JPH06280037A - Surface treating device - Google Patents

Abstract

PURPOSE:To improve the treating efficiency of a material to be treated, to reduce the stcking of impurity, etc., to the material to be treated and to improve the yield. CONSTITUTION:Rotary holding plates 7 are arranged so as to be rotatable to the facing surfaces of oppositely faced hanging members 2 and a first supporting shafts 18 circumscribing the materials D to be treated are supported so as to be rotatable at the inner peripheral sides of the rotary holding plates 7. Shaft receiving grooves 21 opened to the outer part in the diameter direction holding a second supporting shafts 19 circumscribing the outer side of the materials D to be treated are arranged on the outer peripheral sides of the rotary holding plate 7 and guides 23 for preventing the drop of the second supporting shaft 19 are arranged at least near the outer periphery of lower parts of the rotary holding plates 7. A fixed wheel 26 is arranged at the rotary center part of the rotary holding plate 7, and a driven wheel 27 rotated by contacting with the fixed wheel 26 is arranged in the first supporting shaft 18. By this method, the second supporting shaft 19 is inserted into the shaft receiving groove 21 of the rotary holding plate 7 and the materials D to be treated can easily be set between the first and the second supporting shafts 18, 19. After setting, while auto-rotating the material D to be treated in treating liquid 4 accompanying the rotation of the rotary holding plate 7, the material D is revolved and the uniform surface treatment is quickly executed.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface treatment apparatus, and more particularly to a surface treatment apparatus for subjecting an object to be treated such as a magnetic disk to electroless plating.

[0002]

2. Description of the Related Art Conventionally, when a surface of a magnetic disk made of aluminum is coated with, for example, nickel phosphorus, a disk substrate D (hereinafter referred to as a disk) which is an object to be processed is appropriately spaced as shown in FIG. The support shaft 1 is vertically supported, and the support shaft 1 is laterally suspended between the suspension members 2 facing each other.
Then, the suspension member 2 is lowered to immerse the disk D in the plating solution 4 in the plating tank 3 which is a processing tank.
The surface of is plated. According to such surface treatment, a large number of disks D can be surface-treated at the same time. In this example, a surface treatment device for a donut-shaped disc having a hole in the center is shown, but in the case of a disc having no hole in the center, the disc is supported by a plurality of support shafts circumscribing. Will be done.

[0003]

However, in the conventional surface treatment apparatus of this type, the spring 6 is interposed between the bearings 5 provided on the opposing mounting surfaces of the suspension member 2 facing the support shaft 1. By attaching it, or by providing a holding hole in one of the suspension members 2, inserting the end of the support shaft 1 into the holding hole once, and then engaging the other end of the support shaft 1 with the bearing 5. The support shaft 1 was laid horizontally between the suspension members 2. Therefore, there is a problem that setting the support shaft 1 and the disk D is troublesome. In addition, since the spring 6 and the holding hole are also plated during the plating process, the plated portion of the spring 6 and the like peels off during the repeated surface treatment to generate particulate impurities (particles). There is also a problem that it adheres to the disk D and causes a chemical reaction (chemical contamination), resulting in deterioration of the characteristics and yield of the magnetic disk. Furthermore, since the disk D is stationary in the plating solution 4, it is difficult to quickly form a uniform plating film on the disk surface.

The present invention has been made in view of the above circumstances. The object to be processed can be easily set, the surface of the object to be processed can be uniformly processed rapidly, and impurities such as impurities in the object to be processed can be quickly processed. An object of the present invention is to provide a surface treatment apparatus capable of reducing adhesion and improving yield.

[0005]

In order to achieve the above object, in the surface treatment apparatus of the present invention, a support shaft is horizontally installed between facing suspension members, and a plurality of objects to be processed are spaced in the axial direction. Assuming a surface treatment device for treating the surface of the object to be treated by supporting it vertically and immersing it in the treatment liquid, the rotation holding plate can be rotated on the opposite surface of the hanging member. A rotatably supported first support shaft circumscribing the object to be processed is provided on the inner peripheral side of the rotation holding plate, and a second support shaft circumscribing the object to be processed is retained on the outer peripheral side of the rotation holding plate. A bearing groove opened radially outward is provided, a drop prevention guide for the second support shaft is provided at least near the outer periphery of the lower portion of the rotation holding plate, and a fixed wheel is provided at the center of rotation of the rotation holding plate. At the same time, a driven wheel that rotates in contact with the fixed wheel is attached to the first support shaft. It is characterized in that the digits.

[0006]

According to the surface treatment apparatus of the present invention constructed as described above, the object to be treated is easily set between the first support shaft and the outer support shaft by inserting it into the bearing groove of the rotation holding plate. be able to. The second support shaft is guided by the fall prevention guide as the rotation holding plate rotates, and the object to be processed revolves around the driven wheel rotating in contact with the fixed wheel and the first support shaft while revolving around. By moving inside, the surface of the object to be processed can be uniformly processed quickly.

[0007]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described in detail below with reference to the accompanying drawings. Here, a case where the surface treatment apparatus of the present invention is applied to an electroless plating apparatus for an aluminum magnetic disk will be described. Further, the same parts as those of the conventional surface treatment apparatus will be described with the same reference numerals.

FIG. 1 is a sectional view of a first embodiment of a surface treatment apparatus of the present invention, and FIG. 2 is a sectional view taken along the line AA of FIG.

This surface treatment apparatus has a pair of suspension members 2 that are hung from a conveyance mechanism (not shown) and face each other. Rotation holding plates 7 are provided on opposite surfaces of both suspension members 2 via a spindle 8. It is mounted so that it can rotate vertically. Support shaft 8
The portion 8a fitted to the suspension member 2 has a rectangular cross section and is fixed to the suspension member 2 via a fixing member 9.
If the support shaft 8 is attached so that the corners of the rectangular portion 8a face downward, the drainage of the plating liquid when the support shaft 8 is pulled up from the plating bath 3 can be improved. A central hole 11 is formed at the center of the rotation holding plate 7 so as to be rotatably fitted to the support shaft 8 via a slide bearing 10, and a tooth portion 12 is provided at the outer peripheral portion of the rotation holding plate 7. . In order to drive the rotation holding plate 7 to rotate, a transmission gear 13 meshing with a tooth portion 12 of the rotation holding plate 7 is rotatably attached to the suspension member 2 via a shaft 14, and the transmission gear 13 is rotated. A drive gear 17 mounted on the drive shaft 16 of the drive motor 15 is meshed with the drive gear 17.

In order to rotatably support a plurality of disks D having no hole at the center, which is an object to be processed, between the rotation holding plates 7 facing each other, the rotation holding plates 7 are rotatably supported between them. First support shaft 1 located on the circumferential side and circumscribing the disc D
8 and a second support shaft 19 located on the outer peripheral side and circumscribing the disk D are laterally supported rotatably. In this case, a plurality of first support shafts 18 (four in the embodiment) are arranged at a predetermined interval in the circumferential direction of the rotation holding plate 7, and a second support shaft 19 is provided.
Is a plurality (4 in the illustrated example) at a predetermined interval in the circumferential direction of the rotary holding plate 7 so as to be positioned between the adjacent first support shafts 18.
This is arranged, and the disc D is rotatably supported by two adjacent first support shafts 18 and one second support shaft 19 located in the middle thereof. An annular groove 20 for vertically arranging a plurality of disks D is formed on the first and second support shafts 18 and 19 at appropriate intervals in the axial direction.

Further, in order to facilitate the setting of the disk D, the outer sides of the opposite surfaces of the both rotation holding plates 7 are radially outwardly arranged to detachably hold the ends of the second support shafts 19. A bearing groove 21 having an opening is provided. In the embodiment, the bearing piece 22 having the bearing groove 21 is attached to the inner surface of the rotation holding plate 7, but the inner surface of the rotation holding plate 7 is formed with a convex portion having an outer circumferential surface along the circumferential direction. However, the bearing groove 21 may be formed in this convex portion.

A bearing groove 2 is provided in the vicinity of the outer circumference of the rotation holding plate 7.
An annular drop-out prevention guide 23 for preventing the second support shaft 19 from falling from 1 is arranged so as to surround the outer side of the bearing groove 21, and the guide 23 extends from diagonally above to the bearing groove 21. On the other hand, an inlet / outlet 24 for inserting / removing the second support shaft 19 is formed. The guide 23 is fixed to the suspension member 2 with a fixing pin 25. It is sufficient that the guide 23 is disposed at least in the lower part of the rotation holding plate 7, and in that case, the second support shaft 19 can be inserted into and removed from the support shaft 21 in a wide range of the upper part of the rotation holding plate 7. . Further, the entrance / exit 24 that opens obliquely upward may be formed on the opposite side of the guide 23, and in that case, one may be the entrance and the other may be the exit.

On the other hand, a fixed wheel 26 is provided at the center of rotation of the rotation holding plate 7, and a driven wheel 27 that rotates in contact with the fixed wheel 26 is provided on the first support shaft 18. In this case, as the fixed wheel 26, a fixed gear is integrally formed on the inner end portion of the one support shaft 8, and as the driven wheel 27, the first support shaft 18 is equipped with the driven gear that meshes with the fixed gear. Therefore, when the rotation holding plate 7 rotates, the driven gear 27 rolls on the outer circumference of the fixed gear 26 to rotate the first support shaft 18, and the rotation of the first support shaft 18 causes the disk D to rotate.
And the disk D revolves around its own axis. The fixed wheel 26 and the driven wheel 27 do not necessarily have to be gears, but may be, for example, friction wheels.

Next, an operation mode of the surface treatment apparatus configured as described above will be described. First, the bearing groove 21 on the rotation holding plate 7 is located at the entrance / exit 24 of the guide 23, and the disks D are placed side by side on the adjacent first support shafts 18,
The second support shaft 19 is inserted from the inlet / outlet 24 of the guide 23 into the bearing groove 21. After rotating the rotary holding plate 7 by a predetermined angle (90 °), the disk D and the second support shaft 19 are set as described above.

The disk D thus set is immersed in a cleaning tank or a predetermined chemical tank by a transport mechanism (not shown) for pretreatment, and then moved above the plating tank 3. Then, when the drive motor 15 is driven after the suspension member 2 is lowered to immerse the disk D in the plating solution 4 in the plating tank 3, the rotation is transmitted to the rotation holding plate 7 via the transmission gear 13. The rotation holding plate 7 rotates in the vertical direction. As the rotation holding plate 7 rotates, the fixed gear 2
The first support shaft 18 rotates via the driven gear 27 that rolls on the drive shaft 6, and the rotation of the first support shaft 18 causes the disk D to rotate. Therefore, since the disk D revolves around and revolves in the plating solution 4, the surface of the disk D can be rapidly plated with a uniform film thickness. While the disk D is revolving, when the disk D is positioned below the first support shaft 18, a gap is created between the first support shaft 18 and the disk D, so that the disk D is temporarily hard to rotate. There is no problem in processing.

After the plating process is performed in this manner, the suspension member 2 is pulled up from the plating tank 3 and conveyed to the next processing step. At this time, the slanted surface 2a provided on the lower end surface of the suspension member 2 can make the plating solution drain well when the suspension member is pulled up from the plating tank 3. Then, after the final processing is performed, the second support shaft 19 and the disk D are reversed by the procedure reverse to the above-mentioned procedure.
Is removed.

FIG. 3 shows a second embodiment of the present invention. The surface treatment apparatus of the second embodiment is configured to set a disc D having a diameter smaller than that of the disc of the first embodiment. That is, in the first embodiment, the second support shaft 19 is arranged in the middle of the adjacent first support shafts 18, whereas in the second embodiment, the second support shaft 1 is provided.
9 is arranged at a position facing the first support shaft 18 in the radial direction. Therefore, the bearing groove 21 is arranged at the position of the second support shaft 19 (not shown).

A third support shaft 28 is horizontally mounted between both rotation holding plates 7 so as to support both sides of the disk D supported between the first and second support shafts 18 and 19 and is rotatable. The disk is supported at three points in the first embodiment, whereas the disk D is supported at four points in the second embodiment. In the second embodiment, the other parts are the same as those in the first embodiment,
The same parts are designated by the same reference numerals and the description thereof will be omitted.

In the above embodiment, the case where the rotation is transmitted from the drive motor 15 to the rotation holding plate 7 via the gear mechanism has been described. However, the means is not necessarily a gear transmission mechanism, for example, a wire or the like. You may make it rotate using the cord of. Further, in the above embodiment, the case of the electroless plating treatment of the disk-shaped magnetic disk having no hole centering on the surface treatment apparatus of the present invention has been described, but the object to be processed is not necessarily a disk-shaped magnetic disk. Alternatively, it may have a donut shape having a hole in the center. Further, it is needless to say that the present invention can be applied to plating treatment of an object to be treated such as LD or CD other than the magnetic disk or surface treatment other than plating.

[0020]

As described above, according to the surface treatment apparatus of the present invention, which is configured as described above,
The following effects can be obtained.

1) A rotation holding plate is rotatably provided on the facing surfaces of the facing suspension members, and a first support shaft circumscribing the object to be processed is provided on the inner peripheral side of the rotation holding plate. Since the second support shaft is inserted in the bearing groove provided radially outward on the outer peripheral side to support the object to be processed between the first support shaft and the second support shaft, a large number are provided. It is possible to easily set the objects to be processed.

2) Since the fixed wheel is provided at the center of rotation of the rotation holding plate and the driven wheel that rotates in contact with the fixed wheel is provided on the first support shaft, the object to be processed is rotated as the rotation holding plate rotates. As it revolves around the processing liquid while rotating, it is possible to rapidly perform uniform processing on the surface of the object to be processed and improve the processing capacity.

3) A fall prevention guide disposed at least in the vicinity of the outer periphery of the lower portion of the rotary holding plate by receiving the second support shaft in a bearing groove provided on the outer peripheral side of the rotary holding plate and opening radially outward. Since the second support shaft is guided by means of, unlike the case where the support shaft is held by the spring, the generation of impurities such as particles is small, the adhesion of impurities to the object to be processed can be reduced, and the yield can be improved. .

[Brief description of drawings]

FIG. 1 is a sectional view of a first embodiment of a surface treatment apparatus of the present invention.

FIG. 2 is a sectional view taken along line AA of FIG.

FIG. 3 is a sectional view of a second embodiment of the surface treatment apparatus of the present invention.

FIG. 4 is a schematic sectional view showing an example of a conventional surface treatment apparatus.

[Explanation of symbols]

 D disk (object to be treated) 2 suspension member 4 plating liquid (treatment liquid) 7 rotation holding plate 18 first support shaft 19 second support shaft 21 bearing groove 23 fall prevention guide 26 fixed wheel 27 driven vehicle

Claims (1)

[Claims] 1. A support shaft is laterally mounted between facing suspension members,
In a surface treatment apparatus for treating the surface of the object to be treated by vertically supporting a plurality of objects to be treated in the axial direction at intervals and immersing the object in the treatment liquid, the suspension members face each other. A rotation holding plate is rotatably provided on the surface, and a first support shaft circumscribing the object to be processed is rotatably supported on the inner peripheral side of the rotation holding plate, and the object to be processed is provided on the outer peripheral side of the rotation holding plate. A bearing groove is provided which is open outward in the radial direction to hold the circumscribing second support shaft, and a fall prevention guide for the second support shaft is provided at least near the lower outer periphery of the rotation holding plate. A surface treatment apparatus, wherein a fixed wheel is provided at the center of rotation of the vehicle, and a driven wheel that rotates in contact with the fixed wheel is provided on the first support shaft.