JPH06254521A - Degreasing and cleaning method - Google Patents

Degreasing and cleaning method

Info

Publication number
JPH06254521A
JPH06254521A JP7291893A JP7291893A JPH06254521A JP H06254521 A JPH06254521 A JP H06254521A JP 7291893 A JP7291893 A JP 7291893A JP 7291893 A JP7291893 A JP 7291893A JP H06254521 A JPH06254521 A JP H06254521A
Authority
JP
Japan
Prior art keywords
cleaning
tank
tanks
cleaned
pure water
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP7291893A
Other languages
Japanese (ja)
Inventor
Hajime Takimoto
肇 瀧本
Masahiro Itakura
昌宏 板倉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Priority to JP7291893A priority Critical patent/JPH06254521A/en
Publication of JPH06254521A publication Critical patent/JPH06254521A/en
Withdrawn legal-status Critical Current

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  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)

Abstract

PURPOSE:To minutely and surely clean the glass product or metallic product and to shorten the cleaning time by ultrasonically vibrating a cleaning soln. from the bottom of a cleaning tank and reciprocating the product at a specified speed at the same time. CONSTITUTION:First and second cleaning tanks 1 and 2, a pure water tank 3 and a hot pure water tank 4 are provided, and a nonionic surfactant or an alkaline surfactant is filled in the tanks 1 and 2 for degreasing a material to be cleaned as a cleaning agent. An ultrasonic vibrator 9 at 40kHz, etc., is arranged on the bottoms of the tanks 1 and 2, and a means for vertically reciprocating the material being ultrasonically cleaned is furnished in the tank 1. This means has a cylinder 8, a cleaning basket 7 is hung from a lifting arm 5 to be vertically moved by the cylinder 8 through a hook 6, the material in the basket 7 is reciprocated at a speed of >=20cm/s, hence the contaminant is reduced, and a cleaning effect is enhanced.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明はレンズなどのガラス製品
や金属製品、その他の製品に付着している汚れを除去す
る脱脂洗浄方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a degreasing / cleaning method for removing dirt adhering to glass products such as lenses, metal products and other products.

【0002】[0002]

【従来の技術】上述のような製品の洗浄を行う従来技術
としては、特開昭59−166282号公報の洗浄方法
が知られている。この方法は洗浄液が満たされた洗浄槽
の底部に超音波振動子が設けられており、被洗浄物を往
復または回転させつつ超音波を印加して洗浄するもので
ある。また、かかる被洗浄物を往復運動させるための装
置として、実開昭49−88576号公報には昇降板の
上昇,下降で洗浄籠を上下動させる機構が、実開昭49
−93757号公報にはカムと揺動枠とを連結し、カム
の往復動を揺動杆の上下動に変換する機構が、特開昭5
8−84086号公報には昇降フレームに揺動リンクを
連結させる機構がそれぞれ記載されている。従って、こ
れらの機構を上述した特開昭59−166282号公報
の方法に組み込むことにより洗浄物の往復動を簡単に行
うことが可能となる。
2. Description of the Related Art As a conventional technique for cleaning products as described above, a cleaning method disclosed in Japanese Patent Laid-Open No. 59-166282 is known. In this method, an ultrasonic vibrator is provided at the bottom of a cleaning tank filled with a cleaning liquid, and ultrasonic waves are applied to the object to be cleaned while reciprocating or rotating the object to be cleaned. In addition, as a device for reciprocating such an object to be cleaned, a mechanism for moving a cleaning basket up and down by raising and lowering an elevating plate is disclosed in Japanese Utility Model Laid-Open No. Sho 88-88576.
Japanese Patent Laid-Open No. 93957/1993 discloses a mechanism for connecting a cam and a rocking frame to convert the reciprocating motion of the cam into the vertical motion of the rocking rod.
Japanese Patent Laid-Open No. 8-84086 describes a mechanism for connecting a swing link to a lifting frame. Therefore, by incorporating these mechanisms into the method of the above-mentioned Japanese Patent Laid-Open No. 59-166282, it becomes possible to easily reciprocate the cleaning object.

【0003】[0003]

【発明が解決しようとする課題】しかしながら、特開昭
59−166282号公報の洗浄方法では、その往復動
や回転に関する速度が不明であり、洗浄を良好に行うこ
とを期待することができない。すなわち、超音波は洗浄
槽の深さ方向に強度分布を生じるが、通常の被洗浄物の
往復動等は、この超音波を洗浄槽の深さ方向に均一化す
るだけであり、往復動を積極的に洗浄に使用することが
ないためである。一方、上述した機構をこの洗浄方法に
組み合わせることも考えられるが、この場合においても
常識的な範囲内の速度での往復動であり、往復動を洗浄
力向上に積極的に応用することはでいない。
However, in the cleaning method disclosed in Japanese Patent Laid-Open No. 59-166282, the speed relating to the reciprocating motion and the rotation is unknown, and it cannot be expected that the cleaning is performed well. That is, the ultrasonic waves generate a strength distribution in the depth direction of the cleaning tank, but the normal reciprocating motion of the object to be cleaned, etc. is only to make the ultrasonic waves uniform in the depth direction of the cleaning tank. This is because it is not actively used for cleaning. On the other hand, it is conceivable to combine the above-mentioned mechanism with this cleaning method, but even in this case, the reciprocating motion is at a speed within a common sense range, and the reciprocating motion cannot be positively applied to improve the cleaning power. Not in.

【0004】本発明は上記事情を考慮してなされたもの
であり、超音波振動と往復動との双方を洗浄に適用し、
これにより洗浄力を向上させることが可能な脱脂洗浄方
法を提供することを目的とする。
The present invention has been made in consideration of the above circumstances, and applies both ultrasonic vibration and reciprocating motion to cleaning,
An object of the present invention is to provide a degreasing cleaning method that can improve the cleaning power.

【0005】[0005]

【課題を解決するための手段および作用】本発明の脱脂
洗浄方法は、洗浄槽の底部から洗浄液に超音波振動を作
用させると同時に、被洗浄物を20cm/s以上の速度
で往復運動させることを特徴とするものである。
According to the degreasing and cleaning method of the present invention, ultrasonic vibration is applied to the cleaning liquid from the bottom of the cleaning tank, and at the same time, the object to be cleaned is reciprocated at a speed of 20 cm / s or more. It is characterized by.

【0006】一般に、洗浄液に浸漬されている被洗浄物
表面ではオイルなどの汚れと洗浄液との間で溶解,乳化
などの親和作用が発生する。この状態で超音波振動が作
用すると溶解,乳化の促進と共に、被洗浄物からの剥離
を促進することができる。しかしながら、汚れと被洗浄
物の基材との組合せや種類によっては、親和力が異なる
ため超音波振動に基づいたキャビテーションのみによる
剥離が難しくなる。例えば、洗浄液に界面活性剤を使用
した場合においては、汚れの乳化→剥離へのプロセスが
円滑に進行せず、乳化途中で汚れが被洗浄物表面に残留
することが判明している。
Generally, on the surface of the object to be cleaned which is immersed in the cleaning liquid, an affinity action such as dissolution or emulsification occurs between dirt such as oil and the cleaning liquid. When ultrasonic vibration acts in this state, dissolution and emulsification can be promoted and peeling from the object to be cleaned can be promoted. However, depending on the combination and type of the stain and the base material of the object to be cleaned, the affinity is different, so that it becomes difficult to separate the cavitation based on the ultrasonic vibration. For example, it has been found that when a surfactant is used as the cleaning liquid, the process of emulsifying the dirt → peeling does not proceed smoothly and the dirt remains on the surface of the object to be cleaned during the emulsification.

【0007】本発明においては、かかる超音波振動と同
時に被洗浄物を20m/s以上の光速度で往復移動させ
るものであり、この高速の往復動により乳化途中での汚
れの剥離,除去を促進することができる。すなわち上述
した高速の往復動により被洗浄物と洗浄液との相対速度
が増大して被洗浄物の基材と平行な方向への剪断力が汚
れと基材との間に有効に作用するため、汚れの剥離を促
進できるためである。
In the present invention, the object to be cleaned is reciprocally moved at a light speed of 20 m / s or more at the same time as such ultrasonic vibration. This high-speed reciprocating motion promotes peeling and removal of dirt during emulsification. can do. That is, since the relative speed between the object to be cleaned and the cleaning liquid is increased by the above-described high-speed reciprocating motion and the shearing force in the direction parallel to the base material of the object to be cleaned effectively acts between the dirt and the base material, This is because the peeling of dirt can be promoted.

【0008】従って、本発明の脱脂洗浄方法では、単純
な形状の被洗浄物のみならず、細孔,段差,隙間等を有
した複雑な形状の被洗浄物に対しても有効な洗浄ができ
ると共に、脂肪分を多く含有したオイルなどの汚れに対
しても、また、この汚れが多量に付着している場合にも
確実な洗浄が可能となり、洗浄時間も短縮化することが
できる。
Therefore, according to the degreasing and cleaning method of the present invention, not only simple objects to be cleaned but also complicated objects having pores, steps, gaps, etc. can be effectively cleaned. At the same time, even if dirt such as oil containing a large amount of fat is attached, and even if a large amount of this dirt is attached, reliable cleaning can be performed, and the cleaning time can be shortened.

【0009】[0009]

【実施例1】図1は本発明の実施例1が適用される洗浄
システムを示す。本実施例は例えば、金属製品を洗浄す
るシステムに適用されるものであり、全体で4槽より構
成されている。同図において第1槽は本実施例が適用さ
れる第1の洗浄槽1,第2はその後の洗浄を行う洗浄槽
2,第2槽は純水槽3,第4槽は温純水槽4である。
First Embodiment FIG. 1 shows a cleaning system to which a first embodiment of the present invention is applied. This embodiment is applied to, for example, a system for cleaning metal products, and is composed of four tanks as a whole. In the figure, the first tank is a first cleaning tank 1 to which this embodiment is applied, the second is a cleaning tank 2 for performing the subsequent cleaning, the second tank is a pure water tank 3, and the fourth tank is a warm pure water tank 4. is there.

【0010】洗浄槽1には駆動手段(図示省略)からの
動力により上下動する昇降アーム5が配設されており、
この昇降アーム5のフック6に洗浄籠7が掛止されてい
る。また昇降アーム5にはシリンダ8が取り付けられて
いる。このシリンダ8はその駆動によりフック6を高速
で往復動させるものであり、これにより洗浄籠7は洗浄
液への浸漬状態で上下方向に往復動する。かかる高速の
往復動は20cm/s以上の速度で行うものである。な
お、温純水槽4にも昇降アーム5およびフック6が配設
されるが、この温純水槽4では液残りがないような低速
度で洗浄籠7を引き上げるように使用される。
The cleaning tank 1 is provided with an elevating arm 5 which moves up and down by power from a driving means (not shown),
A washing basket 7 is hooked on the hook 6 of the lifting arm 5. A cylinder 8 is attached to the lifting arm 5. This cylinder 8 drives the hook 6 to reciprocate at a high speed by its drive, whereby the cleaning basket 7 reciprocates in the vertical direction in a state of being immersed in the cleaning liquid. Such high-speed reciprocating motion is performed at a speed of 20 cm / s or more. An elevating arm 5 and a hook 6 are also provided in the warm pure water tank 4, and the warm pure water tank 4 is used to pull up the cleaning basket 7 at a low speed so that no liquid remains.

【0011】洗浄槽1および2は被洗浄物の脱脂を行う
ものであり、その内部にはノニオン系界面活性剤やアル
カリ性界面活性剤が洗浄液として充填されている。この
界面活性剤としては、例えば商品名バイオセブンHTC
(ベリタス(株)製)や商品名EE−1110,EE−
1120(オリンパスケミテック(社)製)さらにはN
COOL55(ナショナル貿易(社)製)その他の界面
活性剤が選択使用される。また、これらの洗浄槽1,2
の底部には40KHZ 等の超音波振動子9が配置されて
いる。一方、純水槽3および温純水槽4には、純水が掛
け流し状に供給される。
The cleaning tanks 1 and 2 are for degreasing the object to be cleaned, and the inside thereof is filled with a nonionic surfactant or an alkaline surfactant as a cleaning liquid. As this surfactant, for example, trade name Bio Seven HTC
(Manufactured by Veritas Co., Ltd.) and product names EE-1110, EE-
1120 (manufactured by Olympus Chemitec) and N
COOL55 (manufactured by National Trading Co., Ltd.) and other surfactants are selectively used. Also, these cleaning tanks 1, 2
The bottom is disposed ultrasonic transducer 9 such 40KH Z. On the other hand, pure water is supplied to the pure water tank 3 and the warm pure water tank 4 in a free-flowing state.

【0012】このような構成の洗浄システムにおいて、
洗浄槽1,2および純水槽3を40℃、温純水槽4を7
0℃に温度設定し、各槽における流速を1〜2リットル
/minに設定して、脱脂洗浄を行う。第1槽の洗浄槽
1内においては、超音波振動子9を駆動させて超音波振
動を作用させると共に、シリンダ8によって洗浄籠7を
30cm/sの速度で往復動させる。また、第2槽の洗
浄槽2では超音波振動だけを作用させる。被洗浄物とし
ては、商品名カット201A(三菱石油(社)製)、商
品名ダフニーカットHS−5(出光石油(株)製)がそ
れぞれ付着したアルミニウム平板を使用し、洗浄籠に入
れ各槽1分タクトで順次洗浄を行った。
In the cleaning system having such a structure,
The cleaning tanks 1 and 2 and the pure water tank 3 are at 40 ° C., and the warm pure water tank 4 is 7
The temperature is set to 0 ° C., the flow rate in each tank is set to 1 to 2 liters / min, and degreasing cleaning is performed. In the cleaning tank 1 of the first tank, the ultrasonic vibrator 9 is driven to apply ultrasonic vibration, and the cylinder 8 causes the cleaning basket 7 to reciprocate at a speed of 30 cm / s. In the second cleaning tank 2, only ultrasonic vibration is applied. As the object to be cleaned, an aluminum flat plate to which the trade name Cut 201A (manufactured by Mitsubishi Petroleum Co., Ltd.) and the trade name Daphne Cut HS-5 (manufactured by Idemitsu Petroleum Co., Ltd.) were respectively attached, was placed in a washing basket Washing was sequentially performed with a 1-minute tact.

【0013】すなわち、第1槽の洗浄槽1の処理の後、
第2槽の洗浄槽2に被洗浄物を移送し、同槽2内で1分
間の超音波振動を行う。その後、第2槽の純水槽3内に
移送し、1分間静止してリンスした後、第4槽の温純水
槽4内に移送し、緩速度で引上げて洗浄を終了する。
That is, after the treatment of the first cleaning tank 1,
The object to be cleaned is transferred to the second cleaning tank 2, and ultrasonic vibration is performed in the same tank 2 for 1 minute. After that, it is transferred into the pure water tank 3 of the second tank, rinsed for one minute while still standing, and then transferred into the warm pure water tank 4 of the fourth tank, and pulled up at a slow speed to complete the cleaning.

【0014】上述のような操作を行ったアルミニウム平
板に対し、50倍の光学顕微鏡による目視検査を行った
ところ、汚れやシミがなく、清浄であることが確認され
た。また、このアルミニウム板を接触角試験に供したと
ころ、表1となった。
The aluminum flat plate subjected to the above operation was visually inspected with an optical microscope at a magnification of 50. As a result, it was confirmed that the aluminum flat plate was clean without stains or stains. Moreover, when this aluminum plate was subjected to a contact angle test, the results are shown in Table 1.

【0015】[0015]

【表1】 [Table 1]

【0017】同表において比較例1は3槽のトリクロロ
エタン槽で洗浄した場合の接触角であり、この比較例と
同程度の接触角であるところから清浄であることが裏付
けられている。因みにアルミニウム板はオイルが付着し
ている場合には、60前後の接触角となる。
In the same table, Comparative Example 1 shows the contact angle when washed in three trichloroethane tanks, and the fact that the contact angle is comparable to that of this Comparative Example proves that the cleaning is clean. Incidentally, the aluminum plate has a contact angle of about 60 when oil is attached.

【0016】図2は本実施例の比較例2を示し、同一の
要素は同一の符号で対応させてある。すなわち、洗浄槽
1,2には40KHZ の超音波振動子9を設け、温純水
槽4には昇降アーム5およびフック6を設けてある。か
かる比較例に対し、実施例1と同一の界面活性剤および
切削油を使用して同一の条件で洗浄を行った後、接触角
試験を行ったところ、表1に示すように大きな値とな
り、洗浄度が劣っていた。また50倍の光学顕微鏡での
検査においても、端部にオイル残りが発生していた。
FIG. 2 shows a comparative example 2 of this embodiment, in which the same elements are designated by the same reference numerals. That is, the cleaning tank 1 is provided an ultrasonic transducer 9 40KH Z, in hot deionized water tank 4 is provided with a lifting arm 5 and the hook 6. In comparison with the comparative example, the same surfactant and cutting oil as in Example 1 were used for washing under the same conditions, and then a contact angle test was conducted. As a result, a large value as shown in Table 1 was obtained. The cleanliness was poor. Also, in the inspection with an optical microscope at 50 times, oil residue was found at the end.

【0017】図3は本実施例において、往復動速度とオ
イルに対する洗浄性とを測定した特性図を示す。オイル
としては脂肪分を含むものを使用し、このオイルをアル
ミニウム平板に付着させた。洗浄性はこのオイルの洗浄
度を100%とし、表面に残留するカーボン量を、その
ピーク強度で換算するESCAにより行った。同図から
判るように、20cm/s以上の高速の往復動では10
0%の洗浄性を有している。
FIG. 3 is a characteristic diagram in which the reciprocating speed and the cleaning property with respect to oil are measured in this embodiment. An oil containing fat was used and this oil was adhered to an aluminum flat plate. The detergency was determined by ESCA in which the degree of detergency of this oil was 100% and the amount of carbon remaining on the surface was converted into its peak intensity. As can be seen from the figure, it is 10 at high speed reciprocating motion of 20 cm / s or more
It has a detergency of 0%.

【0018】[0018]

【実施例2】図4は本発明の実施例2が適用される洗浄
システムを示し、図1と同一の要素は同一の符号を付し
て対応させてある。本実施例は、例えばレンズ等のガラ
ス製品を洗浄するシステムに適用されるものであり、全
体で10槽により構成されている。第1槽および第2槽
は洗浄液としてトリクロロエタンが充填された洗浄槽3
1,32であり、第3および第4槽は実施例1と同様な
界面活性剤が充填された洗浄槽33,34、第5および
第6槽は市水が充填された市水槽35,36、第7槽は
純水槽37,第8槽および第9槽はIPA槽38,3
9、第10槽はフロンベーパーによる乾燥槽40となっ
ている。超音波振動子9(28KHZ )は洗浄槽31,
32,33,34に配置される。
Second Embodiment FIG. 4 shows a cleaning system to which a second embodiment of the present invention is applied, and the same elements as those in FIG. 1 are designated by the same reference numerals and correspond to each other. The present embodiment is applied to, for example, a system for cleaning glass products such as lenses, and is composed of 10 tanks in total. The first tank and the second tank are cleaning tanks 3 filled with trichloroethane as a cleaning liquid.
1 and 32, the third and fourth tanks are cleaning tanks 33 and 34 filled with the same surfactant as in Example 1, and the fifth and sixth tanks are city water tanks 35 and 36 filled with city water. , 7th tank is pure water tank 37, 8th tank and 9th tank are IPA tanks 38, 3
The 9th and 10th tanks are the drying tanks 40 made of Freon vapor. Ultrasonic transducer 9 (28KH Z) cleaning tank 31,
32, 33, 34 are arranged.

【0019】第1槽の洗浄槽31および第3槽の洗浄槽
33は、本実施例が適用される槽であり、昇降アーム5
にシリンダ8が取り付けられると共に、シリンダによっ
てフック6が40cm/sの高速で往復動するようにな
っている。
The first tank cleaning tank 31 and the third tank cleaning tank 33 are tanks to which this embodiment is applied, and the lifting arm 5 is used.
The cylinder 8 is attached to the hook 6, and the hook 6 reciprocates at a high speed of 40 cm / s by the cylinder.

【0020】上記構成の洗浄システムにおいて、乾燥槽
40を除く各槽の流速を1〜2リットル/minに設定
すると共に、洗浄槽31,32,33,34を40℃、
乾燥槽40を70℃に設定する。そして、被洗浄物は各
槽内に1分間ずつ入れられて処理が行われる。
In the cleaning system having the above construction, the flow rate of each tank except the drying tank 40 is set to 1 to 2 liters / min, and the cleaning tanks 31, 32, 33 and 34 are set at 40 ° C.
The drying tank 40 is set at 70 ° C. Then, the object to be cleaned is placed in each tank for one minute and processed.

【0021】本実施例において、商品名「ユシロンC
G」(ユシロ化学(社)製)および商品名ダフニーカッ
トの各芯取り油を付着させたガラス平板を被洗浄物とし
て、上述した処理を行い、50倍の光学顕微鏡による目
視検査およびXPS(X線光電子分光法)による評価を
行った。目視検査では、ガラス平板上に汚れ、シミがな
く清浄であることが確認された。表2はXPS評価であ
る。同表における比較例3はトリクロロエタン槽を2
槽,界面活性剤槽を3槽,市水槽を1槽,洗浄槽を1
槽,市水槽を2槽,純水槽を1槽,IPAを3槽,フロ
ンベーパー槽を1槽,備えた14槽からなる洗浄システ
ムである。本実施例では、比較例3に比べ、有機物残量
が同程度であり、清浄であることと共に、槽数が少なく
なっている。
In this embodiment, the trade name "Yushiron C"
G "(manufactured by Yushiro Kagaku Co., Ltd.) and a glass plate to which each centering oil of trade name Duffney Cut is attached as the object to be cleaned, the above-mentioned treatment is carried out, and a visual inspection by an optical microscope of 50 times and XPS (X The evaluation was performed by line photoelectron spectroscopy. It was confirmed by visual inspection that the glass plate was clean without stains or stains. Table 2 is an XPS evaluation. Comparative Example 3 in the table has two trichloroethane tanks.
3 tanks, 3 surfactant tanks, 1 city water tank, 1 cleaning tank
This is a cleaning system consisting of 14 tanks, 2 tanks, 2 city water tanks, 1 pure water tank, 3 IPA tanks, and 1 fluorocarbon tank. In this example, compared with Comparative example 3, the remaining amount of organic matter is about the same, the organic matter is clean, and the number of tanks is small.

【0022】[0022]

【表2】 [Table 2]

【0023】[0023]

【発明の効果】以上のとおり本発明は、超音波振動を作
用させると同時に被洗浄物を高速で往復動させるため、
汚れを確実に除去できると共に、洗浄システムの槽数削
減や洗浄時間の短縮化が可能となる。
As described above, according to the present invention, since the ultrasonic vibration is applied and the object to be cleaned is reciprocated at a high speed,
It is possible to reliably remove dirt, reduce the number of tanks in the cleaning system, and shorten the cleaning time.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の実施例1が適用される洗浄システムの
斜視図。
FIG. 1 is a perspective view of a cleaning system to which a first embodiment of the present invention is applied.

【図2】比較例1の斜視図。2 is a perspective view of Comparative Example 1. FIG.

【図3】往復動速度と洗浄性の特性図。FIG. 3 is a characteristic diagram of reciprocating speed and cleaning property.

【図4】実施例2の斜視図。FIG. 4 is a perspective view of the second embodiment.

【符号の説明】[Explanation of symbols]

1,2 洗浄槽 3 純水槽 4 温純水槽 5 昇降アーム 6 フック 7 洗浄籠 8 シリンダ 1, 2 Washing tank 3 Pure water tank 4 Hot pure water tank 5 Lifting arm 6 Hook 7 Washing basket 8 Cylinder

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 洗浄槽の底部から洗浄液に超音波振動を
作用させると同時に、被洗浄物を20cm/s以上の速
度で往復運動させることを特徴とする脱脂洗浄方法。
1. A degreasing cleaning method, wherein ultrasonic vibration is applied to the cleaning liquid from the bottom of the cleaning tank, and at the same time, the object to be cleaned is reciprocated at a speed of 20 cm / s or more.
JP7291893A 1993-03-08 1993-03-08 Degreasing and cleaning method Withdrawn JPH06254521A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7291893A JPH06254521A (en) 1993-03-08 1993-03-08 Degreasing and cleaning method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7291893A JPH06254521A (en) 1993-03-08 1993-03-08 Degreasing and cleaning method

Publications (1)

Publication Number Publication Date
JPH06254521A true JPH06254521A (en) 1994-09-13

Family

ID=13503220

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7291893A Withdrawn JPH06254521A (en) 1993-03-08 1993-03-08 Degreasing and cleaning method

Country Status (1)

Country Link
JP (1) JPH06254521A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0810643A2 (en) * 1996-05-28 1997-12-03 Canon Kabushiki Kaisha Method for cleaning a porous surface of a semiconductor substrate
ES2347408A1 (en) * 2010-05-26 2010-10-28 Fernando Jorge Otegui Roman Ultrasound cleaning machine and automatic battery (Machine-translation by Google Translate, not legally binding)
WO2011075831A3 (en) * 2009-12-22 2011-08-18 William Lash Phillips Apparatus and method for ultrasonically cleaning industrial components
CN106423989A (en) * 2016-11-15 2017-02-22 王虹 Throwing mechanism for glasses automatic cleaning device
CN113860590A (en) * 2021-10-27 2021-12-31 佛山市富龙环保科技有限公司 Pretreatment method of high-concentration industrial wastewater

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0810643A2 (en) * 1996-05-28 1997-12-03 Canon Kabushiki Kaisha Method for cleaning a porous surface of a semiconductor substrate
EP0810643A3 (en) * 1996-05-28 1998-03-11 Canon Kabushiki Kaisha Method for cleaning a porous surface of a semiconductor substrate
WO2011075831A3 (en) * 2009-12-22 2011-08-18 William Lash Phillips Apparatus and method for ultrasonically cleaning industrial components
ES2347408A1 (en) * 2010-05-26 2010-10-28 Fernando Jorge Otegui Roman Ultrasound cleaning machine and automatic battery (Machine-translation by Google Translate, not legally binding)
CN106423989A (en) * 2016-11-15 2017-02-22 王虹 Throwing mechanism for glasses automatic cleaning device
CN113860590A (en) * 2021-10-27 2021-12-31 佛山市富龙环保科技有限公司 Pretreatment method of high-concentration industrial wastewater

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