JPH11271595A - Mirror holder device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a compact mirror holder device which can adjust a reflecting mirror finely and stably with ease and has a lock function for stably maintaining the adjustment state. SOLUTION: The mirror holder device 31 is constituted by embedding plural magnetic materials 35 in its outer peripheral surface and providing the reflecting mirror 46 at a flat part 33A, and makes a split spherical member 33 having a rod member 41 stood at its upper end part 33B abut against the inner peripheral surface of a casing 32 by biasing it with a spring 36 clamped with a bolt 39 and a nut 40 between a spherical washer 37 and a flat washer 38. When the reflecting mirror 46 is cleaned or replaced, the split spherical member 33 released from the easing 32 by releasing the attracting force of the magnet member 34 by switching a lever 34A is made with the biasing force of the spring 36 to abut against the casing 32 with proper resistance, thereby holding the angle θ of incidence of laser beam 47 adjusted by a 1st adjusting screw member 43 and a 2nd adjusting screw member 44 by abutting against the rod member 41.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a transmission path for transmitting a laser beam emitted from a laser oscillator of a laser processing apparatus to an irradiation point, for reflecting and bending a laser beam at an arbitrary angle. Related to a mirror holder device.

[0002]

2. Description of the Related Art As shown in FIG.
Is composed of a laser oscillator 2 and a processing optical system 3A or a processing optical system 3B. The laser oscillator 2 includes a laser substance 4 and resonators 5A and 5B. Laser substance 4
When is a solid, the laser substance 4 is optically excited by a flash lamp, and when the laser substance 4 is a gas, the laser substance 4 is excited. The laser output is controlled by these electrical inputs. The processing optical systems 3A and 3B include a plane mirror 8, a condensing lens 9, a parabolic mirror 11, a spherical mirror, and the like for condensing the laser beam 7 on the surface of the material 10A or 10B to be processed constantly.

[0003] The laser processing apparatus 1 configured as described above.
Generally, the laser light 7 from the laser oscillator 2 that emits the laser light 7 to the processing points of the materials 10A and 10B due to the positional relationship between the laser oscillator 2 and a laser head (not shown).
It is difficult to set the transmission path linearly. Also,
The laser head is provided with a three-dimensional movement function or a rotation function in the X, Y, and Z directions so that the laser beam 7 is always irradiated to each processing point in an appropriate state. Alternatively, many laser processing apparatuses such as five-axis control are used. For this reason, the laser beam 7 normally passes through the center of a plurality of hollow shafts having different axial directions, and at each bending point of these hollow shafts, the laser beam 7 is reflected and bent by the reflecting mirrors (8, 11) of the mirror holder device. Guided to the irradiation point. Therefore, in order to transmit the laser beam 7 whose optical axis is stable, the reflecting mirrors (8, 11) must reflect the laser beam 7 accurately without being distorted at the center thereof. in this way,
In order to correct the incident and reflected positions of the laser beam 7 with high accuracy, it is necessary to finely adjust the angles of the reflecting mirrors (8, 11) at the time of assembling the mirror holder device, or to readjust during use.

FIG. 5 shows a mirror holder device of such a conventional laser processing apparatus. As shown in FIG. 5, the mirror holder device 21 forms a hemisphere 24 on the back side of a mounting plate 23 on which a reflecting mirror 22 is mounted. To make contact while urging. The angle of the reflecting mirror 22 can be finely adjusted by moving the mounting plate 23 along the ball seat 26 with three or four adjusting screws 28.

[0005]

According to the mirror holder device shown in FIG. 5, the hemispherical surface 24 may be separated from the spherical seat 26 depending on the adjusting condition of the adjusting screw 28. As a result, the rotation of the reflecting mirror 22 may be performed. The heart is misaligned and the adjustment state becomes unstable. Further, since there is no particular lock function after the adjustment, there is a problem that the adjustment screw 28 is loosened due to vibration or the like generated at the time of processing, and the adjustment state is out of order.

SUMMARY OF THE INVENTION An object of the present invention is to solve the above-mentioned problems, to provide a mirror function of a compact laser processing apparatus, which can easily perform stable fine adjustment of a reflecting mirror and has a lock function for stably maintaining an adjusting state. An object of the present invention is to provide a holder device.

[0007]

SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, the present invention relates to a mirror holder device used in a laser processing apparatus for processing a material by irradiating a laser beam.
A reflecting mirror is provided on a transmission path for transmitting laser light emitted from a laser oscillator to an irradiation point, provided on a flat surface of a spheroidal member of the spheroidal member to reflect incident laser light, and an inner peripheral surface of the spheroidal member. A casing that engages with the outer peripheral surface, a fixing device that fixes the casing and the split ball member, a holding device that holds the engagement between the casing and the split ball member, and changing an engagement phase between the casing and the split ball member. And an adjusting device configured to adjust the incident angle of the incident laser beam.

In the above-mentioned mirror holder device, the holding device stands up by screwing with a hole in the casing having an adjustment allowance of the adjusting device and a female screw provided on the split spherical member by engaging with the hole. The stepped portion is constituted by an integral or divided screw rod member, and a spring interposed between the stepped portion of the screw rod member and a spherical washer abutting on the outer peripheral surface of the casing. Alternatively, a structure in which a permanent magnet member is used for one of the split ball member and the split ball member, and a magnetic material is used for the other, and the two are opposed to each other.

In the above-mentioned mirror holder device,
The fixing device is a part of the outer peripheral surface of the casing and the split ball member,
Alternatively, the magnetic material used as a whole is configured so that both are opposed to each other by using a magnet member capable of releasing a suction force to a casing. Alternatively, a hole having an adjustment allowance of the adjusting device in the casing, a bolt engaged with the hole and screwed with a female screw provided on the split ball member, and engaged with the bolt to contact the outer peripheral surface of the casing. It consists of a spherical washer in contact.

Further, in any one of the above-mentioned mirror holder devices, the adjusting device includes a block member which is erected and engaged with a hole provided at the top of the casing, and which is engaged with the hole and the block member at the top of the casing. A rod member standing upright at the upper end of the split ball member, a first adjusting screw member screwed to the block member and provided with a fixing pin at a contact portion with the rod member, and a first adjusting screw member And a second adjusting screw member provided with a fixed pin portion or a movable pin portion biased by a spring at a contact portion with the bar member by being screwed to the block member with the bar member interposed therebetween. . Alternatively, the first adjustment screw member and / or the second adjustment screw member are configured as at least two micrometer heads.

[0011]

1 to 3 show an embodiment of a mirror holder device according to the present invention. FIG. 1 shows a first embodiment of a mirror holder device according to the present invention. The mirror holder device 31 shown in FIG. 1 is provided in the transmission path of the laser light 7 from the laser oscillator 2 to the materials 10A and 10B in FIG. It may be applied directly to the plane mirror 8 and the parabolic mirror 11 in FIG.

FIGS. 1A and 1B show longitudinal sections of different parts. A split ball member 33 in which a plurality of magnetic members 35 are embedded on the outer peripheral surface is provided with a lever 34A corresponding to the magnetic member 35.
Is engaged with the casing 32 provided with the magnet member 34 capable of releasing the attraction force by the switching operation. The spherical member 33 is fixed to the inner peripheral surface of the casing 32 by the attractive force of the magnet member 34. The magnet member 34 is arranged such that the attractive force always acts on the outer peripheral surface of the split spherical member 33 or the inner peripheral surface of the casing 32 in the normal direction. The magnet member 34 and the magnetic material 35 constitute a fixing device 80.

A spring 36 is provided between the adjacent magnet members 34 and 34 so as to abut the inner peripheral surface of the casing 32 and the outer peripheral surface of the split ball member 33 on the outer peripheral surface of the casing 32. Between the spherical washer 37 and the flat washer 38 of FIG.
Bolt 39 which is screwed up with female screw 33C provided in 3
And a nut 40 interposed therebetween. The biasing force of the spring 36 releases the suction force by the switching operation of the lever 34A so that the split spherical member 33 released from the casing 32 comes into contact with the inner peripheral surface of the casing 32 with appropriate resistance. Hold. A holding device is constituted by the spring 36, the bolt 39, the nut 40, and the like.

The flat ball portion 33A of the split ball member 33 includes:
A reflecting mirror 46 that reflects a laser beam 47 incident from an emission-side transmission line of a laser oscillator (not shown) to an irradiation point-side transmission line is detachably provided by a retainer 48. Reflector 46
May be a parabolic mirror (11). In addition, a rod member 41 is provided upright at an upper end portion 33B of the ball-shaped member 33, and the rod member 41 is a hollow of a hollow member 42 which is fitted into a hole 32A provided at the top of the casing 32 and is provided upright. Engage with the part 42A. On one of the opposing surfaces of the rod member 41, a first adjusting screw member 43 provided with a fixing pin portion 43A at the tip is screwed into the hollow member 42, and the fixing pin portion 43A contacts the rod member 41. On the other hand, a second adjusting screw member 44 having a moving pin portion 44A biased by a spring 44B at its tip is screwed into the hollow member 42, and the moving pin portion 44A is connected to the rod member 4.
Contact 1 The first adjusting screw member 43 and the second adjusting screw member 44 are provided as a pair on the other surface of the rod member 41 to form the adjusting device 45.

When the laser beam 47 transmitted from the transmission line on the emission side of the laser oscillator enters the reflecting mirror 46 of the mirror holder device 31 adjusted / set to an appropriate angle θ by the adjusting device 45, the laser beam 47 is reflected and mirrored. The laser beam 47 is transmitted through the transmission path from the device 31 to the irradiation point and is irradiated with a laser beam 47 into a predetermined processing shape at the irradiation point to process the material. After the cleaning or replacement work of the reflecting mirror 46, when finely adjusting the incident angle θ of the laser beam 47 to the reflecting mirror 46, the magnet member 34 for fixing the split ball member 33 in contact with the inner peripheral surface of the casing 32 is used. The lever 34A is operated to release the suction force between the casing 32 and the split ball member 33, and the incident angle θ is finely adjusted by the first screw adjusting member 43 and the second adjusting screw member 44 of the adjusting device 45. The optical axis of the light 47 is adjusted, and the lever 34 </ b> A of the magnet member 34 is operated to fix the split spherical member 33 to the inner peripheral surface of the casing 32.

This fixing force is applied to the outer peripheral surface of the split spherical member 33,
Alternatively, since it acts on the inner peripheral surface of the casing 32 in the normal direction, the surface contact can be firmly fixed. Even if the lever 34A of the magnet member 34 is operated to open the split spherical member 33 from the inner peripheral surface of the casing 32, the casing 36 is actuated by the urging force of the spring 36 acting on the outer peripheral surface of the split spherical member 33 in the normal direction. Since the inner peripheral surface of the base 32 and the split spherical member 33 are adjusted so as to contact each other with an appropriate resistance, the casing 32, the split spherical member 33, and the reflecting mirror 46 do not fluctuate, and adjustment by the adjusting device 45 is performed. Since the direction is tangential to the outer peripheral surface of the split spherical member 33 or the inner peripheral surface of the casing 32, the direction does not affect the holding force in the normal direction. Therefore, fine adjustment of the incident angle θ of the laser beam 47 to the reflecting mirror 46 can be easily performed, and the reproducibility is good.

The casing 3 through which the bolt 39 penetrates
The second hole 32B has a reflecting mirror 46 corresponding to the adjusting device 45.
There is provided an adjustment allowance for adjusting the split spherical member 33 provided with. In the first embodiment, the adjusting device 45 is used.
Although the second adjusting screw member 44 has a movable pin portion 44A at the tip that contacts the rod member 41, the second adjusting screw member (56) having a fixed pin portion (56A) described later may be used.

Further, the hollow member 42 into which the first adjusting screw member 43 and the second adjusting screw member 44 are screwed is formed by connecting the first adjusting screw member 43 and the second adjusting screw member 44 respectively or the first adjusting screw member. A plurality of brackets screwed together by combining the member 43 and the second adjustment screw member 44 may be used. Further, instead of the spring 36 sandwiched between the spherical washer 37 and the flat washer 38 by the bolt 39 and the nut 40, the fastening bolt (5) is inserted through the spherical washer (53) as in the second embodiment described later.
2), the casing 32 and the split ball member 33 may be fixed.

FIG. 2 shows a second embodiment of the mirror holder device according to the present invention. The mirror holder device 51 is shown in FIG.
As shown in FIG. 2A and FIG.
5 is embedded in the casing 32 provided with a permanent magnet member 54 having a small attractive force corresponding to the magnetic material 35. Due to the attractive force of the permanent magnet member 54, the split spherical member 33 is held on the inner peripheral surface of the casing 32. The permanent magnet member 54 always has the attraction force of the split spherical member 3.
3 and the inner peripheral surface of the casing 32 so as to act in a normal direction. Magnetic material 35
And the permanent magnet member 54 constitute a holding device 70.

A spherical washer 5 provided on the outer peripheral surface of the casing 32 is provided between the adjacent permanent magnet members 54, 54.
3, a normal line to the inner peripheral surface of the casing 32 or the outer peripheral surface of the split spherical member 33 is attached to the split spherical member 33 for fixing the inner peripheral surface of the casing 32 and the outer peripheral surface of the split spherical member 33. A fastening bolt 52 that is screwed into the female screw 33C provided in the direction is provided.

As in the first embodiment, the spheroid member 3
A reflecting mirror 46 for reflecting a laser beam 47 incident from the transmission line on the emission side of the laser oscillator to the transmission line on the irradiation point side is detachably provided by a retainer 48 on the third split ball flat portion 33A. The fixing device 80 is constituted by the fastening bolt 52 and the spherical washer 53.

At the upper end portion 33B of the split ball member 33,
A rod member 41 is erected, and the rod member 41 is fitted into a hole 32A provided at the top of the casing 32 and is a hollow member 42 erected.
With the hollow portion 42A. One of the opposing surfaces of the rod member 41 is provided with a first fixed pin portion 43A at the tip.
The adjusting screw member 43 is screwed into the hollow member 42, and the fixing pin portion 43 </ b> A contacts the rod member 41. On the other hand, similarly to the first adjusting screw member 43, a second adjusting screw member 56 provided with a fixing pin portion 56 </ b> A at the distal end is screwed to the hollow member 42, and the fixing pin portion 56 </ b> A contacts the rod member 41. Touch The first adjusting screw member 43 and the second adjusting screw member 56 are provided as a pair on the other surface of the rod member 41 to form the adjusting device 55.

When the laser beam 47 transmitted from the transmission line of the laser oscillator (not shown) is incident on the reflecting mirror 46 of the mirror holder device 51 adjusted / set to an appropriate angle θ by the adjusting device 55, it is reflected. Mirror holder device 51
Is transmitted through a transmission path from the irradiation point to the irradiation point, and irradiates a material (not shown) with a laser beam 47 at a predetermined processing shape at the irradiation point,
Process the material. After the cleaning or replacement work of the reflecting mirror 46, when finely adjusting the incident angle θ of the laser beam 47 to the reflecting mirror 46, the fastening bolt 52 for fixing the split ball member 33 in contact with the inner peripheral surface of the casing 32 is used. The first screw adjusting member 43 and the second adjusting screw member 56 of the adjusting device 55 finely adjust the incident angle θ to adjust the optical axis of the laser beam 47. Is fixed to the inner peripheral surface of the casing 32.

This fixing force is applied to the outer peripheral surface of the split spherical member 33,
Alternatively, since it acts on the inner peripheral surface of the casing 32 in the normal direction, the surface contact can be firmly fixed. Even if the fastening bolt 52 is loosened and the split spherical member 33 is opened from the inner peripheral surface of the casing 32, the split spherical member 33 is moved in the normal direction to the outer peripheral surface of the split spherical member 33 or the inner peripheral surface of the casing 32. Since the permanent magnet member 54 is in contact with the inner peripheral surface of the casing 32 by an appropriate attractive force, the casing 32, the spheroidal member 33, and the reflecting mirror 46 do not fluctuate and adjust as in the first embodiment. The direction of adjustment by the device 45 is tangential to the outer peripheral surface of the split ball member 33 or the inner peripheral surface of the casing 32, and therefore does not affect the holding force in the normal direction. Therefore, fine adjustment of the incident angle θ of the laser beam 47 to the reflecting mirror 46 can be easily performed, and the reproducibility is good.

In the second embodiment, as in the first embodiment, the casing 32 through which the fastening bolt 52 passes is provided.
The hole 32B is provided with an adjustment allowance for adjusting the split spherical member 33 provided with the reflecting mirror 46 corresponding to the adjusting device 55. Further, in the second embodiment, the second adjusting screw member 56 of the adjusting device 55 has the fixed pin portion 56A at the tip which comes into contact with the rod member 41, but the tip moves as in the first embodiment. The second adjustment screw member 44 of the pin portion 44A may be used.

FIG. 3 shows an embodiment of another adjusting device used for the mirror holder device according to the present invention. In this embodiment, an adjusting device 65 is configured by replacing the first adjusting screw members 43, 43 in the adjusting devices 45, 55 of the first and second embodiments with micrometer heads 64, 64. The configuration of the mirror holder device other than the adjusting device 65 is as follows.
The description is omitted because it is the same as the first embodiment and the second embodiment.

The adjusting device 65 of the mirror holder device 61 includes:
As shown in FIGS. 3A and 3B, similarly to the first and second embodiments, the upper end 3 of the split ball member 33 of the split ball member 33.
3B, a rod member 41 is provided upright, and the rod member 41 is a flange 6 fitted into a hole 32A provided at the top of the casing 32.
The first block 63A and the second block 63B, each of which has an L-shaped cross section, are engaged with the second block 63B.
One of the opposing surfaces of the rod member 41 includes a rod member 41.
A first block 63A is provided so as to face the first block 6A.
The distal ends of the spindles 64A, 64A of the micrometer heads 64, 64 provided in 3A are brought into contact with the rod member 41.
On the other hand, the second block 6 faces the rod member 41.
3B, the second adjusting screw members 56, 56 provided with fixing pin portions 56A, 56A at the ends are screwed into the second block 63B, and the fixing pin portions 56A, 56A abut the rod member 41.

In this embodiment, the adjusting device 65 is used.
The second adjusting screw member 56 has a fixed pin portion 56A at the distal end which comes into contact with the bar member 41. However, similarly to the first embodiment, the second adjusting screw member 56 has a distal end as the second adjusting screw member 44 of the moving pin portion 44A. Good. The first block 63A to which the micrometer heads 64, 64 are attached is the same as the first embodiment and the second block 63A.
Similarly to the embodiment, as the hollow member (42), the second adjusting screw members (44, 56) may be provided in parallel and directly erected on the casing 32. Further, a positioning pin may be engaged with the flange 62 and the first block 63A to form a detachable measuring jig.

The adjustment by the micrometer head 64 is as follows.
Similar to the measurement of a measurement object with a normal micrometer,
The spindle 64A is rotated by the thimble 64B and the ratchet stop 64C of the micrometer head 64, and the spindle 64A is fixed by a clamp (not shown).
The final fixing of the casing 32 and the split ball member 33 after the adjustment of the micrometer head 64 is performed by the magnet member 34,
Alternatively, depending on the fastening bolt 52, the positioning of the split ball member 33 up to the fixing operation by the magnet member 34 or the fastening bolt 52 may be performed by the above-mentioned clamp (not shown) of the micrometer head 64, or the first block 63A The adjusting screw members 43, 44, 56 may be provided together.

In the present invention, since the outer peripheral surface of the split spherical member 33 and the inner peripheral surface of the casing 32 are spherical, the center of rotation P can be provided on the reflecting surface of the reflecting mirror 46. When () is used, the optical axis does not shift at the time of angle adjustment, and more accurate adjustment is possible. Further, in the above embodiment, the split spherical member 3
The magnetic device 35 is used for a part or the whole of the outer peripheral surface of the holder 3, and the holding device 70 is configured by engaging with the permanent magnet member 54 provided on the casing 32. Instead, the permanent magnet member 54 is used for part or all of the outer peripheral surface of the split spherical member 33, and the casing 3 is replaced with the permanent magnet member 54 used for the casing 32.
Using a magnetic material 35 for a part or the whole of the inner peripheral surface of 2,
The holding device 70 may be configured.

[0031]

As is apparent from the above description, according to the present invention, an appropriate biasing force of the spring and the attraction of the permanent magnet member are always applied in the normal direction to the spherical surface where the casing and the split ball member abut. Since the force acts to hold the spheroid member, even if the spheroid member is opened from the inner peripheral surface of the casing, there is no wobble between the casing, the spheroid member and the reflecting mirror, and the adjusting direction by the adjusting device is relative to the spherical surface. Is tangential,
Since it does not affect the holding force in the normal direction, stable fine adjustment of the incident angle of the laser beam to the reflecting mirror can be easily performed, and the reproducibility is also good. Further, since the force for fixing the casing and the split spherical member always acts in the normal direction to the spherical surface, it can be firmly fixed by surface contact, so it is strong against vibration and has good stability and stability in the adjustment state. Furthermore, by using a magnet member,
A compact mirror holder device can be provided, and the use of a micrometer head enables more accurate fine adjustment of the incident angle of the laser beam.

[Brief description of the drawings]

FIG. 1A is a sectional view of a main part of a mirror holder device according to a first embodiment of the present invention. FIG. 1B is a sectional view taken along the line AA of FIG.

2A is a sectional view of a main part of a mirror holder device according to a second embodiment of the present invention. FIG. 2B is a sectional view taken along line BB of FIG.

FIG. 3A is a main part top view of a mirror holder device in another embodiment of the adjusting device; FIG.

FIG. 4 is an explanatory diagram of a configuration of a laser processing apparatus.

FIG. 5 is a sectional view of a main part of a mirror holder device according to a conventional technique.

[Explanation of symbols]

31 is a mirror holder device, 32 is a casing, 32A,
32B is a hole, 33 is a split ball member, 33A is a split ball flat portion,
33B is a spherical upper end portion, 33C is a female screw, 34 is a magnet member, 34A is a lever, 35 is a magnetic material, 36 is a spring, 37
Is a spherical washer, 38 is a flat washer, 39 is a bolt, 40 is a nut, 41 is a rod member, 42 is a hollow member, 42A is a hollow portion,
43 is a first adjusting screw member, 43A is a fixed pin portion, 44 is a second adjusting screw member, 44A is a moving pin portion, 44B is a spring, 45 is an adjusting device, 46 is a reflecting mirror, 47 is a laser beam,
48 is a retainer, 51 is a mirror holder device, 52 is a fastening bolt, 53 is a spherical washer, 54 is a permanent magnet member, 55 is an adjusting device, 56 is a second adjusting screw member, 56A is a fixed pin portion, and 61 is a mirror holder device. , 62 is a flange, 63A
Is a first block, 63B is a second block, 64 is a micrometer head, 64A is a spindle, 64B is a thimble, 64C is a ratchet stop, 65 is an adjusting device, 7
0 is a holding device, 80 is a fixing device, θ is an incident angle, and P is a rotation center.

Claims (7)

[Claims] 1. A mirror holder device used in a laser processing apparatus for processing a material by irradiating a laser beam, the mirror holder device being provided on a transmission path for transmitting a laser beam emitted from a laser oscillator to an irradiation point. A reflecting mirror provided on a flat portion of the spherical member to reflect the incident laser light; and (b) a casing for engaging the inner peripheral surface with the outer peripheral surface of the spherical member.
(C) a fixing device (80) for fixing the casing and the split ball member; (d) a holding device (70) for holding the engagement between the casing and the split ball member; An adjusting device (45) configured to adjust the incident angle of the incident laser light by changing the engagement phase;
(55) and (65). 2. The holding device according to claim 1, wherein:
(A) a hole in the casing having an adjustment allowance of the adjusting device, and (b) a stepped portion which is engaged with the hole and screwed up with a female screw provided on the split ball member to stand upright. A mirror holder device comprising: a divided threaded rod member; and (c) a spring interposed between a stepped portion of the threaded rod member and a spherical washer abutting on the outer peripheral surface of the casing. 3. The holding device according to claim 1, wherein:
A mirror holder device comprising: a spheroid member; a permanent magnet member for one of the spheroid members; a magnetic material for the other; 4. The fixing device according to claim 1, wherein the fixing device (80) uses a magnetic material used for part or all of the outer peripheral surface of the casing and the split ball member to release the suction force to the casing. A mirror holder device characterized in that both members are configured to face each other using a possible magnet member. 5. The fixing device according to claim 1, wherein the fixing device (80) includes: (a) a hole in the casing having an adjustment allowance of the adjusting device; And a spherical washer engaged with the female screw provided on the split ball member and a spherical washer engaged with the bolt and abutting against the outer peripheral surface of the casing. apparatus. 6. A block according to claim 1, wherein said adjusting devices (45) and (55) are (a) a block which is engaged with a hole provided at a top portion of a casing and stands upright. A member, (b) a rod member that is engaged with the hole at the top of the casing and the block member and stands upright on the upper end of the split ball member, and (c) a rod member that is screwed into the block member. A first adjusting screw member provided with a fixing pin portion at the abutting portion, and (d) screwing to the block member with the bar member interposed therebetween facing the first adjusting screw member and fixed to the abutting portion with the bar member. And a second adjusting screw member provided with a pin portion or a moving pin portion biased by a spring. 7. The adjusting device according to claim 6, wherein the adjusting device comprises:
A mirror holder device, wherein the adjusting screw member and / or the second adjusting screw member are configured as at least two micrometer heads.