JPH0623565Y2 - Ｃｖｄ装置用原料収納容器 - Google Patents
Ｃｖｄ装置用原料収納容器Info
- Publication number
- JPH0623565Y2 JPH0623565Y2 JP1988039633U JP3963388U JPH0623565Y2 JP H0623565 Y2 JPH0623565 Y2 JP H0623565Y2 JP 1988039633 U JP1988039633 U JP 1988039633U JP 3963388 U JP3963388 U JP 3963388U JP H0623565 Y2 JPH0623565 Y2 JP H0623565Y2
- Authority
- JP
- Japan
- Prior art keywords
- raw material
- container
- storage container
- powder
- material storage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000002994 raw material Substances 0.000 title claims description 66
- 238000003860 storage Methods 0.000 title description 14
- 239000000843 powder Substances 0.000 claims description 19
- 230000008016 vaporization Effects 0.000 claims description 9
- 238000010438 heat treatment Methods 0.000 claims description 7
- 239000007787 solid Substances 0.000 claims description 2
- 239000011651 chromium Substances 0.000 description 7
- 238000009834 vaporization Methods 0.000 description 7
- 229910052804 chromium Inorganic materials 0.000 description 6
- 239000012159 carrier gas Substances 0.000 description 5
- 238000005229 chemical vapour deposition Methods 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 5
- 238000012544 monitoring process Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988039633U JPH0623565Y2 (ja) | 1988-03-28 | 1988-03-28 | Ｃｖｄ装置用原料収納容器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988039633U JPH0623565Y2 (ja) | 1988-03-28 | 1988-03-28 | Ｃｖｄ装置用原料収納容器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01147254U JPH01147254U (enrdf_load_stackoverflow) | 1989-10-11 |
| JPH0623565Y2 true JPH0623565Y2 (ja) | 1994-06-22 |
Family
ID=31266133
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988039633U Expired - Lifetime JPH0623565Y2 (ja) | 1988-03-28 | 1988-03-28 | Ｃｖｄ装置用原料収納容器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0623565Y2 (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007520052A (ja) * | 2003-09-30 | 2007-07-19 | 東京エレクトロン株式会社 | 金属−カルボニルプリカーサから金属層を堆積させる方法。 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE60106675T2 (de) * | 2000-05-31 | 2005-12-01 | Shipley Co., L.L.C., Marlborough | Verdampfer |
| US6921062B2 (en) * | 2002-07-23 | 2005-07-26 | Advanced Technology Materials, Inc. | Vaporizer delivery ampoule |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5888122U (ja) * | 1981-12-09 | 1983-06-15 | 日立造船株式会社 | タンク内液の検出装置 |
-
1988
- 1988-03-28 JP JP1988039633U patent/JPH0623565Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007520052A (ja) * | 2003-09-30 | 2007-07-19 | 東京エレクトロン株式会社 | 金属−カルボニルプリカーサから金属層を堆積させる方法。 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01147254U (enrdf_load_stackoverflow) | 1989-10-11 |
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