JPH0629507Y2 - 圧電振動子ポンプ - Google Patents

圧電振動子ポンプ

Info

Publication number
JPH0629507Y2
JPH0629507Y2 JP1987054566U JP5456687U JPH0629507Y2 JP H0629507 Y2 JPH0629507 Y2 JP H0629507Y2 JP 1987054566 U JP1987054566 U JP 1987054566U JP 5456687 U JP5456687 U JP 5456687U JP H0629507 Y2 JPH0629507 Y2 JP H0629507Y2
Authority
JP
Japan
Prior art keywords
piezoelectric vibrator
discharge
pump
piezoelectric
check valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987054566U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63162980U (enrdf_load_stackoverflow
Inventor
英憲 奥山
Original Assignee
株式会社三鈴エリ−
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社三鈴エリ− filed Critical 株式会社三鈴エリ−
Priority to JP1987054566U priority Critical patent/JPH0629507Y2/ja
Publication of JPS63162980U publication Critical patent/JPS63162980U/ja
Application granted granted Critical
Publication of JPH0629507Y2 publication Critical patent/JPH0629507Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Reciprocating Pumps (AREA)
JP1987054566U 1987-04-10 1987-04-10 圧電振動子ポンプ Expired - Lifetime JPH0629507Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987054566U JPH0629507Y2 (ja) 1987-04-10 1987-04-10 圧電振動子ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987054566U JPH0629507Y2 (ja) 1987-04-10 1987-04-10 圧電振動子ポンプ

Publications (2)

Publication Number Publication Date
JPS63162980U JPS63162980U (enrdf_load_stackoverflow) 1988-10-25
JPH0629507Y2 true JPH0629507Y2 (ja) 1994-08-10

Family

ID=30881677

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987054566U Expired - Lifetime JPH0629507Y2 (ja) 1987-04-10 1987-04-10 圧電振動子ポンプ

Country Status (1)

Country Link
JP (1) JPH0629507Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2578973Y2 (ja) * 1991-06-18 1998-08-20 化成オプトニクス株式会社 圧電振動子ポンプ

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5588087U (enrdf_load_stackoverflow) * 1978-12-13 1980-06-18
JPS6098181A (ja) * 1983-11-04 1985-06-01 Asahi Okuma Ind Co Ltd ダイヤフラムポンプ
JPS60195986U (ja) * 1984-06-08 1985-12-27 株式会社三鈴エリー 圧電体振動子ポンプ

Also Published As

Publication number Publication date
JPS63162980U (enrdf_load_stackoverflow) 1988-10-25

Similar Documents

Publication Publication Date Title
JPH0629507Y2 (ja) 圧電振動子ポンプ
CN119103092B (zh) 开放式流体发生装置
JPH0629508Y2 (ja) 圧電振動子ポンプ
JPS59161800U (ja) 超音波変換器
US2406792A (en) Piezoelectric oscillator
JPH07301182A (ja) 圧電ポンプの駆動方法
JP2578973Y2 (ja) 圧電振動子ポンプ
JPS52103704A (en) Construction made by connecting diaphragm plate and driving shaft
JP1733609S (ja) 液体用ポンプ
JP3460301B2 (ja) 圧電ポンプ
JPH0319916B2 (enrdf_load_stackoverflow)
JPS60192141A (ja) 液封入防振装置
JPS57137671A (en) Laminated bimolf vibrator pump
JPS6314875U (enrdf_load_stackoverflow)
JPH0417828Y2 (enrdf_load_stackoverflow)
JPS639481U (enrdf_load_stackoverflow)
JPH03222878A (ja) 圧電振動子ポンプ
SU624659A1 (ru) Устройство дл излучени акустических колебаний
JP2542620Y2 (ja) 圧電ポンプ
JP2578977Y2 (ja) 圧電ポンプ
JPH07151060A (ja) 圧電ポンプ
JPS6148366A (ja) 気体薬剤拡散装置
JP1733627S (ja) 液体用ポンプ
JPH0310086U (enrdf_load_stackoverflow)
SU723215A2 (ru) Гидро - или пневмоприводной насос