JPH06234530A - Production of quartz glass - Google Patents

Production of quartz glass

Info

Publication number
JPH06234530A
JPH06234530A JP5022293A JP2229393A JPH06234530A JP H06234530 A JPH06234530 A JP H06234530A JP 5022293 A JP5022293 A JP 5022293A JP 2229393 A JP2229393 A JP 2229393A JP H06234530 A JPH06234530 A JP H06234530A
Authority
JP
Japan
Prior art keywords
gas
quartz glass
burner
ingot
homogeneity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5022293A
Other languages
Japanese (ja)
Other versions
JP2814866B2 (en
Inventor
Jun Takano
潤 高野
Kazuhiro Nakagawa
和博 中川
Norio Komine
典男 小峯
Hiroki Jinbo
宏樹 神保
Hiroyuki Hiraiwa
弘之 平岩
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=12078705&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=JPH06234530(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Priority to JP5022293A priority Critical patent/JP2814866B2/en
Application filed by Nikon Corp filed Critical Nikon Corp
Publication of JPH06234530A publication Critical patent/JPH06234530A/en
Priority to US08/484,863 priority patent/US5699183A/en
Priority to US08/479,130 priority patent/US5702495A/en
Priority to US08/509,223 priority patent/US5703712A/en
Priority to US08/648,867 priority patent/US5696624A/en
Priority to US08/711,471 priority patent/US5719698A/en
Publication of JP2814866B2 publication Critical patent/JP2814866B2/en
Application granted granted Critical
Anticipated expiration legal-status Critical
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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70241—Optical aspects of refractive lens systems, i.e. comprising only refractive elements
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C03B19/1415—Reactant delivery systems
    • C03B19/1423—Reactant deposition burners
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00—Glass compositions
    • C03C3/04—Glass compositions containing silica
    • C03C3/06—Glass compositions containing silica with more than 90% silica by weight, e.g. quartz
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/36—Fuel or oxidant details, e.g. flow rate, flow rate ratio, fuel additives
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/70—Control measures
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2201/00—Glass compositions
    • C03C2201/02—Pure silica glass, e.g. pure fused quartz
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2203/00—Production processes
    • C03C2203/40—Gas-phase processes

Abstract

PURPOSE:To provide a producing method of a quartz glass excellent in light transmissivity and high in the homogeneity of refractive index. CONSTITUTION:In the producing for quartz glass by jetting an Si compound gas, gaseous oxygen and gaseous hydrogen from a burner 1 to burn and depositing a quartz glass on a target 3 to form an ingot 7, the temp. distribution of the ingot is controlled to be suitable for the homogeneity of refractive index by changing the gas flow rate of the burner by a mass flow controller 8 in accordance with the information obtained by measuring the temp. distribution of the head part of the ingot 7.

Description

【発明の詳細な説明】Detailed Description of the Invention

【０００１】[0001]

【産業上の利用分野】本発明は石英ガラスの製造方法に
関するものであり、特に高均質性が要求される合成石英
ガラス部材を必要とする分野、例えば光リソグラフィ
ー、高精度分光器、レーザー等の精密光学機器に有用と
される高均質な光学用合成石英ガラスに関するものであ
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for producing quartz glass, and particularly in fields requiring a synthetic quartz glass member requiring high homogeneity, such as photolithography, high precision spectroscope, laser and the like. The present invention relates to a highly homogeneous synthetic quartz glass for optics, which is useful for precision optical instruments.

【０００２】[0002]

【従来の技術】従来、シリコン等のウエハ上に集積回路
の微細パターンを露光・転写する光リソグラフィー技術
においては、ステッパーと呼ばれる露光装置が用いられ
ている。このステッパーの光源は、近年のＬＳＩの高集
積化にともなってｇ線（４３６ｎｍ）からｉ線（３６５
ｎｍ）、さらにはＫｒＦ（２４８ｎｍ）やＡｒＦ（１９
３ｎｍ）エキシマレーザーへと短波長化が進められてい
る。2. Description of the Related Art Conventionally, an exposure apparatus called a stepper has been used in an optical lithography technique for exposing and transferring a fine pattern of an integrated circuit on a wafer such as silicon. The light source of this stepper is g-line (436 nm) to i-line (365 nm) with the recent high integration of LSI.
nm), and further KrF (248 nm) and ArF (19 nm)
(3 nm) Shorter wavelengths are being promoted to excimer lasers.

【０００３】一般に、ステッパーの照明系あるいは投影
レンズとして用いられる光学ガラスは、ｉ線よりも短い
波長領域では光透過率が低下するため、従来の光学ガラ
スにかえて合成石英ガラスやＣａＦ2（蛍石）等のフッ
化物単結晶を用いることが提案されている。このよう
に、紫外線リソグラフィー用の光学素子として用いられ
る石英ガラスには、紫外域の高透過性と屈折率の高均質
性が要求されている。紫外域の高透過性を実現するため
には、石英ガラス中の不純物濃度を抑える必要がある。
そこで、石英ガラスの原料となるＳｉ化合物ガス（Ｓｉ
化合物ガスを送り出すために、Ｏ2、Ｈ2等のキャリアガ
スが用いられる）と加熱のための燃焼ガス（Ｏ2ガスと
Ｈ2ガス）とをバーナーから流出し、火炎内で石英ガラ
スを堆積させる火炎加水分解法が一般的に用いられてい
る。Generally, the optical glass used as an illumination system or a projection lens of a stepper has a low light transmittance in a wavelength region shorter than the i-line, and therefore synthetic quartz glass or CaF 2 (fluorite) is used instead of the conventional optical glass. It has been proposed to use a fluoride single crystal such as stone. As described above, quartz glass used as an optical element for ultraviolet lithography is required to have high transmittance in the ultraviolet region and high homogeneity of the refractive index. In order to realize high transmittance in the ultraviolet region, it is necessary to suppress the impurity concentration in quartz glass.
Therefore, a Si compound gas (Si
Carrier gases such as O 2 and H 2 are used to send out the compound gas) and combustion gases (O 2 gas and H 2 gas) for heating are discharged from the burner, and quartz glass is deposited in the flame. The flame hydrolysis method is commonly used.

【０００４】この方法は、原料、燃焼ガスの不純物を抑
えることが容易なため、高純度な石英ガラスを得られる
ことが知られている。It is known that this method makes it possible to obtain high-purity quartz glass because it is easy to suppress impurities in raw materials and combustion gas.

【０００５】[0005]

【発明が解決しようとする課題】しかしながら、従来の
火炎加水分解法により製造された石英ガラスは、不純物
濃度が抑えられてはいるが、屈折率の均質性に関しては
満足のいくものが得られていなかった。本発明の目的
は、このような問題を解決し、光透過性がよく、かつ屈
折率の均質性の高い石英ガラスの製造方法を提供するこ
とにある。However, although the silica glass produced by the conventional flame hydrolysis method has a low impurity concentration, it is satisfactory in terms of the homogeneity of the refractive index. There wasn't. An object of the present invention is to solve the above problems and to provide a method for producing quartz glass having good light transmittance and high homogeneity of refractive index.

【０００６】[0006]

【課題を解決するための手段】屈折率の均質性は、ター
ゲット上にインゴットが形成されるときの径方向（横方
向）から見た温度分布に依存すると考えられる。そこ
で、従来は、バーナーの先端部の形状や、原料ガス、燃
焼ガス（Ｏ2ガスとＨ2ガス）の量や比を、あらかじめ均
質化の最適な温度分布となるように予測して設定してい
た。It is considered that the homogeneity of the refractive index depends on the temperature distribution seen from the radial direction (lateral direction) when the ingot is formed on the target. Therefore, conventionally, the shape of the tip of the burner, the amount and the ratio of the raw material gas and the combustion gas (O 2 gas and H 2 gas) are set in advance by predicting the optimum temperature distribution for homogenization. Was there.

【０００７】しかしながら、温度分布は必ずしも予測通
りにはならず、また、どの程度の均質性の石英ガラスが
得られるかは、実際に製造して均質性を測定するまでわ
からなかった。本発明者らは、このような状況を踏まえ
た上で、屈折率の均質性を最適化するようにインゴット
のヘッド部の温度分布を調整すべく鋭意研究を重ねた結
果、ヘッド部の温度分布を計測し、その情報に応じてバ
ーナーのガス量を変化させることにより上記問題を解決
できることを見い出し、本発明を成すに至った。However, the temperature distribution is not always as predicted, and the degree of homogeneity of the silica glass obtained has not been known until actual production and measurement of the homogeneity. Based on such a situation, the present inventors have earnestly studied to adjust the temperature distribution of the head portion of the ingot so as to optimize the homogeneity of the refractive index, and as a result, the temperature distribution of the head portion has been found. The inventors have found that the above problems can be solved by measuring and measuring the gas and changing the gas amount of the burner in accordance with the information, and have completed the present invention.

【０００８】よって、本発明は、Ｓｉ化合物ガスとＯ2
ガスとＨ2ガスとをバーナーから噴出して燃焼させ、タ
ーゲット上に石英ガラスを堆積しインゴットを形成する
石英ガラスの製造方法において、前記インゴットのヘッ
ド部の温度分布を計測して得られた情報により前記バー
ナーのガス量を変化させることを特徴とする石英ガラス
の製造方法（請求項１）を提供するものである。Therefore, according to the present invention, Si compound gas and O 2
Information obtained by measuring the temperature distribution of the head portion of the ingot in a method for producing a quartz glass in which gas and H 2 gas are jetted from a burner and burned to deposit quartz glass on a target to form an ingot. The method of manufacturing quartz glass (claim 1) is characterized in that the amount of gas in the burner is changed according to the above.

【０００９】また、本発明の石英ガラスの製造方法にお
いて、バーナーのガス量を変化させる手段として、好ま
しくはマスフローコントローラが用いられる（請求項
２）。In the method for producing quartz glass according to the present invention, a mass flow controller is preferably used as the means for changing the gas amount of the burner (claim 2).

【００１０】[0010]

【作用】従来の製造方法においては、屈折率の均質化に
最適な条件で石英ガラスのインゴットを一定の速度で安
定して合成させるために、バーナーのガス量はほとんど
一定であった。ところが、本発明者らが研究した結果、
一定のガス量では、ヘッドの温度分布に対する様々な外
乱要因により高均質の屈折率分布を持つ石英ガラスが得
られないことがわかった。さらに研究したところ、バー
ナーの中央部の燃焼ガスのガス量がヘッドの温度分布に
強く作用することと、周辺部の燃焼ガスのガス量はヘッ
ドの温度分布への影響が少ないことがわかった。したが
って、本発明においては、バーナー中央部のガス量をヘ
ッドの温度分布制御に利用し、バーナー周辺部のガス量
はインゴットを一定の速度で安定して合成させる制御に
利用した。これにより、絶えず合成速度の安定化を考慮
しながら屈折率の均質性を保つのに最適なガス量を制御
することができた。In the conventional manufacturing method, the gas amount of the burner was almost constant in order to stably synthesize the quartz glass ingot at a constant rate under the optimum conditions for homogenizing the refractive index. However, as a result of the research conducted by the present inventors,
It was found that with a constant gas amount, silica glass with a highly uniform refractive index distribution cannot be obtained due to various disturbance factors with respect to the temperature distribution of the head. Further research revealed that the amount of combustion gas in the central part of the burner strongly affects the temperature distribution of the head, and that the amount of combustion gas in the peripheral part has little effect on the temperature distribution of the head. Therefore, in the present invention, the gas amount in the central portion of the burner is used for controlling the temperature distribution of the head, and the gas amount in the peripheral portion of the burner is used for controlling the ingot to be stably synthesized at a constant speed. As a result, it was possible to control the optimum amount of gas for maintaining the homogeneity of the refractive index while constantly considering the stabilization of the synthesis rate.

【００１１】本発明の石英ガラスの製造方法により製造
された石英ガラスは、主としてレンズ、プリズム、反射
板等の光学素子の母材として用いられる。この母材の外
周部分は削り取られ、必要に応じて切断、再成形されて
任意の形状に加工される。そして、内部歪をなくすため
にアニール（熱処理）した後、研磨、コーティング工程
を経て光学素子となる。The quartz glass produced by the method for producing quartz glass of the present invention is mainly used as a base material for optical elements such as lenses, prisms and reflectors. The outer peripheral portion of the base material is scraped off, cut and re-formed as required to be processed into an arbitrary shape. Then, after annealing (heat treatment) to eliminate the internal strain, polishing and coating steps are performed to obtain an optical element.

【００１２】[0012]

【実施例】以下、火炎加水分解法を用いた本発明の石英
ガラスの製造方法の一実施例について説明するが、本発
明はこれに限られるものではない。図１は本発明の一実
施例を示す概念図である。バーナー１は、炉２の上部か
らターゲット３にその先端部を向けて設置されている。
炉壁には観察用の窓４と、ＩＲカメラ観察用の窓５と、
排気孔６とがそれぞれ設けられている。さらに、炉の下
部には、インゴット７形成用のターゲット３が設置され
ている。EXAMPLES An example of the method for producing quartz glass of the present invention using the flame hydrolysis method will be described below, but the present invention is not limited to this. FIG. 1 is a conceptual diagram showing an embodiment of the present invention. The burner 1 is installed from the top of the furnace 2 to the target 3 with its tip end facing.
On the furnace wall, an observation window 4 and an IR camera observation window 5,
Exhaust holes 6 are provided respectively. Further, a target 3 for forming an ingot 7 is installed in the lower part of the furnace.

【００１３】図２はバーナー先端部の概略図である。石
英管１１からＳｉＣｌ4ガスおよびキャリアガスが、加
熱のための燃焼ガスとして中央部の石英管１２及び周辺
部の石英管１３からＯ2ガスとＨ2ガスとがそれぞれ流出
される。それぞれのガス量は、バーナー先端部の形状等
によっても異なるが、本実施例の場合は、ＳｉＣｌ4ガ
ス５〜５０ｇ／min.、Ｏ2ガス２０〜２５０ｌ／min.、
Ｈ 2ガス４０〜５００ｌ／min.の範囲で変化させた。FIG. 2 is a schematic view of the tip of the burner. stone
English tube 11 to SiClFourGas and carrier gas
Quartz tube 12 in the center and its surroundings as combustion gas for heat
From the quartz tube 132Gas and H2Gas and spill respectively
To be done. The amount of each gas depends on the shape of the burner tip, etc.
In the case of this embodiment, SiClFourMoth
5 to 50 g / min., O2Gas 20-250 l / min.,
H 2The gas was changed in the range of 40 to 500 l / min.

【００１４】燃焼ガスによる火炎により、ＳｉＣｌ4ガ
スが酸化されて熔融石英となり、ターゲット上に堆積し
インゴットを形成する。インゴットのヘッド部は燃焼ガ
スによる火炎におおわれている。インゴットのヘッド部
の温度測定にはＩＲカメラ９を使用し、画面をデータ処
理するためのコンピュータ１０、および、ガス量を制御
するマスフローコントローラ８（ＭＦＣと略す）で構成
されている。コンピュータは、処理された画面データか
ら最適なガス量を計算し、ＭＦＣに信号を送ることによ
り、オンラインでの制御が可能になっている。The flame of the combustion gas oxidizes the SiCl 4 gas to form fused quartz, which is deposited on the target to form an ingot. The head portion of the ingot is covered with the flame due to the combustion gas. An IR camera 9 is used to measure the temperature of the head portion of the ingot, and it is composed of a computer 10 for data processing of the screen and a mass flow controller 8 (abbreviated as MFC) for controlling the gas amount. The computer calculates the optimum amount of gas from the processed screen data and sends a signal to the MFC to enable online control.

【００１５】図３は実験的にＭＦＣによりバーナーの燃
焼ガスのガス量を変化させた時のインゴットのヘッド部
の温度分布と屈折率の均質性の結果を示す。本実施例に
おいては、インゴットを形成している際に径方向（横方
向）から見た温度分布を計測し、この情報に応じてバー
ナーのガス量を調整することにより屈折率の均質化に最
適な温度分布を保つことが可能となり、インゴットの径
方向の均質性の向上した石英ガラスを製造することがで
きた。FIG. 3 shows the results of the homogeneity of the temperature distribution and the refractive index of the head part of the ingot when the gas amount of the combustion gas of the burner was experimentally changed by the MFC. In the present embodiment, the temperature distribution seen from the radial direction (lateral direction) during the formation of the ingot is measured, and the burner gas amount is adjusted according to this information to optimize the homogenization of the refractive index. It was possible to maintain a wide temperature distribution, and it was possible to produce silica glass with improved radial homogeneity of the ingot.

【００１６】さらに、ヘッド部の温度分布を最適値に保
つために中央部ガス量を制御すると同時に、石英ガラス
のインゴットを一定の速度で合成するために周辺部のガ
ス量を制御することにより、インゴットの径方向（横方
向）から見た均質性の向上した石英ガラスを一定の速度
で安定して製造することができた。Further, by controlling the amount of gas in the central part in order to keep the temperature distribution in the head part at an optimum value, and at the same time controlling the amount of gas in the peripheral part in order to synthesize the ingot of quartz glass at a constant speed, Quartz glass with improved homogeneity viewed from the radial direction (transverse direction) of the ingot could be stably manufactured at a constant speed.

【００１７】[0017]

【発明の効果】以上の様に、本発明の石英ガラスの製造
方法によれば、温度分布を計測し、この情報に応じてバ
ーナーのガス量を変化させることにより屈折率の均質性
を最適化するような温度分布とすることができ、結果と
して不純物濃度が低く、かつ均質性の高い石英ガラスが
得られる。As described above, according to the method for producing quartz glass of the present invention, the temperature distribution is measured and the burner gas amount is changed according to this information to optimize the homogeneity of the refractive index. Such a temperature distribution can be obtained, and as a result, silica glass having a low impurity concentration and high homogeneity can be obtained.

【図面の簡単な説明】[Brief description of drawings]

【図１】 本発明の実施例１に用いられる石英ガラス製
造装置の概念図である。FIG. 1 is a conceptual diagram of a quartz glass manufacturing apparatus used in Example 1 of the present invention.

【図２】 図１の製造装置のバーナー先端部の形状を示
す概念図である。FIG. 2 is a conceptual diagram showing the shape of a burner tip portion of the manufacturing apparatus of FIG.

【図３】 バーナーのガス量を変化させたときのインゴ
ットのヘッド部の温度分布と屈折率の均質性の結果を示
す説明図である。FIG. 3 is an explanatory diagram showing the results of the temperature distribution in the head portion of the ingot and the homogeneity of the refractive index when the amount of gas in the burner is changed.

【符号の説明】[Explanation of symbols]

１ バーナー ２ 炉 ３ ターゲット ４ 観察用窓 ５ ＩＲカメラ観察用窓 ６ 排気孔 ７ インゴット ８ マスフローコントローラ ９ ＩＲカメラ １０ コンピュータ １１ ＳｉＣｌ4ガス用石英管 １２ バーナー中央部のＯ2、Ｈ2ガス用石英管 １３ バーナー周辺部のＯ2、Ｈ2ガス用石英管1 burner 2 furnace 3 target 4 observation window 5 IR camera observation window 6 exhaust hole 7 ingot 8 mass flow controller 9 IR camera 10 computer 11 SiCl 4 gas quartz tube 12 burner O 2 and H 2 gas quartz tube 13 Quartz tube for O 2 and H 2 gas around burner

───────────────────────────────────────────────────── フロントページの続き (72)発明者 神保 宏樹 東京都千代田区丸の内３丁目２番３号 株 式会社ニコン内 (72)発明者 平岩 弘之 東京都千代田区丸の内３丁目２番３号 株 式会社ニコン内 ─────────────────────────────────────────────────── ─── Continued Front Page (72) Inventor Hiroki Jimbo 3 2-3 Marunouchi, Chiyoda-ku, Tokyo Nikon (72) Inventor Hiroyuki Hiraiwa 3 2-3 Marunouchi, Chiyoda-ku, Tokyo Company Nikon

Claims (2)

【特許請求の範囲】[Claims] 【請求項１】Ｓｉ化合物ガスとＯ2ガスとＨ2ガスとをバ
ーナーから噴出して燃焼させ、ターゲット上に石英ガラ
スを堆積しインゴットを形成する石英ガラスの製造方法
において、前記インゴットのヘッド部の温度分布を計測
して、得られた情報により前記バーナーのガス量を変化
させることを特徴とする石英ガラスの製造方法。1. A method for producing a quartz glass, wherein a Si compound gas, O 2 gas and H 2 gas are jetted from a burner and burned to deposit quartz glass on a target to form an ingot. Is measured, and the amount of gas in the burner is changed according to the obtained information. 【請求項２】請求項１に記載の製造方法において、前記
バーナーのガス量を変化させる手段としてマスフローコ
ントローラを用いることを特徴とする石英ガラスの製造
方法。2. The method for producing quartz glass according to claim 1, wherein a mass flow controller is used as a means for changing the gas amount of the burner.
JP5022293A 1993-02-10 1993-02-10 Manufacturing method of quartz glass Expired - Lifetime JP2814866B2 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP5022293A JP2814866B2 (en) 1993-02-10 1993-02-10 Manufacturing method of quartz glass
US08/484,863 US5699183A (en) 1993-02-10 1995-06-07 Silica glass member for UV-lithography, method for silica glass production, and method for silica glass member production
US08/479,130 US5702495A (en) 1993-02-10 1995-06-07 Silica glass member for UV-lithography, method for silica glass production, and method for silica glass member production
US08/509,223 US5703712A (en) 1993-02-10 1995-07-31 Silica glass member for UV-lithography, method for silica glass production, and method for silica glass member production
US08/648,867 US5696624A (en) 1993-02-10 1996-05-16 Silica glass member for UV-lithography, method for silica glass production, and method for silica glass member production
US08/711,471 US5719698A (en) 1993-02-10 1996-09-06 Silica glass member for UV-lithography, method for silica glass production, and method for silica glass member production

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5022293A JP2814866B2 (en) 1993-02-10 1993-02-10 Manufacturing method of quartz glass

Publications (2)

Publication Number Publication Date
JPH06234530A true JPH06234530A (en) 1994-08-23
JP2814866B2 JP2814866B2 (en) 1998-10-27

Family

ID=12078705

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5022293A Expired - Lifetime JP2814866B2 (en) 1993-02-10 1993-02-10 Manufacturing method of quartz glass

Country Status (1)

Country Link
JP (1) JP2814866B2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5696038A (en) * 1995-09-12 1997-12-09 Corning Incorporated Boule oscillation patterns in methods of producing fused silica glass
US5698484A (en) * 1995-09-12 1997-12-16 Corning Incorporated Method and containment vessel for producing fused silica glass and the fused silica blank produced
US5951730A (en) * 1995-09-12 1999-09-14 Corning Incorporated Furnace for producing fused silica glass
JP2005503316A (en) * 2001-09-27 2005-02-03 コーニング インコーポレイテッド Improved method and furnace for quartz glass production
CN113683291A (en) * 2021-07-30 2021-11-23 江苏亨通智能科技有限公司 Method for producing large-size and high-uniformity synthetic quartz glass weight

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5696038A (en) * 1995-09-12 1997-12-09 Corning Incorporated Boule oscillation patterns in methods of producing fused silica glass
US5698484A (en) * 1995-09-12 1997-12-16 Corning Incorporated Method and containment vessel for producing fused silica glass and the fused silica blank produced
US5951730A (en) * 1995-09-12 1999-09-14 Corning Incorporated Furnace for producing fused silica glass
JP2005503316A (en) * 2001-09-27 2005-02-03 コーニング インコーポレイテッド Improved method and furnace for quartz glass production
CN113683291A (en) * 2021-07-30 2021-11-23 江苏亨通智能科技有限公司 Method for producing large-size and high-uniformity synthetic quartz glass weight

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