JPH06247703A - Ozone generating device - Google Patents
Ozone generating deviceInfo
- Publication number
- JPH06247703A JPH06247703A JP6085193A JP6085193A JPH06247703A JP H06247703 A JPH06247703 A JP H06247703A JP 6085193 A JP6085193 A JP 6085193A JP 6085193 A JP6085193 A JP 6085193A JP H06247703 A JPH06247703 A JP H06247703A
- Authority
- JP
- Japan
- Prior art keywords
- gasket
- ozone
- discharge plates
- gap
- voltage side
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
- C01B13/10—Preparation of ozone
- C01B13/11—Preparation of ozone by electric discharge
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2201/00—Preparation of ozone by electrical discharge
- C01B2201/30—Dielectrics used in the electrical dischargers
- C01B2201/34—Composition of the dielectrics
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】この発明は、オゾン発生装置に係
り、特に電極の放電板間隙を保持するガスケットをふっ
素樹脂で形成したオゾン発生装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ozone generator, and more particularly to an ozone generator in which a gasket for holding a gap between discharge plates of electrodes is made of a fluororesin.
【０００２】[0002]
【従来の技術】オゾン発生装置は、図２に示すように、
互いに対向する高圧側電極１と低圧側電極１′の両放電
板２，２間隙にＯ2 等の原料ガスを流し、両電極１，
１′に高電圧を加えて放電板２，２間隙に放電現象を誘
起することにより、原料ガスをオゾンＯ3 化する仕組み
のものである。したがって、両放電板２，２の間隙を保
持するガスケットには、耐ガスシール性、耐オゾン性、
耐電圧性が要求される。2. Description of the Related Art An ozone generator, as shown in FIG.
Together both discharge plate 2,2 gap opposing high voltage side electrode 1 and the low-voltage side electrode 1 'flowing a source gas such as O 2, the electrodes 1,
A high voltage is applied to 1'to induce a discharge phenomenon in the gap between the discharge plates 2 and 2, whereby the source gas is converted to ozone O 3 . Therefore, the gasket that holds the gap between the two discharge plates 2 and 2 has gas seal resistance, ozone resistance,
Withstand voltage is required.
【０００３】この種のガスケットとしては、従来より図
３や図４に示すものが使用されている。As this type of gasket, those shown in FIGS. 3 and 4 have been conventionally used.
【０００４】すなわち、図３に示すものは、セラミック
で形成したガスケット４を、シール材であるＯリング８
を介して両放電板２，２に密着させる構造であり、図４
に示すものは、比較的耐オゾン性を有するシリコン樹脂
で形成したガスケット４を、接着剤９で両放電板２，２
に接着する構造である。That is, in the structure shown in FIG. 3, the gasket 4 made of ceramic is replaced with the O-ring 8 which is a sealing material.
4 is a structure in which both the discharge plates 2 and 2 are brought into close contact with each other through
In the case of the one shown in FIG. 2, a gasket 4 made of a silicone resin having relatively ozone resistance is attached to both discharge plates 2 and 2 with an adhesive 9.
It is a structure that adheres to.
【０００５】[0005]
【発明が解決しようとする課題】しかしながら、上記従
来のガスケットは、いずれも比較的低濃度のオゾン発生
装置を対象に開発されたものであったため、例えば半導
体の生産工程等で必要とされる１２５ｇ／Ｎｍ3 以上の
高濃度オゾンの発生装置に使用すると、図４のガスケッ
トの場合では、ゴム製のＯリング８が早期にオゾン劣化
をきたし、また、図５のガスケットの場合では、接着剤
９がやはり早期にオゾン劣化をきたすだけでなく、シリ
コン樹脂製のガスケット４自体も早期にオゾン劣化する
といった問題を生じる。このため、上記のような高濃度
のオゾンを長期間、安定的に発生できる装置の開発は困
難なのが実情である。However, all of the above-mentioned conventional gaskets were developed for an ozone generator having a relatively low concentration, so that 125 g, which is required in, for example, a semiconductor production process, is used. When used in a generator of high-concentration ozone of / Nm 3 or more, in the case of the gasket of FIG. 4, the rubber O-ring 8 causes ozone deterioration at an early stage, and in the case of the gasket of FIG. However, this not only causes ozone deterioration at an early stage, but also causes a problem that the gasket 4 itself made of a silicone resin itself also deteriorates due to ozone at an early stage. For this reason, it is the actual situation that it is difficult to develop a device that can stably generate high-concentration ozone as described above for a long period of time.
【０００６】本発明は、このような実情に鑑みなされた
もので、高濃度オゾン発生下にあっても耐ガスシール
性、耐オゾン性、耐電圧性が全く損なわれない構造のガ
スケットを採用したオゾン発生装置の提供を目的とす
る。The present invention has been made in view of the above circumstances, and employs a gasket having a structure in which gas seal resistance, ozone resistance, and voltage resistance are not impaired even when high-concentration ozone is generated. The purpose is to provide an ozone generator.
【０００７】[0007]
【課題を解決するための手段】上記目的を達成する本発
明のオゾン発生装置は、互いに対向する高圧側電極１と
低圧側電極１′の両放電板２，２間隙に原料ガスを流
し、両電極に高電圧を加えてオゾンを発生させる装置に
おいて、高圧側電極と低圧側電極の両放電板２，２間隙
Ｌを保持するガスケット４をふっ素樹脂で形成し、両放
電板２，２の表面に焼付けたふっ素樹脂塗膜３と、熱溶
着させたことを特徴とする。In the ozone generator of the present invention which achieves the above object, a source gas is caused to flow in a gap between both discharge plates 2 and 2 of a high voltage side electrode 1 and a low voltage side electrode 1'which face each other. In a device for generating ozone by applying a high voltage to the electrodes, a gasket 4 that holds a gap L between the discharge plates 2 and 2 of the high-voltage side electrode and the low-voltage side electrode is formed of fluororesin, and the surfaces of both discharge plates 2 and 2 are formed. It is characterized in that it is heat-welded with the fluororesin coating film 3 which is baked on.
【０００８】[0008]
【作用】ふっ素樹脂製のガスケット４は、ふっ素樹脂自
体が耐高濃度オゾン性および耐電圧性に優れた性質を有
しており、これらの雰囲気下に晒しても全く変質しな
い。しかも、このガスケット４は、両放電板２，２の表
面に焼付けた同じ性質のふっ素樹脂塗膜３と熱溶着さ
れ、これによってガスシールされる。したがって、シー
ル材に別途Ｏリング８や接着剤９を使用する従来のもの
のようにシール材からオゾン劣化を生じることがなく、
高濃度オゾン下の耐ガスシール性においても優れた性能
を発揮する。In the gasket 4 made of fluororesin, the fluororesin itself has the characteristics of excellent high-concentration ozone resistance and withstand voltage, and does not deteriorate even if exposed to these atmospheres. Moreover, the gasket 4 is heat-welded with the fluororesin coating film 3 of the same property baked on the surfaces of both the discharge plates 2 and 2 and thereby gas-sealed. Therefore, unlike the conventional one in which the O-ring 8 and the adhesive 9 are separately used as the sealing material, the sealing material is not deteriorated by ozone,
It also exhibits excellent performance in gas sealing resistance under high concentration ozone.
【０００９】以下、本発明の実施例について記載する。Examples of the present invention will be described below.
【００１０】[0010]
【実施例】図１（イ）（ロ）は、本発明を実施したオゾ
ン発生装置の一例を模式的に示す平面図とそのＡ−Ａ断
面図である。1 (A) and 1 (B) are a plan view and an AA sectional view schematically showing an example of an ozone generator according to the present invention.
【００１１】同図に示すように、上下に対向配置された
高圧側電極１と低圧側電極１′は、いずれも放熱体を兼
ねるラジェータ構造の板型電極であり、その電極板面に
放電板２が誘電性の接着剤で貼着してある。As shown in the figure, the high-voltage side electrode 1 and the low-voltage side electrode 1'which are vertically opposed to each other are plate-type electrodes having a radiator structure which also serve as a radiator, and a discharge plate is provided on the electrode plate surface. 2 is attached with a dielectric adhesive.
【００１２】これらの放電板２，２は金属板にガラスま
たはホーローのコーティングを施したものである。両放
電板２，２のコーティング表面はふっ素樹脂（ポリフル
オロエチレン：通称テフロン）の塗膜３で被覆してあ
る。この塗膜３は、市販の上記ふっ素樹脂塗料（ポリフ
ロンＴＦＥ、エナメルＥＫ−１７８３ＧＢ融点３３０℃
ダイキン製）を２００メッシュ程度の網でろ過したもの
を、吹き付け圧力２〜３ｋｇｆ／ｃｍ2 に調整したスプ
レーガンにて膜厚７〜１５μｍ程度に塗布し、乾燥（１
１０℃×１０分）させた後、焼成（３８０℃×１５〜３
０分）して焼付けたものである。The discharge plates 2 and 2 are metal plates coated with glass or enamel. The coating surfaces of both discharge plates 2 and 2 are coated with a coating film 3 of fluororesin (polyfluoroethylene: commonly called Teflon). This coating film 3 is a commercially available fluororesin paint (polyflon TFE, enamel EK-1783GB, melting point 330 ° C.).
What was made by Daikin Co., Ltd., which was filtered through a net of about 200 mesh was applied to a film thickness of about 7 to 15 μm with a spray gun adjusted to a spraying pressure of 2 to 3 kgf / cm 2 , and dried (1
After making it 10 degreeC x 10 minutes, baking (380 degreeC x 15-3)
It was baked for 0 minutes).
【００１３】上記両放電板２，２の間隙Ｌは、両放電板
２，２間の周辺部に配設された枠板状のガスケット４に
より一定に保持されている。このガスケット４は前記塗
膜３と同様のふっ素樹脂（テフロン）よりなる厚さ１ｍ
ｍのシート材（ネオフロンＰＦＡ、融点３０２〜３１０
℃ ダイキン製）より形成したもので、その上下両面は
放電板２表面に焼付けられた前記塗膜３と熱溶着させて
ある。ガスケット４と塗膜３との熱溶着は、塗膜３を焼
付けた両放電板２，２を、その塗膜３およびガスケット
４の溶融温度以上に予め加熱しておき、十分加熱された
両放電板２，２間にガスケット４を挟んで、所要時間一
定の重量下に保持することにより行ったものである。The gap L between the two discharge plates 2 and 2 is kept constant by a frame plate-shaped gasket 4 arranged in the peripheral portion between the two discharge plates 2 and 2. The gasket 4 is made of the same fluorocarbon resin (Teflon) as the coating film 3 and has a thickness of 1 m.
m sheet material (neoflon PFA, melting point 302-310
(Made by Daikin Co., Ltd.), and the upper and lower surfaces thereof are heat-welded to the coating film 3 baked on the surface of the discharge plate 2. The heat welding of the gasket 4 and the coating film 3 is carried out by heating both the discharge plates 2 and 2 on which the coating film 3 is baked to a temperature above the melting temperature of the coating film 3 and the gasket 4 in advance, so that both discharges are sufficiently heated. This is performed by sandwiching a gasket 4 between the plates 2 and 2 and keeping the same under a constant weight for a required time.
【００１４】溶着時における放電板２の上記予熱温度と
その予熱時間、およびガスケットを挟んだ後に加える重
量とその重量下での保持時間等の条件は、溶着後のガス
ケット４の厚さ、即ち両放電板２，２の間隙Ｌ精度を大
きく左右する。したがって、これらの溶着条件は予め十
分に試験を行い、実際の熱溶着に際して、目標の間隙Ｌ
値が得られるように管理する必要がある。因に、図示例
の場合は、両放電板２，２の予熱を３５０℃で１０分間
行い、次いで、この両放電板２，２間に前記１ｍｍ厚の
ガスケット４を挟んだ後、上部より１ｋｇｆの重量（重
し）を加えて１分間保持することにより溶着させたもの
であり、これにより目標どおりの間隙値0.８ｍｍが得ら
れている。The conditions such as the above-mentioned preheating temperature and its preheating time of the discharge plate 2 at the time of welding, the weight added after sandwiching the gasket and the holding time under the weight are the thickness of the gasket 4 after welding, that is, both of them. The accuracy of the gap L between the discharge plates 2 and 2 largely depends. Therefore, these welding conditions are thoroughly tested in advance, and when the actual heat welding is performed, the target gap L
It must be managed so that the value can be obtained. Incidentally, in the case of the illustrated example, both the discharge plates 2 and 2 are preheated at 350 ° C. for 10 minutes, and then the gasket 4 having a thickness of 1 mm is sandwiched between the discharge plates 2 and 2 and then 1 kgf from the top. Was welded by adding the weight (weight) and holding it for 1 minute, whereby a target gap value of 0.8 mm was obtained.
【００１５】上記構成よりなるオゾン発生装置は、高圧
側電極１と低圧側電極１′に高電圧を印加し、ガスケッ
ト４にて保持された高圧側と低圧側の両放電板２，２間
隙Ｌにガス送給管６より原料酸素ガス（Ｏ2 ）を流す
と、両放電板２，２間の放電現象によって原料酸素ガス
（Ｏ2 ）中に高濃度のオゾン（Ｏ3 ）を発生し、発生し
たオゾンを排出管７より外部へ排出するようになってい
る。In the ozone generator having the above structure, a high voltage is applied to the high-voltage side electrode 1 and the low-voltage side electrode 1 ', and the gap L between the high-pressure side and the low-pressure side discharge plates 2 and 2 held by the gasket 4 is formed. When a raw material oxygen gas (O 2 ) is caused to flow through the gas supply pipe 6, a high-concentration ozone (O 3 ) is generated in the raw material oxygen gas (O 2 ) due to a discharge phenomenon between the discharge plates 2 and 2. The generated ozone is discharged from the discharge pipe 7 to the outside.
【００１６】なお、本発明は板型オゾン発生装置に対し
てのみならず、円筒型オゾン発生装置に対しても同様に
実施することができ、同様の効果を得ることができる。The present invention can be applied not only to a plate-type ozone generator but also to a cylindrical ozone generator, and similar effects can be obtained.
【００１７】[0017]
【発明の効果】以上に説明したとおり、本発明のオゾン
発生装置は、電極の両放電板間隙を保持するガスケット
を耐高濃度オゾン性、耐電圧性に優れたふっ素樹脂で形
成し、かつ、このガスケットを放電板表面に焼付けた同
じふっ素樹脂塗膜と溶着させて耐ガスシール性を確保し
た構造であるから、ガスケットが高濃度オゾンや高電圧
によって変質することはなく、またガスシール性が損な
われることもない。したがって、高濃度オゾンの発生が
要求されるオゾン発生装置として最適である。As described above, in the ozone generator of the present invention, the gasket for holding the gap between the two discharge plates of the electrode is formed of a fluororesin having excellent high-concentration ozone resistance and withstand voltage, and This gasket is welded to the same fluororesin coating film baked on the surface of the discharge plate to ensure gas seal resistance, so the gasket will not deteriorate due to high concentration ozone or high voltage, and the gas seal property will be high. It will not be damaged. Therefore, it is optimal as an ozone generator that is required to generate high-concentration ozone.
【図１】（イ）は本発明装置の平面図で、（ロ）は図１
（イ）のＡ−Ａ矢視断面図である。FIG. 1A is a plan view of the device of the present invention, and FIG.
It is an AA arrow sectional view of (a).
【図２】オゾン発生装置の原理の説明する図である。FIG. 2 is a diagram illustrating the principle of an ozone generator.
【図３】従来のオゾン発生装置を説明する要部断面図で
ある。FIG. 3 is a cross-sectional view of main parts for explaining a conventional ozone generator.
【図４】従来の他のオゾン発生装置を説明する要部断面
図である。FIG. 4 is a cross-sectional view of main parts for explaining another conventional ozone generator.
Ｌ 放電板間隙 １，１′ 電極 ２ 放電板 ３ 塗膜 ４ ガスケット L Discharge plate gap 1,1 'Electrode 2 Discharge plate 3 Coating film 4 Gasket
Claims (1)
極１′の両放電板２，２間隙に原料ガスを流し、両電極
に高電圧を加えてオゾンを発生させる装置において、高
圧側電極と低圧側電極の両放電板２，２間隙Ｌを保持す
るガスケット４をふっ素樹脂で形成し、両放電板２，２
の表面に焼付けたふっ素樹脂塗膜３と、熱溶着させたこ
とを特徴とするオゾン発生装置。1. An apparatus for generating a ozone by applying a high voltage to both electrodes by flowing a raw material gas into a gap between both discharge plates 2 and 2 of a high voltage side electrode 1 and a low voltage side electrode 1'opposed to each other. And the discharge plates 2 and 2 of the low-voltage side electrode, a gasket 4 for holding the gap L is formed of fluororesin.
An ozone generator characterized in that it is heat-welded with a fluororesin coating film 3 baked on the surface of.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5060851A JP2750651B2 (en) | 1993-02-24 | 1993-02-24 | Ozone generator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5060851A JP2750651B2 (en) | 1993-02-24 | 1993-02-24 | Ozone generator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH06247703A true JPH06247703A (en) | 1994-09-06 |
| JP2750651B2 JP2750651B2 (en) | 1998-05-13 |
Family
ID=13154302
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5060851A Expired - Fee Related JP2750651B2 (en) | 1993-02-24 | 1993-02-24 | Ozone generator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2750651B2 (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0489304A (en) * | 1990-07-27 | 1992-03-23 | Sumitomo Precision Prod Co Ltd | Ozonizer |
| JPH0489303A (en) * | 1990-07-27 | 1992-03-23 | Sumitomo Precision Prod Co Ltd | Ozonizer |
-
1993
- 1993-02-24 JP JP5060851A patent/JP2750651B2/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0489304A (en) * | 1990-07-27 | 1992-03-23 | Sumitomo Precision Prod Co Ltd | Ozonizer |
| JPH0489303A (en) * | 1990-07-27 | 1992-03-23 | Sumitomo Precision Prod Co Ltd | Ozonizer |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2750651B2 (en) | 1998-05-13 |
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