JPH06250073A - Position adjusting and fitting mechanism for mirror - Google Patents

Abstract

PURPOSE:To efficiently and precisely adjust a mirror by a simple mechanism by adjusting the position of the mirror with the center of the reflecting surface of the mirror as the reference position of the adjustment. CONSTITUTION:The abutting part of a fitting member 11 side and a mirror main body 12 is spherically formed with a distance between the central position O of the reflecting surface 12a and the central position of the fitting surface of the fitting member 11 as a radius. A pressing force adjustment means fixing the spherical abutting part to the fitting surface of the fitting member 11 and a reflecting surface adjustment means which can adjust the position of the reflecting surface are plurally provided between a flange for fitting 14 and the fitting member 11 provided on the back surface of the mirror main body 12. When the position of the reflecting surface 12a is adjusted under a state that the spherical abutting part on the mirror main body 12 side is made to be in press-contact with and fitted to the fitting member 11 by springs 18 provided at plural places, the reflecting surface is displaced with the center O of the surface of the mirror aligned with an optical axis made incident on as a reference point and adjusted by operating a prescribed screw for adjusting the position of a reflecting surface 19.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a mechanism for adjusting the position of a reflecting surface of a mirror, which serves as a position adjusting means for a mirror arranged in an optical path of a heat treatment apparatus using a laser or an optical path of a scanning optical system. It can be used.

[0002]

2. Description of the Related Art In a cutting / welding apparatus using a laser beam, as shown in FIGS. 4 (a) and 4 (b), a mirror 3, 4 or a mirror 3, a mirror 3, 4 is provided between a lens 1 and a processed surface 2. An object mirror 5 and a head portion 7 having a nozzle 6 are provided, and the light from the lens 1 is guided to the processing surface via the nozzle 6 of the head portion 7. Further, as shown in FIG. 5, as an optical device having a general branch optical path system, a plurality of mirrors 9a, 9b, 9c are arranged in the optical path of the laser oscillator 8 to guide light to a predetermined position.

The mirror arranged in the head portion 7 and the mirror arranged in the optical path of the laser oscillator 8 are attached to a supporting member through appropriate adjusting means so as to form an originally intended optical path. However, such adjustment means
It has a complicated structure, and it is impossible to obtain a predetermined accuracy even with a complicated structure.

A conventional method of adjusting the position of the mirror surface will be briefly described. FIG. 6 shows the reflection surface 12
In order to cool the back surface of the mirror 12 having a
The cooling base 13 having a hollow portion formed on the back surface of the cooling base 2 is joined to the mounting member 11 to attach the mirror 12 to the cooling base 1.
A mounting flange 14 is integrally connected to the back surface of the sheet 3.

An opening 11a is formed in the mounting member 11 to which this mirror is attached, and the reflection surface 12a of the mirror 12 is arranged inside the opening 11a through the opening 11a. The outer peripheral position of the mounting flange 14 located outside the opening 11a. In multiple places,
A pair of adjusting screws 15a and 15b for adjusting the distance between the opening 11a and the mounting member 11 is arranged. And a pair of adjusting screws 15a, 1 at any one of a plurality of locations
The tilt of the mirror surface is adjusted by adjusting 5b.

FIG. 7 shows a structure in which the mirror 12 having the reflecting surface 12a and the cooling base 13 are integrated in the structure of FIG. 6, and the mounting flange 14 is coupled to the mounting member 11 having the opening 11a. At the position of the opening 11a, between the back surface of the cooling base 13 and the mounting flange 14 serving as the reference surface, a center ball 16 is arranged at a position corresponding to the center position of the reflecting surface 12a. Center ball 1 so that mirror 12 moves around ball 16
6, a plurality of adjusting screws 15a, 15
b is arranged, and the tilt of the mirror surface is adjusted by adjusting the pair of adjusting screws 15a and 15b.

In the case of FIG. 6, the reflecting surface 12 of the mirror 12 is shown.
When displacing a, there is no reference position for rotation, and it takes time and effort to make adjustment. In FIG. 7, the reference position for rotation by the center ball is provided. The distance that exists with the center of the surface makes precise adjustment difficult.

[0008]

The present invention makes it possible to adjust the position of the mirror with the center of the reflecting surface of the mirror as the reference position for the adjustment, and to adjust the mirror efficiently and accurately by a simple mechanism. It is an object of the present invention to provide a means capable of performing adjustment in a short time.

[0009]

SUMMARY OF THE INVENTION In order to achieve the above object, the present invention provides a mirror in which the position of a mirror body having a reflective surface formed on the surface thereof can be adjustably attached to an attachment member. In the position adjusting mounting mechanism, the contact portion of the mirror body with the mounting member side is formed in a spherical shape having a radius from the center position of the reflecting surface to the center position of the mounting surface of the mounting member. And a mounting member provided on the rear surface of the mirror body with pressure contact force adjusting means for fixing the contact portion to the mounting surface of the mounting member, and reflecting surface adjusting means for adjusting the position of the reflecting surface. It is characterized in that it is provided at a plurality of locations between and.

Further, in the present invention, the pressure contact force adjusting means is constituted by combining a spring and an adjusting screw, and the reflecting surface adjusting means is constituted by the adjusting screw.

[0011]

According to the structure of the present invention, it is necessary to adjust the position of the reflecting surface in a state in which the abutment portion on the side of the mirror body having a spherical shape is pressed against and attached to the mounting member by the springs provided at a plurality of positions. In this case, by operating a predetermined screw for adjusting the position of the reflecting surface, the reflecting surface can be displaced and adjusted with the center of the mirror surface, which coincides with the center of the incident optical axis, as a reference point.

[0012]

Embodiments of the present invention will be described below with reference to FIGS. In FIG. 1 shown as a cross-sectional view (cross-section XX in FIG. 2) of the position adjusting mechanism of the mirror of the present invention, in order to prevent the temperature rise of the reflecting surface 12a, the back surface of the mirror main body 12 having the reflecting surface 12a is provided. The cooling base 13 having the cavity 13a formed between the cooling base 13 and the back surface of the mirror body 12 is integrally coupled with the screw member 17. Then, in order to mount the mirror body 12 on the mounting member 11, the mounting flange 14 is integrally coupled to the back surface of the cooling base 13 by the screw member 22.

An opening 11a is formed in the mounting member 11 to which the mirror body is attached, and the opening 11a has a structure capable of supporting the outer peripheral surface 13b of the cooling base 13 for helping the position adjustment of the mirror body 12. is doing. That is, the outer peripheral surface 1 of the cooling base 13 is provided in the opening 11 a of the mounting member 11.
3b is fitted, and in this case, the outer peripheral surface 13 of the cooling base 13
b is a reflection surface 12 of the mirror body 12 as shown in FIG.
Length r from center position O of a to the outer peripheral surface 13b
It is composed of a spherical surface drawn by
The opening 11a of the cooling base 1 has the spherical surface.
The outer peripheral surface 13b of No. 3 is movable, and in the embodiment, the inclined surface 11b is formed. Instead of the inclined surface, a spherical surface having the same radius r can be used.

On the mounting flange 14 integrally connected to the back side of the cooling base 13 with a screw member 22, the spherical surface 13b of the cooling base 13 is attached to the inclined surface 11 of the mounting member 11.
Means for adjusting the position of the mirror reflecting surface 12a by contacting b and displacing the contact position of the spherical surface 13b of the cooling base 13 with respect to the inclined surface 11b of the mounting member 11 are provided. .

A means for supplying and discharging the cooling medium to and from the cavity 13a formed between the cooling base 13 and the mirror body 12 is provided at the position of the mounting flange 14. That is, the mounting flange 14 has two openings 1
4a and 14b are formed, a supply connection portion 20a for supplying the cooling medium to the cavity portion 13a via the cooling base 13 is provided at the position of one opening 14a, and a cavity portion is provided at the position of the other opening 14b. Ejection connection parts 20b for ejecting the cooling medium from 13a via the cooling base 13 are provided on the cooling base 13, respectively. Reference numeral 23 is an O-ring for sealing the cooling medium.

In order to make the pressing force between the spherical surface 13b of the cooling base 13 supporting the mirror body 12 and the inclined surface 11b of the mounting member 11 a predetermined pressure, in the embodiment,
At the outer peripheral position of the mounting flange 14 facing the mounting member 11, springs 18 and this spring 18 are provided at four positions at intervals of 90 degrees as pressure contact force adjusting means.
A pressure contact force adjusting screw 21 for adjusting the pressure is provided.

The structure of the one portion is such that the concave locking portion 1 is provided at the position where the mounting member 11 and the mounting flange 14 face each other.
1c and a concave locking portion 14c are formed, and an extension spring 18 is arranged between them. If the spring 18 is too strong, the spherical surface 13b and the inclined surface 11b
The pressure contact force between and is large, and when it is too weak, the pressure contact force is small, and this pressure contact force can be adjusted by operating the pressure contact force adjusting screw 21.

As a means for adjusting the position of the reflecting surface 12a of the mirror body, in the embodiment, there are provided reflecting surface adjusting means at four positions. The reflecting surface adjusting means may be provided at two places. This reflecting surface adjusting means is provided at a position different from the position where the spring 18 and the pressure contact force adjusting screw 21 are installed.
The reflecting surface adjusting screw 19 is provided at a constant interval. The reflection surface adjusting screw 19 is attached to the mounting flange 14
The tip of the screw hole 14b is engaged with a fitting hole 11d formed on the surface of the mounting member 11. A ball portion 19a is formed at the tip of the reflection surface adjusting screw 19, and the ball portion 19a prevents the reflection surface adjusting screw 19 from being displaced with respect to the fitting hole 11d. Reference numeral 19b is an operation knob provided on the adjusting screw 19.

In the pressure contact force adjusting means arranged at four places, the spring 18 always attaches the mirror 12 to the mounting member 1.
1 and the spring 1
By operating the reflection surface adjusting screw 19 as the reflection surface adjusting means against the action of 8, the spherical surface 13b of the cooling base 13 is moved in a predetermined direction with respect to the inclined surface 11b of the mounting member 11. It can be displaced. As a result, the mirror surface 12a can perform precessive movement with the center O of the mirror surface, which coincides with the center A of the incident optical axis, as a reference point.

The outer peripheral surface 13b of the cooling base 13 having a spherical surface and the inclined surface 11b of the mounting member 11 that abuts against the spherical surface 13b are made of brass or stainless steel in order to prevent deformation of the abutting portion. Material with hardness, such as
Alternatively, it is made of a material surface-treated so as to have the same hardness.

Regarding the mirror of the position adjusting means of the mirror of the present invention, the plane mirror has been mentioned as an example, but the mirror is not limited to the plane mirror, and the same adjustment is possible for a non-planar mirror such as a parabolic mirror. It is natural that In the embodiment, the pressure contact force adjusting means and the reflecting surface adjusting means respectively arranged at four positions have been described, but the number is not limited to four and may be two or three, respectively, and they are provided at a plurality of positions at equal intervals. By
The same adjustment is possible.

[0022]

The structure of the present invention has the advantage that the position of the reflecting surface of the mirror body can be adjusted starting from the center point of the reflecting surface, which is the central position of the optical axis. There is an effect that the optical axis of the mirror can be easily adjusted without causing the occurrence.

[Brief description of drawings]

FIG. 1 is a sectional view of a main part of a mirror position adjusting mechanism of the present invention.

FIG. 2 is a rear side plan view of the mirror position adjusting mechanism of the present invention.

FIG. 3 is an explanatory diagram of a mirror position adjusting mechanism of the present invention.

FIG. 4 is a view showing a usage state of a mirror position adjusting mechanism.

FIG. 5 is a view showing another usage mode of the mirror position adjusting mechanism.

FIG. 6 is a sectional view showing an example of a conventional mirror position adjusting mechanism.

FIG. 7 is a sectional view showing another example of a conventional mirror position adjusting mechanism.

[Explanation of symbols]

 11 Mounting Member 11b Inclined Surface 12 Mirror 12a Reflective Surface 13 Cooling Base 13b Spherical Surface 14 Mounting Flange 18 Spring 19 Reflective Surface Position Adjusting Screw 19b Operating Knob 21 Pressure Contact Force Adjusting Screw 21a Operating Knob

Claims (2)

[Claims] 1. A position adjusting attachment mechanism for a mirror, wherein a position of a mirror body having a reflecting surface formed on a surface thereof can be adjustably attached to an attachment member. The portion is formed in a spherical shape having a radius from the center position of the reflecting surface to the center position of the mounting surface of the mounting member, and the contact force of the spherical shape is fixed to the mounting surface of the mounting member. Position of the mirror characterized in that a plurality of adjusting means and a reflecting surface adjusting means capable of adjusting the position of the reflecting surface are provided between the mounting flange and the mounting member provided on the back surface of the mirror body. Adjustable mounting mechanism. 2. The position adjustment of a mirror according to claim 1, wherein the pressure contact force adjusting means is formed by combining a spring and an adjusting screw, and the reflecting surface adjusting means is formed by an adjusting screw. Attachment mechanism.