JPH0625961Y2 - ウエハ搬送装置 - Google Patents

ウエハ搬送装置

Info

Publication number
JPH0625961Y2
JPH0625961Y2 JP4695088U JP4695088U JPH0625961Y2 JP H0625961 Y2 JPH0625961 Y2 JP H0625961Y2 JP 4695088 U JP4695088 U JP 4695088U JP 4695088 U JP4695088 U JP 4695088U JP H0625961 Y2 JPH0625961 Y2 JP H0625961Y2
Authority
JP
Japan
Prior art keywords
motor
vacuum container
vacuum
main shaft
swivel base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP4695088U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01157429U (ko
Inventor
恒雄 平松
真 中沢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP4695088U priority Critical patent/JPH0625961Y2/ja
Publication of JPH01157429U publication Critical patent/JPH01157429U/ja
Application granted granted Critical
Publication of JPH0625961Y2 publication Critical patent/JPH0625961Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP4695088U 1988-04-06 1988-04-06 ウエハ搬送装置 Expired - Lifetime JPH0625961Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4695088U JPH0625961Y2 (ja) 1988-04-06 1988-04-06 ウエハ搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4695088U JPH0625961Y2 (ja) 1988-04-06 1988-04-06 ウエハ搬送装置

Publications (2)

Publication Number Publication Date
JPH01157429U JPH01157429U (ko) 1989-10-30
JPH0625961Y2 true JPH0625961Y2 (ja) 1994-07-06

Family

ID=31273184

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4695088U Expired - Lifetime JPH0625961Y2 (ja) 1988-04-06 1988-04-06 ウエハ搬送装置

Country Status (1)

Country Link
JP (1) JPH0625961Y2 (ko)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006518917A (ja) * 2003-02-21 2006-08-17 アクセリス テクノロジーズ インコーポレーテッド 直線走査モータを用いて注入角度を調整可能にするイオンビーム注入装置用の加工物支持構造体
WO2010081009A3 (en) * 2009-01-11 2010-10-14 Applied Materials, Inc. Systems, apparatus and methods for making an electrical connection to a robot and electrical end effector thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006518917A (ja) * 2003-02-21 2006-08-17 アクセリス テクノロジーズ インコーポレーテッド 直線走査モータを用いて注入角度を調整可能にするイオンビーム注入装置用の加工物支持構造体
WO2010081009A3 (en) * 2009-01-11 2010-10-14 Applied Materials, Inc. Systems, apparatus and methods for making an electrical connection to a robot and electrical end effector thereof

Also Published As

Publication number Publication date
JPH01157429U (ko) 1989-10-30

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