JPH06268504A - Semiconductor device drive circuit - Google Patents

Semiconductor device drive circuit

Info

Publication number
JPH06268504A
JPH06268504A JP5049392A JP4939293A JPH06268504A JP H06268504 A JPH06268504 A JP H06268504A JP 5049392 A JP5049392 A JP 5049392A JP 4939293 A JP4939293 A JP 4939293A JP H06268504 A JPH06268504 A JP H06268504A
Authority
JP
Japan
Prior art keywords
semiconductor device
voltage
drive circuit
error
reference voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP5049392A
Other languages
Japanese (ja)
Inventor
Hironobu Kumagai
浩伸 熊谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Engineering Ltd
Original Assignee
NEC Engineering Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Engineering Ltd filed Critical NEC Engineering Ltd
Priority to JP5049392A priority Critical patent/JPH06268504A/en
Publication of JPH06268504A publication Critical patent/JPH06268504A/en
Withdrawn legal-status Critical Current

Links

Abstract

PURPOSE:To provide a semiconductor device drive circuit provided with a function for monitoring an effect of a radiant ray onto a semiconductor device and for recovering an electric characteristic deteriorated by the effect of the radiant ray. CONSTITUTION:The drive circuit is provided with a semiconductor device 12 whose source connects to a drive power supply 14 via a resistor 13 and whose gate and drain connect to ground, a differential amplifier 15 generating a detection voltage in response to a voltage between both terminals of the resistor 13, a reference voltage source 16 generating a reference voltage, an error amplifier 17 outputting an error voltage based on the detected voltage and the reference voltage, light sources 25, 26 arranged opposite respectively to the semiconductor device 12 and the electric circuit 11, switches 19, 20 connected between the light sources and power supplies 22, 23 for the light sources and turned on/off in response to the error voltage and a switch 21 connected between the electric circuit 11 and a drive power supply 24 and turned off/on in response to the error voltage.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、半導体デバイス駆動回
路に関し、特に被曝放射線量をモニタしながら半導体デ
バイスを駆動する耐放射線半導体デバイス駆動回路に関
する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor device drive circuit, and more particularly to a radiation resistant semiconductor device drive circuit for driving a semiconductor device while monitoring the radiation dose.

【0002】[0002]

【従来の技術】従来の半導体デバイス駆動回路は、単に
半導体デバイスに対して駆動電圧を供給している。
2. Description of the Related Art A conventional semiconductor device drive circuit simply supplies a drive voltage to a semiconductor device.

【0003】[0003]

【発明が解決しようとする課題】一般に、半導体デバイ
スを放射線環境下で使用すると電気特性が劣化する。例
えば、MOS型電界効果トランジスタでは、二酸化珪素
を組成とするゲート電極部酸化膜が放射線に被曝し、被
曝によって発生する電離作用により価電子帯にある電子
が伝導体に励起され、価電子帯に正孔がトラップされ
る。これによりしきい値の恒久的ドリフト現象等の電気
的特性劣化が生じ電気回路としての機能を失う。また、
MOS型電界効果トランジスタやバイポーラトランジス
タが、モノシリックに集積されている構造の半導体デバ
イスにおいても、これらのトランジスタを電気的に分離
する二酸化珪素を組成とする分離帯に同様の現象が生
じ、トランジスタ間の分離機能が損なわれ、漏れ電流や
以上電流が流れてトランジスタを破壊してしまう。
Generally, when a semiconductor device is used in a radiation environment, its electrical characteristics deteriorate. For example, in a MOS field effect transistor, an oxide film of a gate electrode portion having a composition of silicon dioxide is exposed to radiation, and electrons in the valence band are excited by a conductor due to an ionizing action generated by the exposure, so that a valence band is generated. Holes are trapped. As a result, the electrical characteristics such as a permanent drift phenomenon of the threshold value are deteriorated and the function as an electric circuit is lost. Also,
Even in a semiconductor device having a structure in which MOS type field effect transistors and bipolar transistors are monolithically integrated, a similar phenomenon occurs in a separation band having a composition of silicon dioxide, which electrically separates these transistors, and the same phenomenon occurs between the transistors. The isolation function is impaired, and leakage current or more current flows and destroys the transistor.

【0004】従来の駆動回路は、これら放射線による影
響を除去することができないという問題点がある。
The conventional drive circuit has a problem that it is impossible to eliminate the influence of these radiations.

【0005】本発明は、放射線の影響をモニタし、かつ
放射線の影響によって劣化した電気特性を回復させる機
能を備えた半導体デバイス駆動回路を提供することを目
的とする。
An object of the present invention is to provide a semiconductor device drive circuit having a function of monitoring the influence of radiation and recovering the electrical characteristics deteriorated by the influence of radiation.

【0006】[0006]

【課題を解決するための手段】本発明によれば、第1の
半導体デバイスを駆動する第1の駆動電源を有する半導
体デバイス駆動回路であって、被曝放射線量をモニタす
る第2の半導体デバイスと該第2の半導体デバイスを駆
動する第2の駆動用電源との間に接続された抵抗と、該
抵抗の両端子間の電位差に応じた検出電圧を発生する差
動増幅器と、基準電圧を発生する基準電圧源と、前記検
出電圧と前記基準電圧との差に基づいて誤差電圧を出力
する誤差増幅器と、前記第1および第2の半導体デバイ
スにそれぞれ対向配置された第1および第2の光源と、
該第1および第2の光源と該光源をそれぞれ駆動する第
1および第2の光源用電源との間に各々接続され前記誤
差電圧の電位に応じてオン/オフする第1および第2の
スイッチと、前記第1の耐放射線半導体デバイスと前記
第1の駆動電源との間に接続され前記誤差電圧の電位に
応じてオフ/オンする第3のスイッチとを有することを
特徴とす半導体デバイス駆動回路が得られる。
According to the present invention, there is provided a semiconductor device drive circuit having a first drive power source for driving a first semiconductor device, the second semiconductor device monitoring a radiation dose. A resistor connected between a second driving power source for driving the second semiconductor device, a differential amplifier for generating a detection voltage according to a potential difference between both terminals of the resistor, and a reference voltage Reference voltage source, an error amplifier that outputs an error voltage based on the difference between the detected voltage and the reference voltage, and first and second light sources that are arranged to face the first and second semiconductor devices, respectively. When,
First and second switches that are respectively connected between the first and second light sources and the first and second light source power supplies that drive the light sources, and that are turned on / off in accordance with the potential of the error voltage. And a third switch connected between the first radiation-resistant semiconductor device and the first drive power supply and turned on / off according to the potential of the error voltage. The circuit is obtained.

【0007】[0007]

【実施例】以下、図面を参照して本発明の実施例を説明
する。図1に本発明の一実施例を示す。本実施例の半導
体デバイス駆動回路は、半導体デバイス(図示せず)を
含む電気回路11を駆動するための駆動回路である。こ
の半導体デバイス駆動回路は、放射線をモニタする半導
体デバイス(MOS型電界効果トランジスタ)12を有
している。半導体デバイス12のソースには、抵抗13
を介して駆動用電源14が接続され、ゲート及びドレイ
ンはアースされている。また、ゲート上には光導波部が
形成されている。また、この半導体デバイス駆動回路
は、抵抗13の両端の電位差に応じた電圧を出力する増
幅器15と、基準電圧を発生する基準電圧源16、増幅
器15と基準電圧源16との出力の電位差に応じた電圧
を発生する誤差増幅器17と、リレー18及びリレース
イッチ19、20、及び21と、これらリレースイッチ
19及び20にそれぞれ接続された光源用電源22及び
23と、リレースイッチ21に接続された電気回路駆動
用電源24と、半導体デバイス12及び電気回路11内
の半導体デバイスに対向配置された光源25及び26と
を有している。
Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 shows an embodiment of the present invention. The semiconductor device drive circuit of this embodiment is a drive circuit for driving an electric circuit 11 including a semiconductor device (not shown). This semiconductor device drive circuit has a semiconductor device (MOS type field effect transistor) 12 for monitoring radiation. The source of the semiconductor device 12 includes a resistor 13
The driving power supply 14 is connected via the, and the gate and drain are grounded. An optical waveguide is formed on the gate. The semiconductor device drive circuit also includes an amplifier 15 that outputs a voltage according to the potential difference across the resistor 13, a reference voltage source 16 that generates a reference voltage, and a potential difference between the outputs of the amplifier 15 and the reference voltage source 16. Error amplifier 17 for generating a voltage, relays 18 and relay switches 19, 20, and 21, power sources 22 and 23 for light sources connected to these relay switches 19 and 20, respectively, and electric power connected to relay switch 21. It has a circuit driving power supply 24 and light sources 25 and 26 arranged to face the semiconductor device 12 and the semiconductor devices in the electric circuit 11.

【0008】次に、この駆動回路の動作を説明する。通
常の状態では、図に示すようにリレースイッチ19及び
20はオフしており、リレースイッチ21はオンしてい
る。即ち、電気回路11は駆動されている。このとき、
半導体デバイス12のソース・ドレイン間には電流は流
れていない。
Next, the operation of this drive circuit will be described. In the normal state, as shown in the figure, the relay switches 19 and 20 are off, and the relay switch 21 is on. That is, the electric circuit 11 is driven. At this time,
No current flows between the source and drain of the semiconductor device 12.

【0009】この駆動回路が放射線に曝されると、半導
体デバイス12は被曝し、ソース・ドレイン間に暗電流
が流れる。即ち、抵抗13の両端に電位差が生じる。増
幅器15はこの電位差に基づいて検出電圧を出力する。
誤差増幅器17は、基準電圧源16からの基準電圧と増
幅器15からの検出電圧を比較し、検出電圧が基準電圧
を越えるとその誤差を増幅してリレー18を駆動する。
これによりリレースイッチ19及び20はオンし、リレ
ースイッチ21はオフする。そして、光源25及び26
は点灯し、電気回路11は駆動を停止される。光源25
及び26の点灯により半導体デバイス12及び電気回路
11の半導体デバイスの内部でトラップされた正孔はデ
トラップされ劣化した電気特性を回復することができ
る。
When this drive circuit is exposed to radiation, the semiconductor device 12 is exposed and a dark current flows between the source and drain. That is, a potential difference is generated across the resistor 13. The amplifier 15 outputs a detection voltage based on this potential difference.
The error amplifier 17 compares the reference voltage from the reference voltage source 16 with the detection voltage from the amplifier 15, and when the detection voltage exceeds the reference voltage, the error is amplified and the relay 18 is driven.
As a result, the relay switches 19 and 20 are turned on and the relay switch 21 is turned off. Then, the light sources 25 and 26
Lights up and the electric circuit 11 is stopped. Light source 25
The holes trapped inside the semiconductor device 12 and the semiconductor device of the electric circuit 11 are detrapped and the deteriorated electrical characteristics can be restored by lighting the light emitting devices 26 and 26.

【0010】半導体デバイス12の電気特性が回復する
と暗電流が流れなくなるので、抵抗13の電位差が無く
なり、誤差増幅器17の出力も無くなる。これによりリ
レースイッチ19及び20はオフし、リレースイッチは
オンして元の状態に戻る。即ち、本実施例は、半導体デ
バイス12の電気特性が回復すると、電気回路11の半
導体デバイスの電気特性も回復したものと見なしてい
る。
When the electric characteristics of the semiconductor device 12 are restored, the dark current stops flowing, so that the potential difference of the resistor 13 disappears and the output of the error amplifier 17 also disappears. As a result, the relay switches 19 and 20 are turned off and the relay switches are turned on to return to the original state. That is, in the present embodiment, it is considered that when the electrical characteristics of the semiconductor device 12 are restored, the electrical characteristics of the semiconductor device of the electric circuit 11 are also restored.

【0011】[0011]

【発明の効果】本発明によれば、駆動する半導体デバイ
スとは異なるモニタ用半導体デバイスを用いて被曝状況
をモニタし、モニタ用半導体デバイスに被曝による電気
特性の劣化があるときは光源を点灯して駆動する半導体
デバイスの駆動を停止すると共に光を照射するようにし
たことで、駆動する半導体デバイスの被曝による影響を
回復させることができ、破壊を免れることができる。
According to the present invention, the exposure situation is monitored by using a monitor semiconductor device different from the semiconductor device to be driven, and the light source is turned on when the monitor semiconductor device is deteriorated in electrical characteristics due to the exposure. By stopping the driving of the semiconductor device to be driven by irradiating the semiconductor device with light, it is possible to recover the influence of the exposure of the driven semiconductor device and avoid destruction.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例の回路図である。FIG. 1 is a circuit diagram of an embodiment of the present invention.

【符号の説明】[Explanation of symbols]

11 電気回路 12 半導体デバイス 13 抵抗 14 駆動用電源 15 増幅器 16 基準電圧源 17 誤差増幅器 18 リレー 19,20,21 リレースイッチ 22,23 光源用電源 24 電気回路駆動用電源 25,26 光源 11 Electric Circuit 12 Semiconductor Device 13 Resistance 14 Driving Power Supply 15 Amplifier 16 Reference Voltage Source 17 Error Amplifier 18 Relay 19, 20, 21 Relay Switch 22, 23 Light Source Power Supply 24 Electric Circuit Driving Power Supply 25, 26 Light Source

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 第1の半導体デバイスを駆動する第1の
駆動電源を有する半導体デバイス駆動回路であって、被
曝放射線量をモニタする第2の半導体デバイスと該第2
の半導体デバイスを駆動する第2の駆動用電源との間に
接続された抵抗と、該抵抗の両端子間の電位差に応じた
検出電圧を発生する差動増幅器と、基準電圧を発生する
基準電圧源と、前記検出電圧と前記基準電圧との差に基
づいて誤差電圧を出力する誤差増幅器と、前記第1およ
び第2の半導体デバイスにそれぞれ対向配置された第1
および第2の光源と、該第1および第2の光源と該光源
をそれぞれ駆動する第1および第2の光源用電源との間
に各々接続され前記誤差電圧の電位に応じてオン/オフ
する第1および第2のスイッチと、前記第1の耐放射線
半導体デバイスと前記第1の駆動電源との間に接続され
前記誤差電圧の電位に応じてオフ/オンする第3のスイ
ッチとを有することを特徴とす半導体デバイス駆動回
路。
1. A semiconductor device drive circuit having a first drive power supply for driving a first semiconductor device, the second semiconductor device monitoring a radiation dose, and the second semiconductor device.
A resistor connected between the second driving power source for driving the semiconductor device, a differential amplifier for generating a detection voltage according to a potential difference between both terminals of the resistor, and a reference voltage for generating a reference voltage. A source, an error amplifier that outputs an error voltage based on a difference between the detected voltage and the reference voltage, and a first amplifier arranged to face the first and second semiconductor devices, respectively.
And a second light source, respectively connected between the first and second light sources and first and second light source power sources for driving the light sources, and turned on / off in accordance with the potential of the error voltage. Having first and second switches, and a third switch which is connected between the first radiation resistant semiconductor device and the first driving power supply and which is turned on / off according to the potential of the error voltage. A semiconductor device drive circuit characterized by:
JP5049392A 1993-03-10 1993-03-10 Semiconductor device drive circuit Withdrawn JPH06268504A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5049392A JPH06268504A (en) 1993-03-10 1993-03-10 Semiconductor device drive circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5049392A JPH06268504A (en) 1993-03-10 1993-03-10 Semiconductor device drive circuit

Publications (1)

Publication Number Publication Date
JPH06268504A true JPH06268504A (en) 1994-09-22

Family

ID=12829764

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5049392A Withdrawn JPH06268504A (en) 1993-03-10 1993-03-10 Semiconductor device drive circuit

Country Status (1)

Country Link
JP (1) JPH06268504A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104007382A (en) * 2013-02-20 2014-08-27 英特尔公司 High dose radiation detector

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104007382A (en) * 2013-02-20 2014-08-27 英特尔公司 High dose radiation detector
US9690578B2 (en) 2013-02-20 2017-06-27 Intel Corporation High dose radiation detector

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Effective date: 20000530