JPH0625735Y2 - 精密移動装置 - Google Patents
精密移動装置Info
- Publication number
- JPH0625735Y2 JPH0625735Y2 JP1986116536U JP11653686U JPH0625735Y2 JP H0625735 Y2 JPH0625735 Y2 JP H0625735Y2 JP 1986116536 U JP1986116536 U JP 1986116536U JP 11653686 U JP11653686 U JP 11653686U JP H0625735 Y2 JPH0625735 Y2 JP H0625735Y2
- Authority
- JP
- Japan
- Prior art keywords
- feed screw
- base
- metal bellows
- moving
- moving device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000002184 metal Substances 0.000 claims description 11
- 210000001015 abdomen Anatomy 0.000 description 2
- 239000003638 chemical reducing agent Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 230000002706 hydrostatic effect Effects 0.000 description 1
- 230000008595 infiltration Effects 0.000 description 1
- 238000001764 infiltration Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Transmission Devices (AREA)
- Moving Of Heads (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986116536U JPH0625735Y2 (ja) | 1986-07-28 | 1986-07-28 | 精密移動装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986116536U JPH0625735Y2 (ja) | 1986-07-28 | 1986-07-28 | 精密移動装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6322457U JPS6322457U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-02-15 |
| JPH0625735Y2 true JPH0625735Y2 (ja) | 1994-07-06 |
Family
ID=31001220
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986116536U Expired - Lifetime JPH0625735Y2 (ja) | 1986-07-28 | 1986-07-28 | 精密移動装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0625735Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20220096901A (ko) * | 2020-12-31 | 2022-07-07 | 포항공과대학교 산학협력단 | 초고진공용 정밀 변위구동 액추에이터 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56127521U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1980-02-25 | 1981-09-28 |
-
1986
- 1986-07-28 JP JP1986116536U patent/JPH0625735Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20220096901A (ko) * | 2020-12-31 | 2022-07-07 | 포항공과대학교 산학협력단 | 초고진공용 정밀 변위구동 액추에이터 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6322457U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-02-15 |