JPH0623565Y2 - Ｃｖｄ装置用原料収納容器 - Google Patents

Ｃｖｄ装置用原料収納容器

Info

Publication number
JPH0623565Y2
JPH0623565Y2 JP1988039633U JP3963388U JPH0623565Y2 JP H0623565 Y2 JPH0623565 Y2 JP H0623565Y2 JP 1988039633 U JP1988039633 U JP 1988039633U JP 3963388 U JP3963388 U JP 3963388U JP H0623565 Y2 JPH0623565 Y2 JP H0623565Y2
Authority
JP
Japan
Prior art keywords
raw material
container
storage container
powder
material storage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988039633U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01147254U (enrdf_load_stackoverflow
Inventor
進午 村上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP1988039633U priority Critical patent/JPH0623565Y2/ja
Publication of JPH01147254U publication Critical patent/JPH01147254U/ja
Application granted granted Critical
Publication of JPH0623565Y2 publication Critical patent/JPH0623565Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP1988039633U 1988-03-28 1988-03-28 Ｃｖｄ装置用原料収納容器 Expired - Lifetime JPH0623565Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988039633U JPH0623565Y2 (ja) 1988-03-28 1988-03-28 Ｃｖｄ装置用原料収納容器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988039633U JPH0623565Y2 (ja) 1988-03-28 1988-03-28 Ｃｖｄ装置用原料収納容器

Publications (2)

Publication Number Publication Date
JPH01147254U JPH01147254U (enrdf_load_stackoverflow) 1989-10-11
JPH0623565Y2 true JPH0623565Y2 (ja) 1994-06-22

Family

ID=31266133

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988039633U Expired - Lifetime JPH0623565Y2 (ja) 1988-03-28 1988-03-28 Ｃｖｄ装置用原料収納容器

Country Status (1)

Country Link
JP (1) JPH0623565Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007520052A (ja) * 2003-09-30 2007-07-19 東京エレクトロン株式会社 金属−カルボニルプリカーサから金属層を堆積させる方法。

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1160355B1 (en) * 2000-05-31 2004-10-27 Shipley Company LLC Bubbler
US6921062B2 (en) * 2002-07-23 2005-07-26 Advanced Technology Materials, Inc. Vaporizer delivery ampoule

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5888122U (ja) * 1981-12-09 1983-06-15 日立造船株式会社 タンク内液の検出装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007520052A (ja) * 2003-09-30 2007-07-19 東京エレクトロン株式会社 金属−カルボニルプリカーサから金属層を堆積させる方法。

Also Published As

Publication number Publication date
JPH01147254U (enrdf_load_stackoverflow) 1989-10-11

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