JPH0623943Y2 - マスフローコントローラー用ヒーター - Google Patents

マスフローコントローラー用ヒーター

Info

Publication number
JPH0623943Y2
JPH0623943Y2 JP17881387U JP17881387U JPH0623943Y2 JP H0623943 Y2 JPH0623943 Y2 JP H0623943Y2 JP 17881387 U JP17881387 U JP 17881387U JP 17881387 U JP17881387 U JP 17881387U JP H0623943 Y2 JPH0623943 Y2 JP H0623943Y2
Authority
JP
Japan
Prior art keywords
heater
mass flow
flow controller
heat
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP17881387U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0184022U (cs
Inventor
恒雄 相川
Original Assignee
日本タイラン株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本タイラン株式会社 filed Critical 日本タイラン株式会社
Priority to JP17881387U priority Critical patent/JPH0623943Y2/ja
Publication of JPH0184022U publication Critical patent/JPH0184022U/ja
Application granted granted Critical
Publication of JPH0623943Y2 publication Critical patent/JPH0623943Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measuring Volume Flow (AREA)
  • Flow Control (AREA)
JP17881387U 1987-11-26 1987-11-26 マスフローコントローラー用ヒーター Expired - Lifetime JPH0623943Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17881387U JPH0623943Y2 (ja) 1987-11-26 1987-11-26 マスフローコントローラー用ヒーター

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17881387U JPH0623943Y2 (ja) 1987-11-26 1987-11-26 マスフローコントローラー用ヒーター

Publications (2)

Publication Number Publication Date
JPH0184022U JPH0184022U (cs) 1989-06-05
JPH0623943Y2 true JPH0623943Y2 (ja) 1994-06-22

Family

ID=31470412

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17881387U Expired - Lifetime JPH0623943Y2 (ja) 1987-11-26 1987-11-26 マスフローコントローラー用ヒーター

Country Status (1)

Country Link
JP (1) JPH0623943Y2 (cs)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4195819B2 (ja) * 2003-01-17 2008-12-17 忠弘 大見 弗化水素ガスの流量制御方法及びこれに用いる弗化水素ガス用流量制御装置
KR102102142B1 (ko) * 2014-03-20 2020-04-20 히타치 긴조쿠 가부시키가이샤 열식 질량 유량계 및 이것을 사용한 질량 유량 제어 장치

Also Published As

Publication number Publication date
JPH0184022U (cs) 1989-06-05

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