JPS59204291A - Laser resonator - Google Patents
Laser resonatorInfo
- Publication number
- JPS59204291A JPS59204291A JP7872883A JP7872883A JPS59204291A JP S59204291 A JPS59204291 A JP S59204291A JP 7872883 A JP7872883 A JP 7872883A JP 7872883 A JP7872883 A JP 7872883A JP S59204291 A JPS59204291 A JP S59204291A
- Authority
- JP
- Japan
- Prior art keywords
- mirror
- diaphragm
- resonator
- fixed
- discharge tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
- H01S3/086—One or more reflectors having variable properties or positions for initial adjustment of the resonator
Abstract
Description
【発明の詳細な説明】
本発明はレーザ共振器に関し、特にレーザ共振器の共振
器ミラーないしは閉鎖窓の固定機構に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a laser resonator, and more particularly to a fixing mechanism for a resonator mirror or closing window of a laser resonator.
周知のように、レーザ共振器においては一対の共振器ミ
ラーを互いに対向させて配置と１シなけｔｌばならない
。一般に、このような共振器ミラーを固定するミラーホ
ルダには、共振器ミラーの角度を微調整するだめの機構
が具備されている。As is well known, in a laser resonator, a pair of resonator mirrors must be arranged so as to face each other. Generally, a mirror holder for fixing such a resonator mirror is equipped with a mechanism for finely adjusting the angle of the resonator mirror.
ところで、封じ切り型のガスレーザでは、前記したミラ
ー角度調整の機能に加えて、ミノ−ホルダが密封構造に
保たれていることが心安とされる。By the way, in a sealed gas laser, in addition to the function of adjusting the mirror angle described above, it is said that the minnow holder is kept in a sealed structure for peace of mind.
このような要求を満たすものとして、特許出願公告昭５
４−３８４８０号明細書には、金属でｊ１４成さね永続
的な塑性変形が可能な領域を有するミラーホルダを具備
した装置が提案されている。当該シ装置では、塑性変形
が可能な領域にに貝をあてて共振器ミラーの角度調整を
行うものである。As something that satisfies these requirements, the patent application publication published in 1973
No. 4-38480 proposes a device comprising a mirror holder made of metal and having a region capable of permanent plastic deformation. In this device, the angle of the resonator mirror is adjusted by applying a shell to a region that can be plastically deformed.
しかしながら、該明細書に記載のされた装置では、薄肉
に構成された局所的領域の塑性変形を利用してミラーの
角度調整を行っているので、」ソ丁に示すような欠点を
有している。However, the device described in this specification adjusts the angle of the mirror by utilizing plastic deformation of a localized thin-walled area, so it has the drawbacks shown in "So-cho". There is.
（１）塑性変形の生じている領域には応力歪が発生する
ので、加熱された場合に熱変形を受は二ノーホルダが正
規の位置から変位する。従つ−Ｃ１共振器の光学系に狂
いが生じ、出力像下等をもたらす。これは、Ｈｅ−Ｎｅ
レーザのように小出力の装置では問題にならないが、Ｃ
Ｏ２レーザのように比較的出力の大きいものでは放電管
の発熱率、が人であり、塑性変形領域に影響を与えてし
まう。(1) Stress strain occurs in the area where plastic deformation occurs, so when heated, the two-way holder will be displaced from its normal position due to thermal deformation. Therefore, the optical system of the -C1 resonator is distorted, resulting in a lower output image. This is He-Ne
This is not a problem with low-output devices such as lasers, but C
In the case of a device with a relatively large output such as an O2 laser, the heat generation rate of the discharge tube is high, which affects the plastic deformation region.
（２）塑性変形をさせる領域は薄肉に形成された局所的
部位であるので、塑性変形によって該部位に応力歪が集
中的に発生する。従って、ミラー調整の際に該部位にク
ラック等が入る心配があり、細心の注意が必要とされた
。塘だ、調整を１１１１度もやり直すことができなかっ
た。(2) Since the region to be plastically deformed is a thin localized region, stress and strain are generated intensively in the region due to plastic deformation. Therefore, when adjusting the mirror, there is a risk that cracks will occur in the area, and great care must be taken. It's Tong, I couldn't redo the adjustment 1111 times.
本発明は前記した従来装置の欠点に鑑みてなされたもの
でミミラー調整を容易に行えかつ光学系を安定に保つこ
とのできるレーザ共振器の提供を目的９表する。The present invention has been made in view of the above-mentioned drawbacks of the conventional device, and has a ninth object to provide a laser resonator that can easily adjust the mirror and maintain a stable optical system.
以下本発明について添付図面を参照して詳細に説明する
。The present invention will be described in detail below with reference to the accompanying drawings.
第１図は本発明の一実施例を示す説明図である。FIG. 1 is an explanatory diagram showing one embodiment of the present invention.
図中、１はレーザ放電管を、２は終端部拐を、３は調整
子ジを、４はダイヤフラムを、５は介在部側を、６はミ
ラー保持部祠を、７は共振器ミラーを示、す。In the figure, 1 is the laser discharge tube, 2 is the terminal end, 3 is the adjuster, 4 is the diaphragm, 5 is the intervening part side, 6 is the mirror holding part, and 7 is the resonator mirror. show.
レーザ放電管１はカラスないしにセラミックス等から成
っており、該放電管の＝スＩ°１；に終端部７（４２の
一端が封着固定される。終端１部拐２１１１１１ ｆη
〕状ｔ状形ζ形成ており、中央部に開口２１を治し外周
部に７ランン２２を有する。開口２１は放′ｉれ管１内
に連通ずる。The laser discharge tube 1 is made of glass or ceramics, and one end of the terminal end 7 (42) is sealed and fixed to the =I°1; of the discharge tube.
It has a T-shape ζ with an opening 21 in the center and seven runs 22 on the outer periphery. The opening 21 communicates into the discharge tube 1.
終端部拐２の他端に＋ｄ、薄肉の金属から成るダイヤフ
ラム４が接着ないしは融着等によってＪｒ、１着固定さ
れる。該ダイヤフラム４は中央部Ｋ 開ｕ ４１を有す
る。A diaphragm 4 made of a thin metal is fixed to the other end of the terminal part 2 by adhesion or fusion. The diaphragm 4 has a central portion K opening 41 .
ダイヤフラム４の外周部には、円筒状の介在部材５が刺
着固定される。A cylindrical intervening member 5 is stuck and fixed to the outer circumference of the diaphragm 4 .
一方、共振器ミラー７の周＋１！４１Ｋ ６−１円イル
状のミソ−保持部材６が封着固定されており、該保持部
月６に介在部材５が固定されるっ
まだ、保持部材６の外周部には複数本の調整ネジ３が設
けられ、該ネジ３の先端１部か終飽４部４Ａ’ ２のフ
ランジ２２へねじ込まれ固定される。図示はし・てない
が、調整ネジ３は３本程度設けることが望ましい。On the other hand, the circumference of the resonator mirror 7 is +1!41K 6-1 The circular-shaped retaining member 6 is sealed and fixed, and the intervening member 5 is still fixed to the retaining portion 6. A plurality of adjustment screws 3 are provided on the outer periphery of the screw 3, and one of the tips of the screws 3 is screwed into the flange 22 of the final portion 4A'2 and fixed. Although not shown, it is desirable to provide about three adjustment screws 3.
このように４１４成された装置において、調整ネジ３を
調整することによってミラー保持部拐６は進退しようと
する。ここで、ダイヤフラム４は外力によって？♀易に
変形されるので、調整ネジ３の操作によって保持部！Ａ
’ ６は変位する。従って、３本のＡ整ネジによって共
振器ミラー７を該ミラーと対向して設置された共］辰器
ミラー（図示せず）に対して任意の角度に設定すること
ができる。In the device constructed as described above, the mirror holding part 6 attempts to move forward or backward by adjusting the adjustment screw 3. Here, is the diaphragm 4 caused by an external force? ♀Since it is easily deformed, the holding part can be adjusted by operating the adjustment screw 3! A
' 6 is displaced. Therefore, the resonator mirror 7 can be set at an arbitrary angle with respect to a mirror (not shown) placed opposite to the resonator mirror 7 using the three A-setting screws.
以−に詳述してきたように本発明の装置では、共（
振器ミラー７の角度調整をダイヤフラム４の機械的変形
によって許容している。周知のように、ダイヤフラムは
多少の機械的変形が生じてもクラック等が入るようなこ
とはないので、装置の破損のＩシ・配なくミラー調整が
行え′る。まだ、本発明の装置では、共振器ミラー７の
位置は調整ネジ３によって規定されている。従って、放
電管１の発熱によってダイヤフラム４が熱変形をきたし
共振器ミラー７が正規の位置からずれるようなことはな
いので、光学系を安定に保てる。そわ故、本発明は小出
力のレーザのみならず比較的出力の大きいＣＯ２レーザ
等にも利用できるものである。As described in detail above, in the device of the present invention, the angle of the resonator mirror 7 is allowed to be adjusted by mechanical deformation of the diaphragm 4. As is well known, the diaphragm is susceptible to some mechanical deformation. Even if cracks occur, the mirror adjustment can be performed without causing any damage to the device.However, in the device of the present invention, the position of the resonator mirror 7 is determined by the adjustment screw 3. Therefore, the diaphragm 4 is not thermally deformed due to the heat generated by the discharge tube 1, and the resonator mirror 7 is not displaced from its normal position, so the optical system can be kept stable. It can be used not only for high-output lasers but also for relatively high-output CO2 lasers and the like.
尚、本発明は前記実施例にのみ限定さ）］るものではな
い。例えば、共振器ミラーの代わりに閉鎖窓を設ければ
、ブリュースタ窓としても用いることが可能である。ま
た、介在部利とミラー保持部材とを一体的に構成するこ
とも可能である、同様に、レーザ放電管と終端部材とを
一体的に構成する−ととも可能である。Note that the present invention is not limited to the above embodiments. For example, if a closing window is provided in place of the resonator mirror, it can also be used as a Brewster window. It is also possible to integrally constitute the intervening part and the mirror holding member, and similarly, it is also possible to configure the laser discharge tube and the termination member integrally.
第１図は本発明の一実施例を示す説明図である。
１・・・レーザ放電管、２・・終端部拐、３・・調整イ
・ジ、４・・・ダイヤフラム、５・・・介在部拐、６・
・・ミラー保持部拐、７・・・共振器ミラー。
特許出願人
日本赤外線工業株式会社
代表者 末 永 徳 博FIG. 1 is an explanatory diagram showing one embodiment of the present invention. DESCRIPTION OF SYMBOLS 1...Laser discharge tube, 2...Terminal part removal, 3...Adjustment hole, 4...Diaphragm, 5...Intervening part removal, 6.
...Mirror holding part removed, 7...Resonator mirror. Patent applicant Japan Infrared Industry Co., Ltd. Representative Norihiro Suenaga
Claims (1)
機構が、筒状の終端部材と、終端部材に固定された開に
１を有するダイヤフラムと、ダイヤフラムに固定された
筒状の介在部材と、介在部制にし１定され共振器ミラー
を保持するミラー保持部４４と、ミラー保持部材を終端
部拐に固定する複数本の調整子ジとからなることを特徴
とするレーザ共振器。(1) The fixing mechanism for the optical element fixed to the terminal end of the laser discharge tube includes a cylindrical terminal member, a diaphragm having an opening 1 fixed to the terminal member, and a cylindrical intervening member fixed to the diaphragm. A laser resonator comprising: a mirror holding part 44 which is fixed as an intervening part and holds a resonator mirror; and a plurality of adjusters which fix the mirror holding member to the terminal end.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7872883A JPS59204291A (en) | 1983-05-04 | 1983-05-04 | Laser resonator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7872883A JPS59204291A (en) | 1983-05-04 | 1983-05-04 | Laser resonator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS59204291A true JPS59204291A (en) | 1984-11-19 |
Family
ID=13669940
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7872883A Pending JPS59204291A (en) | 1983-05-04 | 1983-05-04 | Laser resonator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59204291A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4941740A (en) * | 1989-06-22 | 1990-07-17 | United Technologies Corporation | Mirror mount with annular flat diaphragm encircling circular mirror and including a plurality of actuators |
| US5596404A (en) * | 1994-12-30 | 1997-01-21 | Albion Instruments, Inc. | Raman gas analysis system with flexible web and differential thread for precision optical alignment |
| US5703683A (en) * | 1996-05-28 | 1997-12-30 | Ohmeda Inc. | Extruded wobble plate optical alignment device |
| US10351477B2 (en) | 2013-12-10 | 2019-07-16 | Rogers Germany Gmbh | Method for producing a metal-ceramic substrate |
-
1983
- 1983-05-04 JP JP7872883A patent/JPS59204291A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4941740A (en) * | 1989-06-22 | 1990-07-17 | United Technologies Corporation | Mirror mount with annular flat diaphragm encircling circular mirror and including a plurality of actuators |
| US5596404A (en) * | 1994-12-30 | 1997-01-21 | Albion Instruments, Inc. | Raman gas analysis system with flexible web and differential thread for precision optical alignment |
| US5818579A (en) * | 1994-12-30 | 1998-10-06 | Ohmeda Inc. | Raman gas analysis system with cavity/boss assembly for precision optical alignment |
| US5912734A (en) * | 1994-12-30 | 1999-06-15 | Ohmeda Inc. | Raman gas analysis system with ball and socket assembly for precision optical alignment |
| US5703683A (en) * | 1996-05-28 | 1997-12-30 | Ohmeda Inc. | Extruded wobble plate optical alignment device |
| US10351477B2 (en) | 2013-12-10 | 2019-07-16 | Rogers Germany Gmbh | Method for producing a metal-ceramic substrate |
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