JPH07116885A - Method for cutting thick plate with high quality by laser beam - Google Patents

Method for cutting thick plate with high quality by laser beam

Info

Publication number
JPH07116885A
JPH07116885A JP5287555A JP28755593A JPH07116885A JP H07116885 A JPH07116885 A JP H07116885A JP 5287555 A JP5287555 A JP 5287555A JP 28755593 A JP28755593 A JP 28755593A JP H07116885 A JPH07116885 A JP H07116885A
Authority
JP
Japan
Prior art keywords
cutting
gas
thick plate
laser beam
oxygen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5287555A
Other languages
Japanese (ja)
Other versions
JP2670233B2 (en
Inventor
Genta Takano
元太 高野
Seiji Beppu
征二 別府
Yoneo Hiramoto
米雄 平本
Sumio Mori
純雄 毛利
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP5287555A priority Critical patent/JP2670233B2/en
Publication of JPH07116885A publication Critical patent/JPH07116885A/en
Application granted granted Critical
Publication of JP2670233B2 publication Critical patent/JP2670233B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Laser Beam Processing (AREA)

Abstract

PURPOSE:To provide a high quality laser beam cutting method for a thick plate by which reduction of cutting accuracy is prevented by evading generation of self-burning phenomenon and cutting is efficiently and economically carried out. CONSTITUTION:When the thick plate is cut by a laser beam, a surface condition of the plate at a position in immediately front of the cutting position is monitored and cutting is carried out alternatively switching cutting gas in accordance with change of the surface condition as when a hot red heated zone 11 is expanding, the cutting gas is switched from an oxygen gas 15 to an inert gas 14 and when the red heated zone 11 is shrinking, the cutting gas is switched from the inert gas 14 to the oxygen gas 15.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、原子力プラント等大型
厚肉構造物の解体切断に適用される厚板の高品質レーザ
切断方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a high-quality laser cutting method for a thick plate which is applied to dismantling and cutting a large-scale thick structure such as a nuclear power plant.

【0002】[0002]

【従来の技術】レーザ切断においては、レーザ熱により
被切断材からその溶融物を吹き飛ばす必要があるので、
従来、ガスを用いている。このガスとしては不活性ガス
又は酸素があり、厚板の切断では、従来、切断能力を大
きくできる酸素が切断用ガスとして一般に広く使用され
ている。
2. Description of the Related Art In laser cutting, it is necessary to blow away the melt from the material to be cut by laser heat.
Conventionally, gas is used. As this gas, there is an inert gas or oxygen, and conventionally, when cutting a thick plate, oxygen, which can increase the cutting ability, has been generally widely used as a cutting gas.

【0003】[0003]

【発明が解決しようとする課題】上記したように、厚板
をレーザ切断しようとすれば、切断能力を向上させるた
めに、酸素を切断用ガスとして使用している。しかしな
がら、100mmを超えるような厚板になると、切断速
度が遅くなるので、酸素が切断位置より前方に拡散して
ゆく現象が生ずる。その結果、切断位置より前方にてセ
ルフバーニング現象が起きて、バーニング部が欠落する
ため、切断精度が著しく悪化するという問題がある。
As described above, when laser cutting a thick plate, oxygen is used as a cutting gas in order to improve the cutting ability. However, when the plate is thicker than 100 mm, the cutting speed becomes slower, so that oxygen diffuses forward from the cutting position. As a result, a self-burning phenomenon occurs in front of the cutting position, and the burning portion is missing, so that there is a problem that the cutting accuracy is significantly deteriorated.

【0004】本発明はこのような事情に鑑みて提案され
たもので、セルフバーニング現象の発生を避けて切断精
度の低下を防止する効率的で経済的な厚板の高品質レー
ザ切断方法を提供することを目的とする。
The present invention has been proposed in view of the above circumstances, and provides an efficient and economical high-quality laser cutting method for thick plates that avoids the occurrence of the self-burning phenomenon and prevents the reduction of cutting accuracy. The purpose is to do.

【0005】[0005]

【課題を解決するための手段】そのために本発明は、厚
板をレーザ切断する際に、切断位置より前方の表面状況
をモニタリングし、高温の赤熱域が広がってきたなら
ば、切断ガスを酸素から不活性ガスに切り替え、同赤熱
域が狭くなってきたならば、同切断ガスを不活性ガスか
ら酸素へと交互に切り替えて切断することを特徴とす
る。
To this end, the present invention monitors the surface condition in front of the cutting position during laser cutting of a thick plate, and when the high-temperature red hot zone spreads, the cutting gas is oxygenated. Is switched to an inert gas, and when the red heat range becomes narrower, the cutting gas is alternately switched from the inert gas to oxygen for cutting.

【0006】[0006]

【作用】このような構成によれば、厚板をレーザ切断す
る場合に、切断ガスとして酸素と不活性ガスを交互に送
給することにより、酸素過剰によるセルフバーニング現
象を防止しつつ、酸素供給による厚板切断能力を維持で
きる。不活性ガスでは切断能力は低下するが、セルフバ
ーニング現象は生じないので、切断精度は低下しなくな
る。
According to this structure, when laser cutting a thick plate, oxygen and an inert gas are alternately supplied as a cutting gas to prevent the self-burning phenomenon due to excess oxygen while supplying oxygen. The ability to cut thick plates can be maintained. Although the cutting ability decreases with an inert gas, the self-burning phenomenon does not occur, so the cutting accuracy does not decrease.

【0007】[0007]

【実施例】本発明の一実施例を図面について説明する
と、図1はその全体系統図である。上図において、レー
ザ発振器1より出てきたレーザビーム2は反射鏡3,5
を経て凹面鏡6により被切断材8の表面近傍に収束され
る。切断ガスはノズル7を通して供給されるので、反射
鏡5及び凹面鏡6を包囲する必要があり、そのためにミ
ラーボックス16に透過窓4を設けている。
DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described with reference to the drawings. FIG. 1 is an overall system diagram thereof. In the above figure, the laser beam 2 emitted from the laser oscillator 1 is reflected by mirrors 3, 5
After that, it is converged by the concave mirror 6 near the surface of the material 8 to be cut. Since the cutting gas is supplied through the nozzle 7, it is necessary to surround the reflection mirror 5 and the concave mirror 6, and for that purpose, the transmission window 4 is provided in the mirror box 16.

【0008】ここで、9は被切断材8の切断溝、11は
切断溝9の若干前方の赤熱域、10はモニタリング用オ
プティカルファイバー、12は画像解析装置、13はガ
ス切替器で、不活性ガスボンベ14の切断ガスをミラー
ボックス16へ切替えて導入する。
Here, 9 is a cutting groove of the material 8 to be cut, 11 is a red heat region slightly in front of the cutting groove 9, 10 is an optical fiber for monitoring, 12 is an image analysis device, 13 is a gas switch, and it is inactive. The cutting gas of the gas cylinder 14 is switched to and introduced into the mirror box 16.

【0009】このような装置において、収束されたレー
ザビーム2により被切断材8には切断溝9が形成されて
ゆき、その周囲には赤熱域11が生ずる。そこで、この
赤熱域11の部分を監視用オプチカルファイバー10で
観察する。そして得られた情報は画像解析装置12に送
られ、ここで赤熱域11の大きさを判断してその信号を
ガス切替器13に送り、不活性ガスボンベ14,酸素ボ
ンベ15のいずれか一方の切断ガスをミラーボックス1
6へ送入し、これをノズル7を経て被切断材8の切断部
に供給する。その際、酸素過剰によるセルフバーニング
は表面側で生じやすいので、切断位置より前方の表面状
況をオプチカルファイバーで監視して、高温の赤熱域が
広がってくると、不活性ガスを供給し、逆に狭くなって
くると酸素を供給する。
In such an apparatus, a cut groove 9 is formed in the material 8 to be cut by the focused laser beam 2, and a red heat zone 11 is generated around the cut groove 9. Therefore, the portion of the red heat region 11 is observed with the monitoring optical fiber 10. Then, the obtained information is sent to the image analysis device 12, where the size of the red heat zone 11 is judged and the signal is sent to the gas switching device 13 to disconnect either the inert gas cylinder 14 or the oxygen cylinder 15. Gas in mirror box 1
6 is fed to the cutting portion of the material 8 to be cut through the nozzle 7. At that time, since self-burning due to excess oxygen is likely to occur on the surface side, the surface condition in front of the cutting position is monitored with an optical fiber, and when the high-temperature red heat region spreads, an inert gas is supplied, and conversely. When it gets narrower, it supplies oxygen.

【0010】[0010]

【発明の効果】このような方法によれば、従来、酸素過
剰で、セルフバーニング現象を生じた結果、非常に広く
なっていたレーザ切断部の溝幅を大幅に狭くすることが
可能となる。
According to such a method, it is possible to significantly reduce the groove width of the laser cutting portion, which has been very wide as a result of the self-burning phenomenon caused by excess oxygen in the past.

【0011】要するに本発明によれば、厚板をレーザ切
断する際に、切断位置より前方の表面状況をモニタリン
グし、高温の赤熱域が広がってきたならば、切断ガスを
酸素から不活性ガスに切り替え、同赤熱域が狭くなって
きたならば、同切断ガスを不活性ガスから酸素へと交互
に切り替えて切断することにより、セルフバーニング現
象の発生を避けて切断精度の低下を防止する効率的で経
済的な厚板の高品質レーザ切断方法を得るから、本発明
は産業上極めて有益なものである。
In summary, according to the present invention, when the thick plate is laser-cut, the surface condition in front of the cutting position is monitored, and if the high-temperature red hot zone is widened, the cutting gas is changed from oxygen to an inert gas. If the red hot zone becomes narrower by switching, the cutting gas is switched from inert gas to oxygen alternately to cut, thereby avoiding the occurrence of self-burning phenomenon and preventing a decrease in cutting accuracy. The present invention is extremely useful in industry because it provides a high-quality laser cutting method for thick plates which is economical and economical.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例のレーザ切断方法を示す系統
図である。
FIG. 1 is a system diagram showing a laser cutting method according to an embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1 レーザ発振器 2 レーザビーム 3 反射鏡 4 透過窓 5 反射鏡 6 凹面鏡 7 ノズル 8 被切断材 9 切断溝 10 オプティカルファイバー 11 赤熱域 12 画像解析装置 13 ガス切替器 14 不活性ボンベ 15 酸素ボンベ 16 ミラーボックス 1 Laser Oscillator 2 Laser Beam 3 Reflecting Mirror 4 Transmission Window 5 Reflecting Mirror 6 Concave Mirror 7 Nozzle 8 Material to be Cut 9 Cutting Groove 10 Optical Fiber 11 Red Heat Zone 12 Image Analysis Device 13 Gas Switch 14 Inert Cylinder 15 Oxygen Cylinder 16 Mirror Box

───────────────────────────────────────────────────── フロントページの続き (72)発明者 毛利 純雄 兵庫県高砂市荒井町新浜二丁目1番1号 三菱重工業株式会社高砂研究所内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Sumio Mohri 2-1-1 Nihama, Arai-cho, Takasago-shi, Hyogo Mitsubishi Heavy Industries Ltd. Takasago Research Institute

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 厚板をレーザ切断する際に、切断位置よ
り前方の表面状況をモニタリングし、高温の赤熱域が広
がってきたならば、切断ガスを酸素から不活性ガスに切
り替え、同赤熱域が狭くなってきたならば、同切断ガス
を不活性ガスから酸素へと交互に切り替えて切断するこ
とを特徴とする厚板の高品質レーザ切断方法。
1. When cutting a thick plate by laser, the surface condition in front of the cutting position is monitored, and if the high-temperature red heat zone spreads, the cutting gas is switched from oxygen to an inert gas, and the red heat zone is changed. If the cutting width becomes narrower, the cutting gas is switched from the inert gas to oxygen alternately to cut, and a high-quality laser cutting method for a thick plate.
JP5287555A 1993-10-22 1993-10-22 High quality laser cutting method for thick plate Expired - Fee Related JP2670233B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5287555A JP2670233B2 (en) 1993-10-22 1993-10-22 High quality laser cutting method for thick plate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5287555A JP2670233B2 (en) 1993-10-22 1993-10-22 High quality laser cutting method for thick plate

Publications (2)

Publication Number Publication Date
JPH07116885A true JPH07116885A (en) 1995-05-09
JP2670233B2 JP2670233B2 (en) 1997-10-29

Family

ID=17718866

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5287555A Expired - Fee Related JP2670233B2 (en) 1993-10-22 1993-10-22 High quality laser cutting method for thick plate

Country Status (1)

Country Link
JP (1) JP2670233B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007014992A (en) * 2005-07-08 2007-01-25 Amada Co Ltd Piercing method, and laser beam machining apparatus
DE102011003717A1 (en) 2011-02-07 2012-08-09 Trumpf Werkzeugmaschinen Gmbh + Co. Kg Apparatus and method for monitoring and in particular for controlling a laser cutting process
CN104625429A (en) * 2014-12-22 2015-05-20 中国矿业大学 Laser cutting technology for thick metal plate
CN115302101A (en) * 2022-08-31 2022-11-08 厦门通富微电子有限公司 Wafer cutting method and device, electronic equipment and storage medium

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6487713A (en) * 1987-09-29 1989-03-31 Toshiba Corp Laser control equipment
JPH03210981A (en) * 1990-01-17 1991-09-13 Mitsubishi Electric Corp Laser beam cutting method for iron-base thick plate

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6487713A (en) * 1987-09-29 1989-03-31 Toshiba Corp Laser control equipment
JPH03210981A (en) * 1990-01-17 1991-09-13 Mitsubishi Electric Corp Laser beam cutting method for iron-base thick plate

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007014992A (en) * 2005-07-08 2007-01-25 Amada Co Ltd Piercing method, and laser beam machining apparatus
DE102011003717A1 (en) 2011-02-07 2012-08-09 Trumpf Werkzeugmaschinen Gmbh + Co. Kg Apparatus and method for monitoring and in particular for controlling a laser cutting process
EP3189926A1 (en) 2011-02-07 2017-07-12 TRUMPF Werkzeugmaschinen GmbH + Co. KG Device and method for monitoring, and particularly for controlling, a laser cutting process
US10058953B2 (en) 2011-02-07 2018-08-28 Trumpf Werkzeugmaschinen Gmbh + Co. Kg Method for monitoring and controlling a laser cutting process
US10888954B2 (en) 2011-02-07 2021-01-12 Trumpf Werkzeugmaschinen Gmbh + Co. Kg Method for monitoring and controlling a laser cutting process
CN104625429A (en) * 2014-12-22 2015-05-20 中国矿业大学 Laser cutting technology for thick metal plate
CN115302101A (en) * 2022-08-31 2022-11-08 厦门通富微电子有限公司 Wafer cutting method and device, electronic equipment and storage medium

Also Published As

Publication number Publication date
JP2670233B2 (en) 1997-10-29

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Effective date: 19970610

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