JPH06244481A - Raman laser device - Google Patents

Raman laser device

Info

Publication number
JPH06244481A
JPH06244481A JP2652393A JP2652393A JPH06244481A JP H06244481 A JPH06244481 A JP H06244481A JP 2652393 A JP2652393 A JP 2652393A JP 2652393 A JP2652393 A JP 2652393A JP H06244481 A JPH06244481 A JP H06244481A
Authority
JP
Japan
Prior art keywords
concave
refrigerant
concave mirror
concave mirrors
laser light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2652393A
Other languages
Japanese (ja)
Other versions
JP3059020B2 (en
Inventor
Keiji Yoshimura
敬二 吉村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP2652393A priority Critical patent/JP3059020B2/en
Publication of JPH06244481A publication Critical patent/JPH06244481A/en
Application granted granted Critical
Publication of JP3059020B2 publication Critical patent/JP3059020B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

PURPOSE:To facilitate the adjustment of multiple reflection of a laser and besides, prevent the damage of a concave mirror. CONSTITUTION:A pair of concave mirrors 1 and 2 are arranged in condition that the concaves are opposed to each other. An incoming laser beam 30 are reflected multiply between the concave mirrors 1 and 2, and a laser beam 31, which has become a Raman laser beam, is outputted. Refrigerant jackets 1B and 2B are formed in the concave mirrors 1 and 2, and refrigerants are supplied to the refrigerant jackets 1B and 2B through supply pipes 1C and 2C, and are discharged through return pipes 1D and 2D. Adjusting the temperatures of refrigerants changes the radius of curvature of the concave mirror, and enables the condition of reflection to be controlled. Moreover, the cooling can also be done.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明はラマンレーザ装置の改良
に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an improved Raman laser device.

【従来の技術】[Prior art]

【0002】ラマンレーザは、ガス分子の回転散乱遷移
でレーザ光を長波長側へ波長変換するものであり、一対
の鏡によりレーザ光を多重反射させるものが知られてい
る。
A Raman laser is a laser that converts the wavelength of a laser beam to a long wavelength side by a rotational scattering transition of gas molecules, and it is known that a laser beam is multiple-reflected by a pair of mirrors.

【0003】ラマンレーザ装置を、構成図である図4及
びレーザ光の多重反射の説明図である図5を参照して説
明する。図4に示すように、それぞれ端板22,23に
短管20,21が固定されており、短管20,21に挿
入された凹面鏡1,2が円筒3の両端フランジ3A,3
Bに、端板22,23を介して固定されている。したが
ってレーザ光30が端板22のレーザ光入射用の窓4及
び凹面鏡2の入射用孔2Aを介して凹面鏡1,2間に入
り、図5に示すように、この凹面鏡1,2間の多重反射
部分24で多重反射する。そして、多重反射してラマン
レーザ光となったレーザ光31は、凹面鏡1の出射用孔
1A及び端板23のレーザ光出射用の窓5を介して装置
外に出射される。
A Raman laser device will be described with reference to FIG. 4, which is a structural view, and FIG. 5, which is an explanatory view of multiple reflection of laser light. As shown in FIG. 4, the short pipes 20 and 21 are fixed to the end plates 22 and 23, respectively, and the concave mirrors 1 and 2 inserted in the short pipes 20 and 21 are the both end flanges 3A and 3 of the cylinder 3.
It is being fixed to B through the end plates 22 and 23. Therefore, the laser light 30 enters between the concave mirrors 1 and 2 through the laser light entrance window 4 of the end plate 22 and the entrance hole 2A of the concave mirror 2 and, as shown in FIG. Multiple reflection occurs at the reflecting portion 24. Then, the laser light 31 that has been multiply reflected and becomes Raman laser light is emitted to the outside of the device through the emission hole 1A of the concave mirror 1 and the laser light emission window 5 of the end plate 23.

【0004】端板22,23はタイボルト40で締結さ
れており、円筒3の中央部のベローズ3Cの伸縮性を利
用して、端板22,23の距離を調整することにより凹
面鏡1,2間の距離を調整する。このことによりレーザ
光の多重反射を正確におこなわせることができる。
The end plates 22 and 23 are fastened together by tie bolts 40, and by utilizing the elasticity of the bellows 3C at the center of the cylinder 3, the distance between the end plates 22 and 23 is adjusted so that the concave mirror 1 and the concave mirror 1 are separated from each other. Adjust the distance of. This makes it possible to accurately perform multiple reflections of laser light.

【0005】[0005]

【発明が解決しようとする課題】ところで上記従来技術
には次のような課題があった。
However, the above-mentioned prior art has the following problems.

【0006】第1の課題は凹面鏡間距離の調整の問題で
ある。即ち、正確な多重反射を行うには、凹面鏡の曲率
半径に応じて凹面鏡間距離を正確に調整する必要があ
る。しかし従来では、凹面鏡を取り付けている両端板2
2,23の間をタイボルト40で締結し、このタイボル
ト40によって凹面鏡間距離を調整しており、調整作業
が困難であると同時に、両端板の両方あるいは一方を可
動にするため複雑である。
The first problem is the problem of adjusting the distance between concave mirrors. That is, in order to perform accurate multiple reflection, it is necessary to accurately adjust the distance between concave mirrors according to the radius of curvature of the concave mirrors. However, conventionally, both end plates 2 to which the concave mirror is attached are attached.
2 and 23 are fastened with tie bolts 40, and the distance between the concave mirrors is adjusted by these tie bolts 40. This makes adjustment work difficult and, at the same time, makes both or one of both end plates movable, which is complicated.

【0007】第2の課題は凹面鏡表面の損傷の問題であ
る。即ち、凹面鏡のレーザ光の反射点であるレーザスポ
ット点では、極めて短時間ではあるが繰り返し高出力の
レーザ光による熱が加わり、局部的にレーザスポット部
が損傷し凹面鏡として機能しなくなる。
The second problem is that the surface of the concave mirror is damaged. That is, at the laser spot point, which is the reflection point of the laser light of the concave mirror, heat is repeatedly applied by the high-power laser light for a very short time, and the laser spot portion is locally damaged, so that it does not function as a concave mirror.

【0008】本発明は、上記従来技術に鑑み、凹面鏡間
距離の調整が簡単にでき、しかも凹面鏡表面の損傷の無
いラマンレーザ装置を提供することを目的とする。
In view of the above-mentioned prior art, it is an object of the present invention to provide a Raman laser device in which the distance between concave mirrors can be easily adjusted and the surface of the concave mirror is not damaged.

【課題を解決するための手段】[Means for Solving the Problems]

【0009】上記課題を解決する本発明の構成は、凹面
鏡そのものに冷媒ジャケットを設け、凹面鏡の曲率半径
を、冷媒温度を変えることにより、任意に調整できるよ
うにすると共に、円筒を開放することなく冷媒を外側か
ら導入・排出できるようにした。
According to the structure of the present invention for solving the above-mentioned problems, the concave mirror itself is provided with a coolant jacket, and the radius of curvature of the concave mirror can be arbitrarily adjusted by changing the coolant temperature, and the cylinder is not opened. The refrigerant can be introduced and discharged from the outside.

【0010】[0010]

【作用】凹面鏡の曲率半径をR(mm)、熱膨張率をα
(1/℃)、初期温度をT1 (℃)、冷媒温度をT
2 (℃)とすると、T1 からT2 へ温度変化を与えたと
きの曲率半径の変化量ΔRは次式(1)のようになる。
The radius of curvature of the concave mirror is R (mm) and the coefficient of thermal expansion is α
(1 / ° C), initial temperature is T 1 (° C), refrigerant temperature is T
Assuming that the temperature is 2 (° C.), the change amount ΔR of the radius of curvature when the temperature is changed from T 1 to T 2 is given by the following expression (1).

【0011】[0011]

【数1】 [Equation 1]

【0012】一方、レーザ光の多重反射を正確に行う上
で、凹面鏡間距離Lと凹面鏡曲率半径Rの間には次式
(2),(3)の関係がある。
On the other hand, the relationship between the concave mirror distance L and the concave mirror curvature radius R is expressed by the following equations (2) and (3) in order to accurately perform the multiple reflection of the laser light.

【0013】[0013]

【数2】 [Equation 2]

【0014】Lを定めたとき、上式を満足するRは1つ
しか存在しない。従来はRが固定されているのでLをR
に合わせて調整していたが、本発明はLを定め、Lに合
わせてRを熱膨張を利用して調整するもので、T2 を任
意にかえることにより、ΔRを任意に変えてRを変え
る。
When L is defined, there is only one R that satisfies the above equation. Conventionally, R is fixed, so L is R
However, the present invention defines L and adjusts R according to L by utilizing thermal expansion. By arbitrarily changing T 2 , ΔR can be arbitrarily changed and R can be changed. Change.

【0015】[0015]

【実施例】以下に本発明の実施例を説明する。なお、従
来技術と同一機能を果たす部分には同一記号を付し、重
複する説明は省略する。
EXAMPLES Examples of the present invention will be described below. In addition, the same symbols are attached to the portions having the same functions as those of the conventional technique, and the duplicated description will be omitted.

【0016】図1は本発明の実施例を示す。従来技術と
異なるのは凹面鏡の構造のみである。即ち凹面鏡1,2
には冷媒ジャケット1B,2Bが形成されており、冷媒
ジャケット1Bには供給配管1C及びもどり配管1Dが
連結され、冷媒ジャケット2Bには供給配管2C及びも
どり配管2Dが連結されている。このため供給配管1
C,2Cから冷媒ジャケット1B,2Bに冷媒を送り、
更に冷媒をもどり配管1D,2Dから排出することがで
きる。このとき冷媒の温度を変更することで、凹面鏡
1,2の温度ひいては曲率半径Rを変更することができ
る。
FIG. 1 shows an embodiment of the present invention. Only the structure of the concave mirror is different from the prior art. That is, concave mirrors 1 and 2
Refrigerant jackets 1B and 2B are formed in the refrigerant jacket 1B, a supply pipe 1C and a return pipe 1D are connected to the refrigerant jacket 1B, and a supply pipe 2C and a return pipe 2D are connected to the refrigerant jacket 2B. Therefore, the supply pipe 1
The refrigerant is sent from C and 2C to the refrigerant jackets 1B and 2B,
Furthermore, the refrigerant can be returned and discharged from the pipes 1D and 2D. At this time, the temperature of the concave mirrors 1 and 2 and thus the radius of curvature R can be changed by changing the temperature of the refrigerant.

【0017】レーザ光30は窓4から入り凹面鏡1,2
間で多重反射しラマンレーザ光となったレーザ光31は
窓5から出力される。
The laser light 30 enters through the window 4 and the concave mirrors 1 and 2 are used.
The laser light 31 that has been multiply reflected between and becomes Raman laser light is output from the window 5.

【0018】本実施例では、凹面鏡間距離が固定されて
いるため、凹面鏡1,2の曲率半径が式(2)(3)を
満足しないときは多重反射は正確に行なわれないが、冷
媒温度を変えて式(2)(3)を満足する曲率半径Rと
なるようコントロールすることで、多重反射の状態を修
正することができる。
In this embodiment, since the distance between the concave mirrors is fixed, when the radius of curvature of the concave mirrors 1 and 2 does not satisfy the equations (2) and (3), the multiple reflection is not accurately performed, but the coolant temperature is not. The state of multiple reflection can be corrected by controlling the radius of curvature R so as to satisfy the equations (2) and (3).

【0019】多重反射が正確であるか否かは凹面鏡面の
レーザスポット配置が真円上に等間隔となっているか否
かで評価できる。図2に凹面鏡曲率半径が正しい半径の
5%増となっているときのレーザスポット配置を示す。
レーザスポットは真円上に配列されているが間隔は不等
間隔である。これを凹面鏡温度(絶対温度)を5%下げ
て凹面鏡曲率半径を正しい半径にまで熱収縮効果により
修正した結果を図3に示す。図3ではレーザスポットは
真円上かつ等間隔に配列されており、正確な多重反射に
なったことが分る。なお図4,図5はミラー面上のスポ
ット軌跡をミラー側から見た状態で示している。
Whether or not the multiple reflection is accurate can be evaluated by whether or not the laser spots arranged on the concave mirror surface are arranged at equal intervals on a perfect circle. FIG. 2 shows the laser spot arrangement when the radius of curvature of the concave mirror is increased by 5% of the correct radius.
The laser spots are arranged on a perfect circle, but the intervals are unequal. FIG. 3 shows the result of correcting the concave mirror temperature (absolute temperature) by 5% and correcting the concave mirror curvature radius to the correct radius by the heat shrinkage effect. In FIG. 3, the laser spots are arranged on a perfect circle at equal intervals, and it can be seen that accurate multiple reflection has occurred. 4 and 5 show the spot locus on the mirror surface as viewed from the mirror side.

【0020】[0020]

【発明の効果】本発明によれば次のような効果を得るこ
とができる。 (1)凹面鏡間距離を変えることなく、冷媒温度変更の
みでレーザ光の多重反射を正確に調整できる。 (2)これは、冷媒温度変更のみでよく、極めて簡単で
かつ、凹面鏡間距離を変更する必要がないので構造が簡
単になる。 (3)凹面鏡が冷却されているのでレーザスポット部の
熱が除去されやすく、レーザスポット部の損傷を回避し
やすく、凹面鏡の寿命を長く維持できる。
According to the present invention, the following effects can be obtained. (1) Multiple reflection of laser light can be accurately adjusted only by changing the coolant temperature without changing the distance between the concave mirrors. (2) This requires only changing the temperature of the refrigerant, is extremely simple, and does not require changing the distance between the concave mirrors, which simplifies the structure. (3) Since the concave mirror is cooled, heat of the laser spot is easily removed, damage to the laser spot is easily avoided, and the life of the concave mirror can be maintained for a long time.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の実施例を示す構成図。FIG. 1 is a configuration diagram showing an embodiment of the present invention.

【図2】ミラー面上のスポット軌跡を示す説明図。FIG. 2 is an explanatory diagram showing a spot trajectory on a mirror surface.

【図3】ミラー面上のスポット軌跡を示す説明図。FIG. 3 is an explanatory diagram showing a spot trajectory on a mirror surface.

【図4】従来技術を示す構成図。FIG. 4 is a configuration diagram showing a conventional technique.

【図5】レーザ光の多重反射を示す説明図。FIG. 5 is an explanatory view showing multiple reflection of laser light.

【符号の説明】[Explanation of symbols]

1,2 凹面鏡 1A 出射用孔 2A 入射用孔 1B,2B 冷媒ジャケット 1C,2C 供給配管 1D,2D もどり配管 3 円筒 3A,3B 両端フランジ 3C ベローズ 4,5 窓 20,21 短管 22,23 端板 24 多重反射部分 30,31 レーザ光 40 タイボルト 1, 2 concave mirror 1A exit hole 2A entrance hole 1B, 2B refrigerant jacket 1C, 2C supply pipe 1D, 2D return pipe 3 cylinder 3A, 3B both ends flange 3C bellows 4,5 window 20,21 short pipe 22,23 end plate 24 Multiple reflection part 30, 31 Laser light 40 Tyvolt

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 凹面を対向させた状態で一対の凹面鏡を
配置し、一対の凹面鏡の間でレーザ光を多重反射させて
ラマンレーザ光として出力するラマンレーザ装置におい
て、 前記凹面鏡にそれぞれ冷媒ジャケットを形成すると共
に、この冷媒ジャケットに冷媒を供給する供給配管を冷
媒ジャケットに連結し、冷媒ジャケットから冷媒を排出
するもどり配管を冷媒ジャケットに連結したことを特徴
とするラマンレーザ装置。
1. A Raman laser device in which a pair of concave mirrors are arranged with concave surfaces facing each other, and laser light is multiple-reflected between the pair of concave mirrors and output as Raman laser light, wherein a coolant jacket is formed on each of the concave mirrors. At the same time, a supply pipe for supplying a refrigerant to the refrigerant jacket is connected to the refrigerant jacket, and a return pipe for discharging the refrigerant from the refrigerant jacket is connected to the refrigerant jacket.
JP2652393A 1993-02-16 1993-02-16 Raman laser device Expired - Lifetime JP3059020B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2652393A JP3059020B2 (en) 1993-02-16 1993-02-16 Raman laser device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2652393A JP3059020B2 (en) 1993-02-16 1993-02-16 Raman laser device

Publications (2)

Publication Number Publication Date
JPH06244481A true JPH06244481A (en) 1994-09-02
JP3059020B2 JP3059020B2 (en) 2000-07-04

Family

ID=12195842

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2652393A Expired - Lifetime JP3059020B2 (en) 1993-02-16 1993-02-16 Raman laser device

Country Status (1)

Country Link
JP (1) JP3059020B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000028631A1 (en) * 1998-11-10 2000-05-18 Tokyo Denshi Kabushiki Kaisha Apparatus for photoreaction
JP2006278383A (en) * 2005-03-28 2006-10-12 Ricoh Co Ltd Solid state laser device and laser device system

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000028631A1 (en) * 1998-11-10 2000-05-18 Tokyo Denshi Kabushiki Kaisha Apparatus for photoreaction
KR100337623B1 (en) * 1998-11-10 2002-05-24 모리 마코토 Apparatus for Photoreaction
US6487003B1 (en) 1998-11-10 2002-11-26 Tokyo Denshi Kabushiki Kaisha Optical interaction device
JP2006278383A (en) * 2005-03-28 2006-10-12 Ricoh Co Ltd Solid state laser device and laser device system
JP4608346B2 (en) * 2005-03-28 2011-01-12 株式会社リコー Solid-state laser device and laser device system

Also Published As

Publication number Publication date
JP3059020B2 (en) 2000-07-04

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