JP2750651B2 - Ozone generator - Google Patents
Ozone generatorInfo
- Publication number
- JP2750651B2 JP2750651B2 JP5060851A JP6085193A JP2750651B2 JP 2750651 B2 JP2750651 B2 JP 2750651B2 JP 5060851 A JP5060851 A JP 5060851A JP 6085193 A JP6085193 A JP 6085193A JP 2750651 B2 JP2750651 B2 JP 2750651B2
- Authority
- JP
- Japan
- Prior art keywords
- gasket
- ozone
- discharge plates
- ozone generator
- side electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
- C01B13/10—Preparation of ozone
- C01B13/11—Preparation of ozone by electric discharge
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2201/00—Preparation of ozone by electrical discharge
- C01B2201/30—Dielectrics used in the electrical dischargers
- C01B2201/34—Composition of the dielectrics
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
Description
【０００１】[0001]
【産業上の利用分野】この発明は、オゾン発生装置に係
り、特に電極の放電板間隙を保持するガスケットをふっ
素樹脂で形成したオゾン発生装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ozone generator, and more particularly to an ozone generator in which a gasket for holding a gap between discharge plates of electrodes is formed of fluororesin.
【０００２】[0002]
【従来の技術】オゾン発生装置は、図２に示すように、
互いに対向する高圧側電極１と低圧側電極１′の両放電
板２，２間隙にＯ2 等の原料ガスを流し、両電極１，
１′に高電圧を加えて放電板２，２間隙に放電現象を誘
起することにより、原料ガスをオゾンＯ3 化する仕組み
のものである。したがって、両放電板２，２の間隙を保
持するガスケットには、耐ガスシール性、耐オゾン性、
耐電圧性が要求される。2. Description of the Related Art As shown in FIG.
A raw material gas such as O 2 is passed between the discharge plates 2 and 2 of the high-pressure side electrode 1 and the low-pressure side electrode 1 ′ facing each other.
By applying a high voltage to 1 'to induce a discharge phenomenon in the gap between the discharge plates 2 and 2, the source gas is converted into ozone O 3 . Therefore, the gasket that holds the gap between the two discharge plates 2 and 2 has gas-sealing resistance, ozone resistance,
Withstand voltage is required.
【０００３】この種のガスケットとしては、従来より図
３や図４に示すものが使用されている。As this type of gasket, those shown in FIGS. 3 and 4 have been conventionally used.
【０００４】すなわち、図３に示すものは、セラミック
で形成したガスケット４を、シール材であるＯリング８
を介して両放電板２，２に密着させる構造であり、図４
に示すものは、比較的耐オゾン性を有するシリコン樹脂
で形成したガスケット４を、接着剤９で両放電板２，２
に接着する構造である。FIG. 3 shows a gasket 4 made of ceramic and an O-ring 8 serving as a sealing material.
FIG.
The gasket 4 made of silicone resin having relatively high ozone resistance is bonded to both discharge plates 2 and 2 with an adhesive 9.
It is a structure to adhere to.
【０００５】[0005]
【発明が解決しようとする課題】しかしながら、上記従
来のガスケットは、いずれも比較的低濃度のオゾン発生
装置を対象に開発されたものであったため、例えば半導
体の生産工程等で必要とされる１２５ｇ／Ｎｍ３以上の
高濃度オゾンの発生装置に使用すると、図３のガスケッ
トの場合では、ゴム製のＯリング８が早期にオゾン劣化
をきたし、また、図４のガスケットの場合では、接着剤
９がやはり早期にオゾン劣化をきたすだけでなく、シリ
コン樹脂製のガスケット４自体も早期にオゾン劣化する
といった問題を生じる。このため、上記のような高濃度
のオゾンを長期間、安定的に発生できる装置の開発は困
難なのが実情である。However, all of the above-mentioned conventional gaskets have been developed for a relatively low-concentration ozone generator, and therefore, for example, 125 g required in a semiconductor production process or the like. / Nm 3 or more when used in generator of high concentration ozone, in the case of the gasket of Figure 3, a rubber O-ring 8 is Kitaichi ozone deterioration early, and in the case of the gasket of Figure 4, the adhesive 9 However, there is a problem that not only the ozone deterioration occurs early but also the silicon resin gasket 4 itself deteriorates ozone early. For this reason, the fact is that it is difficult to develop a device that can stably generate such a high concentration of ozone for a long period of time.
【０００６】本発明は、このような実情に鑑みなされた
もので、高濃度オゾン発生下にあっても耐ガスシール
性、耐オゾン性、耐電圧性が全く損なわれない構造のガ
スケットを採用したオゾン発生装置の提供を目的とす
る。The present invention has been made in view of such circumstances, and employs a gasket having a structure in which gas seal resistance, ozone resistance, and voltage resistance are not impaired at all even when high concentration ozone is generated. The purpose is to provide an ozone generator.
【０００７】[0007]
【課題を解決するための手段】上記目的を達成する本発
明のオゾン発生装置は、互いに対向する高圧側電極１と
低圧側電極１′の両放電板２，２間隙に原料ガスを流
し、両電極に高電圧を加えてオゾンを発生させる装置に
おいて、高圧側電極と低圧側電極の両放電板２，２間隙
Ｌを保持するガスケット４がふっ素樹脂で形成されると
共に、両放電板２，２の表面にふっ素樹脂塗膜３，３が
焼付けによりそれぞれ形成されており、且つ、前記ガス
ケット４がふっ素樹脂塗膜３，３に熱溶着されているこ
とを特徴とする。In order to achieve the above object, an ozone generator according to the present invention is characterized in that a raw material gas is caused to flow through a gap between both discharge plates 2 and 2 of a high voltage side electrode 1 and a low voltage side electrode 1 'facing each other. in the apparatus in addition a high voltage to generate ozone in the electrode, the gasket 4 for holding the two discharge plates 2,2 gap L of the high-voltage side electrode and the low-voltage side electrode is formed by fluorine resin
In both cases, a fluororesin coating film 3, 3 is provided on the surface of both discharge plates 2, 2.
Each of which is formed by baking and the gas
The present invention is characterized in that the casing 4 is thermally welded to the fluororesin coatings 3,3 .
【０００８】[0008]
【作用】ふっ素樹脂製のガスケット４は、ふっ素樹脂自
体が耐高濃度オゾン性および耐電圧性に優れた性質を有
しており、これらの雰囲気下に晒しても全く変質しな
い。しかも、このガスケット４は、両放電板２，２の表
面に焼付けた同じ性質のふっ素樹脂塗膜３，３と熱溶着
され、これによってガスシールされる。したがって、シ
ール材に別途Ｏリング８や接着剤９を使用する従来のも
ののようにシール材からオゾン劣化を生じることがな
く、高濃度オゾン下の耐ガスシール性においても優れた
性能を発揮する。The gasket 4 made of fluororesin has properties such as high resistance to high concentration ozone and excellent withstand voltage, and does not deteriorate at all when exposed to these atmospheres. In addition, the gasket 4 is thermally welded to the fluororesin coatings 3 , 3 of the same properties, which are baked on the surfaces of the discharge plates 2, 2, and thereby gas-sealed. Accordingly, unlike the conventional case where the O-ring 8 and the adhesive 9 are separately used for the sealing material, ozone deterioration does not occur from the sealing material, and excellent performance in gas sealing resistance under high-concentration ozone is exhibited.
【０００９】以下、本発明の実施例について記載する。Hereinafter, embodiments of the present invention will be described.
【００１０】[0010]
【実施例】図１（イ）（ロ）は、本発明を実施したオゾ
ン発生装置の一例を模式的に示す平面図とそのＡ−Ａ断
面図である。1 (a) and 1 (b) are a plan view schematically showing an example of an ozone generator embodying the present invention and a sectional view taken along the line AA.
【００１１】同図に示すように、上下に対向配置された
高圧側電極１と低圧側電極１′は、いずれも放熱体を兼
ねるラジェータ構造の板型電極であり、その電極板面に
放電板２が誘電性の接着剤で貼着してある。As shown in FIG. 1, the high-voltage side electrode 1 and the low-voltage side electrode 1 ', which are vertically opposed to each other, are plate-type electrodes having a radiator structure which also serve as a heat radiator. 2 is attached with a dielectric adhesive.
【００１２】これらの放電板２，２は金属板にガラスま
たはホーローのコーティングを施したものである。両放
電板２，２のコーティング表面はふっ素樹脂（ポリフル
オロエチレン：通称テフロン）の塗膜３，３で被覆して
ある。各塗膜３は、市販の上記ふっ素樹脂塗料（ポリフ
ロンＴＦＥ、エナメルＥＫ−１７８３ＧＢ融点３３０℃
ダイキン製）を２００メッシュ程度の網でろ過したもの
を、吹き付け圧力２〜３ｋｇｆ／ｃｍ２に調整したスプ
レーガンにて膜厚７〜１５μｍ程度に塗布し、乾燥（１
１０℃×１０分）させた後、焼成（３８０℃×１５〜３
０分）して焼付けたものである。These discharge plates 2 and 2 are formed by coating a metal plate with glass or enamel. The coating surfaces of both discharge plates 2 and 2 are coated with coating films 3 and 3 made of fluororesin (polyfluoroethylene: so-called Teflon). Each coating film 3, a commercial of the fluorine resin paint (Polyflon TFE, Enamel EK-1783GB melting point 330 ° C.
(Daikin) was filtered through a mesh of about 200 mesh, and applied to a thickness of about 7 to 15 μm with a spray gun adjusted to a spray pressure of 2 to 3 kgf / cm 2 , and dried (1
(10 ° C. × 10 minutes), and then fired (380 ° C. × 15-3)
0 minutes) and baked.
【００１３】上記両放電板２，２の間隙Ｌは、両放電板
２，２間の周辺部に配設された枠板状のガスケット４に
より一定に保持されている。このガスケット４は前記塗
膜３，３と同様のふっ素樹脂（テフロン）よりなる厚さ
１ｍｍのシート材（ネオフロンＰＦＡ、融点３０２〜３
１０℃ ダイキン製）より形成したもので、その上下両
面は放電板２，２表面に焼付けられた前記塗膜３，３と
熱溶着させてある。ガスケット４と塗膜３，３との熱溶
着は、塗膜３，３を焼付けた両放電板２，２を、その塗
膜３，３およびガスケット４の溶融温度以上に予め加熱
しておき、十分加熱された両放電板２，２間にガスケッ
ト４を挟んで、所要時間一定の重量下に保持することに
より行ったものである。The gap L between the two discharge plates 2, 2 is kept constant by a frame plate-shaped gasket 4 disposed around the two discharge plates 2, 2. The gasket 4 is the coating film 3, 3 made of the same fluororesin (Teflon) and 1mm thick sheet material (NEOFLON PFA, melting point 302-3
10 ° C., manufactured by Daikin Co., Ltd., and the upper and lower surfaces thereof are thermally welded to the coating films 3 , 3 baked on the surfaces of the discharge plates 2 , 2 . The thermal welding between the gasket 4 and the coatings 3 , 3 is performed by heating the discharge plates 2, 2 on which the coatings 3 , 3 have been baked at a temperature higher than the melting temperature of the coatings 3 , 3 and the gasket 4 in advance. This is performed by holding the gasket 4 between the two sufficiently heated discharge plates 2 and 2 and maintaining the gasket 4 under a constant weight for a required time.
【００１４】溶着時における放電板２の上記予熱温度と
その予熱時間、およびガスケットを挟んだ後に加える重
量とその重量下での保持時間等の条件は、溶着後のガス
ケット４の厚さ、即ち両放電板２，２の間隙Ｌ精度を大
きく左右する。したがって、これらの溶着条件は予め十
分に試験を行い、実際の熱溶着に際して、目標の間隙Ｌ
値が得られるように管理する必要がある。因に、図示例
の場合は、両放電板２，２の予熱を３５０℃で１０分間
行い、次いで、この両放電板２，２間に前記１ｍｍ厚の
ガスケット４を挟んだ後、上部より１ｋｇｆの重量（重
し）を加えて１分間保持することにより溶着させたもの
であり、これにより目標どおりの間隙値0.８ｍｍが得ら
れている。Conditions such as the preheating temperature and the preheating time of the discharge plate 2 at the time of welding, the weight added after sandwiching the gasket, and the holding time under the weight are determined by the thickness of the gasket 4 after welding, ie, both thicknesses. The accuracy of the gap L between the discharge plates 2 and 2 greatly affects the accuracy. Therefore, these welding conditions are sufficiently tested in advance, and in actual heat welding, the target gap L
It needs to be managed so that values can be obtained. In the case of the illustrated example, the two discharge plates 2 and 2 are preheated at 350 ° C. for 10 minutes. Then, after the gasket 4 having a thickness of 1 mm is sandwiched between the two discharge plates 2 and 2, 1 kgf is applied from above. Was welded by adding the weight (weight) and holding for 1 minute to obtain a target gap value of 0.8 mm.
【００１５】上記構成よりなるオゾン発生装置は、高圧
側電極１と低圧側電極１′に高電圧を印加し、ガスケッ
ト４にて保持された高圧側と低圧側の両放電板２，２間
隙Ｌにガス送給管６より原料酸素ガス（Ｏ2 ）を流す
と、両放電板２，２間の放電現象によって原料酸素ガス
（Ｏ2 ）中に高濃度のオゾン（Ｏ3 ）を発生し、発生し
たオゾンを排出管７より外部へ排出するようになってい
る。In the ozone generator having the above-mentioned structure, a high voltage is applied to the high-voltage electrode 1 and the low-voltage electrode 1 ′, and the high-pressure and low-pressure discharge plates 2 and 2 held by the gasket 4 have a gap L. When the source oxygen gas (O 2 ) flows from the gas supply pipe 6 through the gas supply pipe 6, high-concentration ozone (O 3 ) is generated in the source oxygen gas (O 2 ) by a discharge phenomenon between the discharge plates 2 and 2. The generated ozone is discharged from the discharge pipe 7 to the outside.
【００１６】なお、本発明は板型オゾン発生装置に対し
てのみならず、円筒型オゾン発生装置に対しても同様に
実施することができ、同様の効果を得ることができる。The present invention can be applied not only to a plate-type ozone generator but also to a cylindrical ozone generator, and similar effects can be obtained.
【００１７】[0017]
【発明の効果】以上に説明したとおり、本発明のオゾン
発生装置は、電極の両放電板間隙を保持するガスケット
を耐高濃度オゾン性、耐電圧性に優れたふっ素樹脂で形
成し、かつ、このガスケットを放電板表面に焼付けた同
じふっ素樹脂塗膜と溶着させて耐ガスシール性を確保し
た構造であるから、ガスケットが高濃度オゾンや高電圧
によって変質することはなく、またガスシール性が損な
われることもない。したがって、高濃度オゾンの発生が
要求されるオゾン発生装置として最適である。As described above, according to the ozone generator of the present invention, the gasket for holding the gap between the two discharge plates of the electrode is made of a fluororesin having high ozone resistance and high voltage resistance, and This gasket is welded to the same fluororesin coating baked on the surface of the discharge plate to ensure gas-sealing resistance, so that the gasket does not deteriorate due to high-concentration ozone or high voltage, and the gas-sealing property is low. There is no loss. Therefore, it is most suitable as an ozone generator which requires generation of high-concentration ozone.
【図１】（イ）は本発明装置の平面図で、（ロ）は図１
（イ）のＡ−Ａ矢視断面図である。FIG. 1A is a plan view of the device of the present invention, and FIG.
It is sectional drawing in the AA arrow of (a).
【図２】オゾン発生装置の原理の説明する図である。FIG. 2 is a diagram illustrating the principle of an ozone generator.
【図３】従来のオゾン発生装置を説明する要部断面図で
ある。FIG. 3 is a sectional view of a main part for explaining a conventional ozone generator.
【図４】従来の他のオゾン発生装置を説明する要部断面
図である。FIG. 4 is a cross-sectional view of a main part explaining another conventional ozone generator.
Ｌ 放電板間隙 １，１′ 電極 ２ 放電板 ３ 塗膜 ４ ガスケット L Discharge plate gap 1, 1 'electrode 2 Discharge plate 3 Coating film 4 Gasket
Claims (1)
極１′の両放電板２，２間隙に原料ガスを流し、両電極
に高電圧を加えてオゾンを発生させる装置において、高
圧側電極と低圧側電極の両放電板２，２間隙Ｌを保持す
るガスケット４がふっ素樹脂で形成されると共に、両放
電板２，２の表面にふっ素樹脂塗膜３，３が焼付けによ
りそれぞれ形成されており、且つ、前記ガスケット４が
ふっ素樹脂塗膜３，３に熱溶着されていることを特徴と
するオゾン発生装置。An apparatus for generating ozone by flowing a raw material gas between the discharge plates 2 and 2 of a high-pressure side electrode 1 and a low-pressure side electrode 1 'facing each other and applying a high voltage to both electrodes. and with the gasket 4 for holding the two discharge plates 2,2 gap L of the low voltage side electrode is formed by fluorine resin, both release
Fluororesin coatings 3 and 3 are baked on the surfaces of
Each gasket 4 is formed
An ozone generator characterized by being thermally welded to the fluororesin coatings 3,3 .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5060851A JP2750651B2 (en) | 1993-02-24 | 1993-02-24 | Ozone generator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5060851A JP2750651B2 (en) | 1993-02-24 | 1993-02-24 | Ozone generator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH06247703A JPH06247703A (en) | 1994-09-06 |
| JP2750651B2 true JP2750651B2 (en) | 1998-05-13 |
Family
ID=13154302
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5060851A Expired - Fee Related JP2750651B2 (en) | 1993-02-24 | 1993-02-24 | Ozone generator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2750651B2 (en) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0489304A (en) * | 1990-07-27 | 1992-03-23 | Sumitomo Precision Prod Co Ltd | Ozonizer |
| JPH0489303A (en) * | 1990-07-27 | 1992-03-23 | Sumitomo Precision Prod Co Ltd | Ozonizer |
-
1993
- 1993-02-24 JP JP5060851A patent/JP2750651B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH06247703A (en) | 1994-09-06 |
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