JPH06232612A - Dielectric resonator - Google Patents

Dielectric resonator

Info

Publication number
JPH06232612A
JPH06232612A JP3257593A JP3257593A JPH06232612A JP H06232612 A JPH06232612 A JP H06232612A JP 3257593 A JP3257593 A JP 3257593A JP 3257593 A JP3257593 A JP 3257593A JP H06232612 A JPH06232612 A JP H06232612A
Authority
JP
Japan
Prior art keywords
dielectric
electrode
internal electrode
sheet
dielectric resonator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3257593A
Other languages
Japanese (ja)
Inventor
Keiichi Kagami
慶一 鏡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP3257593A priority Critical patent/JPH06232612A/en
Publication of JPH06232612A publication Critical patent/JPH06232612A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To obtain a dielectric resonator coping with miniaturization, formed with high precision and whose resonance frequency is stable by forming an internal electrode into a plated shape in the dielectric resonator in which the internal electrode is formed in a dielectric body and an outer electrode is formed around the dielectric body. CONSTITUTION:A plate-shaped internal electrode 2 is formed in the middle of a dielectric body 1 and an outer electrode 3 is formed around the dielectric body 1. One end of the internal electrode 2 is connected to the outer electrode 3 at a connection part to form a short-circuit end and the other end is not connected to the outer electrode 3 to form an open end. The dielectric body 1 and the internal electrode 2 are formed by laminating and pressing dielectric sheets including at least a dielectric material and electrode sheets formed by printing the internal electrode 2 to a prescribed position on the dielectric sheet. Furthermore, a width W1 of the internal electrode 2 is selected to be 20-80% of a width W2 of the dielectric body 1, the thickness of the internal electrode 2 is selected to be 3-30mum, the thickness of the dielectric sheet is selected to be 50-1000mum, and the thickness of the outer electrode 3 is selected to be 3-30mum.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は誘電体共振器に係わるも
のであり、詳細にはその形状に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a dielectric resonator, and more particularly to its shape.

【0002】[0002]

【従来の技術】例えば、自動車用無線電話機や携帯用無
線電話機の帯域フィルターとして、複数の誘電体共振器
を組み合わせたものが用いられている。上記誘電体共振
器は、図5に示すように、中心に空洞12を有する誘電
体11の内壁及び外壁に内部電極13及び外部電極14
が形成されてなるものである。なお、図5中に示した誘
電体共振器は1/4波長TEMモードの誘電体共振器で
ある。この誘電体共振器の断面図を図6に示すが、内部
電極13が一端で接続部15により外部電極14と接続
されて短絡端11aが形成され、内部電極13の他端は
外部電極14と接続されずに解放端11bを形成してい
る。
2. Description of the Related Art For example, a combination of a plurality of dielectric resonators is used as a bandpass filter for an automobile radio telephone or a portable radio telephone. As shown in FIG. 5, the dielectric resonator has an inner electrode 13 and an outer electrode 14 on an inner wall and an outer wall of a dielectric 11 having a cavity 12 at the center.
Are formed. The dielectric resonator shown in FIG. 5 is a quarter-wave TEM mode dielectric resonator. A cross-sectional view of this dielectric resonator is shown in FIG. 6. The internal electrode 13 is connected at one end to the external electrode 14 by the connecting portion 15 to form the short-circuit end 11a, and the other end of the internal electrode 13 is connected to the external electrode 14. The open end 11b is formed without being connected.

【0003】このような誘電体共振器は、次のようにし
て製造される。先ず、一軸プレス成形或いは射出成形等
の手法によって誘電体材料と高分子材料よりなる誘電体
スラリーを中心に空洞を有する誘電体共振器の形状に成
形する。次に、該成形物を焼成してセラミックである誘
電体を得る。そして、導電塗料を焼き付ける或いは無電
解メッキを施す等の手法によって、この誘電体の内壁及
び外壁に内部電極及び外部電極を形成する。この時、外
部電極は誘電体の周囲全面に形成されることとなるた
め、内部電極は外部電極と両端で接続されることとな
る。そこで、内部電極の一端に接続される外部電極を除
去し、解放端とし、また他端である短絡端においても空
洞上に形成される外部電極を除去し、空洞の両端が開口
部となるようにして、図5に示すような誘電体共振器を
得る。
Such a dielectric resonator is manufactured as follows. First, a dielectric resonator made of a dielectric material and a polymer material is molded into a shape of a dielectric resonator having a cavity at the center by a method such as uniaxial press molding or injection molding. Next, the molded product is fired to obtain a ceramic dielectric. Then, an internal electrode and an external electrode are formed on the inner wall and the outer wall of this dielectric by a method such as baking a conductive paint or applying electroless plating. At this time, since the external electrode is formed on the entire surface around the dielectric, the internal electrode is connected to the external electrode at both ends. Therefore, the external electrode connected to one end of the internal electrode is removed to make it an open end, and the external electrode formed on the cavity is also removed at the short-circuit end which is the other end so that both ends of the cavity become openings. Then, a dielectric resonator as shown in FIG. 5 is obtained.

【0004】[0004]

【発明が解決しようとする課題】近年においては、前述
のような自動車用無線電話機や携帯用無線電話機といっ
た通信機器の小型化が進められており、これらの部品と
して使用される誘電体共振器においても小型化が望ま
れ、具体的には外形寸法2mm以下、内部電極寸法1m
m以下程度のものが要求されている。
In recent years, miniaturization of communication devices such as the above-mentioned automobile radio telephones and portable radio telephones has been promoted, and in dielectric resonators used as these components. Is also desired to be smaller, specifically, the outer dimensions are 2 mm or less, and the internal electrode dimensions are 1 m.
Those of about m or less are required.

【0005】ところが、中心に空洞を有する誘電体共振
器の誘電体は、前述のように一軸プレス成形或いは射出
成形によって成形されるため、誘電体共振器の小型化に
は限界がある。すなわち、このような成形方法において
は、金型の強度の問題から成形物に形成される空洞を小
さくするには限界があり、上記のような寸法の誘電体共
振器を形成する誘電体を成形することは困難である。従
って、上記のような誘電体共振器の小型化には限界が生
じる。
However, since the dielectric of the dielectric resonator having a cavity at the center is molded by uniaxial press molding or injection molding as described above, there is a limit to miniaturization of the dielectric resonator. That is, in such a molding method, there is a limit to the size of the cavity formed in the molded product due to the problem of the strength of the mold, and the dielectric body forming the dielectric resonator having the above dimensions is molded. Is difficult to do. Therefore, there is a limit to miniaturization of the dielectric resonator as described above.

【0006】また、このような誘電体共振器の共振周波
数は、誘電体共振器の外形寸法によって決定される。図
6に示すような誘電体共振器の長さをL、誘電体の比誘
電率をεr とし、光速をCとした場合の共振周波数f0
は次のように表される。 f0 =C/(4L√εr
The resonance frequency of such a dielectric resonator is determined by the outer dimensions of the dielectric resonator. A resonant frequency f 0 when the length of the dielectric resonator as shown in FIG. 6 is L, the relative permittivity of the dielectric is ε r , and the speed of light is C
Is represented as follows. f 0 = C / (4L√ε r )

【0007】従って、共振周波数f0 を安定化させるに
は、長さLの寸法精度を高くする必要がある。さらに
は、前述のような誘電体共振器の小型化によってより高
い寸法精度が必要とされる。しかしながら、上述のよう
な一軸プレス成形或いは射出成形によって成形した誘電
体を用いた誘電体共振器においては、長さLの精度は低
く、必要とされる寸法精度を達成することは難しい。
Therefore, in order to stabilize the resonance frequency f 0 , it is necessary to increase the dimensional accuracy of the length L. Furthermore, due to the miniaturization of the dielectric resonator as described above, higher dimensional accuracy is required. However, in the dielectric resonator using the dielectric formed by uniaxial press molding or injection molding as described above, the accuracy of the length L is low, and it is difficult to achieve the required dimensional accuracy.

【0008】そこで本発明は従来の実情に鑑みて提案さ
れたものであり、小型化に対応でき、且つ高精度に形成
され、その共振周波数が安定している誘電体共振器を提
供することを目的とする。
Therefore, the present invention has been proposed in view of the conventional circumstances, and it is an object of the present invention to provide a dielectric resonator which is adaptable to miniaturization, is formed with high precision, and has a stable resonance frequency. To aim.

【0009】[0009]

【課題を解決するための手段】上述の目的を達成するた
めに本発明者等が鋭意検討した結果、誘電体及び内部電
極を積層によって形成すれば、誘電体中心の空洞が不要
となることから誘電体共振器の小型化が可能となり、ま
た高精度な加工も可能となることから共振周波数の安定
化が可能となることを見出した。
Means for Solving the Problems As a result of intensive studies made by the present inventors in order to achieve the above-mentioned object, when a dielectric and an internal electrode are formed by lamination, a cavity at the center of the dielectric is not necessary. It has been found that the size of the dielectric resonator can be reduced and high-precision processing can be performed, so that the resonance frequency can be stabilized.

【0010】すなわち、本発明は、誘電体中に内部電極
が形成され、該誘電体の周囲に外部電極が形成されてな
る誘電体共振器において、上記内部電極が板状であるこ
とを特徴とするものである。
That is, according to the present invention, in a dielectric resonator having an internal electrode formed in a dielectric and an external electrode formed around the dielectric, the internal electrode is plate-shaped. To do.

【0011】また本発明においては、上記のような誘電
体共振器において、誘電体及び内部電極を、少なくとも
誘電体材料を含む誘電体シートと誘電体シート上の所定
の位置に内部電極が印刷によって形成されている電極シ
ートとを積層圧着した後に焼成を行うことで形成される
ものとしても良い。
Further, according to the present invention, in the above-described dielectric resonator, the dielectric and the internal electrode are printed by printing the dielectric sheet containing at least the dielectric material and the internal electrode at a predetermined position on the dielectric sheet. It may be formed by laminating and press-bonding the formed electrode sheets and then firing.

【0012】さらに本発明においては、上記のような誘
電体共振器において、内部電極の幅W1 を誘電体の幅W
2 の20%〜80%としても良く、内部電極の厚さを3
μm〜30μm、誘電体シートの厚さを50μm〜10
00μm、外部電極の厚さを3μm〜30μmとしても
良い。
Further, in the present invention, in the dielectric resonator as described above, the width W 1 of the internal electrode is set to the width W of the dielectric.
It may be a 20% to 80% of 2, the thickness of the internal electrode 3
μm to 30 μm, the thickness of the dielectric sheet is 50 μm to 10 μm
The thickness of the external electrode may be set to 00 μm and the thickness of the external electrode may be set to 3 μm to 30 μm.

【0013】なお、この時、内部電極の幅W1 を誘電体
の幅W2 の20%未満、或いは80%よりも大きくする
と、Qu値が低下する。
At this time, if the width W 1 of the internal electrode is less than 20% or more than 80% of the width W 2 of the dielectric material, the Qu value decreases.

【0014】また、内部電極の厚さを3μm未満とする
と、十分な導電性が得られず、30μmよりも厚くする
と、誘電体との密着性が低下する。さらに、誘電体シー
トの厚さを50μm未満とすると、誘電体シート自体の
強度が不足すると共に、積層枚数が多くなり好ましくな
い。一方、誘電体シートの厚さを1000μmよりも厚
くすると、誘電体シート形成時にヒビが発生し易く、良
好な誘電体シートを得ることが困難である。さらにま
た、外部電極の厚さを3μm未満とすると導体の導電性
が十分でなく、Qu値が低下し、外部電極の厚さを30
μmよりも厚くすると、電極の形成に時間を要し、生産
性が低下するため、好ましくない。
Further, if the thickness of the internal electrode is less than 3 μm, sufficient conductivity cannot be obtained, and if it is more than 30 μm, the adhesion to the dielectric is deteriorated. Furthermore, if the thickness of the dielectric sheet is less than 50 μm, the strength of the dielectric sheet itself becomes insufficient and the number of laminated layers increases, which is not preferable. On the other hand, if the thickness of the dielectric sheet is more than 1000 μm, cracks are likely to occur during the formation of the dielectric sheet, and it is difficult to obtain a good dielectric sheet. Furthermore, if the thickness of the external electrode is less than 3 μm, the conductivity of the conductor is not sufficient, the Qu value is lowered, and the thickness of the external electrode is reduced to 30 μm.
If it is thicker than μm, it takes time to form an electrode and productivity is lowered, which is not preferable.

【0015】なお、誘電体シートと電極シートを積層圧
着する際には静水圧加圧法によって加圧すれば良く、そ
の際の圧力は、50MPa以上であり、好ましくは10
0MPa以上である。
When the dielectric sheet and the electrode sheet are laminated and pressure-bonded, a hydrostatic pressure method may be applied, and the pressure at that time is 50 MPa or more, preferably 10 MPa.
It is 0 MPa or more.

【0016】[0016]

【作用】本発明においては、誘電体中に内部電極が形成
され、該誘電体の周囲に外部電極が形成されてなる誘電
体共振器において、上記内部電極を板状とし、上記誘電
体及び内部電極を、少なくとも誘電体材料を含む誘電体
シートと誘電体シート上の所定の位置に内部電極が印刷
によって形成されている電極シートとを積層圧着して形
成していることから、一軸プレス成形或いは射出成形に
よる成形のように成形時の制約がなく、誘電体及び内部
電極の大きさの変更が比較的自由であり、高い寸法精度
を有する誘電体及び内部電極を形成することができる。
According to the present invention, in a dielectric resonator in which an internal electrode is formed in a dielectric and an external electrode is formed around the dielectric, the internal electrode has a plate shape, and the dielectric and the internal Since the electrodes are formed by laminating and pressing a dielectric sheet containing at least a dielectric material and an electrode sheet having internal electrodes formed by printing at predetermined positions on the dielectric sheet, uniaxial press molding or There is no restriction at the time of molding unlike the molding by injection molding, the size of the dielectric and the internal electrode can be changed relatively freely, and the dielectric and the internal electrode having high dimensional accuracy can be formed.

【0017】[0017]

【実施例】以下、本発明を適用した具体的な実施例につ
いて、図面を参照しながら説明する。先ず、本実施例の
誘電体共振器を図1に示す。本実施例の誘電体共振器
は、図1に示すように、誘電体1の中央に板状の内部電
極2が形成され、且つ該誘電体1の周囲には外部電極3
が形成されたものである。該誘電体共振器の図1中A−
A’で示す面の断面図を図2に示すが、内部電極2が一
端で接続部4により外部電極3と接続されて短絡端1a
が形成され、内部電極2の他端は外部電極3と接続され
ずに解放端1bを形成している。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Specific embodiments to which the present invention is applied will be described below with reference to the drawings. First, the dielectric resonator of this example is shown in FIG. As shown in FIG. 1, in the dielectric resonator of this embodiment, a plate-shaped internal electrode 2 is formed in the center of a dielectric 1, and an external electrode 3 is formed around the dielectric 1.
Are formed. The dielectric resonator A- in FIG.
A cross-sectional view of the surface indicated by A'is shown in FIG. 2, in which the internal electrode 2 is connected to the external electrode 3 by the connecting portion 4 at one end and the short-circuit end 1a is formed.
Is formed, and the other end of the internal electrode 2 is not connected to the external electrode 3 and forms the open end 1b.

【0018】本実施例の誘電体共振器の外形寸法は次の
通りであり、図1中に示す内部電極2の幅W1 が0.8
mm、誘電体の幅W2 が2.0mm、誘電体共振器の長
さLが5.59mm、内部電極の厚さd1 が5μm、外
部電極の厚さd2 が5μm、誘電体の厚さd3 が1.0
mmである。
The external dimensions of the dielectric resonator of this embodiment are as follows, and the width W 1 of the internal electrode 2 shown in FIG. 1 is 0.8.
mm, dielectric width W 2 is 2.0 mm, dielectric resonator length L is 5.59 mm, internal electrode thickness d 1 is 5 μm, external electrode thickness d 2 is 5 μm, dielectric thickness D 3 is 1.0
mm.

【0019】本実施例の誘電体共振器は次のようにして
製造した。先ず、誘電体材料の作製を行った。BaCO
3 を13.9モル%、Bi2 3 を1.5モル%、Na
2 3 を12.7モル%、Sm2 3 を3.2モル%、
TiO2 を68.7モル%の比率で混合し、湿式ボール
ミルで15時間混合粉砕した後、1000℃の大気中で
5時間仮焼し、誘電体材料粉末を得、さらに湿式ボール
ミルで15時間粉砕して粒径1μm以下の誘電体材料微
粉末を得た。
The dielectric resonator of this example was manufactured as follows. First, a dielectric material was manufactured. BaCO
3 13.9 mol%, Bi 2 O 3 1.5 mol%, Na
2 O 3 is 12.7 mol%, Sm 2 O 3 is 3.2 mol%,
TiO 2 was mixed at a ratio of 68.7 mol%, mixed and pulverized in a wet ball mill for 15 hours, calcinated in the atmosphere at 1000 ° C. for 5 hours to obtain a dielectric material powder, and further pulverized in a wet ball mill for 15 hours. Thus, a dielectric material fine powder having a particle size of 1 μm or less was obtained.

【0020】次に、上記誘電体材料微粉末を高分子材料
よりなるバインダーに混合して誘電体スラリーを作製し
た。すなわち、誘電体材料微粉末70重量%に対して、
バインダーであるポリビニルブチラール(PVB)と可
塑剤であるジブチルフタレート(DBP)を両者の合計
が30重量%となるように加え、これにトルエン,メチ
ルエチルケトン,ブタノールを添加して、ボールミルに
て5時間混合し、誘電体スラリーを作製した。
Next, the dielectric material fine powder was mixed with a binder made of a polymer material to prepare a dielectric slurry. That is, with respect to 70% by weight of the dielectric material fine powder,
Polyvinyl butyral (PVB) which is a binder and dibutyl phthalate (DBP) which is a plasticizer are added so that the total amount of both is 30% by weight, and toluene, methyl ethyl ketone and butanol are added thereto, and mixed in a ball mill for 5 hours. Then, a dielectric slurry was prepared.

【0021】次いで、該誘電体スラリーをドクターブレ
ードを用いて厚さ200μmの誘電体シート(いわゆ
る、グリーンシート)に成形した。このようなシートを
10枚用意し、このうち1枚に内部電極を乾燥後の幅が
0.8mm,厚さが5μmとなるようにスクリーン印刷
によって形成し、乾燥して電極シートとした。内部電極
は、導電ペーストによって構成されるが、本実施例にお
いては導電ペーストの組成を次のようにした。すなわ
ち、導電粉末を100重量部、バインダーを40重量
部、溶剤を50重量部とし、導電粉末としてPd:Ag
=7:3の割合で形成された合金を用い、バインダーと
してはポリビニルブチラール、溶剤としてエチレングリ
コールを用いた。なお、バインダーとしてはエチルセル
ロース等も使用可能であり、また溶剤としてはエチルエ
ーテル,トルエン,キシレン等を用いても良い。
Next, the dielectric slurry was formed into a dielectric sheet (so-called green sheet) having a thickness of 200 μm using a doctor blade. Ten such sheets were prepared, and one of them was formed by screen printing so that the width after drying was 0.8 mm and the thickness was 5 μm, and dried to obtain an electrode sheet. The internal electrodes are composed of a conductive paste. In this embodiment, the composition of the conductive paste was as follows. That is, 100 parts by weight of the conductive powder, 40 parts by weight of the binder, 50 parts by weight of the solvent, and Pd: Ag as the conductive powder.
= 7: 3 was used for the alloy, polyvinyl butyral was used as the binder, and ethylene glycol was used as the solvent. In addition, ethyl cellulose or the like can be used as the binder, and ethyl ether, toluene, xylene or the like may be used as the solvent.

【0022】そして、図3に示すように上記のような誘
電体シート5を4枚積層した後に内部電極2の形成され
た電極シート6を内部電極2が後に得られる誘電体の中
央に位置するように積層し、さらにその上に誘電体シー
ト5を5枚積層し、静水圧加圧法により図4中矢印Pで
示すような圧力をかけて圧着し、積層体を得た。この時
の圧力は100MPa以上とした。
Then, as shown in FIG. 3, after stacking four dielectric sheets 5 as described above, the electrode sheet 6 on which the internal electrodes 2 are formed is placed at the center of the dielectric to be obtained later. As described above, five dielectric sheets 5 were further laminated thereon, and a pressure as shown by an arrow P in FIG. 4 was applied by pressure by a hydrostatic pressure method to perform pressure bonding to obtain a laminated body. The pressure at this time was 100 MPa or more.

【0023】このようにして形成された積層体を図1中
に示したように誘電体の幅W2 が2.0mm、誘電体共
振器の長さLが5.59mmとなるように打抜いて成形
した。なお、砥石による研削加工によって成形を行って
も良い。次いで、該積層体を500℃の大気中で10時
間脱脂処理し、1200℃の大気中で焼成し、誘電体1
を得た。
The laminated body thus formed is punched so that the width W 2 of the dielectric body is 2.0 mm and the length L of the dielectric resonator is 5.59 mm as shown in FIG. Was molded. The molding may be performed by grinding with a grindstone. Then, the laminated body is degreased in the air at 500 ° C. for 10 hours and fired in the air at 1200 ° C.
Got

【0024】次に、上記のような誘電体1の周囲全体に
無電解Cuメッキにて外部電極3を形成した。そして、
内部電極2の一端と接続される外部電極3を研磨によっ
て除去し、解放端1bを形成し、図1に示すような誘電
体共振器を得た。本実施例の誘電体共振器の共振周波数
は1.5GHzであり、無負荷Qは200であった。
Next, the external electrode 3 was formed on the entire periphery of the dielectric 1 as described above by electroless Cu plating. And
The external electrode 3 connected to one end of the internal electrode 2 was removed by polishing to form the open end 1b, and the dielectric resonator shown in FIG. 1 was obtained. The resonant frequency of the dielectric resonator of this example was 1.5 GHz, and the unloaded Q was 200.

【0025】すなわち、本実施例の誘電体共振器におい
ては、長さ5mm,幅2mm,高さ1mmという大きさ
で1.5GHzの共振周波数を得ることが可能である。
That is, in the dielectric resonator of this embodiment, it is possible to obtain a resonance frequency of 1.5 GHz with a size of 5 mm in length, 2 mm in width and 1 mm in height.

【0026】従って、本実施例の誘電体共振器において
は、誘電体中に内部電極が形成され、該誘電体の周囲に
外部電極が形成されてなる誘電体共振器において、上記
内部電極を板状とし、上記誘電体及び内部電極を、少な
くとも誘電体材料を含む誘電体シートと誘電体シート上
の所定の位置に内部電極が印刷によって形成されている
電極シートとを積層圧着して形成することにより、誘電
体共振器の特性を低下させることなく小型化を達成し、
また高い寸法精度を達成した。
Therefore, in the dielectric resonator according to the present embodiment, the internal electrode is formed in the dielectric, and the external electrode is formed around the dielectric. Forming the dielectric and the internal electrode by laminating and pressing a dielectric sheet containing at least a dielectric material and an electrode sheet having the internal electrode formed by printing at a predetermined position on the dielectric sheet. Achieves miniaturization without degrading the characteristics of the dielectric resonator,
It also achieved high dimensional accuracy.

【0027】[0027]

【発明の効果】以上の説明からも明らかなように、本発
明においては、誘電体中に内部電極が形成され、該誘電
体の周囲に外部電極が形成されてなる誘電体共振器にお
いて、上記内部電極が板状であるため、誘電体及び内部
電極の大きさの変更が比較的自由であり、誘電体共振器
の小型化に対応できる。
As is apparent from the above description, according to the present invention, a dielectric resonator in which an internal electrode is formed in a dielectric and an external electrode is formed around the dielectric is Since the internal electrodes are plate-shaped, the size of the dielectric and the internal electrodes can be changed relatively freely, and the dielectric resonator can be downsized.

【0028】また本発明においては、上記のような誘電
体共振器において、誘電体及び内部電極を、少なくとも
誘電体材料を含む誘電体シートと誘電体シート上の所定
の位置に内部電極が印刷によって形成されている電極シ
ートとを積層圧着した後に焼成を行って形成されるもの
としても良く、一軸プレス成形或いは射出成形による成
形のような成形時の制約がなく、誘電体及び内部電極の
大きさの変更が比較的自由であり、小型化に対応でき
る。さらに、高い寸法精度を有する誘電体及び内部電極
を形成することができ、その後に機械的な加工を行うこ
とが可能であるため、非常に高い寸法精度を達成するこ
とができ、誘電体共振器の共振周波数を安定化させ、ま
た製造歩留りを向上させて生産性を向上させることが可
能である。
Further, according to the present invention, in the above dielectric resonator, the dielectric and the internal electrode are printed by printing the dielectric sheet containing at least the dielectric material and the internal electrode at a predetermined position on the dielectric sheet. It may be formed by laminating and press-bonding the formed electrode sheets and then firing, and there are no restrictions at the time of molding such as molding by uniaxial press molding or injection molding, and the size of the dielectric and internal electrodes. Is relatively free to change, and can be made smaller. Furthermore, since it is possible to form a dielectric and an internal electrode having high dimensional accuracy and then perform mechanical processing, it is possible to achieve extremely high dimensional accuracy. It is possible to stabilize the resonance frequency and improve the manufacturing yield to improve the productivity.

【0029】さらに本発明においては、上記のような誘
電体共振器において、内部電極の幅W1 を誘電体の幅W
2 の20%〜80%としても良く、内部電極の厚さを3
μm〜30μm、誘電体シートの厚さを50μm〜10
00μm、外部電極の厚さを3μm〜30μmとしても
良く、これらの条件を満たすことにより更に高品質な誘
電体共振器を得ることが可能となる。
Further, in the present invention, in the above-described dielectric resonator, the width W 1 of the internal electrode is set to the width W of the dielectric.
It may be a 20% to 80% of 2, the thickness of the internal electrode 3
μm to 30 μm, the thickness of the dielectric sheet is 50 μm to 10 μm
The thickness of the external electrode may be set to 00 μm, and the thickness of the external electrode may be set to 3 μm to 30 μm. By satisfying these conditions, it is possible to obtain a higher quality dielectric resonator.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明を適用した誘電体共振器の実施例を示す
斜視図である。
FIG. 1 is a perspective view showing an embodiment of a dielectric resonator to which the present invention is applied.

【図2】本発明を適用した誘電体共振器の実施例を示す
断面図である。
FIG. 2 is a sectional view showing an embodiment of a dielectric resonator to which the present invention is applied.

【図3】本発明を適用した誘電体共振器の実施例の製造
方法を工程順に示すものであり、誘電体シートと電極シ
ートを積層する工程を示す平面図である。
FIG. 3 is a plan view showing a method of manufacturing the embodiment of the dielectric resonator to which the present invention is applied, in the order of steps, and showing a step of laminating a dielectric sheet and an electrode sheet.

【図4】誘電体シートと電極シートを圧着する工程を示
す平面図である。
FIG. 4 is a plan view showing a step of pressure-bonding a dielectric sheet and an electrode sheet.

【図5】従来の誘電体共振器を示す斜視図である。FIG. 5 is a perspective view showing a conventional dielectric resonator.

【図6】従来の誘電体共振器を示す断面図である。FIG. 6 is a cross-sectional view showing a conventional dielectric resonator.

【符号の説明】[Explanation of symbols]

1・・・・誘電体 2・・・・内部電極 3・・・・外部電極 4・・・・接続部 5・・・・誘電体シート 6・・・・電極シート 1 ... Dielectric 2 ... Internal electrode 3 ... External electrode 4 ... Connection part 5 ... Dielectric sheet 6 ... Electrode sheet

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 誘電体中に内部電極が形成され、該誘電
体の周囲に外部電極が形成されてなる誘電体共振器にお
いて、 上記内部電極が板状であることを特徴とする誘電体共振
器。
1. A dielectric resonator in which an internal electrode is formed in a dielectric and an external electrode is formed around the dielectric, wherein the internal electrode is plate-shaped. vessel.
【請求項2】 少なくとも誘電体材料を含む誘電体シー
トと誘電体シート上の所定の位置に内部電極が印刷によ
って形成されている電極シートとを積層圧着した後に焼
成を行うことで誘電体及び内部電極が形成されているこ
とを特徴とする請求項1記載の誘電体共振器。
2. A dielectric sheet and an internal sheet by stacking and pressing a dielectric sheet containing at least a dielectric material and an electrode sheet having internal electrodes formed by printing at predetermined positions on the dielectric sheet, followed by firing. The dielectric resonator according to claim 1, wherein electrodes are formed.
【請求項3】 内部電極の幅W1 が誘電体の幅W2 の2
0%〜80%であることを特徴とする請求項1記載の誘
電体共振器。
3. The width W 1 of the internal electrode is 2 which is the width W 2 of the dielectric.
It is 0% -80%, The dielectric resonator of Claim 1 characterized by the above-mentioned.
【請求項4】 内部電極の厚さが3μm〜30μmであ
り、誘電体シートの厚さが50μm〜1000μmであ
り、外部電極の厚さが3μm〜30μmであることを特
徴とする請求項2記載の誘電体共振器。
4. The thickness of the internal electrode is 3 μm to 30 μm, the thickness of the dielectric sheet is 50 μm to 1000 μm, and the thickness of the external electrode is 3 μm to 30 μm. Dielectric resonator.
JP3257593A 1993-01-29 1993-01-29 Dielectric resonator Pending JPH06232612A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3257593A JPH06232612A (en) 1993-01-29 1993-01-29 Dielectric resonator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3257593A JPH06232612A (en) 1993-01-29 1993-01-29 Dielectric resonator

Publications (1)

Publication Number Publication Date
JPH06232612A true JPH06232612A (en) 1994-08-19

Family

ID=12362689

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3257593A Pending JPH06232612A (en) 1993-01-29 1993-01-29 Dielectric resonator

Country Status (1)

Country Link
JP (1) JPH06232612A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06296107A (en) * 1993-04-08 1994-10-21 Fuji Elelctrochem Co Ltd Manufacture of dielectric resonator
DE10345238B4 (en) * 2003-09-29 2008-11-20 Qimonda Ag Alignment mark for aligning a semiconductor wafer in an exposure device and their use

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06296107A (en) * 1993-04-08 1994-10-21 Fuji Elelctrochem Co Ltd Manufacture of dielectric resonator
DE10345238B4 (en) * 2003-09-29 2008-11-20 Qimonda Ag Alignment mark for aligning a semiconductor wafer in an exposure device and their use

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