JPH06224496A - Metal vapor generator - Google Patents

Abstract

PURPOSE:To make vapor density in a discharge tube uniform by making a temperautre distribution of the tube a high temperature and uniform. CONSTITUTION:A discharge tube 2 is surrounded by a metal member 12 of high thermal conductivity to transfer heat radially and axially outside the discharge tube 2. Therefore a high temperature is achieved uniformly in a low-cost tube, and vapor density in the tube is made uniform. Further, axial transfer of the heat in the member 12 is controlled, external release of the generated heat is prevented to hold the temperature in the member a high temperature.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a metal vapor generator for generating metal vapor by heat generated by electric discharge.

[0002]

2. Description of the Related Art FIG. 7 shows, for example, "Discharge Heated Longitudinal Strontium Plus Ion Combination Laser (Discharge h
eatedlongitudinal Sr ⁺ recombination laser) "1st
191, 1986, The British Physical Society (The Institute
FIG. 1 is a cross-sectional view showing a conventional metal vapor laser device shown in FIG. 1 of the drawings, in which 1 is a metal jacket, 2 is a discharge tube made of a bell rear material, 3 is an insulating jacket, and 4 is inside the discharge tube 2. Strontium particles that are installed and generate strontium vapor, 5 is a cathode connected to one end of the discharge tube 2,
6 is a window flange for extracting laser light on the cathode side provided outside the cathode 5, 7 is a cathode terminal, 9 is an anode connected to the other end of the discharge tube 2, and 10 is outside the anode 9. A window 11 for extracting laser light on the anode side provided is an anode terminal, and this anode terminal 11 is electrically connected to the metal jacket 1 and the anode 9. In addition, 8 is a discharge gas sealed in the discharge tube 2.

Next, the operation will be described. When a predetermined pulse voltage is applied between the cathode terminal 7 and the anode terminal 11, pulse discharge is generated in the atmosphere of the discharge gas 8 in the discharge tube 2, and the discharge tube 2 is in a discharge state. The heat generated by this discharge is first transmitted to the wall of the discharge tube 2 and then spreads radially and axially from the wall. The heat spread in the radial direction is suppressed by the insulating jacket 3 provided around the discharge tube 2. As a result, the temperature inside the discharge tube 2 rises uniformly in the axial direction. Due to this temperature rise, the strontium particles 4 in the discharge tube 2 are dissolved, and strontium vapor is generated. This strontium vapor is excited by a pulse voltage and causes population inversion. Thus, if optical resonators (not shown) are arranged outside the windows 6 and 10 at both ends of the discharge tube 2, laser light can be obtained through those windows.

[0004]

Since the conventional metal vapor laser device is constructed as described above, in order to obtain a high-power laser, the temperature distribution in the discharge tube must be made uniform, which is why the discharge is performed. The tube had to be made of a material with high thermal conductivity. A berria material is used as such a material, but there is a problem that the berria material is very expensive.

The invention of claim 1 has been made in order to solve the above-mentioned problems. A discharge tube made of an inexpensive insulating material is used to obtain a uniform temperature distribution in the discharge tube, and vapor in the tube is ensured. It is an object of the present invention to obtain a metal vapor generator that can make the density uniform.

According to the second aspect of the present invention, when the heat is moved in the axial direction in the metal member, the heat is prevented from escaping from the end of the metal member so that the temperature inside the discharge tube can be maintained at a high temperature. The purpose is to obtain the device.

According to the third aspect of the present invention, when heat moves in the axial direction in the metal member, it is possible to prevent the heat from radiating from the end portion of the metal member in the radial direction and keep the temperature in the metal member at a higher temperature. The purpose is to obtain a metal vapor generator.

According to the fourth aspect of the present invention, when heat moves in the axial direction through the metal member, it is possible to more effectively prevent the heat from escaping from the end of the metal member and keep the temperature inside the metal member at a higher temperature. The purpose is to obtain a metal vapor generator.

It is an object of the invention of claim 5 to obtain a metal vapor generator capable of keeping the temperature in the metal cylinder more uniform by effectively utilizing the heat moving in the metal cylinder.

It is an object of the present invention to provide a metal vapor generator capable of efficiently controlling the distribution of heat moving inside a metal member and keeping the temperature inside the pipe at a high temperature and uniformly. .

[0011]

In the metal vapor generator according to the invention of claim 1, a metal member having a high thermal conductivity is provided outside the discharge tube.

In the metal vapor generator according to the invention of claim 2, heat dissipation preventing means is provided on the end of the metal member so that the heat does not escape from the end.

The metal vapor generator according to a third aspect of the present invention is provided with a thin portion in which the thickness of the end portion of the metal member is thin on the discharge tube side.

According to a fourth aspect of the present invention, there is provided a metal vapor generating device, wherein an end portion of a metal member is provided with a preventing member made of a material having a lower thermal conductivity than the metal.

In the metal vapor generator according to a fifth aspect of the present invention, the cylindrical body is provided with an opening for allowing only radiant heat to escape to the outside from the cylindrical body.

In the metal vapor generator according to the invention of claim 6, in order to control the heat which moves in the axial direction in the metal cylinder having a high thermal conductivity, the opening having a larger interval toward the end thereof in the cylinder. Parts are provided.

[0017]

The metal vapor generator according to the invention of claim 1 is
When the heat generated by the discharge moves into the metal member, the heat in the high temperature region of the discharge tube moves in the member in the radial direction and the axial direction,
On the other hand, in the low temperature region, on the contrary, the heat moving in the member moves to the discharge tube, so that the temperature distribution in the discharge tube becomes high and uniform.

In the metal vapor generator according to the second aspect of the invention, when the heat generated by the discharge moves into the metal member, the heat moves in the member in the radial direction and the axial direction, and at the end thereof. The transfer of heat to the outside is suppressed, so that the temperature distribution inside the metal member can be kept uniform and at a high temperature.

In the metal vapor generator according to the third aspect of the present invention, when the heat generated by the discharge moves into the metal member, the heat moves in the member in the radial direction and the axial direction, and at the end thereof. The movement of heat in the radial direction is suppressed on the discharge tube side,
Therefore, the temperature distribution in the metal member can be kept more uniform and higher.

In the metal vapor generator according to the invention of claim 4, when the heat generated by the discharge moves into the metal member, the heat moves in the member in the radial direction and the axial direction, and at the end thereof. The material having a low thermal conductivity suppresses the movement of heat and effectively suppresses the escape of heat to the outside, so that the temperature distribution in the metal member can be kept more uniform and at a higher temperature.

In the metal vapor generator according to the invention of claim 5, when the heat generated by the discharge moves into the metal cylinder,
Although heat moves in the radial direction and the axial direction, only radiant heat escapes from the openings in the member, so that the temperature distribution in the discharge tube can be kept more uniform and higher.

In the metal vapor generator according to the invention of claim 6, when the heat generated by the discharge moves into the metal cylinder,
The heat moves in the radial direction and the axial direction, but the movement of this heat is formed so that the gap between the openings provided in the cylindrical body becomes larger toward the end, so that the movement of heat at the end is suppressed. Therefore, heat escape at the end of the metal cylinder is prevented,
Moreover, heat transfer can be efficiently controlled.

[0023]

EXAMPLES Example 1. An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a cross-sectional view showing a metal vapor generator according to an embodiment of the invention of claim 1.
1 is a heat shield jacket of tantalum provided in an insulating jacket 3 made of quartz, 2 is a discharge tube made of alumina and having a diameter of 13 mm and a length of 55 cm, and 4 is a strontium rod having a diameter of 15 mm, which is cut into 3 cm intervals. Strontium grains 5 and 9 provided in 2 are a cathode (electrode) and an anode (electrode) made of tantalum, and 18 kV is applied.
6 and 10 are window flanges for extracting laser light provided at the outer ends of the cathode 5 and the anode 9, 7 and 11 are terminals of the cathode 5 and the anode 9, and 8 is He gas sealed in the discharge tube 2. Also, the pressure in the tube is 250 mbar.

Reference numeral 12 denotes a copper metal cylinder (metal member) disposed between the insulating jacket 3 and the discharge tube 2. When the cylindrical body 12 is provided between the discharge tube 2 and the insulating jacket 3, it is necessary to provide a clearance for expansion with the discharge tube 2. Reference numeral 13 is an insulating member arranged between the cylindrical body 12 and the cathode. This insulating member 13 is for preventing current from flowing from the cylindrical body 12 to the cathode 5 during discharge. As the insulating member, ceramic wool, glass fiber, insulating brick, etc. are used. In the figure, the insulating member 13 is provided between the cylindrical body 12 and the cathode 5, but as shown in FIG. 2, the insulating member 14 can also be provided between the cylindrical body 12 and the anode 9. .

The size and position of the metal vapor source are not limited to the above, and the installation position may be provided at one position on the upstream side in the case where there is a gas flow, for example. As the material of the discharge tube, other than alumina, any material having a low thermal conductivity and capable of withstanding high temperature may be used, and quartz, sapphire or the like can be used. The metal member may be any one that can move heat in the radial direction and the axial direction of the discharge tube, and it is preferable to form the metal material into a cylinder, but to form a thin piece and wind it around the discharge tube. Good.
As the metal material, a material having a higher melting point and a higher thermal conductivity than metals that generate steam other than copper may be used,
Gold, silver, etc. can be used. The movement of heat in the metal member is performed by conduction, diffusion or the like.

Next, the operation will be described. When a predetermined pulse voltage is applied between the cathode terminal 5 and the anode terminal 9,
The pulse discharge is generated in the discharge gas atmosphere in the discharge tube 2 and the inside of the discharge tube is in a discharge state. The heat generated by this discharge first propagates through the wall of the discharge tube 2 and spreads from the wall in the radial direction and the axial direction of the discharge tube, but does not move sufficiently in the axial direction. Therefore, most of the heat in the high temperature region of the discharge tube moves in the radial direction and moves to the metal cylindrical body 12. When this heat is transferred to the cylindrical body 12, the heat moves in the cylindrical body in the axial direction. On the other hand, in the low temperature region of the discharge tube wall, the heat moving in the cylindrical body moves to the discharge tube wall in reverse. According to the configuration of the first embodiment, since a metal member having a good thermal conductivity such as copper is provided around the discharge tube made of a material having a low thermal conductivity such as alumina, heat of the discharge tube is prevented. Despite the insufficient movement, the discharge tube can be kept at a high temperature and evenly, so that the vapor density in the discharge tube can be made uniform.

Example 2. 3 and 4 are views showing a metal vapor generator according to an embodiment of the present invention.
3 and FIG. 4 are sectional views showing the apparatus of claim 4, and the same parts as those in FIG. 1 and FIG. In FIG. 3, a metal cylinder 1 made of copper
Thin portions 15 (heat dissipation preventing means) are formed at both ends of 2 (metal member) so that the thickness on the discharge tube side is smaller than the thickness on the outside thereof. Also, when a metal thin piece (metal member) is provided so as to surround the discharge tube 2, the thickness on the discharge tube side may be formed to be smaller than the thickness on the outer side thereof as in the above case.

Next, the operation will be described. When the heat generated by the electric discharge is transmitted to the metal cylindrical body 12, the heat moves in the radial direction and the axial direction. Then, the heat toward the end portion of the cylindrical body 12 tries to escape from the end portion in the radial direction, but since the end portion is a thin portion, the movement of the heat in the radial direction is suppressed, so that the heat is released. It stays in the cylinder 12. According to the configuration of the second embodiment, since the wall thickness of the cylindrical body is thin on the discharge tube side, escape of heat moving in the cylindrical body in the radial direction is suppressed, so that the temperature inside the cylindrical body is raised to a higher temperature. And can be kept uniform.

Further, referring to FIG. 4, the metal cylinder 1 made of copper is used.
An iron prevention member (heat dissipation prevention means) 16 which is a metal having a lower thermal conductivity than copper is provided between the insulating members 13 and 14 on both end sides of 2. The prevention member 16 is a metal other than iron,
It may be zinc or ceramics such as alumina. In this case, the prevention member is processed into the cylindrical body 12 and joined to the copper cylindrical body 12 to be formed.

Next, the operation will be described. As in the case described above, the heat that has moved into the metal member has its ends prevented from escaping to the outside. According to the configuration of the second embodiment, since a material having a lower thermal conductivity than copper is used on both end sides of the copper cylindrical body, it is possible to prevent the heat from being diffused to the outside with a simple configuration. The body can be kept hot and uniform.

Example 3. FIG. 5 is a cross-sectional view showing a metal vapor generator according to an embodiment of the present invention. The same parts as those in FIGS. 1 and 2 are designated by the same reference numerals and duplicate description will be omitted. In FIG. 5, a plurality of openings 17 are formed in the metal cylinder 12 made of copper at regular intervals and with the same opening width.

Next, the operation will be described. Metal cylinder 1
With respect to the heat moving in the inside 2, only the radiant heat escapes through the opening, and the heat moves in the cylindrical body 12 in the axial direction. According to the structure of the third embodiment, since the opening through which only the radiant heat is released is provided in the metal cylindrical body, the heat in the cylindrical body is smoothly transferred and becomes uniform, and the temperature is kept high. .

Example 4. FIG. 6 is a sectional view showing a metal vapor generator according to an embodiment of the present invention. The same parts as those in FIGS. In FIG. 6, a plurality of openings 18 are formed in the metal cylinder 12 made of copper, and the openings 18 are formed in the cylinder 1.
The width of the interval is formed so as to increase toward the end of 2. The width of the opening 18 is the same.

Next, the operation will be described. Metal cylinder 1
The heat that moves in the axial direction in 2 is controlled by the difference in the interval between the openings 18, and the heat escape is smaller toward the end of the cylindrical body 12, and the movement of the heat in the axial direction is controlled. According to the configuration of the fourth embodiment, the space between the openings 18 formed in the metal cylindrical body is made larger toward the end thereof, so that the heat can be prevented from escaping to the outside and the heat axis can be prevented. The movement in the direction can be controlled, and the temperature inside the cylinder can be kept high and uniform.

[0035]

As described above, according to the invention of claim 1, since the metal member having a high thermal conductivity is provided outside the discharge tube, the temperature distribution in the discharge tube can be made uniform by an inexpensive device. Therefore, there is an effect that the vapor density in the tube can be made uniform.

According to the second aspect of the present invention, the heat dissipation preventing member is provided at the end of the metal member so that the heat does not escape from the end of the metal member. Therefore, the heat moves in the axial direction in the metal member. At that time, there is an effect that the temperature does not escape from the end portion and the temperature inside the metal member can be kept high and uniform.

According to the third aspect of the invention, since the discharge tube side is formed as the thin portion of the metal member, there is an effect that heat can be prevented from escaping in the radial direction.

According to the invention of claim 4, since the prevention member having a lower thermal conductivity than the metal is provided at the end of the metal member, the escape of heat from the end can be prevented more effectively. There is an effect that can be done.

According to the fifth aspect of the invention, since the opening is provided to allow only the radiant heat to escape from the metal cylinder to the outside, there is an effect that the temperature inside the metal cylinder can be kept more uniform.

According to the sixth aspect of the present invention, since the opening is formed so that the gap is increased toward the end of the metal cylinder, the heat can be prevented from escaping from the metal cylinder. The movement of heat in the axial direction can also be efficiently controlled, and the temperature in the cylinder can be kept high and uniform.

[Brief description of drawings]

FIG. 1 is a sectional view of a metal vapor generator according to an embodiment of the present invention.

FIG. 2 is a sectional view of a metal vapor generator according to an embodiment of the present invention.

FIG. 3 is a sectional view of a metal vapor generator according to an embodiment of the present invention.

FIG. 4 is a sectional view of a metal vapor generator according to another embodiment of the present invention.

FIG. 5 is a sectional view of a metal vapor generator according to an embodiment of the present invention.

FIG. 6 is a sectional view of a metal vapor generator according to an embodiment of the invention of claim 6;

FIG. 7 is a sectional view of a metal vapor laser device including a conventional metal vapor generator.

[Explanation of symbols]

 2 Discharge Tube 5 Cathode (Electrode) 9 Anode (Electrode) 12 Metal Cylindrical Body (Metal Member) 15 Thin Section (Heat Dissipation Preventing Means) 16 Preventing Member (Heat Dissipation Preventing Means) 17 Opening 18 Opening

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[Procedure amendment]

[Submission date] June 3, 1993

[Procedure Amendment 1]

[Document name to be amended] Statement

[Name of item to be corrected] 0023

[Correction method] Change

[Correction content]

[0023]

EXAMPLES Example 1. An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a cross-sectional view showing a metal vapor generator according to an embodiment of the invention of claim 1.
1 tantalum thermal shield jacket provided in the insulating jacket 3 made of quartz, 2 discharge collector tube made of alumina, 4 provided within the tube 2 at equal intervals cut small scan <br/> strontium rod was strontium grain, 5 and 9 is a cathode made of tantalum (electrode) and the anode (electrode). 6 and 10 window flange of laser light extraction provided on the outer end of the cathode 5 and the anode 9, 7 and 11 terminals of the cathode 5 and the anode 9, 8 is a He gas sealed in the discharge tube 2 .

[Procedure Amendment 2]

[Document name to be amended] Statement

[Correction target item name] 0026

[Correction method] Change

[Correction content]

Next, the operation will be described. When a predetermined pulse voltage is applied between the cathode terminal 5 and the anode terminal 9,
The pulse discharge is generated in the discharge gas atmosphere in the discharge tube 2 and the inside of the discharge tube is in a discharge state. The heat generated by this discharge first propagates through the wall of the discharge tube 2 and spreads from the wall in the radial direction and the axial direction of the discharge tube 2, but does not move sufficiently in the axial direction. Therefore, most of the heat in the high temperature region of the discharge tube moves in the radial direction and moves to the metal cylindrical body 12. When this heat is transferred to the cylindrical body 12, the heat moves in the cylindrical body in the axial direction. On the other hand, in the low temperature region of the discharge tube wall, the heat moving in the cylindrical body moves to the discharge tube wall in reverse. According to the configuration of the first embodiment, since the metal member having good thermal conductivity such as copper is provided around the discharge tube made of the material having low thermal conductivity such as alumina, the discharge
The tube material itself does not have sufficient heat transfer, but the external metal
Because the heat can be transferred by the members, the discharge tube can be heated to a high temperature.
Can be maintained evenly and uniformly, so that the steam inside the discharge tube
Airtightness can be made uniform.

[Procedure 3]

[Document name to be amended] Statement

[Name of item to be corrected] 0029

[Correction method] Change

[Correction content]

Further, referring to FIG. 4, the metal cylinder 1 made of copper is used.
An iron prevention member (heat dissipation prevention means) 16 which is a metal having a lower thermal conductivity than copper is provided between the insulating members 13 and 14 on both end sides of 2. The prevention member 16 is a metal other than iron,
May be a zinc, In this case, prevention member is processed into a cylindrical body 12 is formed is joined to the cylindrical body 12 of copper.

[Procedure amendment 4]

[Document name to be amended] Statement

[Name of item to be corrected] 0032

[Correction method] Change

[Correction content]

Next, the operation will be described. Metal cylinder 1
With respect to the heat moving in the inside 2, only the radiant heat escapes through the opening, and the heat moves in the cylindrical body 12 in the axial direction. According to the configuration of the third embodiment, since the opening for allowing only the radiant heat to escape is provided in the metal cylindrical body, the movement of heat in the cylindrical body is prevented.
Since it can be controlled, the temperature distribution can be made uniform,
Also kept at high temperature.

Claims (6)

[Claims] 1. An electrode provided at both ends of a discharge tube for causing a pulse discharge in the discharge tube, and heat provided by the discharge provided outside the discharge tube of the discharge tube via the discharge tube. A metal vapor generator comprising: a metal member having a high thermal conductivity that is moved in a radial direction and an axial direction. 2. Electrodes provided at both ends of the discharge tube for causing pulsed discharge in the discharge tube, and heat provided by the discharge provided on the outside of the discharge tube of the discharge tube via the discharge tube. A metal provided with a metal member having a high thermal conductivity for moving in the radial direction and the axial direction, and a heat dissipation preventing means provided at the end of the metal member to prevent heat moving in the metal member from escaping from the end. Steam generator. 3. The metal vapor generator according to claim 2, wherein the heat dissipation preventing means comprises a thin portion in which the thickness of the metal member is thin on the discharge tube side. 4. The metal vapor generator according to claim 2, wherein the heat dissipation prevention means is composed of a prevention member made of a material having a lower thermal conductivity than the material of the metal member. 5. Electrodes provided at both ends of the discharge tube for causing pulse discharge in the discharge tube, and heat generated by the discharge provided on the outside of the discharge tube of the discharge tube via the discharge tube. A metal vapor generator comprising: a metal cylinder having a high thermal conductivity that is moved in a radial direction and an axial direction; and an opening provided in the cylinder to allow only radiant heat to escape from the metal cylinder to the outside. 6. Electrodes provided at both ends of the discharge tube for causing pulsed discharge in the discharge tube, and heat provided by the discharge provided outside the discharge tube of the discharge tube via the discharge tube. A metal cylinder having a high thermal conductivity which is moved in the radial direction and the axial direction, and a space provided so as to increase toward the end of the cylinder for controlling heat moving in the metal cylinder in the axial direction. A metal vapor generator having an opening.