets, for example, 10 sheets each in the transport magazine on the right side of the drawing is performed. When storing multiple boards,
The loader lifter 2 shown in (1) is intermittently lifted, and when the loader lifter 2 is stopped, the substrates are successively stored in the conveyance magazine at the equally partitioned portions. The rotary motion of the motor 9 which is the drive source of this mechanism is converted into a linear motion and transmitted to the pusher 12 via the pulley 10 and the low expansion round belt 11. The low-expansion round belt 11 also has a role of absorbing the unique vibration generated when the motor 9 rotates and preventing it from being transmitted to the pusher 12. Furthermore, the shock absorbing material 13 attached to the tip of the pusher 12 can minimize the shock given to the mounted electronic components when coming into contact with the substrate which is the object to be conveyed.

【0015】なお、図1に示した搬送装置は、図示しな
い制御手段を有する。この制御手段は、後工程の処理状
態を検出する検出手段からの信号を受け、上記のように
して搬送用マガジンへ収納される基板の最適な枚数を決
定し、それにより、搬送用マガジンの搬送を制御する。
The carrying device shown in FIG. 1 has a control means (not shown). This control means receives the signal from the detection means for detecting the processing state of the subsequent process, determines the optimum number of substrates to be stored in the transfer magazine as described above, and thereby the transfer magazine of the transfer magazine is transferred. To control.

【0016】次に、ローダリフタ2とアンローダリフタ
4の昇降機構を説明する。図1に示したように、ローダ
リフタ2は、空の搬送用マガジン8を下段コンベア6よ
り受け取り、次に、バッファステージ1の搬送位置で基
板を収納した後、上段コンベア3へ搬送用マガジン8を
供給する動作を行っている。また、アンローダリフタ4
は上段コンベア3上を搬送されてきた搬送用マガジン8
を受け取り、後工程のリフロ装置投入位置で基板を1枚
ずつ供給し、空になった搬送用マガジン8を下段コンベ
ア6に供給する動作を行っている。
Next, an elevating mechanism for the loader lifter 2 and the unloader lifter 4 will be described. As shown in FIG. 1, the loader lifter 2 receives an empty transfer magazine 8 from the lower conveyor 6, then stores the substrate at the transfer position of the buffer stage 1, and then transfers the transfer magazine 8 to the upper conveyor 3. It is supplying. In addition, the unloader lifter 4
Is a carrying magazine 8 that has been carried on the upper conveyor 3.
Is received, the substrates are supplied one by one at the reflow device loading position in the subsequent process, and the empty transport magazine 8 is supplied to the lower conveyor 6.

【0017】図3に示すリフタの昇降機構の駆動伝達方
式は、モータ14の駆動をダイレクトにボールネジ17
に伝達するのではなく、タイミングプーリ15、タイミ
ングベルト16を介して伝達するベルトドライブ方式を
使用する。このことから、図2の基板受け入れ機構で説
明した低膨張丸ベルト11と同様の効果が得られる。ま
た、リフタ上に搬送用マガジン8が無いとき、つまりロ
ーダリフタ2側の下降時、アンローダリフタ4側の上昇
時には送り速度を高速にすることで搬送時間の短縮もで
きる。ボールネジ17の回転はリフタのボールベアリン
グに伝えられ、リフタが昇降する。
In the drive transmission system of the lifter lifting mechanism shown in FIG. 3, the motor 14 is driven directly by the ball screw 17
The belt drive system is used in which the transmission is performed via the timing pulley 15 and the timing belt 16 instead of being transmitted to From this, the same effect as the low expansion round belt 11 described in the substrate receiving mechanism of FIG. 2 can be obtained. Further, when there is no carrying magazine 8 on the lifter, that is, when the loader lifter 2 side is lowered and when the unloader lifter 4 side is raised, the feeding speed can be made high to shorten the carrying time. The rotation of the ball screw 17 is transmitted to the ball bearing of the lifter, and the lifter moves up and down.

【0018】図4に基板払い出し機構を示す。本機構
は、後工程のリフロ装置へ搬送用マガジン8内に収納さ
れた基板を1枚ずつ供給する動作を行っている。機械構
成及びねらいは図2で説明した基板受け入れ機構と同様
であるが、ここでは駆動源にスッテピングモータ18を
使用することでプッシャー19が基板に接触する手前ま
で高速で送り、接触する手前で一気に減速し、払い出し
限まで低速で送ることができる。更に、払い出し限から
戻り限までは高速で送るという二段階送り速度の払い出
し動作を行うことが可能となる。なお、プーリー10、
低膨張丸ベルト11、衝撃吸収材13の作用は、図2で
説明したものと同じである。
FIG. 4 shows a substrate delivery mechanism. This mechanism performs the operation of supplying the substrates housed in the transport magazine 8 one by one to the reflow device in the subsequent process. The mechanical structure and aim are the same as those of the substrate receiving mechanism described in FIG. 2, but here, by using the stepping motor 18 as a drive source, the pusher 19 is sent at high speed up to the point before the pusher 19 comes into contact with the substrate, and before the contact comes. You can decelerate all at once and send at a low speed until the payout limit. Further, it is possible to perform a payout operation at a two-step feed speed, in which the paper is fed at high speed from the payout limit to the return limit. In addition, the pulley 10,
The actions of the low expansion round belt 11 and the impact absorbing material 13 are the same as those described in FIG.

【0019】図5に上段コンベアと下段コンベアの搬送
機構の概略図を示す。本機構は、ローラシャフト20、
圧入ローラ21、フリーローラ22、駆動ベルト23か
ら構成されている。よって、フリーフロー機能を目的と
したストッパ24を追加することもストッパ24付近の
フリーローラ22を取り除くだけで容易に行える。ま
た、搬送用マガジン8をコンベア上で停止させるときも
ストッパ24にあてる機械的停止でなく、各ストッパ2
4の近傍に1対で取り付けられているセンサー25で搬
送用マガジン8を検出し、ストッパ24に接触する前に
コンベアの回転を停止させる方式を使用することで減速
停止を行い、振動加速を最小限に抑制できる。
FIG. 5 shows a schematic view of the transport mechanism of the upper conveyor and the lower conveyor. This mechanism includes a roller shaft 20,
It is composed of a press-fitting roller 21, a free roller 22, and a drive belt 23. Therefore, it is possible to easily add the stopper 24 for the purpose of the free flow function only by removing the free roller 22 near the stopper 24. Further, even when the carrying magazine 8 is stopped on the conveyor, it is not a mechanical stop applied to the stopper 24, but each stopper 2
A pair of sensors 25 installed near 4 detects the transport magazine 8 and stops the rotation of the conveyor before contacting the stopper 24, thereby decelerating and stopping to minimize vibration acceleration. It can be suppressed to the limit.

【0020】以上、本実施例によれば、基板を確実にか
つ高効率で搬送することができ、ランニングコストを減
少させると共に、電子部品実装直後で非常に実装部品ず
れを起し易い基板でも、実装時に使用されるフラックス
のみの固定力で確実に搬送が行え、新たに仮固定機能を
設ける必要がなくなった。このことにより、装置製作費
の低減、搬送時間の短縮及び工程装置の簡素化を図るこ
とができた。また、電気的接合部等への異物混入、付着
を防止した搬送装置を実現することができた。
As described above, according to the present embodiment, the board can be reliably and highly efficiently transported, the running cost is reduced, and even if the board is liable to be misaligned immediately after mounting the electronic parts, The flux can be used to reliably convey the product with the fixing force used during mounting, eliminating the need for a new temporary fixing function. As a result, it is possible to reduce the manufacturing cost of the device, shorten the transportation time, and simplify the process device. Further, it is possible to realize a transport device that prevents foreign matter from entering and adhering to the electrical joints and the like.

【0021】[0021]

【発明の効果】以上の説明したように本発明によれば、
あらゆる実装方式の基板を確実にかつ高効率で搬送する
ことができ、ランニングコストを減少させることができ
る。
As described above, according to the present invention,
Substrates of all mounting methods can be transported reliably and with high efficiency, and running costs can be reduced.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の搬送装置の一実施例の構成図。FIG. 1 is a configuration diagram of an embodiment of a carrying device of the present invention.

【図2】図1に示した搬送装置のバッファステージに設
けられた基板受け入れ機構の概略図。
2 is a schematic diagram of a substrate receiving mechanism provided on a buffer stage of the transfer device shown in FIG.

【図3】図1に示した搬送装置のリフタ昇降機構の概略
図。
FIG. 3 is a schematic view of a lifter lifting mechanism of the transfer device shown in FIG.

【図4】図1に示した搬送装置の基板払い出し機構の概
略図。
FIG. 4 is a schematic view of a substrate delivery mechanism of the transfer device shown in FIG.

【図5】図1に示した搬送装置の搬送機構の概略図。5 is a schematic view of a transport mechanism of the transport device shown in FIG.

【符号の説明】[Explanation of symbols]

1…バッファステージ 2…ローダリフタ 3…上段コンベア 4…アンローダリフタ 5…基板払い出し機構 6…下段コンベア 7…クリーンエアー供給口 8…搬送用マガジン 9、14…モータ 10…プーリー 11…低膨張丸ベルト 12、19…プッシャー 13…衝撃吸収材 15…タイミングプーリ 16…タイミングベルト 17…ボールネジ 18…スッテピングモータ 20…ローラシャフト 21…圧入ローラ 22…フリーローラ 23…駆動ベルト 24…ストッパ 25…センサー DESCRIPTION OF SYMBOLS 1 ... Buffer stage 2 ... Loader lifter 3 ... Upper stage conveyor 4 ... Unloader lifter 5 ... Substrate delivery mechanism 6 ... Lower stage conveyor 7 ... Clean air supply port 8 ... Conveying magazine 9, 14 ... Motor 10 ... Pulley 11 ... Low expansion round belt 12 , 19 ... Pusher 13 ... Impact absorbing material 15 ... Timing pulley 16 ... Timing belt 17 ... Ball screw 18 ... Stepping motor 20 ... Roller shaft 21 ... Press-fit roller 22 ... Free roller 23 ... Drive belt 24 ... Stopper 25 ... Sensor

───────────────────────────────────────────────────── フロントページの続き (72)発明者 福岡 洋一 神奈川県秦野市堀山下1番地 株式会社日 立製作所汎用コンピュータ事業部内 (72)発明者 藤川 啓司 神奈川県秦野市堀山下1番地 株式会社日 立製作所汎用コンピュータ事業部内 ─────────────────────────────────────────────────── ─── Continued Front Page (72) Inventor Yoichi Fukuoka, 1 Horiyamashita, Hadano City, Kanagawa Pref., General Computer Division, Hitachi, Ltd. (72) Keiji Fujikawa, 1 Horiyamashita, Hadano, Kanagawa Prefecture Factory General Computer Division

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】基板を搬送用マガジンに収納するための受
け入れ機構、搬送用マガジンを搬送するために上下2段
に設置されたコンベア、搬送用マガジン内の基板を後工
程へ1枚ずつ供給するための払い出し機構及び搬送用マ
ガジンを循環させるため、上記上下2段のコンベアの両
端に設けられた間欠的に昇降可能な昇降機構を有するこ
とを特徴とする搬送装置。
1. A receiving mechanism for accommodating substrates in a transport magazine, conveyors installed in upper and lower two stages for transporting the transport magazine, and substrates in the transport magazine are supplied one by one to a subsequent process. In order to circulate the payout mechanism and the transport magazine, the transport device is provided with an elevating mechanism that is provided at both ends of the upper and lower two-stage conveyors and that can intermittently ascend and descend.
JP8701293A 1993-04-14 1993-04-14 Conveyor system Pending JPH06298304A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8701293A JPH06298304A (en) 1993-04-14 1993-04-14 Conveyor system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8701293A JPH06298304A (en) 1993-04-14 1993-04-14 Conveyor system

Publications (1)

Publication Number Publication Date
JPH06298304A true JPH06298304A (en) 1994-10-25

Family

ID=13903059

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8701293A Pending JPH06298304A (en) 1993-04-14 1993-04-14 Conveyor system

Country Status (1)

Country Link
JP (1) JPH06298304A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110155682A (en) * 2018-02-09 2019-08-23 张民基 The intelligent general assembly line of LED-TV intelligent integrated machine mould group
JP2021130546A (en) * 2020-02-19 2021-09-09 パナソニックIpマネジメント株式会社 Substrate supply device, substrate supply method, substrate storage device, substrate recovery method and lifting device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110155682A (en) * 2018-02-09 2019-08-23 张民基 The intelligent general assembly line of LED-TV intelligent integrated machine mould group
CN110155682B (en) * 2018-02-09 2024-02-09 张民基 Intelligent assembly line of LED-TV intelligent all-in-one module
JP2021130546A (en) * 2020-02-19 2021-09-09 パナソニックIpマネジメント株式会社 Substrate supply device, substrate supply method, substrate storage device, substrate recovery method and lifting device

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